Automatic cleaning device for target material

Abstract

The utility model belongs to the technical field of target material cleaning, and discloses an automatic target material cleaning device which comprises a target material placing frame, a cleaning tank, a circulating water pump, a filtering unit and a spraying unit. Wherein the target material placing frame is used for bearing a target material to be cleaned; the cleaning tank is arranged below the target material placing frame, and cleaning liquid for cleaning the target material can fall into the cleaning tank; an inlet of the circulating water pump communicates with an outlet of the cleaning tank; an inlet of the filtering unit is communicated with an outlet of the circulating water pump, and the filtering unit is used for filtering cleaning liquid in the cleaning tank; an inlet of the spraying unit is communicated with an outlet of the filtering unit, and the spraying unit is arranged above the target material placing frame and used for spraying cleaning liquid to the target material placed on the target material placing frame. According to the automatic cleaning device for the target material, the cleaning liquid can be recycled after being filtered, the cleaning cost of the target material is reduced, the structure is simple, and the equipment cost is low.

Description

Technical Field

[0001] The utility model relates to the technical field of target material cleaning, in particular to an automatic target material cleaning device. Background Art

[0002] In the sputtering coating process, the cleanliness of the target is very important for the coating quality, product yield and production cost. The low cleanliness of the target is generally manifested in the presence of black oxides of several microns to several millimeters on the sputtering surface of the target, generally called nodules. Nodules are insulating and can easily cause abnormal discharge during the sputtering process, causing granular substances to appear in the coating, affecting the coating quality and reducing the product yield. Therefore, in the production process of the target, in order to ensure that the target has sufficient cleanliness, the target needs to be fully cleaned before packaging.

[0003] The existing target cleaning methods are mainly manual cleaning and ultrasonic cleaning. Manual cleaning takes a long time and has low cleaning efficiency; ultrasonic cleaning equipment is expensive, and the cleaning fluid needs to be replaced frequently, making the cleaning cost high.

[0004] Therefore, it is urgent to propose an automatic target cleaning device to solve the above technical problems. Utility Model Content

[0005] The utility model provides an automatic target material cleaning device, which can filter the cleaning liquid and then recycle it, thereby reducing the target material cleaning cost, and has a simple structure and low equipment cost.

[0006] To achieve this purpose, the utility model adopts the following technical solutions:

[0007] Automatic target cleaning device, including:

[0008] A target material placement rack is used to support the target material to be cleaned;

[0009] A cleaning tank, which is arranged below the target material placement rack, and the cleaning liquid used to clean the target material will fall into the cleaning tank;

[0010] A circulating water pump, wherein the inlet of the circulating water pump is connected to the outlet of the cleaning tank;

[0011] a filter unit, the inlet of which is connected to the outlet of the circulating water pump, and is used to filter the cleaning liquid in the cleaning tank;

[0012] A spray unit, the inlet of which is connected to the outlet of the filter unit, and the spray unit is arranged above the target material placement rack to spray a cleaning liquid onto the target material placed on the target material placement rack.

[0013] Optionally, the spray unit includes a spray rack, a manifold arranged on the spray rack, and a plurality of nozzles connected to the manifold; the manifold is connected to an outlet of the filter unit, and the nozzles are used to spray the cleaning liquid onto the target material.

[0014] Optionally, the spray unit further comprises a lifting mechanism disposed on the spray rack, wherein the lifting mechanism is connected to the manifold and is used to drive the manifold to be lifted and lowered so as to adjust the distance between the nozzle and the target placed on the target placement rack.

[0015] Optionally, the spray unit further comprises a translation mechanism disposed on the spray frame, wherein the translation mechanism is connected to the manifold and is used for driving the manifold to translate in a horizontal plane.

[0016] Optionally, the target material automatic cleaning device further comprises a target material conveying line, and the target material conveying line is used to convey the target material to the target material placement rack.

[0017] Optionally, the target material automatic cleaning device further comprises:

[0018] A material detection unit, arranged on the target material placement rack, for detecting whether the target material is on the target material placement rack;

[0019] A control unit is communicatively connected with the material detection unit, the circulating water pump and the spray unit, and the control unit is used to control the circulating water pump and the spray unit to start when the material detection unit detects the target material, so as to clean the target material.

[0020] Optionally, the target material automatic cleaning device further comprises:

[0021] A drying unit, comprising a drying rack and an air blowing mechanism placed on the drying rack, wherein the air blowing mechanism is used to blow air toward the target material on the drying rack;

[0022] A transfer unit is used to transfer the target material on the target material placement rack to the drying placement rack.

[0023] Optionally, the gas blown out by the blowing mechanism is dry inert gas.

[0024] Optionally, the cleaning fluid is isopropyl alcohol.

[0025] Optionally, a filter screen is provided at the outlet of the cleaning tank.

[0026] Beneficial effects of the utility model:

[0027] The utility model provides an automatic target material cleaning device, comprising a target material placement rack, a cleaning tank, a circulating water pump, a filtering unit and a spray unit. The circulating water pump can pump the cleaning liquid in the cleaning tank to the filtering unit for filtering, and then transport the filtered cleaning liquid to the spray unit. The spray unit sprays the cleaning liquid to the target material to be cleaned on the target material placement rack. The cleaning liquid sprayed from the spray unit enters the cleaning tank again for recycling after cleaning the target material. The automatic target material cleaning device can filter the cleaning liquid that has been used to clean the target material and reuse it for cleaning the target material by setting the filtering unit, thereby reducing the frequency of replacing the cleaning liquid, thereby reducing the cost of the cleaning liquid. In addition, the automatic target material cleaning device has a simple structure and low equipment cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments of the present invention. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the contents of the embodiments of the present invention and these drawings without paying any creative work.

[0029] Figure 1 It is a structural schematic diagram of the target material automatic cleaning device provided in an embodiment of the utility model.

[0030] In the figure:

[0031] 10. Target material;

[0032] 100, target material placement rack; 200, cleaning tank; 300, circulating water pump; 400, filtering unit; 500, spray unit; 510, spray rack; 520, manifold; 530, nozzle; 540, lifting mechanism. DETAILED DESCRIPTION

[0033] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0034] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0035] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0036] In the description of this embodiment, the terms "upper", "lower", "left", "right" and other directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0037] This embodiment provides an automatic target material cleaning device, which can filter the cleaning liquid and then recycle it, thereby reducing the target material cleaning cost, and has a simple structure and low equipment cost.

[0038] Specifically, Figure 1 As shown, the target material automatic cleaning device includes a target material placement rack 100 , a cleaning tank 200 , a circulating water pump 300 , a filtering unit 400 and a spraying unit 500 .

[0039] Among them, the target material placement rack 100 is used to support the target material 10 to be cleaned. The cleaning tank 200 is arranged below the target material placement rack 100, and the cleaning liquid after cleaning the target material 10 will fall into the cleaning tank 200. Optionally, the target material placement rack 100 is a hollow design, so that the cleaning liquid for cleaning the target material 10 can fall into the cleaning tank 200 below the target material placement rack 100. The inlet of the circulating water pump 300 is connected to the outlet of the cleaning tank 200, the outlet of the circulating water pump 300 is connected to the inlet of the filter unit 400, the outlet of the filter unit 400 is connected to the inlet of the spray unit 500, and the spray unit 500 is arranged above the target material placement rack 100, and is used to spray the cleaning liquid to the target material 10 placed on the target material placement rack 100.

[0040] The working process of the target automatic cleaning device is:

[0041] The target material 10 to be cleaned is placed on the target material placement rack 100, and the circulating water pump 300 and the spray unit 500 are started. The circulating water pump 300 will pump the cleaning liquid in the cleaning tank 200 into the filter unit 400, and the filter unit 400 will filter the cleaning liquid passing through to make it clean cleaning liquid. After that, the clean cleaning liquid enters the spray unit 500 under the action of the circulating water pump 300, and is sprayed by the spray unit 500 to the target material 10 placed on the target material placement rack 100 to clean the target material 10. The cleaning liquid that has cleaned the target material 10 will enter the cleaning tank 200 again and be recycled.

[0042] The automatic target material cleaning device provided in this embodiment, by providing a filtering unit 400, can filter the cleaning liquid that has been used to clean the target material 10 and reuse it for cleaning the target material 10, thereby reducing the frequency of replacing the cleaning liquid and further reducing the cost of the cleaning liquid. In addition, the automatic target material cleaning device has a simple structure and a low equipment cost.

[0043] Further, see Figure 1 The spray unit 500 includes a spray frame 510, a manifold 520 and a plurality of nozzles 530. The spray frame 510 is used to fix the manifold 520 and the plurality of nozzles 530, and the plurality of nozzles 530 are connected to the manifold 520. The manifold 520 is connected to the outlet of the filter unit 400, and the cleaning liquid from the filter unit 400 enters the manifold 520, and then enters each nozzle 530, and finally the nozzle 530 sprays the cleaning liquid toward the target 10. By providing a plurality of nozzles 530 and spraying at the same time, the cleaning effect of the target 10 can be improved, and the cleaning efficiency of the target 10 can also be improved.

[0044] Optionally, in this embodiment, a plurality of nozzles 530 covers the entire target 10 .

[0045] Optionally, the nozzle 530 is a high-pressure nozzle, and the pressure of the cleaning liquid sprayed by the nozzle 530 can be set as needed to better clean the target material 10 .

[0046] Further, see Figure 1 In a possible embodiment, the spray unit 500 further includes a lifting mechanism 540 disposed on the spray rack 510, the lifting mechanism 540 is connected to the manifold 520, and the lifting mechanism 540 is used to drive the manifold 520 to move up and down to adjust the distance between the nozzle 530 and the target 10 placed on the target placement rack 100. By providing the lifting mechanism 540, the distance between the nozzle 530 and the target 10 can be set according to actual needs to improve the cleaning effect, which is conducive to improving the cleaning efficiency and cleaning quality of the target 10.

[0047] It is understandable that the lifting mechanism 540 may be selected but not limited to a cylinder.

[0048] Further, in another possible embodiment, the spray unit 500 also includes a translation mechanism (not shown in the figure) disposed on the spray rack 510, and the translation mechanism is connected to the manifold 520, and is used to drive the manifold 520 to translate in a horizontal plane. Since multiple targets 10 to be cleaned may be placed on the target material placement rack 100 at the same time, and the coverage area of ​​the multiple nozzles 530 on the manifold 520 is limited, when the multiple nozzles 530 spray at the same time, there may be a problem that some targets 10 are not contacted by the cleaning liquid. Therefore, a translation mechanism is provided to drive the manifold 520 to translate, so that the spraying area of ​​the nozzles 530 can be increased by translation, and the number of targets 10 to be cleaned at the same time is increased, thereby improving the cleaning efficiency of the targets 10.

[0049] It is understandable that the translation mechanism may be selected but not limited to a linear guide rail.

[0050] In this embodiment, the spray unit 500 includes a lifting mechanism 540 and a translation mechanism at the same time, and the lifting mechanism 540 is slidably connected to the spray rack 510, that is, when the translation mechanism drives the manifold 520 to translate, the lifting mechanism 540 slides relative to the spray rack 510 to ensure the reliability of the operation of the manifold 520.

[0051] Furthermore, the above-mentioned target material automatic cleaning device also includes a target material conveying line, which is used to convey the target material 10 to the target material placement rack 100. By setting up the target material conveying line to convey the target material 10, manual handling is not required, the labor intensity of workers is reduced, and the cleaning efficiency is improved.

[0052] Optionally, the target material delivery line may be a conveyor.

[0053] Furthermore, the above-mentioned automatic target cleaning device also includes a material detection unit and a control unit. Among them, the material detection unit is arranged on the target material placement rack 100, and is used to detect whether there is a target material 10 on the target material placement rack 100. The control unit is communicatively connected with the material detection unit, the circulating water pump 300 and the spray unit 500, and the control unit is used to control the circulating water pump 300 and the spray unit 500 to start when the material detection unit detects the target material 10, so as to clean the target material 10. By setting the material detection unit and the control unit, the automatic cleaning of the target material 10 is controlled, which greatly reduces the labor intensity of the workers and has a high degree of intelligence.

[0054] Optionally, the control unit can control the cleaning time, for example, 10 min-15 min.

[0055] Furthermore, the above-mentioned automatic target cleaning device also includes a drying unit and a transfer unit. Among them, the drying unit includes a drying rack and a blowing mechanism placed on the drying rack, and the blowing mechanism is used to blow air to the target 10 on the drying rack. The transfer unit is used to transfer the target 10 on the target rack 100 to the drying rack. The cleaned target 10 can be dried by the drying unit, which is convenient for the subsequent packaging of the target 10.

[0056] Optionally, the gas blown out by the blowing mechanism is a dry inert gas. The inert gas has the function of preventing oxidation and effectively protecting the quality of the target material 10 .

[0057] At present, ultrasonic cleaning machines generally use xylene as cleaning liquid, and the emission of xylene is harmful to the human body and is not conducive to the health of workers. However, the automatic target cleaning device provided in this embodiment uses isopropyl alcohol as cleaning liquid, which is less harmful to the human body and improves the work safety of workers.

[0058] It is worth noting that the circulating water pump 300 and the cleaning tank 200 , the circulating water pump 300 and the filter unit 400 , and the filter unit 400 and the spray unit 500 are all connected via pipelines.

[0059] Furthermore, a filter is provided at the outlet of the cleaning tank 200. The filter can prevent large impurities from entering the filter unit 400, thus achieving a preliminary filtering effect, further improving the cleanliness of the cleaning liquid spraying the target 10, and facilitating improving the cleaning quality of the target 10.

[0060] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.

Claims

1. The target material automatic cleaning device is characterized by: include: A target material placement rack (100) for supporting a target material (10) to be cleaned; A cleaning tank (200), the cleaning tank (200) being arranged below the target material placement rack (100), and the cleaning liquid used to clean the target material (10) will fall into the cleaning tank (200); A circulating water pump (300), wherein the inlet of the circulating water pump (300) is connected to the outlet of the cleaning tank (200); a filter unit (400), the inlet of the filter unit (400) being in communication with the outlet of the circulating water pump (300), and being used for filtering the cleaning liquid in the cleaning tank (200); A spray unit (500), the inlet of the spray unit (500) is connected to the outlet of the filter unit (400), and the spray unit (500) is arranged above the target material placement rack (100) and is used to spray cleaning liquid onto the target material (10) placed on the target material placement rack (100).

2. The target material automatic cleaning device according to claim 1, characterized in that: The spray unit (500) comprises a spray frame (510), a manifold (520) arranged on the spray frame (510), and a plurality of nozzles (530) connected to the manifold (520); the manifold (520) is connected to an outlet of the filter unit (400), and the nozzles (530) are used to spray the cleaning liquid onto the target material (10).

3. The target material automatic cleaning device according to claim 2, characterized in that: The spray unit (500) further comprises a lifting mechanism (540) arranged on the spray frame (510), wherein the lifting mechanism (540) is connected to the manifold (520) and is used to drive the manifold (520) to rise and fall so as to adjust the distance between the nozzle (530) and the target (10) placed on the target placement frame (100).

4. The target material automatic cleaning device according to claim 2, characterized in that: The spray unit (500) further comprises a translation mechanism arranged on the spray frame (510), wherein the translation mechanism is connected to the manifold (520) and is used to drive the manifold (520) to translate in a horizontal plane.

5. The target material automatic cleaning device according to claim 1, characterized in that: The target material automatic cleaning device further comprises a target material conveying line, wherein the target material conveying line is used to convey the target material (10) to the target material placement rack (100).

6. The target material automatic cleaning device according to claim 1, characterized in that: The target material automatic cleaning device also includes: A material detection unit, arranged on the target material placement rack (100), and used for detecting whether the target material (10) is on the target material placement rack (100); A control unit is communicatively connected to the material detection unit, the circulating water pump (300) and the spray unit (500), and the control unit is used to control the circulating water pump (300) and the spray unit (500) to start when the material detection unit detects the target material (10), so as to clean the target material (10).

7. The automatic target cleaning device according to any one of claims 1 to 6, characterized in that: The target material automatic cleaning device also includes: A drying unit, comprising a drying rack and an air blowing mechanism placed on the drying rack, wherein the air blowing mechanism is used to blow air toward the target material (10) on the drying rack; A transfer unit is used to transfer the target material (10) on the target material placement rack (100) to the drying placement rack.

8. The automatic target cleaning device according to claim 7, characterized in that: The gas blown out by the blowing mechanism is dry inert gas.

9. The automatic target cleaning device according to any one of claims 1 to 6, characterized in that: The cleaning liquid is isopropyl alcohol.

10. The automatic target cleaning device according to any one of claims 1 to 6, characterized in that: A filter screen is provided at the outlet of the cleaning tank (200).

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