Probe card probe pressure impedance test board

Abstract

The utility model relates to a probe card probe pressure impedance test bench which comprises a material placing bench, a position adjusting mechanism, a detection mechanism, a microscope and a rack. The detection mechanism is positioned between the microscope and the material placing table through the rack; the detection mechanism comprises a connecting plate, an ejector pin and a display panel, a through hole is formed in the middle of the connecting plate, and the ejector pin is Z-shaped. The utility model has the advantages that the ejector pin is arranged above the probe card, and the probe card ascends and descends through the position adjusting mechanism, so that the pin pressure values and impedance values of different OD quantities of the probe card can be measured; the Z-shaped structure of the ejector pin and the upper part of the ejector pin are provided with holes, so that the shielding space is reduced, a microscope can conveniently observe the butt joint condition of the ejector pin and the probe head of the probe card from top to bottom, and the pin alignment efficiency and the test accuracy are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor packaging, in particular to a probe card needle pressure impedance test table. Background Art

[0002] Semiconductor CP testing is an important part of the semiconductor chip manufacturing process. Its main purpose is to test the function and electrical parameters of the bare chip on the wafer by piercing the chip pins with probe cards before chip packaging, so as to screen out invalid chips as much as possible and save packaging costs. Needle pressure plays an important role in CP testing. Too little needle pressure will lead to poor contact; too much needle pressure will cause needle marks, and in severe cases, it will pierce the wafer, and at the same time cause the needle card to wear out too quickly.

[0003] Therefore, it is necessary to perform needle pressure and impedance tests on the probe card before testing the wafer, measure whether the impedance is within the approved range according to the test OD requirements, and quickly and accurately locate and repair certain needles with poor contact.

[0004] The existing measurement probe card uses the Ω gear of a multimeter, one end is pressed on the gold-plated point of the substrate, and the other end is used to touch the needle tip of the needle card with a small needle tip, and the digital display shows the resistance value. The resistance data measured in this way is very unstable, and the needle pressure value cannot be measured, so the contact impedance cannot be measured according to the test OD. The impedance can only be tested in a static state, and the probe card verification effect is poor.

[0005] In addition, since the wafer-level test probe card is extremely small, it is necessary to complete the docking of the test pins with each needle of the probe card under a microscope. The existing needle pressure measurement table has a structure where the probe card is on top and the measuring pin is on the bottom during testing. The disadvantage is that some probe cards do not have holes on the back, which blocks the view from the top down of the microscope. When docking, there is a risk of the needle tip being bent. Utility Model Content

[0006] The utility model aims to provide a probe card needle pressure impedance test platform, which can increase the line of sight of the probe card and the test top needle, and improve the test efficiency and accuracy.

[0007] In order to achieve the above-mentioned utility model object, the utility model provides a probe card needle pressure impedance test station, including a material placement table, a positioning mechanism, a detection mechanism, a microscope, and a frame; the material placement table is connected to the positioning mechanism, the detection mechanism is located between the microscope and the material placement table through the frame, and the material placement table is located below the microscope;

[0008] The detection mechanism includes a connecting plate, a ejector pin, and a display panel. A through hole is provided in the middle of the connecting plate. The ejector pin is connected to the bottom of the connecting plate and is located below the through hole. The ejector pin is in a "Z" shape. The display panel is connected to the ejector pin.

[0009] As a further improvement of the utility model, the positioning mechanism consists of three positioning components, which include a positioning frame and an adjusting screw. Two of the positioning components are horizontally arranged, and the other positioning component is vertically arranged. The three positioning components are perpendicular to each other. The loading table is connected to the positioning frame of one of the horizontally arranged positioning components, and the three positioning components are connected in sequence through the corresponding adjusting screws.

[0010] Furthermore, the positioning assembly also includes a slider, the positioning frame is provided with a guide groove, the material placement table is connected to the positioning frame of one of the horizontally arranged positioning assemblies through the corresponding slider, the positioning frames of the three positioning assemblies are all connected to the corresponding adjusting screws through the slider, and the slider is located in the guide groove.

[0011] As a further improvement of the utility model, the detection mechanism also includes a connecting head and a connecting rod, the connecting rod is located at the bottom of the connecting plate, the connecting rod is threadedly connected to the connecting head, and the ejector pin is connected to the bottom of the connecting head.

[0012] Furthermore, the connector is provided with a plurality of ejector pins.

[0013] The utility model discloses a probe card needle pressure impedance test table. The probe card is placed on a material placement table with each needle of the probe card facing upward. The operator observes from top to bottom through a microscope. The material placement table realizes three-way adjustment through a positioning mechanism. The needle to be tested is connected to the ejector pin. Subsequently, the needle continues to rise to the target test parameter, and the needle pressure value is obtained through the numerical change of the display panel. Subsequently, the other end of the display panel is connected to other wires of the ejector pin, and the impedance value immediately appears on the display panel.

[0014] Compared with the prior art, the probe card needle pressure impedance test station of the utility model has the following advantages:

[0015] (1) The ejector pin is on top and the probe card is on the bottom. The probe card is raised and lowered by the positioning mechanism to measure the needle pressure and impedance values ​​of different OD values ​​of the probe card.

[0016] (2) The "Z"-shaped structure of the ejector pin and the opening above the ejector pin can reduce the obstruction of space, making it easier to observe the docking status of the ejector pin and the probe card needle from top to bottom under a microscope, thereby improving the needle alignment efficiency and test accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the structure of a probe card needle pressure impedance test station of the utility model;

[0018] Figure 2 It is a schematic diagram of the structure of the adjustment mechanism;

[0019] Figure 3 It is a schematic diagram of the structure of the testing mechanism;

[0020] Figure 4 This is a top view of a probe card needle pressure impedance test station of the utility model;

[0021] Figure 5 Set up a structural diagram for the ejector pin. DETAILED DESCRIPTION

[0022] The specific implementation of the utility model is further described in detail below with reference to the accompanying drawings.

[0023] like Figure 1 As shown, a probe card needle pressure impedance test station of the utility model comprises a material placement table 1, a positioning mechanism 2, a detection mechanism 3, a microscope 4, and a frame 5; the material placement table 1 is connected to the positioning mechanism 2, the detection mechanism 3 is located between the microscope 4 and the material placement table 1 through the frame 5, and the material placement table 1 is located below the microscope 4;

[0024] like Figure 2 As shown, the positioning mechanism 2 is composed of three positioning components 21, and the positioning components 21 include a positioning frame 22 and an adjusting screw 24. Two positioning components 21 are horizontally arranged, and the other positioning component 21 is vertically arranged. The three positioning components 21 are perpendicular to each other, and the loading table 1 is connected to the positioning frame 22 of one of the horizontally arranged positioning components 21, and the three positioning components 21 are connected in sequence through corresponding adjusting screws 24.

[0025] The positioning assembly 21 also includes a slider 25, and the positioning frame 22 is provided with a guide groove 23. The material placement table 1 is connected to the positioning frame 22 of one of the horizontally arranged positioning assemblies 21 through the corresponding slider 25. The positioning frames 22 of the three positioning assemblies 21 are all connected to the corresponding adjusting screw 24 through the slider 25, and the slider 25 is located in the guide groove 23.

[0026] The material placement table 1 is used to place the probe card 6 to be tested. The three positioning components 21 can realize the horizontal movement and lifting of the probe card 6, which is convenient for the probe card 6 to be docked with the detection mechanism 3 under the microscope. By rotating the adjusting screw 24, the slider 25 connected thereto can slide along the corresponding guide groove 23, and the guide groove 23 plays a guiding role; the adjusting screw 24 can be the existing micrometer precision to achieve a minimum reading of 0.5 microns, and the positioning error of the material placement table 1 is controlled within the range of ±1 micron.

[0027] like Figure 3-4As shown, the detection mechanism 3 includes a connecting plate 31, a ejector pin 32, and a display panel 33. A through hole 311 is provided in the middle of the connecting plate 31. The ejector pin 32 is connected to the bottom of the connecting plate 31 and is located below the through hole 311. The ejector pin 32 is in a "Z" shape. The display panel 33 is connected to the ejector pin 32.

[0028] After each needle on the loading platform 1 contacts the ejector pin 32 one by one, the display panel 33 will display the needle pressure value. When the needles are docked, the operator needs to observe through the microscope 4. The through hole 311 of the connecting plate 31 can provide a space to reduce the visual obstruction of the microscope 4 by the connecting plate 31, so that the operator can observe the needle alignment below through the through hole 311. The "Z"-shaped ejector pin 32 can provide the operator with more viewing angles, making it convenient for the operator to capture the image of the ejector pin 32 and the needle to be tested through the microscope 4. If the ejector pin 32 is a vertical rod, the vertically arranged ejector pin 32 will block the observation angle of the microscope 4 from top to bottom, affecting the operator's observation and the efficiency of needle docking.

[0029] The detection mechanism 3 also includes a connector 35 and a connecting rod 34. The connecting rod 34 is located at the bottom of the connecting plate 31. The connecting rod 34 is threadedly connected to the connector 35. The ejector pin 32 is connected to the bottom of the connector 35. According to different detection requirements of the probe card 6, the ejector pins 32 of different specifications can be replaced by screwing the connector 35.

[0030] like Figure 5 As shown, the connector 35 is provided with a plurality of ejector pins 32, which are respectively connected to the display panel 33 through existing wires, so as to achieve simultaneous measurement of adjacent needles of the probe card 6, and read the results on the display panel 33 in split screen, thereby improving the test speed.

[0031] The utility model provides a probe card needle pressure impedance test station. A probe card 6 is placed on a loading platform 1, with each needle of the probe card 6 facing upward. An operator observes from top to bottom through a microscope 4. The loading platform 1 realizes three-way adjustment through a positioning mechanism 2, and the needle to be tested is docked with a ejector pin 32. Subsequently, the needle continues to rise to a target test parameter, and the needle pressure value is obtained through the numerical change of a display panel 33; subsequently, the other end of the display panel 33 is connected to other wires of the ejector pin 32, and the impedance value immediately appears on the display panel 33.

[0032] The preferred embodiments of the present invention have been specifically described above, but the present invention is not limited to the described embodiments. Those skilled in the art may make various equivalent modifications or substitutions without violating the spirit of the present invention, and these equivalent modifications or substitutions are all within the scope defined by the claims of this application.

Claims

1. A probe card needle pressure impedance test station, characterized in that: It includes a material placement table, a positioning mechanism, a detection mechanism, a microscope, and a frame; the material placement table is connected to the positioning mechanism, the detection mechanism is located between the microscope and the material placement table through the frame, and the material placement table is located below the microscope; The detection mechanism includes a connecting plate, a ejector pin, and a display panel. A through hole is provided in the middle of the connecting plate. The ejector pin is connected to the bottom of the connecting plate and is located below the through hole. The ejector pin is in a "Z" shape. The display panel is connected to the ejector pin.

2. A probe card needle pressure impedance test station as claimed in claim 1, characterized in that: The positioning mechanism consists of three positioning components, each of which includes a positioning frame and an adjusting screw. Two of the positioning components are horizontally arranged, and the other positioning component is vertically arranged. The three positioning components are perpendicular to each other. The loading table is connected to the positioning frame of one of the horizontally arranged positioning components, and the three positioning components are connected in sequence through the corresponding adjusting screws.

3. A probe card needle pressure impedance test station as claimed in claim 2, characterized in that: The positioning assembly also includes a slider, and the positioning frame is provided with a guide groove. The material placement table is connected to the positioning frame of one of the horizontally arranged positioning assemblies through the corresponding slider. The positioning frames of the three positioning assemblies are all connected to the corresponding adjusting screws through the slider, and the slider is located in the guide groove.

4. The probe card needle pressure impedance test station according to claim 1, characterized in that: The detection mechanism also includes a connecting head and a connecting rod, wherein the connecting rod is located at the bottom of the connecting plate, the connecting rod is threadedly connected to the connecting head, and the ejector pin is connected to the bottom of the connecting head.

5. A probe card needle pressure impedance test station as claimed in claim 4, characterized in that: The connector is provided with a plurality of ejector pins.

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