Transmission valve structure for stack type coating machine

Abstract

The utility model discloses a transfer valve structure for a stack type coating machine, which belongs to the field of coating machines and comprises a connector, a plugging mechanism and an auxiliary mechanism, two ends of the connector are respectively connected with a feeding chamber and a coating chamber, and a channel communicated with the feeding chamber and the coating chamber is arranged in the connector; the plugging mechanism comprises a plugging plate arranged in the connecting body, a driving piece is fixed to the connecting body, a rotating shaft inserted into the connecting body is connected to the driving piece, a rotating seat is arranged on the upper side of the channel, the rotating shaft is driven to rotate through the driving piece, and the rotating shaft enables the plugging plate to turn downwards through a connecting rod component so as to seal the channel. The motor enables the two lifting screws to rotate through the belt pulley assembly, the lifting screws enable the screw sleeve to move downwards, then the abutting plate moves downwards along with the screw sleeve till the abutting plate makes contact with the fixing block, the blocking plate is limited in the overturning direction, and the channel can be better sealed through the cooperation of the blocking mechanism and the auxiliary mechanism.

Description

Technical Field

[0001] The utility model relates to the technical field of coating machines, in particular to a transmission valve structure used in a stack type coating machine. Background Art

[0002] Due to the important role of high-performance rare earth permanent magnets in various industrial fields and the scarcity of heavy rare earth resources, the grain boundary diffusion process has been widely used in the industry and has become one of the indicators of the technological advancement of industry enterprises. As one of the main production methods for heavy rare earth coatings for grain boundary diffusion process, magnetron sputtering coating production equipment has also been widely used.

[0003] Benefiting from the application experience of magnetron sputtering method in semiconductor, photovoltaic and display industries, and meeting the needs of large-scale production, the horizontal through-type sputtering coating system has been widely used in the rare earth permanent magnet industry. In order to further increase the efficiency, the horizontal feeding is changed to stack feeding. The sputtering coating system needs to evacuate the feeding chamber and the coating chamber before coating. There is a transmission valve between the feeding box and the coating box to control the channel between the feeding box and the coating box. When the material in the feeding box is transported, the channel needs to be closed through the transmission valve, and the coating chamber continues to be coated. Then the air is flushed into the feeding box, and the material is put back into the feeding box. After the loading is completed, the vacuum is re-evacuated. Therefore, the quality of the channel sealing affects the material being coated. Utility Model Content

[0004] The utility model aims to provide a transmission valve structure for a stack type coating machine, which enables a blocking plate to stably block a channel through a blocking mechanism and an auxiliary mechanism.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A transmission valve structure for a stack-type coating machine comprises a connector, a sealing mechanism and an auxiliary mechanism, wherein two ends of the connector are respectively connected to a feed chamber and a coating chamber, and a passage connecting the feed chamber and the coating chamber is arranged in the connector; the sealing mechanism comprises a sealing plate arranged in the connector, a driving member is fixed on the connector, a rotating shaft inserted into the connector is connected to the driving member, a rotating seat is arranged on the upper side of the passage, the upper end of the sealing plate is hinged to the rotating seat, and the rotating shaft and the sealing plate are connected by a connecting rod member; the auxiliary mechanism comprises an abutment plate which can be raised and lowered on one side of the rotation direction, a fixed block against which the abutment plate abuts is fixed on the sealing plate, and the sealing effect is better through the cooperation of the sealing mechanism and the auxiliary mechanism.

[0007] Preferably, the auxiliary mechanism includes a motor arranged on the top of the connecting body, a lifting component is arranged on the lower side of the motor, the upper end of the lifting component is connected to the motor, and the lower end of the lifting component is fixed to the abutment plate, and the lifting component drives the abutment plate to abut the abutment block, thereby limiting the sealing plate from the flipping direction.

[0008] Preferably, the lifting component includes a lifting screw and a screw sleeve arranged inside the connecting body, and a limit block is fixedly connected to the screw sleeve. The limit block is slidably connected to the connecting body, and the limit block prevents the screw sleeve from rotating.

[0009] Preferably, both the fixing block and the abutting plate are provided with inclined surfaces and the two inclined surfaces are in contact with each other, which is beneficial to limit the sealing plate.

[0010] Preferably, two lifting components are provided, and the two lifting components are symmetrically arranged with respect to the blocking plate.

[0011] Preferably, the two lifting components are connected via a pulley assembly.

[0012] Preferably, both ends of the rotating shaft are connected to the driving member.

[0013] Preferably, a plurality of connecting rod components are provided.

[0014] Preferably, the connecting rod component includes a connecting rod 1 and a connecting rod 2, the upper end of the connecting rod 1 is fixed to the rotating shaft, the lower end of the connecting rod 1 is hinged to the upper end of the connecting rod 2, and the lower end of the connecting rod 2 is hinged to the blocking plate.

[0015] Preferably, an axial seal is provided at the place where the lifting screw and the rotating shaft pass through the connecting body.

[0016] Compared with the prior art, the utility model has the following beneficial effects:

[0017] The driving member is used to rotate the rotating shaft, which causes the sealing plate to flip downward through the connecting rod member to close the channel. The motor rotates the two lifting screws through the pulley assembly. The lifting screws cause the screw sleeve to move downward, thereby causing the abutment plate to follow and move downward until the abutment plate contacts the fixed block. The sealing plate is limited in the flipping direction, and the sealing mechanism cooperates with the auxiliary mechanism to better seal the channel. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0019] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0020] Figure 2 This is a schematic diagram of the interior of the connector of the present invention.

[0021] Figure 3 This is a schematic diagram of the separation of the connector, the blocking mechanism and the auxiliary mechanism of the utility model.

[0022] Figure 4 It is a schematic diagram of the sealing plate and the rotating seat of the utility model.

[0023] Explanation of the figure numbers: 1. Connector; 11. Channel; 12. Rotating seat; 2. Sealing mechanism; 21. Sealing plate; 211. Connecting seat; 212. Extension plate; 22. Driving member; 23. Rotating shaft; 24. Connecting rod member; 241. Connecting rod one; 242. Connecting rod two; 25. Axial seal; 3. Auxiliary mechanism; 31. Abutment plate; 32. Fixed block; 33. Motor; 34. Lifting member; 341. Lifting screw; 342. Screw sleeve; 35. Pulley assembly; 36. Limit block; 4. Feed chamber. DETAILED DESCRIPTION

[0024] The utility model is described in further detail below in conjunction with the accompanying drawings.

[0025] The following description is used to disclose the utility model so that those skilled in the art can implement the utility model. The preferred embodiments described below are only examples, and those skilled in the art can think of other obvious variations. The basic principles of the utility model defined in the following description can be used for other implementation schemes, variations, improvements, equivalent schemes, and other technical solutions that do not deviate from the spirit and scope of the utility model.

[0026] Those skilled in the art should understand that, in the disclosure of the present invention, the directions or positions indicated by the terms "longitudinal", "lateral", "up", "down", "left", "right", "front", "back", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. are based on the directions or positional relationships shown in the accompanying drawings, which are only simplified descriptions for the convenience of describing the present invention, and do not indicate or imply that the device or component referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, the above terms should not be understood as limitations on the present invention.

[0027] It is to be understood that the term "one" should be understood as "at least one" or "one or more", that is, in one embodiment, the number of an element may be one, while in another embodiment, the number of the element may be multiple, and the term "one" should not be understood as a limitation on the quantity.

[0028] See also Figure 1 - Figure 4 A transmission valve structure for a stack type coating machine includes a connector 1, a blocking mechanism 2 and an auxiliary mechanism 3. The two ends of the connector 1 are respectively connected to a feed chamber 4 and a coating chamber, and the coating chamber is not shown in the figure. A channel 11 connecting the feed chamber 4 and the coating chamber is provided in the connector 1. The channel 11 is provided at the lower part of the connector 1.

[0029] The blocking mechanism 2 includes a blocking plate 21 arranged in the connecting body 1, a driving member 22 is fixed on the connecting body 1, the driving member 22 is a gear rack swing cylinder, a rotating shaft 23 inserted into the connecting body 1 is connected to the driving member 22, both ends of the rotating shaft 23 are connected to the driving member 22, and an axial seal 25 is arranged at the place where the rotating shaft 23 passes through the connecting body 1. The axial seal 25 is a prior art and is not described here. A rotating seat 12 is arranged on the upper side of the channel 11, and the rotating seat 12 is fixedly connected to the connecting body 1. The rotating shaft 23 in the connecting body 1 is rotatably connected to the rotating seat 12 to enhance the stability of the rotating shaft 23. The upper end of the blocking plate 21 is hinged to the rotating seat 12, and a connecting seat 211 is installed on the blocking plate 21, and an extension plate 21 is arranged on the connecting seat 211 2. The extension plate 212 is hinged to the rotating seat 12, and the rotating shaft 23 is connected to the blocking plate 21 through a connecting rod component 24, and a plurality of connecting rod components 24 are provided; the connecting rod component 24 includes a connecting rod 1 241 and a connecting rod 242, the upper end of the connecting rod 1 241 is fixed to the rotating shaft 23, the lower end of the connecting rod 1 241 is hinged to the upper end of the connecting rod 242, and the lower end of the connecting rod 242 is hinged to the blocking plate 21. When the channel 11 needs to be closed, the driving member 22 is started, and the driving member 22 causes the rotating shaft 23 to rotate, and the rotating shaft 23 rotates with the connecting rod 1 241, and the connecting rod 1 241 causes the connecting rod 242 to move the connecting rod 242, so that the blocking plate 21 is turned downward on the rotating seat 12 to close the channel 11.

[0030] The auxiliary mechanism 3 includes an abutment plate 31 which can be lifted and lowered on one side of the rotation direction, a fixed block 32 which is abutted by the abutment plate 31 is fixed on the blocking plate 21, and both the fixed block 32 and the abutment plate 31 are provided with inclined surfaces and the two inclined surfaces are in contact with each other, the auxiliary mechanism 3 includes a motor 33 arranged at the top of the connector 1, a lifting component 34 is arranged at the lower side of the motor 33, the upper end of the lifting component 34 is connected to the motor 33, and the lower end of the lifting component 34 is fixed to the abutment plate 31, and two lifting components 34 are provided, and the two lifting components 34 are symmetrically arranged about the blocking plate 21, which is conducive to limiting the blocking plate 21, and the two lifting components 34 are arranged symmetrically. The two ends of the motor 33 are connected by a pulley assembly 35, which includes two pulleys and a belt. The output end of the motor 33 is connected to one of the pulleys. The lifting component 34 includes a lifting screw 341 and a screw sleeve 342 arranged inside the connector 1. The round rod portion of the lifting screw 341 passes through the connector 1 and is fixed to the pulley. The lifting screw 341 is provided with an axial seal 25 at the place where the lifting screw 341 passes through the connector 1. The axial seal 25 is used for sealing. A limit block 36 is fixedly connected to the screw sleeve 342. The limit block 36 is slidably connected to the connector 1, and the limit block 36 prevents the screw sleeve 342 from rotating. The driving member 22 and the motor 33 are connected through a controller (the controller is an existing controller that can be programmed to achieve specific time control. The controller controls the driving member 22 and the motor 33 for different time periods so that they run in staggered order. The connection relationship and control method between the controller and the driving member 22 and the motor 33 are all existing public technologies and are not described here. The controller is not shown in the figure). Before starting the driving member 22, the motor 33 is started to rotate the two lifting screws 341 through the pulley assembly 35. The lifting screw 341 causes the screw sleeve 342 to move downward, and the limit block 36 and the abutment plate 31 on the screw sleeve 342 follow and move downward until the abutment plate 31 contacts the fixed block 32, thereby limiting the sealing plate 21 in the flipping direction, which is beneficial to sealing the channel 11. The sealing mechanism 2 cooperates with the auxiliary mechanism 3 to better seal the channel 11.

[0031] Those skilled in the art should understand that the embodiments of the present invention described above and shown in the accompanying drawings are only examples and do not limit the present invention. The purpose of the present invention has been fully and effectively achieved. The functions and structural principles of the present invention have been demonstrated and explained in the embodiments. Without departing from the principles, the embodiments of the present invention may be deformed or modified in any way.

Claims

1. A transmission valve structure for a stack type coating machine, characterized in that: include: A connector (1), wherein two ends of the connector (1) are respectively connected to a feed chamber (4) and a coating chamber, and a channel (11) is provided in the connector (1) for connecting the feed chamber (4) and the coating chamber; A blocking mechanism (2), comprising a blocking plate (21) arranged in a connecting body (1), a driving member (22) being fixed to the connecting body (1), a rotating shaft (23) inserted into the connecting body (1) being connected to the driving member (22), a rotating seat (12) being arranged on the upper side of the channel (11), an upper end of the blocking plate (21) being hinged to the rotating seat (12), and the rotating shaft (23) and the blocking plate (21) being connected via a connecting rod member (24); The auxiliary mechanism (3) comprises an abutment plate (31) which can be raised and lowered on one side of the rotation direction, and a fixed block (32) against which the abutment plate (31) abuts is fixed on the blocking plate (21).

2. The transmission valve structure for a stack coating machine according to claim 1, characterized in that: The auxiliary mechanism (3) comprises a motor (33) arranged at the top of the connecting body (1), a lifting component (34) is arranged at the lower side of the motor (33), the upper end of the lifting component (34) is connected to the motor (33), and the lower end of the lifting component (34) is fixed to the abutment plate (31).

3. The transmission valve structure for a stack coating machine according to claim 2, characterized in that: The lifting component (34) comprises a lifting screw (341) and a screw sleeve (342) arranged inside the connecting body (1); a limit block (36) is fixedly connected to the screw sleeve (342); and the limit block (36) is slidably connected to the connecting body (1).

4. The transmission valve structure for a stack coating machine according to claim 1, characterized in that: The fixing block (32) and the abutting plate (31) are both provided with inclined surfaces, and the two inclined surfaces are in contact with each other.

5. The transmission valve structure for a stack coating machine according to claim 3, characterized in that: Two lifting components (34) are provided, and the two lifting components (34) are symmetrically arranged with respect to the blocking plate (21).

6. The transmission valve structure for a stack coating machine according to claim 5, characterized in that: The two lifting components (34) are connected via a pulley assembly (35).

7. The transmission valve structure for a stack coating machine according to claim 1, characterized in that: Both ends of the rotating shaft (23) are connected to the driving member (22).

8. The transmission valve structure for a stack coating machine according to claim 7, characterized in that: A plurality of connecting rod components (24) are provided.

9. The transmission valve structure for a stack coating machine according to claim 8, characterized in that: The connecting rod component (24) comprises a connecting rod 1 (241) and a connecting rod 2 (242); the upper end of the connecting rod 1 (241) is fixed to the rotating shaft (23); the lower end of the connecting rod 1 (241) is hinged to the upper end of the connecting rod 2 (242); and the lower end of the connecting rod 2 (242) is hinged to the blocking plate (21).

10. The transmission valve structure for a stack coating machine according to claim 3, characterized in that: An axial seal (25) is provided at the place where the lifting screw (341) and the rotating shaft (23) pass through the connecting body (1).

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