Blowing and dust collecting device based on scanning electron microscope sample injector

Abstract

The utility model relates to an air blowing and dust collecting device based on a scanning electron microscope sample injector, which is characterized in that a sample table bracket is arranged on a scanning electron microscope sample table, and a scanning electron microscope sample is placed on the sample table bracket; the air blowing and dust collection device comprises a dust collection device, an air blowing device, a driving device, a limiting device, a compressed air supply device and a controller. The dust collection device and the air blowing device directly face the scanning electron microscope sample table; the controller is electrically connected with the dust collection device, the driving device and the air blowing device. The automatic sample injector has the beneficial effects that the blowing device and the dust collection device are arranged on the automatic sample injector of the scanning electron microscope; the distance between the air blowing device and the sample table is adjustable, and the height of the air blowing device and the distance between the air blowing device and the surface of a sample can be adjusted according to different samples to be cleaned, so that the air blowing force is ensured; and the air blowing and dust collecting device is used for blowing and cleaning the surfaces of the powder and the solid, manpower is liberated, and the cleaning efficiency is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of purging a sample stage of a precision instrument, and in particular relates to an air blowing and dust collecting device based on a scanning electron microscope injector. Background Art

[0002] Scanning electron microscopy is an important technical means to characterize the structure and morphology of samples. For precision instruments such as scanning electron microscopes, in order to observe and characterize the structure and morphology of samples under scanning electron microscopes, it is necessary to prepare samples with high requirements, and after preparing the samples, the samples and the sample stage need to be purged;

[0003] The conventional method of purging the sample stage is to use an ear bulb to purge it; however, the disadvantage of the ear bulb purging method is that the manual purging force is relatively light, and it cannot guarantee that the dust of the powder sample or the solid sample itself will be completely blown off the sample stage; if the impurities and dust fall into the scanning electron microscope, it will cause internal environmental pollution of the scanning electron microscope, which will have a serious impact on the scanning electron microscope and subsequent sample scanning; the ear bulb purging method will also reduce the service life of the electron microscope and reduce the accuracy and reliability of subsequent sample scanning results. Utility Model Content

[0004] The utility model aims to overcome the deficiencies in the prior art and provide an air blowing and dust collecting device based on a scanning electron microscope sample injector.

[0005] The air blowing and dust collecting device based on the scanning electron microscope sample injector has a sample stage bracket provided on the scanning electron microscope sample stage, and the scanning electron microscope sample is placed on the sample stage bracket; the air blowing and dust collecting device comprises: a dust collecting device, an air blowing device, a driving device, a limiting device, a compressed air supply device and a controller; the dust collecting device and the air blowing device are directly opposite to the scanning electron microscope sample stage;

[0006] The controller is electrically connected to the dust collecting device, the driving device and the air blowing device;

[0007] The compressed air supply device is connected to the air blowing device; the compressed air supply device is used to provide compressed air to the air blowing device;

[0008] The driving device is electrically connected to the dust suction device and the air blowing device; the driving device is used to receive the control signal of the controller and drive the dust suction device and the air blowing device to move up and down;

[0009] The dust suction device and the air blowing device are both provided with limit devices, which are used to adjust the distance between the dust suction device and the air blowing device and the surface of the scanning electron microscope sample stage respectively;

[0010] The dust suction device is used to receive the control signal of the controller and suck away the powder and solid on the sample stage of the scanning electron microscope.

[0011] As a preference, a dust storage device is further provided, the dust storage device is connected to the dust suction device and is used to store the powder and solid sucked by the dust suction device.

[0012] Preferably: an electrically controlled airflow switch is provided on the connecting air passage between the compressed air supply device and the blowing device; the electrically controlled airflow switch is electrically connected to the controller; the electrically controlled airflow switch is used to receive the control signal of the controller and adjust the size of the compressed air flow supplied by the compressed air supply device to the blowing device.

[0013] Preferably, the dust suction device is provided with a plurality of long strip suction holes, so that the dust suction device can suction dust evenly and stably; the air blowing device is provided with a plurality of air blowing holes, so that the air blown out is even and has a consistent force.

[0014] As a preferred embodiment, a long strip-shaped adjustment hole is provided on the limiting device, so that the distance between the dust suction device and the air blowing device and the surface of the scanning electron microscope sample stage can be adjusted more flexibly.

[0015] The beneficial effects of the utility model are as follows: the utility model is provided with an air blowing device and a dust suction device on the automatic sample feeder of a scanning electron microscope; the distance between the air blowing device and the sample stage is adjustable, and the height of the air blowing device and the distance between the air blowing device and the sample surface can be adjusted according to different samples to be cleaned, so as to ensure the air blowing force; the air blowing dust suction device is used for blowing and cleaning powder and solid surfaces, thereby freeing up manpower and improving cleaning efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 The utility model is a schematic structural diagram of an air blowing and dust collecting device based on a scanning electron microscope injector.

[0017] Explanation of the accompanying drawings: dust suction device 1, air blowing device 2, sample table bracket 3, driving device 4, limiting device 5, electrically controlled air flow switch 6, compressed air supply device 7, controller 8, dust storage device 9, long strip suction hole 1-1, air blowing hole 2-1, sample table bracket cross section 3-1. DETAILED DESCRIPTION

[0018] The utility model is further described below in conjunction with the embodiments. The description of the following embodiments is only used to help understand the utility model. It should be pointed out that for ordinary people in this technical field, the utility model can also be modified in some ways without departing from the principle of the utility model, and these improvements and modifications also fall within the scope of protection of the claims of the utility model.

[0019] As an example, Figure 1As shown, an air blowing and dust collecting device based on a scanning electron microscope sample injector is provided with a sample stage bracket 3 on the scanning electron microscope sample stage, and a scanning electron microscope sample is placed on the sample stage bracket 3; the air blowing and dust collecting device comprises: a dust collecting device 1, an air blowing device 2, a driving device 4, a limiting device 5, a compressed air supply device 7, a controller 8 and a dust storage device 9; the dust collecting device 1 and the air blowing device 2 are directly opposite to the scanning electron microscope sample stage;

[0020] The controller 8 is electrically connected to the dust collecting device 1, the driving device 4 and the blowing device 2;

[0021] The compressed air supply device 7 is connected to the blowing device 2; an electrically controlled airflow switch 6 is provided on the connecting air passage between the compressed air supply device 7 and the blowing device 2; the electrically controlled airflow switch 6 is electrically connected to the controller 8; the compressed air supply device 7 is used to provide compressed air to the blowing device 2; the electrically controlled airflow switch 6 is used to receive a control signal from the controller 8 and adjust the size of the compressed air flow supplied by the compressed air supply device 7 to the blowing device 2;

[0022] The driving device 4 is electrically connected to the dust collecting device 1 and the air blowing device 2; the driving device 4 is used to receive the control signal of the controller 8 and drive the dust collecting device 1 and the air blowing device 2 to move up and down; the dust collecting device 1 is provided with a plurality of long strip suction holes 1-1, so that the dust collecting device can collect dust evenly and stably; the air blowing device 2 is provided with a plurality of air blowing holes 2-1, so that the air blown out is even and has a consistent force;

[0023] The dust suction device 1 and the air blowing device 2 are both provided with a limit device 5, which is used to adjust the distance between the dust suction device 1 and the air blowing device 2 and the surface of the scanning electron microscope sample stage respectively; the limit device 5 is provided with a long strip adjustment hole, which can more flexibly adjust the distance between the dust suction device and the air blowing device and the surface of the scanning electron microscope sample stage;

[0024] The dust suction device 1 is used to receive the control signal of the controller 8 and suck away the powder and solid on the scanning electron microscope sample stage; the dust storage device 9 is connected to the dust suction device 1 and is used to store the powder and solid sucked by the dust suction device 1.

Claims

1. An air blowing and dust removal device based on a scanning electron microscope sample injector, wherein a sample stage bracket (3) is provided on the scanning electron microscope sample stage, and a scanning electron microscope sample is placed on the sample stage bracket (3); characterized in that: The air blowing and dust collecting device comprises: a dust collecting device (1), an air blowing device (2), a driving device (4), a limiting device (5), a compressed air supply device (7) and a controller (8); the dust collecting device (1) and the air blowing device (2) are directly opposite to the scanning electron microscope sample stage; The controller (8) is electrically connected to the dust collecting device (1), the driving device (4) and the air blowing device (2); The compressed air supply device (7) is connected to the air blowing device (2); the compressed air supply device (7) is used to provide compressed air to the air blowing device (2); The driving device (4) is electrically connected to the dust suction device (1) and the air blowing device (2); the driving device (4) is used to receive a control signal from the controller (8) and drive the dust suction device (1) and the air blowing device (2) to move up and down; The dust suction device (1) and the air blowing device (2) are both provided with a limit device (5) for adjusting the distance between the dust suction device (1) and the air blowing device (2) and the surface of the scanning electron microscope sample stage; The dust suction device (1) is used for receiving a control signal from a controller (8) and sucking away powder and solid on a scanning electron microscope sample stage.

2. The air blowing and dust collecting device based on the scanning electron microscope sample injector according to claim 1, characterized in that: A dust storage device (9) is also provided. The dust storage device (9) is connected to the dust suction device (1) and is used to store powder and solids sucked by the dust suction device (1).

3. The air blowing and dust collecting device based on the scanning electron microscope sample injector according to claim 2, characterized in that: An electrically controlled airflow switch (6) is provided on the connecting air passage between the compressed air supply device (7) and the air blowing device (2); the electrically controlled airflow switch (6) is electrically connected to a controller (8); the electrically controlled airflow switch (6) is used to receive a control signal from the controller (8) and adjust the size of the compressed air flow supplied by the compressed air supply device (7) to the air blowing device (2).

4. The air blowing and dust collecting device based on the scanning electron microscope sample injector according to claim 1, characterized in that: The dust suction device (1) is provided with a plurality of long strip suction holes (1-1); and the air blowing device (2) is provided with a plurality of air blowing holes (2-1).

5. The air blowing and dust collecting device based on the scanning electron microscope sample injector according to claim 1, characterized in that: The limiting device (5) is provided with a long strip-shaped adjustment hole.

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