Gallium arsenide single crystal mechanical polishing equipment

Abstract

The utility model relates to the technical field of polishing, in particular to gallium arsenide single crystal mechanical polishing equipment which comprises a base and a top plate, the base is fixedly connected with the top plate through supporting columns, the upper surface of the top plate is fixedly connected with a first frame and a second frame, and a positioning mechanism is arranged in the first frame. And a dust removal mechanism is arranged above the base. An electric push rod drives a first clamping plate to move, the first clamping plate and a second clamping plate position the gallium kunning single crystal, a handle is rotated, the handle drives a screw to rotate, the screw drives a threaded block to move, the threaded block drives a first support to move, then the gallium kunning single crystal is driven to move, and the gallium kunning single crystal is located at the lower end of a grinding disc; the first motor drives the second clamping plate to rotate so as to drive the gallium arsenide single crystal to rotate, the grinding disc is used for grinding and polishing other surfaces of the gallium arsenide single crystal, operation is simple, and multiple surfaces of the gallium arsenide single crystal can be ground and polished conveniently.

Description

Technical Field

[0001] The utility model relates to the technical field of polishing, in particular to a gallium arsenide single crystal mechanical polishing device. Background Art

[0002] Gallium arsenide wafers are made from gallium arsenide single crystal materials that are synthesized and grown from pure arsenic and gallium, and then processed through processes such as cutting, grinding, polishing and cleaning.

[0003] For example, a gallium arsenide single crystal mechanical polishing device with patent number CN217394627U includes a supporting mechanism, a grinding mechanism, a conversion mechanism and a clamp; the clamp is slidably installed on the upper end of the supporting mechanism, the grinding mechanism is installed in the middle position of the supporting mechanism, and the conversion mechanism is fixedly installed on the supporting mechanism and is connected to the grinding mechanism and the clamp respectively. The above document still has shortcomings. When in use, the friction force of the upper and lower grinding discs on the wafer is offset and summarized by using the cooperation of multiple hydraulic tanks, sliding blocks and slide plates, so as to obtain the final resultant force of the friction force on the wafer, and then the resultant force is fed back to the clamp through hydraulic pressure. , obtain the minimum clamping force, and obtain a stable and efficient real-time feedback mechanism with a simple mechanical structure, so that the equipment can stably and efficiently apply a minimum clamping force to the chip, and protect the chip to the greatest extent. However, the above-mentioned document is for grinding and polishing the GaCl2 crystal sheet. When the GaCl2 single crystal needs to be polished, the GaCl2 single crystal needs to be clamped multiple times, which is troublesome to operate and inconvenient to grind and polish multiple surfaces of the GaCl2 single crystal. At the same time, a large amount of dust will be generated when the GaCl2 single crystal is polished, which will pollute the operating environment. If inhaled by the staff, it will affect the health of the staff. Utility Model Content

[0004] The utility model aims to solve the problem that it is inconvenient to grind and polish multiple surfaces of a gallium arsenide single crystal, and proposes a gallium arsenide single crystal mechanical polishing device.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A gallium arsenide single crystal mechanical polishing device is designed, comprising a base and a top plate, the base is fixedly connected to the top plate via a support, a first frame and a second frame are fixedly connected to the upper surface of the top plate, a positioning mechanism is arranged inside the first frame, a dust removal mechanism is arranged above the base, a second bracket is fixedly connected to the upper surface of the top plate, an electric telescopic rod is fixedly connected to the inside of the second bracket, and a third motor is fixedly connected to the output end of the electric telescopic rod.

[0007] Preferably, the positioning mechanism includes a screw, the outer walls at both ends of the screw are rotatably connected to the first frame through bearings, a handle is fixedly connected to the end of the screw, the outer wall of the screw is threadedly connected to a threaded block, the outer wall of the threaded block is fixedly connected to a first bracket, the interior of the first bracket is rotatably connected to an electric push rod through a bearing, the output end of the electric push rod is fixedly connected to a first clamping plate, the interior of the first bracket is fixedly connected to a first motor, and the output shaft of the first motor is fixedly connected to a second clamping plate.

[0008] Preferably, the dust removal mechanism includes a fan, which is fixedly connected to the upper surface of the base, and the fan is connected to the collecting box through a pipe, and the collecting box is fixedly connected to the upper surface of the base, and a material pipe is fixedly connected to the right side of the collecting box, and the outer wall of the material pipe is fixedly connected to the top plate, and a hose is fixedly connected to the end of the material pipe, and a hopper is fixedly connected to the end of the hose, and the hopper is fixedly connected to the outer wall of the lead screw nut, and the lead screw nut is threadedly connected to the outer wall of the lead screw, and the outer walls at both ends of the lead screw are rotatably connected to the second frame through bearings, and the lead screw is fixedly connected to the output shaft of the second motor, and the second motor is fixed to the outer wall of the second frame.

[0009] Preferably, a second sliding block is fixedly connected to the outer wall of the lead screw nut, the second sliding block is slidably connected to the outer wall of the second sliding rod, and both ends of the second sliding rod are fixedly connected to the second frame.

[0010] Preferably, the first clamping plate and the second clamping plate are both in contact with the outer wall of the GaCl2 single crystal.

[0011] Preferably, a grinding disc is fixedly connected to the output shaft of the third motor.

[0012] The utility model proposes a gallium arsenide single crystal mechanical polishing equipment, the beneficial effect is: through the cooperation between the screw, the handle, the threaded block, the first bracket, the electric push rod, the first clamping plate, the first motor and the second clamping plate, the electric push rod drives the first clamping plate to move, the first clamping plate and the second clamping plate position the gallium arsenide single crystal, the handle is turned, the handle drives the screw to rotate, the screw drives the threaded block to move, the threaded block drives the first bracket to move, and then drives the gallium arsenide single crystal to move, so that the gallium arsenide single crystal is at the lower end of the grinding disk, the first motor drives the second clamping plate to rotate, and then drives the gallium arsenide single crystal to rotate, and the grinding disk is used to grind and polish other surfaces of the gallium arsenide single crystal, the operation is relatively simple, and it is convenient to grind and polish multiple surfaces of the gallium arsenide single crystal.

[0013] Through the cooperation between the fan, collection box, material pipe, hose, hopper, lead screw nut, lead screw and the second motor, the fan creates suction inside the collection box, the collection box creates suction inside the material pipe, the material pipe creates suction inside the hopper through the hose, the second motor drives the lead screw to rotate, the lead screw drives the lead screw nut to move, the lead screw nut drives the hopper to move, thereby increasing the dust handling range, the dust enters the hopper, and then enters the interior of the collection box through the hose and the material pipe, so that a large amount of dust will not be generated when grinding and polishing the gallium kunzide single crystal, and the operating environment will not be polluted, thus avoiding inhalation by the staff and affecting their health. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the structure of the utility model;

[0015] Figure 2 It is a structural sectional view of the utility model;

[0016] Figure 3 It is a structural schematic diagram of the connection between the screw rod, the handle and the threaded block in the utility model;

[0017] Figure 4 It is a schematic structural diagram of the connection between the second motor, the lead screw and the hopper in the utility model.

[0018] In the figure: 1, base, 2, top plate, 3, positioning mechanism, 301, screw, 302, handle, 303, threaded block, 304, first bracket, 305, electric push rod, 306, first clamping plate, 307, first motor, 308, second clamping plate, 3a1, first slider, 3a2, first slide bar, 4, dust removal mechanism, 401, fan, 402, collection box, 403, material pipe, 404, hose, 405, hopper, 406, screw nut, 407, screw, 408, second motor, 5, first frame, 6, second frame, 7, second bracket, 8, electric telescopic rod, 9, third motor, 10, grinding disc, 11, gallium kunzide single crystal, 12, second slider, 13, second slide bar. DETAILED DESCRIPTION

[0019] The utility model is further described below in conjunction with the accompanying drawings:

[0020] Embodiment 1:

[0021] Refer to the attached Figure 1-4In the present embodiment, a gallium arsenide single crystal mechanical polishing device includes a base 1 and a top plate 2. The base 1 is fixedly connected to the top plate 2 through a support. The upper surface of the top plate 2 is fixedly connected with a first frame 5 and a second frame 6. A positioning mechanism 3 is arranged inside the first frame 5. The positioning mechanism 3 positions the gallium arsenide single crystal 11 and can control the rotation of the gallium arsenide crystal. A dust removal mechanism 4 is arranged above the base 1. The dust removal mechanism 4 removes dust during grinding and polishing. A second bracket 7 is fixedly connected to the upper surface of the top plate 2. An electric telescopic rod 8 is fixedly connected to the inside of the second bracket 7. A third motor 9 is fixedly connected to the output end of the electric telescopic rod 8. The electric telescopic rod 8 drives the third motor 9 to move. A grinding disc 10 is fixedly connected to the output shaft of the third motor 9. The third motor 9 drives the grinding disc 10 to rotate.

[0022] The positioning mechanism 3 includes a screw 301, a handle 302, a threaded block 303, a first bracket 304, an electric push rod 305, a first clamping plate 306, a first motor 307 and a second clamping plate 308. The outer walls of both ends of the screw 301 are rotatably connected to the first frame 5 through bearings. The end of the screw 301 is fixedly connected to the handle 302, and the handle 302 drives the screw 301 to rotate. The outer wall of the screw 301 is threadedly connected to the threaded block 303, and the screw 301 drives the threaded block 303 to move. The outer wall of the threaded block 303 is fixedly connected to the first bracket 304, and the threaded block 303 drives the first bracket 30 4 movement, the interior of the first bracket 304 is connected to the electric push rod 305 through the bearing rotation, the output end of the electric push rod 305 is fixedly connected to the first clamping plate 306, the electric push rod 305 drives the first clamping plate 306 to move, the interior of the first bracket 304 is fixedly connected to the first motor 307, the output shaft of the first motor 307 is fixedly connected to the second clamping plate 308, the first motor 307 drives the second clamping plate 308 to move, the first clamping plate 306 and the second clamping plate 308 are both in contact with the outer wall of the gallium kunzide single crystal 11, and the first clamping plate 306 and the second clamping plate 308 clamp the gallium kunzide single crystal 11;

[0023] The electric push rod 305 drives the first clamping plate 306 to move, and the first clamping plate 305 and the second clamping plate 306 position the gallium sulfide single crystal 11. The handle 302 is turned, and the handle 302 drives the screw 301 to rotate. The screw 301 drives the threaded block 303 to move, and the threaded block 303 drives the first bracket 304 to move, thereby driving the gallium sulfide single crystal 11 to move, so that the gallium sulfide single crystal 11 is at the lower end of the grinding disk 10. The first motor 307 drives the second clamping plate 308 to rotate, thereby driving the gallium sulfide single crystal 11 to rotate, and the grinding disk 10 is used to grind and polish other surfaces of the gallium sulfide single crystal 11. The operation is relatively simple, and it is convenient to grind and polish multiple surfaces of the gallium sulfide single crystal 11.

[0024] The dust removal mechanism 4 includes a fan 401, a collection box 402, a material pipe 403, a hose 404, a hopper 405, a screw nut 406, a screw 407 and a second motor 408. The fan 401 is fixedly connected to the upper surface of the base 1. The fan 401 generates suction when it is started. The fan 401 is connected to the collection box 402 through a pipeline. The collection box 402 is fixedly connected to the upper surface of the base 1. The right side of the collection box 402 is fixedly connected with the material pipe 403. The collection box 402 is connected to the material pipe 403. The outer wall of the material pipe 403 is fixedly connected to the top plate 2. The end of the material pipe 403 is fixedly connected with the hose 404. The material pipe 403 is connected to the hose 404. The end of the hose 404 is fixedly connected with the hopper 405. The hose 404 is connected to the hopper 405. 5 is fixedly connected to the outer wall of the lead screw nut 406, the lead screw nut 406 drives the hopper 405 to move, the lead screw nut 406 is threadedly connected to the outer wall of the lead screw 407, the lead screw 407 drives the lead screw nut 406 to move, the outer walls of both ends of the lead screw 407 are rotatably connected to the second frame 6 through bearings, the lead screw 407 is fixedly connected to the output shaft of the second motor 408, the second motor 408 drives the lead screw 407 to rotate, the second motor 408 is fixedly connected to the outer wall of the second frame 6, the outer wall of the lead screw nut 406 is fixedly connected to the second slider 12, the second slider 12 is slidably connected to the outer wall of the second slide bar 13, the second slider 12 and the second slide bar 13 play a guiding role in the movement of the lead screw nut 406, and both ends of the second slide bar 13 are fixedly connected to the second frame 6;

[0025] The fan 401 creates suction inside the collection box 402, the collection box 402 creates suction inside the material pipe 403, the material pipe 403 creates suction inside the hopper 405 through the hose 404, the second motor 408 drives the lead screw 407 to rotate, the lead screw 407 drives the lead screw nut 406 to move, the lead screw nut 405 drives the hopper 405 to move, thereby increasing the dust handling range, the dust enters the hopper 405, and then enters the interior of the collection box 402 through the hose 404 and the material pipe 403, and a large amount of dust will not be generated when grinding and polishing the gallium quinone single crystal 11, and will not cause pollution to the operating environment, thereby avoiding being inhaled by the staff and affecting the health of the staff.

[0026] Working principle:

[0027] When the gallium arsenide single crystal mechanical polishing equipment is in use, the gallium arsenide single crystal 11 is placed between the first clamping plate 306 and the second clamping plate 308, the electric push rod 305 drives the first clamping plate 306 to move, the first clamping plate 305 and the second clamping plate 306 position the gallium arsenide single crystal 11, the handle 302 is turned, the handle 302 drives the screw 301 to rotate, the screw 301 drives the threaded block 303 to move, the threaded block 303 drives the first bracket 304 to move, and then drives the gallium arsenide single crystal 11 to move, so that the gallium arsenide single crystal 11 is at the lower end of the grinding disc 10, the third motor 9 drives the grinding disc 10 to rotate, the electric telescopic rod 8 controls the grinding disc 10 to rise and fall, the grinding disc 10 grinds and polishes the gallium arsenide single crystal 11, when it is necessary to grind and polish other surfaces of the gallium arsenide single crystal 11, the grinding disc 10 is raised, the first motor 307 drives the second clamping plate 308 to rotate, and then drives the gallium arsenide single crystal 11 to rotate, so that The grinding disc 10 is used to grind and polish the other surfaces of the gallium sulfide single crystal 11. The operation is relatively simple and convenient for grinding and polishing multiple surfaces of the gallium sulfide single crystal 11. When grinding and polishing, the fan 401 and the second motor 408 are started. The fan 401 generates suction inside the collection box 402, and the collection box 402 generates suction inside the material pipe 403. The material pipe 403 generates suction inside the hopper 405 through the hose 404. The second motor 408 drives the lead screw 407 to rotate, and the lead screw 407 drives the lead screw nut 406 to move, and the lead screw nut 405 drives the hopper 405 to move, thereby increasing the dust handling range. The dust enters the hopper 405, and then enters the interior of the collection box 402 through the hose 404 and the material pipe 403. When the gallium sulfide single crystal 11 is ground and polished, a large amount of dust will not be generated, and the operating environment will not be polluted, which can prevent the staff from inhaling and affecting their health.

[0028] Embodiment 2:

[0029] Refer to the attached Figure 1-4 In this embodiment, a gallium arsenide single crystal mechanical polishing device is provided, wherein the positioning mechanism 3 further comprises a first slider 3a1 and a first slide bar 3a2, wherein the first slider 3a1 is fixedly connected to the outer wall of the threaded block 303, wherein the threaded block 303 drives the first slider 3a1 to move, wherein the first slider 3a1 is slidably connected to the outer wall of the first slide bar 3a2, wherein the first slider 3a1 slides on the outer wall of the first slide bar 3a2, and both ends of the first slide bar 3a2 are fixedly connected to the first frame 5;

[0030] Through the cooperation between the first slider 3a1 and the first slide rod 3a2, the threaded block 303 drives the first slider 3a1 to move, and the first slider 3a1 slides on the outer wall of the first slide rod 3a2. The first slider 3a1 and the first slide rod 3a2 guide the movement of the threaded block 303.

[0031] Working principle:

[0032] The threaded block 303 drives the first sliding block 3a1 to move when it moves. The first sliding block 3a1 slides on the outer wall of the first sliding rod 3a2. The first sliding block 3a1 and the first sliding rod 3a2 guide the movement of the threaded block 303.

[0033] Although the present invention has been shown and described with reference to the preferred embodiments, it will be understood by those skilled in the art that various changes in form and details may be made therein within the scope of the claims.

Claims

1. A gallium arsenide single crystal mechanical polishing device, comprising a base (1) and a top plate (2), wherein the base (1) is fixedly connected to the top plate (2) via a support, and characterized in that: A first frame (5) and a second frame (6) are fixedly connected to the upper surface of the top plate (2); a positioning mechanism (3) is arranged inside the first frame (5); a dust removal mechanism (4) is arranged above the base (1); a second bracket (7) is fixedly connected to the upper surface of the top plate (2); an electric telescopic rod (8) is fixedly connected inside the second bracket (7); and a third motor (9) is fixedly connected to the output end of the electric telescopic rod (8).

2. The gallium arsenide single crystal mechanical polishing device according to claim 1, characterized in that: The positioning mechanism (3) comprises a screw rod (301), the outer walls of both ends of the screw rod (301) are rotatably connected to the first frame (5) via bearings, a handle (302) is fixedly connected to the end of the screw rod (301), a threaded block (303) is threadedly connected to the outer wall of the screw rod (301), a first bracket (304) is fixedly connected to the outer wall of the threaded block (303), an electric push rod (305) is rotatably connected to the inside of the first bracket (304) via a bearing, an output end of the electric push rod (305) is fixedly connected to a first clamping plate (306), a first motor (307) is fixedly connected to the inside of the first bracket (304), and an output shaft of the first motor (307) is fixedly connected to a second clamping plate (308).

3. The gallium arsenide single crystal mechanical polishing device according to claim 1, characterized in that: The dust removal mechanism (4) comprises a fan (401), the fan (401) being fixedly connected to the upper surface of the base (1), the fan (401) being connected to a collection box (402) via a pipeline, the collection box (402) being fixedly connected to the upper surface of the base (1), a material pipe (403) being fixedly connected to the right side of the collection box (402), an outer wall of the material pipe (403) being fixedly connected to the top plate (2), and a hose (404) being fixedly connected to the end of the material pipe (403). A hopper (405) is fixedly connected to the end of the hose (404), the hopper (405) is fixedly connected to the outer wall of the lead screw nut (406), the lead screw nut (406) is threadedly connected to the outer wall of the lead screw (407), the outer walls at both ends of the lead screw (407) are rotatably connected to the second frame (6) through bearings, the lead screw (407) is fixedly connected to the output shaft of the second motor (408), and the second motor (408) is fixedly connected to the outer wall of the second frame (6).

4. The gallium arsenide single crystal mechanical polishing device according to claim 3, characterized in that: A second sliding block (12) is fixedly connected to the outer wall of the lead screw nut (406), the second sliding block (12) is slidably connected to the outer wall of the second sliding rod (13), and both ends of the second sliding rod (13) are fixedly connected to the second frame (6).

5. The gallium arsenide single crystal mechanical polishing device according to claim 2, characterized in that: The first clamping plate (306) and the second clamping plate (308) are both in contact with the outer wall of the gallium quinone single crystal (11).

6. The gallium arsenide single crystal mechanical polishing device according to claim 1, characterized in that: The output shaft of the third motor (9) is fixedly connected with a grinding disc (10).

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