Developer swing arm mechanism capable of automatically lifting and rotating

Abstract

The utility model discloses a developing machine swing arm mechanism capable of automatically lifting and rotating, which relates to the technical field of semiconductor processing equipment and comprises a supporting seat, a movable arm is fixedly arranged at the top end of the supporting seat, a mounting groove is formed in one end of the movable arm in a penetrating manner, and a supporting rod is arranged in the mounting groove in a penetrating manner. The top end of the supporting rod is movably provided with two positioning nuts through threads, and the two positioning nuts are arranged on the two sides of the movable arm correspondingly. The movable arm is arranged above the supporting seat, the supporting rod is arranged in the mounting groove formed in one end of the movable arm, the positioning nuts are arranged at the two ends of the supporting rod, and the positions of the supporting rod and the movable arm can be adjusted by adjusting the positions of the two positioning nuts. And the servo motor is arranged below the supporting seat, and the servo motor can drive the supporting seat and the movable arm to rotate, so that the positions of the mounting seat and the spray head can be adjusted.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing equipment, in particular to an automatic lifting and rotating developing machine swing arm mechanism. Background Art

[0002] A semiconductor device that can achieve a certain function by etching and wiring on a semiconductor sheet is called a semiconductor chip. In order to coat the photoresist on the semiconductor chip, a coating and developing machine is required.

[0003] For example, a semiconductor chip processing glue developing machine with publication number CN215769351U includes a base and a second bracket, one side of the top of the first bracket is connected to the first electric telescopic column through an electric telescopic rod, the second bracket is fixed on the base, the top of the second bracket is rotatably connected to a rotating frame, and the other side of the upper end surface of the base is provided with a second conveyor belt device. The semiconductor chip processing glue developing machine, after using the first suction cup to suck up a semiconductor chip in the limit frame and transfer it to the first conveyor belt device, the semiconductor chip can move to the right under the operation of the first conveyor belt device and enter the inner side of the glue developing machine body, which is convenient for automatic loading. The glue developing machine body can develop, rinse, glue and dry the semiconductor chip. After the semiconductor chip reaches the bottom of the second suction cup, the second suction cup sucks up the semiconductor chip and transfers it to the second conveyor belt device, which is convenient for automatic unloading.

[0004] The above technical solution has some problems in practical application. It is difficult to adjust the position and height of the developer nozzle according to the placement and specifications of the semiconductor chip, and it is impossible to adjust the developer nozzles of different specifications according to the operating process, resulting in low processing efficiency for semiconductor chips.

[0005] Therefore, it is necessary to invent an automatic lifting and rotating developing machine swing arm mechanism to solve the above problems. Summary of the invention

[0006] The utility model aims to provide a developing machine swing arm mechanism with automatic lifting and rotating function, so as to solve the problems raised in the above-mentioned background technology.

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an automatically lifting and rotating developing machine swing arm mechanism, comprising a support seat, a movable arm is fixedly provided at the top of the support seat, a mounting slot is penetrated at one end of the movable arm, a support rod is penetrated inside the mounting slot, two positioning nuts are movably provided at the top of the support rod through a thread, and the two positioning nuts are respectively arranged on both sides of the movable arm, a mounting seat is fixedly provided at the bottom end of the support rod, a servo motor is provided at the bottom end of the support seat, and the output shaft of the servo motor is fixedly connected to the bottom end of the support seat, a movable seat is fixedly provided at the bottom end of the servo motor, an extension seat is fixedly provided at the bottom end of the movable seat, a threaded groove is opened in the middle of the bottom end of the extension seat, and an adjusting screw is inserted into the inside of the threaded groove.

[0008] Preferably, an adjusting motor is provided below the extension seat, and an output shaft of the adjusting motor is fixedly connected to the bottom end of the adjusting screw.

[0009] Preferably, a positioning block is fixedly provided at the top end of the regulating motor, and a positioning slot corresponding to the positioning block is formed at the bottom end of the extending seat.

[0010] Preferably, a plurality of through holes are provided through the middle of the mounting seat, and nozzles are fixedly provided in the plurality of through holes.

[0011] Preferably, two mounting grooves are provided, and both mounting grooves are configured as strip structures.

[0012] Preferably, a base is fixedly provided on one side of the adjusting motor, and the extension seat is plugged into the top of the base.

[0013] Technical effects and advantages of the utility model:

[0014] 1. The utility model arranges a movable arm above the support seat, and a support rod is arranged in the installation groove opened at one end of the movable arm. Positioning nuts are arranged at both ends of the support rod. By adjusting the positions of the two positioning nuts, the position between the support rod and the movable arm can be adjusted, so that the height of the mounting seat and the nozzle can be adjusted. By arranging a servo motor below the support seat, the servo motor can drive the support seat and the movable arm to rotate, so as to adjust the position of the mounting seat and the nozzle;

[0015] 2. The utility model sets a movable seat and an extension seat below the servo motor. A threaded groove is provided at the bottom of the extension seat. An adjusting screw is provided in the threaded groove. The adjusting screw cooperates with the threaded groove to realize automatic adjustment of the height of the extension seat, thereby realizing automatic adjustment of the height of the mounting seat and the nozzle, so as to facilitate the development process of the semiconductor. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0017] Figure 2 It is a schematic cross-sectional view of the overall structure of the utility model.

[0018] Figure 3 It is a schematic diagram of the structure of the movable arm of the utility model.

[0019] In the figure: 1. Support seat; 2. Movable arm; 3. Mounting slot; 4. Support rod; 5. Positioning nut; 6. Mounting seat; 7. Nozzle; 8. Servo motor; 9. Movable seat; 10. Extension seat; 11. Threaded groove; 12. Adjusting screw; 13. Adjusting motor; 14. Positioning plug; 15. Positioning slot; 16. Base. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] The utility model provides Figure 1-3 The present invention shows an automatic lifting and rotating developing machine swing arm mechanism, comprising a support seat 1, a movable arm 2 is fixedly arranged at the top of the support seat 1, a mounting slot 3 is penetrated at one end of the movable arm 2, two mounting slots 3 are provided, and the two mounting slots 3 are both arranged in a strip structure, a support rod 4 is penetrated inside the mounting slot 3, two positioning nuts 5 are movably provided at the top of the support rod 4 through threads, and the two positioning nuts 5 are respectively arranged at both sides of the movable arm 2, a mounting seat 6 is fixedly arranged at the bottom end of the support rod 4, and the position between the support rod 4 and the movable arm 2 can be adjusted by adjusting the position of the two positioning nuts 5 at the top of the support rod 4, so that the initial position of the mounting seat 6 can be adjusted, so as to facilitate the debugging of the device during the installation process;

[0022] Specifically, a plurality of through holes are provided through the middle of the mounting seat 6, and a nozzle 7 is fixedly provided in each of the plurality of through holes. A plurality of nozzles 7 are provided, and the plurality of nozzles 7 can realize the spraying of developers and cleaning liquids of different specifications;

[0023] More specifically, a servo motor 8 is provided at the bottom end of the support seat 1, and the output shaft of the servo motor 8 is fixedly connected to the bottom end of the support seat 1, a movable seat 9 is fixedly provided at the bottom end of the servo motor 8, an extension seat 10 is fixedly provided at the bottom end of the movable seat 9, a thread groove 11 is provided in the middle of the bottom end of the extension seat 10, an adjusting screw 12 is inserted inside the thread groove 11, an adjusting motor 13 is provided below the extension seat 10, and the output shaft of the adjusting motor 13 is fixedly connected to the bottom end of the adjusting screw 12, the adjusting motor 13 drives the adjusting screw 12 to rotate, and the adjusting screw 12 cooperates with the thread groove 11, so that the extension seat 10 moves up and down on the top end of the base 16;

[0024] In addition, a positioning block 14 is fixedly provided at the top of the adjusting motor 13, and a positioning slot 15 corresponding to the positioning block 14 is provided at the bottom of the extension seat 10. The positioning slot 15 cooperates with the positioning block 14 to ensure that the extension seat 10 can only slide up and down but cannot rotate;

[0025] Moreover, a base 16 is fixedly disposed on one side of the adjusting motor 13 , and the extension seat 10 is plugged into the top of the base 16 , so that the base 16 can play a supporting role for the adjusting motor 13 .

[0026] Working principle of this utility model:

[0027] When the device is in use, the position between the support rod 4 and the movable arm 2 can be adjusted by adjusting the position of the two positioning nuts 5 at the top of the support rod 4, so that the initial position of the mounting seat 6 and the nozzle 7 can be adjusted. By controlling the rotation of the servo motor 8, the servo motor 8 can drive the support seat 1 to rotate, thereby driving the movable arm 2 to swing, so as to adjust the position of the mounting seat 6 and the nozzle 7, so as to adjust the position between different nozzles 7 and the semiconductor. By controlling the rotation of the adjusting motor 13, the adjusting motor 13 drives the adjusting screw 12 to rotate, and the adjusting screw 12 cooperates with the thread groove 11, so that the extension seat 10 moves up and down at the top of the base 16, and the extension seat 10 can drive the movable arm 2 to move up and down through the movable seat 9, the servo motor 8 and the support seat 1, so that the height of the nozzle 7 can be adjusted, so as to control the distance between the nozzle 7 and the semiconductor.

[0028] Finally, it should be noted that the above is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present utility model shall be included in the protection scope of the present utility model.

Claims

1. An automatic lifting and rotating developing machine swing arm mechanism, comprising a support seat (1), characterized in that: A movable arm (2) is fixedly provided at the top end of the support seat (1), a mounting groove (3) is penetrated at one end of the movable arm (2), a support rod (4) is penetrated inside the mounting groove (3), two positioning nuts (5) are movably provided at the top end of the support rod (4) through a thread, and the two positioning nuts (5) are respectively provided on both sides of the movable arm (2), a mounting seat (6) is fixedly provided at the bottom end of the support rod (4), a servo motor (8) is provided at the bottom end of the support seat (1), and the output shaft of the servo motor (8) is fixedly connected to the bottom end of the support seat (1), a movable seat (9) is fixedly provided at the bottom end of the servo motor (8), an extension seat (10) is fixedly provided at the bottom end of the movable seat (9), a thread groove (11) is provided in the middle of the bottom end of the extension seat (10), and an adjusting screw (12) is inserted into the inside of the thread groove (11).

2. The automatic lifting and rotating developing machine swing arm mechanism according to claim 1, characterized in that: An adjusting motor (13) is arranged below the extension seat (10), and an output shaft of the adjusting motor (13) is fixedly connected to the bottom end of the adjusting screw rod (12).

3. The automatic lifting and rotating developing machine swing arm mechanism according to claim 2, characterized in that: A positioning plug block (14) is fixedly disposed at the top end of the regulating motor (13), and a positioning slot (15) corresponding to the positioning plug block (14) is provided at the bottom end of the extension seat (10).

4. The automatic lifting and rotating developing machine swing arm mechanism according to claim 3, characterized in that: A plurality of through holes are provided through the middle of the mounting seat (6), and a nozzle (7) is fixedly provided in each of the plurality of through holes.

5. The automatic lifting and rotating developing machine swing arm mechanism according to claim 4, characterized in that: The installation grooves (3) are provided with two, and the two installation grooves (3) are both provided with a strip-shaped structure.

6. The automatic lifting and rotating developing machine swing arm mechanism according to claim 5, characterized in that: A base (16) is fixedly disposed on one side of the regulating motor (13), and the extension seat (10) is plugged into the top of the base (16).

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