Switchable heat shielding sealing device
By designing a switchable thermal shielding sealing device, the problem of preventing particle leakage and external impurities in the preparation of single crystal thin film is solved, and the strictness of the vacuum environment and the cleanliness of the observation process are achieved.
Patent Information
- Application Number
- CN202323477188.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-20
- Publication Date
- 2025-03-21
- Estimated Expiration
- 2033-12-20
AI Technical Summary
During the preparation of single crystal thin films, it is necessary to observe the reaction growth process in a vacuum environment, while preventing leakage of fluid or solid particles and invasion of external impurities.
A switchable thermal shielding sealing device is designed, including a furnace body, a crucible, a four-way connecting pipe and a sealing device. The sealing device consists of a sealing plug and a linear inlet. The linear inlet includes a flange, a driving rod and a coupling device. Through the movement of the driving rod and the coupling device, the up and down movement of the sealing plug is realized, thereby opening or closing the window on the furnace body.
It effectively prevents fluid or solid particles from leaking from adjacent bonding surfaces, and prevents external impurities such as dust and moisture from entering the equipment, ensuring the strictness of the vacuum environment and the cleanliness of the observation process.
Smart Images
Figure CN222648177U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of semiconductors, in particular to a switchable heat shielding sealing device which can be used when preparing a single crystal film. Background Art
[0002] The important breakthrough of semiconductor optoelectronics will be the research on superlattice, quantum well (dot, line) structure materials and devices, and its development potential is immeasurable. Key electronic components with microelectronics as the core are a high-tech basic technology group, and the development of devices and circuits must rely on ultra-thin layer material growth technology. Molecular beam epitaxy technology has excellent film thickness control, which is unmatched by other growth technologies. The growth chamber is the main component, and the epitaxial growth process is completed in the growth chamber. The growth chamber mainly includes a vacuum chamber, a pump group, a transmission mechanism, a sample stage and various interfaces.
[0003] Molecular beam epitaxy is a method of growing single crystal thin films under ultra-high vacuum with strict control of growth conditions. It is a further development of vacuum evaporation. Epitaxy is a new technology for preparing single crystal thin films. It is a method of growing thin films layer by layer along the crystal axis of the substrate material under appropriate substrates and conditions. The crystal growth process is completed under non-thermal equilibrium conditions and is only restricted by the dynamics of the substrate. This is a fundamental difference from liquid phase epitaxial growth in a near-thermal equilibrium state. This technology can be used to prepare semiconductor devices such as semiconductor lasers, light-emitting diodes, and communication devices.
[0004] During the crystal growth process, strict requirements are placed on the vacuum environment. In order to observe the reaction growth process while ensuring that the environment is not polluted, we propose a switchable heat shielding sealing device. Utility Model Content
[0005] In order to solve the above technical problems, the utility model relates to a switchable heat shielding sealing device.
[0006] The utility model is implemented by the following technical scheme: a switchable heat shield sealing device, including a furnace body, a crucible, a four-way connecting pipe, and a sealing device. An interface is provided on the furnace body, the four-way connecting pipe is connected to the interface, the upper interface of the four-way connecting pipe is provided with a sealing device, and the lower interface of the four-way connecting pipe is connected to the furnace body. The sealing device includes a sealing plug and a linear introducer, the linear introducer includes a flange, a driving rod, and a coupling device, the flange is connected to the upper interface of the four-way connecting pipe, and the driving rod is connected to the coupling device, so as to open or close the window on the furnace body, so as to facilitate observation of the situation inside the furnace.
[0007] Through the above technical solution, when observing the situation inside the furnace, the coupling device is slid downward, the driving rod moves downward to connect with the sealing plug, and the coupling device is slid upward, the driving rod moves upward to drive the sealing plug to move upward, and the window inside the furnace is opened. The device can be used to prevent fluid or solid particles from leaking from adjacent joint surfaces or to prevent external impurities such as dust and moisture from invading components or combinations of components inside the equipment.
[0008] Compared with the prior art, the beneficial effects of the present invention are:
[0009] The utility model uses a switchable heat shielding sealing device to prevent fluid or solid particles from leaking from adjacent bonding surfaces when preparing a single crystal film or to prevent external impurities such as dust and moisture from invading a component or combination of components inside the device. BRIEF DESCRIPTION OF THE DRAWINGS
[0010] Figure 1 It is a schematic diagram of the overall structure of the utility model;
[0011] Description of main symbols:
[0012] 1. Furnace body; 2. Crucible; 3. Four-way connecting pipe; 4. Sealing plug; 5. Driving rod; 6. Flange; 7. Linear introducer; 8. Coupling device; 9. Upper interface; 10. Lower interface. DETAILED DESCRIPTION
[0013] The present invention is further described below in conjunction with the accompanying drawings and specific implementation methods. It should be noted that, under the premise of no conflict, the various embodiments or technical features described below can be arbitrarily combined to form a new embodiment.
[0014] Example:
[0015] Please combine Figure 1 A switchable heat shielding sealing device of this embodiment comprises a furnace body (1), a crucible (2), a four-way connecting pipe (3), and a sealing device, wherein the crucible (2) is inside the furnace body (1), an interface is provided on the furnace body (1), the four-way connecting pipe (3) is connected to the interface, an upper interface (9) of the four-way connecting pipe (3) is provided with a sealing device, and a lower interface (10) of the four-way connecting pipe (3) is connected to the furnace body (1).
[0016] The sealing device comprises a sealing plug (4) and a linear introducer (7). The linear introducer (7) comprises a driving rod (5), a flange (6) and a coupling device (8). The flange (6) is connected to an upper interface (9) of a four-way connecting pipe (3). The driving rod (5) is connected to the coupling device (8), thereby opening or closing a window on the furnace body (1) to facilitate observation of conditions inside the furnace. When observing conditions inside the furnace, the coupling device (8) is slid downward, the driving rod (5) moves downward and connects to the sealing plug (4), the coupling device (8) is slid upward, the driving rod (5) moves upward and drives the sealing plug (4) to move upward, and the window inside the furnace is opened.
[0017] During the crystal growth process, strict requirements are placed on the vacuum environment. In order to observe the reaction growth process while ensuring that the environment is not polluted, we invented this device.
[0018] The above-mentioned implementation modes are only preferred implementation modes of the present invention, and cannot be used to limit the protection scope of the present invention. Any non-substantial changes and substitutions made by technicians in this field on the basis of the present invention shall fall within the scope of protection required by the present invention.
Claims
1. A switchable heat shielding sealing device, characterized in that: The invention comprises a furnace body (1), a crucible (2), a four-way connecting pipe (3), and a sealing device, wherein the crucible (2) is inside the furnace body (1), an interface is provided on the furnace body (1), the four-way connecting pipe (3) is connected to the interface, an upper interface (9) of the four-way connecting pipe (3) is provided with a sealing device, and a lower interface (10) of the four-way connecting pipe (3) is connected to the furnace body (1).
2. A switchable heat shielding sealing device according to claim 1, characterized in that: The sealing device comprises a sealing plug (4) and a linear introducer (7). The linear introducer (7) comprises a driving rod (5), a flange (6) and a coupling device (8). The flange (6) is connected to an upper interface (9) of a four-way connecting pipe (3). The driving rod (5) is connected to the coupling device (8), thereby opening or closing a window on the furnace body (1) to facilitate observation of conditions inside the furnace. When observing conditions inside the furnace, the coupling device (8) is slid downward, the driving rod (5) moves downward and connects to the sealing plug (4), the coupling device (8) is slid upward, the driving rod (5) moves upward and drives the sealing plug (4) to move upward, and the window inside the furnace is opened.