Chassis device capable of being quickly disassembled and assembled

Abstract

The utility model discloses a chassis device capable of being quickly disassembled and assembled, and belongs to the technical field of single crystal furnaces. Comprising a base plate, two symmetrically-distributed connecting assemblies are installed on the upper surface of the base plate, the base plate is movably connected with a furnace body through the connecting assemblies, two symmetrically-distributed arc-shaped fixing plates are installed on the two sides of the furnace body, and the arc-shaped fixing plates are matched with the connecting assemblies. The chassis device capable of being rapidly disassembled and assembled has the beneficial effects that through the arrangement of the connecting assembly, multiple sets of nuts do not need to be used for threaded fixation, time is saved, operation is convenient and fast, rapid disassembly and assembly of the single crystal furnace chassis are achieved, the rapid disassembly and assembly effect is improved, practicability is high, and the practicability is high. Through the arrangement of the clamping plate, the groove, the second sealing ring, the clamping groove, the first sealing ring and the inserting groove, multi-layer sealing of the furnace body and the base plate is achieved, the sealing performance of the furnace body is improved, and the sealing effect of the furnace body in normal use is guaranteed.

Description

Technical Field

[0001] The present application relates to the technical field of single crystal furnaces, and in particular to a chassis device that can be quickly disassembled and assembled. Background Art

[0002] The single crystal furnace is an important semiconductor equipment that uses the Czochralski method to grow single crystals without dislocation. The connection between the single crystal furnace chassis and the furnace body is mostly flange connection, which makes disassembly and assembly complicated and cannot be achieved quickly.

[0003] Chinese patent CN217298100U discloses a chassis device that can be quickly disassembled and assembled, including a chassis body, an upper flange arranged on the periphery of the bottom of the single crystal furnace body, a lower flange arranged on the periphery of the chassis body, a first semicircular sleeve, a second semicircular sleeve, a first clamping sleeve and a second clamping sleeve; the upper flange is close to the lower flange, and the first semicircular sleeve and the second semicircular sleeve are respectively sleeved on both sides of the upper flange and the lower flange.

[0004] In the above patent, the first locking member is inserted into the first extended side and the second extended side, screwed tight, and then fixed with nuts. Multiple sets of nuts are needed to fix the multiple sets of first locking members. It takes a long time to screw tight the multiple sets of nuts, and the effect of quick disassembly and assembly needs to be improved. Therefore, a technical measure is proposed to solve the problem that it takes a long time to fix the multiple sets of first locking members using multiple sets of nuts, and the effect of quick disassembly and assembly needs to be improved. Utility Model Content

[0005] The content of this application is used to introduce concepts in a brief form, which will be described in detail in the detailed implementation section below. The content of this application is not intended to identify the key features or essential features of the technical solution claimed for protection, nor is it intended to limit the scope of the technical solution claimed for protection.

[0006] In order to solve the technical problems mentioned in the above background technology part, some embodiments of the present application provide a chassis device that can be quickly disassembled and assembled, including a chassis, two groups of symmetrically distributed connecting components are installed on the upper surface of the chassis, the chassis is movably connected to the furnace body through the connecting components, and two groups of symmetrically distributed arc-shaped fixing plates are installed on both sides of the furnace body, and the arc-shaped fixing plates are adapted to the connecting components. Thanks to the setting of the connecting components, there is no need to use multiple groups of nuts for threaded fixing, which saves time and is convenient to operate, thereby realizing rapid disassembly and assembly of the single crystal furnace chassis, improving the effect of rapid disassembly and assembly, and having strong practicality.

[0007] Furthermore, a cardboard is installed on the upper surface of the chassis, a first sealing ring is arranged outside the cardboard, the first sealing ring is installed on the upper surface of the chassis, and a card groove is arranged between the first sealing ring and the cardboard.

[0008] Furthermore, a groove is provided at the lower part of the furnace body, a second sealing ring is provided beside the groove, and a slot is provided at one end of the second sealing ring away from the groove.

[0009] Further, the card plate is snap-fitted with the groove, the card slot is snap-fitted with the second sealing ring, and the slot is snap-fitted with the first sealing ring.

[0010] Furthermore, the connection assembly includes connection blocks, which are in two groups. The two groups of connection blocks are fixedly mounted on the upper surface of the chassis, a through hole is provided in the connection block, sliding grooves are provided on both sides of the through hole, and a limiting groove is provided on the surface of the connection block.

[0011] Furthermore, the slide groove is slidably connected to a slider, and there are two groups of sliders. The two groups of sliders are connected to an arc-shaped movable plate, and the arc-shaped movable plate is adapted to the through hole. The slider is slidably connected to a round rod, and the round rod is fixedly installed inside the connecting block. A spring is provided on the outer sleeve of the round rod, and one end of the spring is fixedly installed on the surface of the slider, and the other end of the spring is installed on the inner side of the connecting block.

[0012] Furthermore, a handle is installed at one end of the upper surface of the arc-shaped movable plate, a connecting plate is installed at the center position of the side surface of the end of the arc-shaped movable plate with the handle installed, the connecting plate is rotatably connected to the rotating plate, and the rotating plate and the connecting plate are slidably adapted to the limiting groove.

[0013] Furthermore, the front parts of the arc-shaped movable plate and the arc-shaped fixed plate are arranged in an arc shape, and the arc-shaped movable plate and the arc-shaped fixed plate front parts are adapted to each other.

[0014] The utility model discloses a kind of utility model discloses the ...

[0015] By arranging the clamping plate, the groove, the second sealing ring, the clamping groove, the first sealing ring and the slot, multi-layer sealing of the furnace body and the chassis is achieved, thereby improving the sealing effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The drawings constituting a part of this application are used to provide a further understanding of this application, so that other features, purposes and advantages of this application become more obvious. The illustrative embodiment drawings and their descriptions of this application are used to explain this application and do not constitute an improper limitation on this application.

[0017] In addition, throughout the drawings, the same or similar reference numerals represent the same or similar elements. It should be understood that the drawings are schematic and that the components and elements are not necessarily drawn to scale.

[0018] In the attached picture:

[0019] Figure 1 This is a schematic diagram of the structure of the utility model connected to the furnace body;

[0020] Figure 2 This is a schematic diagram of the utility model in the connection and separation state with the furnace body;

[0021] Figure 3 It is a schematic diagram of the internal structure of the furnace;

[0022] Figure 4 is a schematic diagram of the connection component structure;

[0023] Figure 5 It is a schematic diagram of the contact structure between the arc-shaped fixed plate and the arc-shaped movable plate.

[0024] Reference numerals:

[0025] 1. chassis; 2. connecting assembly; 3. furnace body; 4. arc-shaped fixed plate; 5. card slot; 6. card plate; 7. first sealing ring; 8. groove; 9. second sealing ring; 10. slot; 201. connecting block; 202. through hole; 203. slide groove; 204. round rod; 205. arc-shaped movable plate; 206. handle; 207. spring; 208. rotating plate; 209. limit groove; 210. slider; 211. connecting plate. DETAILED DESCRIPTION

[0026] Embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although certain embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be construed as being limited to the embodiments set forth herein. On the contrary, these embodiments are provided to provide a more thorough and complete understanding of the present disclosure. It should be understood that the drawings and embodiments of the present disclosure are only for exemplary purposes and are not intended to limit the scope of protection of the present disclosure.

[0027] It should also be noted that, for ease of description, only the parts related to the invention are shown in the drawings. In the absence of conflict, the embodiments and features in the embodiments of the present disclosure can be combined with each other.

[0028] It should be noted that the concepts such as "first" and "second" mentioned in the present disclosure are only used to distinguish different devices, modules or units, and are not used to limit the order or interdependence of the functions performed by these devices, modules or units.

[0029] It should be noted that the modifications of "one" and "plurality" mentioned in the present disclosure are illustrative rather than restrictive, and those skilled in the art should understand that unless otherwise clearly indicated in the context, it should be understood as "one or more".

[0030] The present disclosure will be described in detail below with reference to the accompanying drawings and in conjunction with embodiments.

[0031] Reference Figure 1 , Figure 2 and Figure 3 As shown, it includes a chassis 1, two groups of symmetrically distributed connecting components 2 are installed on the upper surface of the chassis 1, the chassis 1 is movably connected to a furnace body 3 through the connecting components 2, two groups of symmetrically distributed arc-shaped fixing plates 4 are installed on both sides of the furnace body 3, the arc-shaped fixing plates 4 are adapted to the connecting components 2, a card plate 6 is installed on the upper surface of the chassis 1, a first sealing ring 7 is arranged outside the card plate 6, the first sealing ring 7 is installed on the upper surface of the chassis 1, a card slot 5 is arranged between the first sealing ring 7 and the card plate 6, a groove 8 is opened at the lower part of the furnace body 3, a second sealing ring 9 is arranged next to the groove 8, and an insert is opened at the end of the second sealing ring 9 away from the groove 8 Groove 10, the card plate 6 is snapped into the groove 8, the card slot 5 is snapped into the second sealing ring 9, the slot 10 is snapped into the first sealing ring 7, when the chassis 1 and the furnace body 3 are connected, the arc-shaped fixing plates 4 on both sides of the furnace body 3 are aligned with the connecting component 2 and snapped in, when the arc-shaped fixing plates 4 are snapped into the connecting component 2, the installation of the furnace body 3 is completed, when the arc-shaped fixing plates 4 are snapped into the connecting component 2, the card plate 6 is snapped into the groove 8 to complete the first layer of sealing of the furnace body 3, the second sealing ring 9 is snapped into the card slot 5 to complete the second layer of sealing of the furnace body 3, and the first sealing ring 7 is snapped into the slot 10 to complete the third layer of sealing of the furnace body 3.

[0032] Reference Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5As shown, the connection assembly 2 includes a connection block 201, and the connection block 201 has two groups. The two groups of connection blocks 201 are fixedly installed on the upper surface of the chassis 1. A through hole 202 is opened in the connection block 201, and slide grooves 203 are opened on both sides of the through hole 202. A limiting groove 209 is opened on the surface of the connection block 201. The slide groove 203 is slidably connected to a slider 210. The slider 210 has two groups. The two groups of sliders 210 are connected to an arc-shaped moving plate 205. The arc-shaped moving plate 205 is adapted to the through hole 202. The slider 210 is slidably connected to a round rod 204. The round rod 204 is fixedly installed inside the connecting block 201, a spring 207 is arranged on the outer sleeve of the round rod 204, one end of the spring 207 is fixedly installed on the surface of the slider 210, and the other end of the spring 207 is installed on the inner side of the connecting block 201, a handle 206 is installed on one end of the upper surface of the arc moving plate 205, and a connecting plate 211 is installed at the center of the side of one end of the arc moving plate 205 with the handle 206 installed, and the connecting plate 211 is rotatably connected with a rotating plate 208, and the rotating plate 208 and the connecting plate 211 are slidably adapted with the limiting groove 209, and the arc The movable plate 205 and the front part of the arc-shaped fixed plate 4 are arranged in an arc shape, and the arc-shaped movable plate 205 is adapted to the arc of the front part of the arc-shaped fixed plate 4. When the arc-shaped fixed plate 4 moves downward, the arc-shaped movable plate 205 is squeezed, and the arc-shaped movable plate 205 is forced to move in the direction away from the furnace body 3. When the arc-shaped movable plate 205 moves, the handle 206, the connecting plate 211, the rotating plate 208 and the slider 210 are moved synchronously. When the slider 210 slides along the round rod 204, the spring 207 is compressed. When the arc-shaped fixed plate 4 is stuck in the lower part of the through hole 202, the arc-shaped movable plate 205 is pressed. The arc-shaped movable plate 205 returns to its original position under the rebound action of the spring 207. At this time, the lower part of the arc-shaped movable plate 205 is tightly pressed against the upper part of the arc-shaped fixed plate 4, and the installation of the furnace body 3 is completed. When the furnace body 3 needs to be disassembled, the handle 206 is pulled outward, and the handle 206 moves outward to drive the arc-shaped movable plate 205, the connecting plate 211 and the rotating plate 208 to move outward. When the rotating plate 208 is completely exposed from the limiting groove 209, the rotating plate 208 is rotated to a vertical state. At this time, the fixation of the arc-shaped movable plate 205 is completed, and the arc-shaped fixed plate 4 is exposed.

[0033] Working principle: when connecting the chassis 1 and the furnace body 3, align the arc-shaped fixed plates 4 on both sides of the furnace body 3 with the connecting components 2 and snap them in. Specifically, when the arc-shaped fixed plates 4 move downward, the arc-shaped movable plates 205 are squeezed, and the arc-shaped movable plates 205 are forced to move in the direction away from the furnace body 3. When the arc-shaped movable plates 205 move, they simultaneously drive the handle 206, the connecting plate 211, the rotating plate 208 and the slider 210 to move. When the slider 210 slides along the round rod 204, the spring 207 is compressed. When the arc-shaped fixed plates 4 are snapped into the lower part of the through hole 202 (the arc-shaped movable plates 205 and the arc-shaped fixed plates 4 have the same curvature, and the depth of the through hole 202 is adapted to the depth of the arc-shaped movable plates 205 and the arc-shaped fixed plates 4), the arc-shaped movable plates 205 are elastically moved. The spring 207 returns to its original position under the rebound effect. At this time, the lower part of the arc-shaped movable plate 205 is pressed against the upper part of the arc-shaped fixed plate 4 to complete the installation of the furnace body 3. When the furnace body 3 needs to be disassembled, the handle 206 is pulled outward, and the handle 206 moves outward to drive the arc-shaped movable plate 205, the connecting plate 211 and the rotating plate 208 to move outward. When the rotating plate 208 is completely exposed from the limiting groove 209, the rotating plate 208 is rotated to a vertical state. At this time, the fixation of the arc-shaped movable plate 205 is completed. At this time, the arc-shaped fixed plate 4 is exposed, and then the furnace body 3 can be taken out. Through the setting of the connecting component 2, there is no need to use multiple sets of nuts for threaded fixing, which saves time, realizes the rapid disassembly and assembly of the single crystal furnace chassis 1, and improves the effect of rapid disassembly and assembly;

[0034] When the arc-shaped fixing plate 4 is inserted into the connecting component 2, the card plate 6 is inserted into the groove 8 to complete the first layer of sealing of the furnace body 3, the second sealing ring 9 is inserted into the card groove 5 to complete the second layer of sealing of the furnace body 3, and the first sealing ring 7 is inserted into the slot 10 to complete the third layer of sealing of the furnace body 3. Through the arrangement of the card plate 6, the groove 8, the second sealing ring 9, the card groove 5, the first sealing ring 7 and the slot 10, multi-layer sealing of the furnace body 3 and the chassis 1 is achieved, thereby improving the sealing effect.

[0035] The above descriptions are only some preferred embodiments of the present disclosure and an explanation of the technical principles used. Those skilled in the art should understand that the scope of the invention involved in the embodiments of the present disclosure is not limited to the technical solutions formed by a specific combination of the above-mentioned technical features, but should also cover other technical solutions formed by any combination of the above-mentioned technical features or their equivalent features without departing from the above-mentioned inventive concept. For example, the above-mentioned features are replaced with the technical features with similar functions disclosed in the embodiments of the present disclosure (but not limited to) and the technical solutions formed.

Claims

1. A chassis device capable of rapid assembly and disassembly, comprising a chassis (1), characterized in that: Two groups of symmetrically distributed connection components (2) are installed on the upper surface of the chassis (1); the chassis (1) is movably connected to a furnace body (3) via the connection components (2); two groups of symmetrically distributed arc-shaped fixing plates (4) are installed on both sides of the furnace body (3); the arc-shaped fixing plates (4) are adapted to the connection components (2).

2. The quickly detachable chassis device according to claim 1, characterized in that: A cardboard (6) is installed on the upper surface of the chassis (1), a first sealing ring (7) is provided outside the cardboard (6), the first sealing ring (7) is installed on the upper surface of the chassis (1), and a card slot (5) is provided between the first sealing ring (7) and the cardboard (6).

3. The quickly detachable chassis device according to claim 2, characterized in that: A groove (8) is provided at the lower part of the furnace body (3), a second sealing ring (9) is provided next to the groove (8), and a slot (10) is provided at one end of the second sealing ring (9) away from the groove (8).

4. The quickly detachable chassis device according to claim 3, characterized in that: The clamping plate (6) is snap-fitted with the groove (8), the clamping groove (5) is snap-fitted with the second sealing ring (9), and the insertion slot (10) is snap-fitted with the first sealing ring (7).

5. The quickly detachable chassis device according to claim 1, characterized in that: The connection assembly (2) comprises a connection block (201), wherein the connection block (201) comprises two groups, and the two groups of the connection blocks (201) are fixedly mounted on the upper surface of the chassis (1), wherein a through hole (202) is provided in the connection block (201), and slide grooves (203) are provided on both sides of the through hole (202), and a limiting groove (209) is provided on the surface of the connection block (201).

6. The quickly detachable chassis device according to claim 5, characterized in that: The slide groove (203) is slidably connected to a slider (210), and there are two groups of the sliders (210). The two groups of the sliders (210) are connected to an arc-shaped movable plate (205), and the arc-shaped movable plate (205) is adapted to the through hole (202). The slider (210) is slidably connected to a round rod (204), and the round rod (204) is fixedly installed inside the connecting block (201). A spring (207) is provided on the outer sleeve of the round rod (204), and one end of the spring (207) is fixedly installed on the surface of the slider (210), and the other end of the spring (207) is installed on the inner side of the connecting block (201).

7. The quickly detachable chassis device according to claim 6, characterized in that: A handle (206) is installed at one end of the upper surface of the arc-shaped movable plate (205), a connecting plate (211) is installed at the center position of the side surface of one end of the arc-shaped movable plate (205) on which the handle (206) is installed, the connecting plate (211) is rotatably connected to a rotating plate (208), and the rotating plate (208) and the connecting plate (211) are slidably adapted to the limiting groove (209).

8. The quickly detachable chassis device according to claim 7, characterized in that: The front parts of the arc-shaped movable plate (205) and the arc-shaped fixed plate (4) are arranged in an arc shape, and the arc-shaped movable plate (205) and the arc-shaped fixed plate (4) are adapted to the arcs at the front parts.

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