Vacuum annealing furnace

Abstract

The vacuum annealing furnace comprises a furnace body, a furnace cover, a rotary lifting mechanism, a first connecting piece and a second connecting piece, and a filling opening is formed in the upper end of the furnace body; the furnace cover comprises an upper furnace cover body and a lower furnace cover body, the lower furnace cover body is connected to the upper portion of the furnace body, and the upper furnace cover body is located above the lower furnace cover body and covers the filler opening. The rotary lifting mechanism is connected with the upper furnace cover and the lower furnace cover and used for controlling the upper furnace cover to move, the first connecting piece is arranged on the upper furnace cover, and the rotary lifting mechanism drives the upper furnace cover and the first connecting piece to move synchronously; the first connecting piece is arranged on the upper furnace cover, the second connecting piece is arranged on the lower furnace cover, the rotary lifting mechanism achieves connection or separation of the first connecting piece and the second connecting piece by adjusting the position of the first connecting piece, and when the first connecting piece is connected with the second connecting piece, the second connecting piece limits movement of the first connecting piece so that the upper furnace cover and the lower furnace cover can be connected in a clamped mode. Through the arrangement, the sealing performance of the upper furnace cover and the lower furnace cover can be improved.

Description

Technical Field

[0001] The present application relates to the technical field of silicon wafer processing, and in particular to a vacuum annealing furnace. Background Art

[0002] At present, vacuum annealing furnaces perform heat treatment by creating a low-pressure or oxygen-free environment. When the material is placed in a vacuum chamber, a negative pressure state can be achieved by extracting most or all of the gas, and the material is heated in a low-pressure environment to eliminate internal stress and improve the mechanical properties of the material.

[0003] In the prior art, since the furnace cover and furnace body of the vacuum annealing furnace need to be frequently operated, when the furnace cover and the furnace body cannot fit tightly due to operational errors, the sealing performance of the furnace cover and the furnace body will be reduced, thereby reducing the sealing performance of the vacuum annealing furnace. Utility Model Content

[0004] In order to solve the deficiencies of the prior art, the purpose of the present application is to provide a vacuum annealing furnace with high sealing performance.

[0005] To achieve the above objectives, this application adopts the following technical solutions:

[0006] A vacuum annealing furnace, the vacuum annealing furnace comprises a furnace body, a furnace cover, a rotating lifting mechanism, a first connecting member and a second connecting member, the upper end of the furnace body is provided with a filling port; the furnace cover comprises an upper furnace cover and a lower furnace cover which are distributed in a vertical direction and are mutually clamped, the lower furnace cover is connected to the upper part of the furnace body and is arranged around the filling port, the upper furnace cover is at least partially located above the lower furnace cover and covers the filling port; the rotating lifting mechanism is respectively connected to the upper furnace cover and the lower furnace cover, the rotating lifting mechanism is used to control the movement of the upper furnace cover so that the upper furnace cover can cover the filling port; the first connecting member is arranged at the upper furnace cover The first connecting piece is arranged on the lower furnace cover and kept relatively fixed with the upper furnace cover. The second connecting piece is arranged on the lower furnace cover and kept relatively fixed with the lower furnace cover. The upper furnace cover includes a first fixed position and a second fixed position. The first connecting piece is driven by the rotary lifting mechanism to adjust the upper furnace cover between the first fixed position and the second fixed position. When the upper furnace cover is in the first fixed position, the second connecting piece limits the first connecting piece in the horizontal direction. When the upper furnace cover is in the first fixed position, the first connecting piece and the second connecting piece are separated.

[0007] Furthermore, an upper water channel is opened in the upper furnace cover, the upper water channel is arranged around the circumference of the upper furnace cover and is located above the filling port; a lower water channel is opened in the lower furnace cover, the lower water channel is arranged around the circumference of the lower furnace cover and around the circumference of the filling port.

[0008] Further, viewed in the vertical direction, the upper water channel is arranged around the lower water channel.

[0009] Furthermore, the rotating lifting mechanism includes an installation support plate, a rotating connecting plate and a rotating shaft. The installation support plate is connected to the lower furnace cover, the rotating shaft is fixedly connected to the installation support plate, the rotating connecting plate is sleeved on the rotating shaft and is rotatably connected to the rotating shaft, and the upper furnace cover is connected to the rotating connecting plate and rotates with the rotating connecting plate.

[0010] Furthermore, a limit plate is also installed on the mounting support plate. The limit plate extends in a vertical direction, and at least a part of the limit plate is located on the rotation path of the rotating connecting plate.

[0011] Furthermore, a notch is provided at the top of the limiting plate, and when the upper furnace cover is in the first fixed position, the upper furnace cover is engaged with the lower furnace cover, and when the upper furnace cover is in the second fixed position, the rotating connecting plate is at least partially engaged in the notch.

[0012] Furthermore, the rotary lifting mechanism also includes a lifting assembly, which is connected to the rotary connecting plate, and the upper furnace cover is connected to the rotary connecting plate through the lifting assembly.

[0013] Further, the lifting assembly includes a lifting plate, a lifting track and a lifting motor, the lifting plate is slidably connected to the lifting track, and the lifting motor drives the lifting plate to slide on the lifting track in a vertical direction;

[0014] The upper furnace cover is connected to the lifting plate, and the lifting track is fixedly connected to the rotating connecting plate on the side away from the lifting plate. The lifting motor drives the upper furnace cover to move in the vertical direction, and the lifting track drives the upper furnace cover and the lifting plate to rotate.

[0015] Furthermore, the first connecting member is in the form of a ring structure, the second connecting member extends in a vertical direction and forms a cylindrical structure, and the ring structure can be sleeved on the cylindrical structure.

[0016] Furthermore, the top end of the second connecting member is chamfered, and the diameter of the top end of the second connecting member is smaller than the inner diameter of the first connecting member.

[0017] The vacuum annealing furnace can be connected by the first connecting member and the second connecting member so that the upper furnace cover and the lower furnace cover are clamped and tightly fitted, which is beneficial to improve the sealing of the upper furnace cover and the lower furnace cover, thereby improving the sealing performance of the vacuum annealing furnace. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the overall structure of the vacuum annealing furnace provided in an embodiment of the present application.

[0019] Figure 2 A schematic diagram of the connection between the furnace cover and the rotary lifting mechanism provided in an embodiment of the present application.

[0020] Figure 3A full cross-sectional view of the furnace cover, the rotary lifting mechanism, the first connecting member and the second connecting member provided in an embodiment of the present application.

[0021] Figure 4 A top view of the furnace cover, the rotary lifting mechanism, the first connecting member and the second connecting member provided in an embodiment of the present application.

[0022] Figure 5 This is a schematic structural diagram from another angle of the furnace cover, rotating lifting mechanism, first connecting member and second connecting member provided in an embodiment of the present application. DETAILED DESCRIPTION

[0023] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the specific implementation manner of the present application will be clearly and completely described below in conjunction with the drawings in the implementation manner of the present application.

[0024] like Figure 1 A vacuum annealing furnace 100 is shown, which is a device for material surface treatment. The vacuum annealing furnace 100 performs heat treatment by creating a low pressure or oxygen-free environment. When the material is placed in a vacuum chamber, a negative pressure state can be achieved by extracting most or all of the gas, and the material is heated in a low pressure environment to eliminate internal stress and improve the mechanical properties of the material. Specifically, the working principle of the vacuum annealing furnace 100 is as follows: First, the material to be treated is placed in the vacuum annealing furnace 100, and the gas in the vacuum annealing furnace 100 is removed to ensure that a relatively vacuum environment is formed in the furnace. Subsequently, heat is supplied to the furnace cavity through a heater, so that the temperature of the material gradually increases, so that the material reaches the required annealing temperature. In addition, since the material is in an oxygen-free or low pressure environment, the material will not react with external gases, thereby ensuring the high purity and uniformity of the material. The material in this application mainly refers to silicon carbide wafers. The silicon carbide wafers treated by the vacuum annealing furnace 100 can reduce micro stress and eliminate tissue defects, which is conducive to improving the quality of silicon carbide wafers. In order to clearly describe the technical solution of the application, the following definitions are also provided: Figure 1 In the present application, the length direction of the vacuum annealing furnace 100 refers to the front-to-back direction, the width direction of the vacuum annealing furnace 100 refers to the left-to-right direction, and the vertical direction refers to the up-down direction, wherein the front-to-back direction and the left-to-right direction constitute a horizontal direction, and the horizontal direction refers to a direction parallel to the ground plane.

[0025] like Figure 1 and Figure 2As shown, as an implementation method, the vacuum annealing furnace 100 includes a furnace body 11, a furnace cover 12, and a rotating lifting mechanism 13. A filling port 111 is provided at the upper end of the furnace body 11. The furnace cover 12 includes an upper furnace cover 121 and a lower furnace cover 122 distributed in the vertical direction and mutually engaged. The lower furnace cover 122 is connected to the upper part of the furnace body 11 and is arranged around the filling port 111. The upper furnace cover 121 is at least partially located above the lower furnace cover 122 and covers the filling port 111. The rotating lifting mechanism 13 is respectively connected to the upper furnace cover 121 and the lower furnace cover 122. The rotating lifting mechanism 13 is used to control the movement of the upper furnace cover 121 so that the upper furnace cover 121 can cover the filling port 111. Specifically, the silicon carbide wafer can be placed in the furnace body 11 through the filling port 111, and the silicon carbide wafer can also be taken out of the furnace body 11 through the filling port 111. The furnace cover 12 is used to seal the filling port 111, and the rotating lifting mechanism 13 is used to control the connection or separation of the furnace cover 12 and the furnace body 11 to place or pick up the silicon carbide wafer. Among them, the rotating lifting mechanism 13 has the functions of lifting and rotating, so that the upper furnace cover 121 can move in the vertical direction or rotate in the horizontal direction, so as to facilitate the placement or picking up of the silicon carbide wafer, thereby facilitating the work efficiency of the vacuum annealing furnace 100.

[0026] In this embodiment, the vacuum annealing furnace 100 further includes a first connecting member 14 and a second connecting member 15. The first connecting member 14 is provided on the upper furnace cover 121 and is relatively fixed to the upper furnace cover 121. The rotary lifting mechanism 13 drives the upper furnace cover 121 and the first connecting member 14 to move synchronously. The second connecting member 15 is provided on the lower furnace cover 122 and is relatively fixed to the lower furnace cover 122. The upper furnace cover 121 includes a first fixed position and a second fixed position. The rotary lifting mechanism 13 acts on the upper furnace cover 121 and drives the upper furnace cover 121 to adjust between the first fixed position and the second fixed position. When the upper furnace cover 121 is in the first fixed position, the second connecting member 15 limits the first connecting member 14 in the horizontal direction. When the upper furnace cover 121 is in the first fixed position, the first connecting member 14 and the second connecting member 15 are separated. Specifically, the rotary lifting mechanism 13 adjusts the position of the first connecting member 14 to achieve the connection or separation of the first connecting member 14 and the second connecting member 15. When the first connecting member 14 is connected to the second connecting member 15, the second connecting member 15 limits the movement of the first connecting member 14 so that the upper furnace cover 121 is engaged with the lower furnace cover 122. More specifically, the vacuum annealing furnace 100 requires frequent filling and unloading, which results in the upper furnace cover 121 needing to be opened and closed multiple times. As the number of operations of the upper furnace cover 121 and the lower furnace cover 122 increases, the upper furnace cover 121 and the lower furnace cover 122 may have operational errors, resulting in the upper furnace cover 121 and the lower furnace cover 122 not being able to fit tightly. In this application, the first connecting member 14 and the second connecting member 15 cooperate with each other to make the upper furnace cover 121 and the lower furnace cover 122 fit tightly. Through the above arrangement, the sealing performance of the upper furnace cover 121 and the lower furnace cover 122 can be improved, thereby improving the sealing performance of the vacuum annealing furnace 100.

[0027] It should be noted that a sealing structure 123 is provided between the upper furnace cover 121 and the lower furnace cover 122. The sealing structure 123 can be sleeved on the upper furnace cover 121. The sealing structure 123 can prevent the vacuum annealing furnace 100 from reducing the quality of the silicon carbide wafer due to air leakage, and the first connecting member 14 and the second connecting member 15 can prevent the sealing structure 123 from being misaligned, which is beneficial to improving the sealing between the upper furnace cover 121 and the lower furnace cover 122, and further beneficial to improving the quality of the silicon carbide wafer.

[0028] like Figure 3As shown, exemplarily, the first connecting member 14 is in a ring structure, and the second connecting member 15 extends in the vertical direction and forms a cylindrical structure 151, and the ring structure can be sleeved on the cylindrical structure 151. Specifically, the first connecting member 14 is provided with an annular through hole 141, and the annular through hole 141 can be sleeved on the cylindrical structure 151, and the inner diameter of the annular through hole 141 is substantially equal to the outer diameter of the cylindrical structure 151. When the annular structure is sleeved on the cylindrical structure 151, the axis of the first connecting member 14 and the axis of the second connecting member 15 are substantially coincident. Through the above arrangement, the horizontal movement of the upper furnace cover 121 and the lower furnace cover 122 can be limited, thereby avoiding the installation misalignment of the upper furnace cover 121 and the lower furnace cover 122, and thus improving the assembly accuracy of the upper furnace cover 121 and the lower furnace cover 122.

[0029] Furthermore, the top of the second connector 15 is chamfered, and the top diameter of the second connector 15 is smaller than the inner diameter of the first connector 14. Specifically, chamfering the top of the second connector 15 allows the first connector 14 to be quickly mounted on the second connector 15, thereby avoiding a reduction in the assembly speed of the first connector 14 and the second connector 15 due to the excessively high transfer accuracy. Through the above arrangement, the difficulty of operating the first connector 14 and the second connector 15 can be reduced, thereby facilitating the improvement of the assembly efficiency of the first connector 14 and the second connector 15.

[0030] As an implementation method, an upper water channel 1211 is provided in the upper furnace cover 121, and the upper water channel 1211 is arranged around the circumference of the upper furnace cover 121 and is located above the filling port 111; a lower water channel 1221 is provided in the lower furnace cover 122, and the lower water channel 1221 is arranged around the circumference of the lower furnace cover 122 and around the circumference of the filling port 111, and both the upper water channel 1211 and the lower water channel 1221 are used to cool the furnace cover 12. Specifically, since the vacuum annealing furnace 100 generates a large amount of heat during operation, the temperature of the furnace cover 12 is too high. When the operator operates the furnace cover 12, it may be affected by the temperature of the furnace cover 12 and inconvenient to operate. Through the above-mentioned arrangement, the temperature of the furnace cover 12 can be reduced to facilitate the operation of the operator, thereby improving the operating experience of the vacuum annealing furnace 100, while avoiding burns to the operator due to operating errors, and further helping to improve the safety performance of the vacuum annealing furnace 100.

[0031] In this embodiment, observed along the vertical direction, the upper water channel 1211 is arranged around the lower water channel 1221. The above arrangement can make the upper water channel 1211 and the lower water channel 1221 basically spread throughout the interior of the furnace cover 12, thereby increasing the cooling area of ​​the furnace cover 12 and further improving the cooling effect of the furnace cover 12.

[0032] like Figure 3 and Figure 4 As shown, it should be noted that the upper furnace cover 121 is provided with an upper water inlet 1211a and an upper water outlet 1211b, and the upper water inlet 1211a and the upper water outlet 1211b are both connected to the upper waterway 1211. The lower furnace cover 122 is provided with a lower water inlet 1221a and a lower water outlet 1221b, and the lower water inlet 1221a and the lower water outlet 1221b are both connected to the lower waterway 1221. Through the above arrangement, the upper water inlet 1211a, the upper water outlet 1211b, the lower water inlet 1221a and the lower water outlet 1221b are compact in structure, which is conducive to improving the compactness of the structure of the furnace cover 12, and is convenient for the arrangement of water pipes to avoid the water pipes being distributed divergently and occupying a large operating space, thereby also helping to improve the space utilization rate of the vacuum annealing furnace 100.

[0033] like Figure 2 As shown, as an implementation method, the rotary lifting mechanism 13 includes a mounting support plate 131, a rotary connecting plate 132 and a rotary shaft 133. The mounting support plate 131 is connected to the lower furnace cover 122, the rotary shaft 133 is fixedly connected to the mounting support plate 131, the rotary connecting plate 132 is sleeved on the rotary shaft 133 and is rotatably connected to the rotary shaft 133, and the upper furnace cover 121 is connected to the rotary connecting plate 132 and rotates with the rotary connecting plate 132. Specifically, the mounting support plate 131, the rotary connecting plate 132 and the rotary shaft 133 cooperate with each other to realize the rotation function of the rotary lifting mechanism 13. In this application, the upper furnace cover 121 is connected to the rotary connecting plate 132 so that the upper furnace cover 121 can rotate with the rotary connecting plate 132, thereby facilitating the filling and removal of silicon carbide wafers, thereby improving the functional diversity of the vacuum annealing furnace 100.

[0034] In this embodiment, a limit plate 134 is also installed on the mounting support plate 131. The limit plate 134 extends in the vertical direction. The limit plate 134 is at least partially located on the rotation path of the rotating connecting plate 132. The limit plate 134 is used to limit the rotation of the upper furnace cover 121 and the rotating connecting plate 132. Specifically, the rotation path of the rotating connecting plate 132 refers to the path of the circumferential rotation of the rotating connecting plate 132 around the rotating shaft 133. The limit plate 134 limits the rotation of the upper furnace cover 121 by limiting the rotation of the rotating connecting plate 132. Since the upper furnace cover 121 can rotate circumferentially with the rotating connecting plate 132, the limit plate 134 can prevent the upper furnace cover 121 from rotating too much due to the rotation angle being too large, thereby preventing the upper furnace cover 121 from operating for too long. Through the above arrangement, the operation time of the upper furnace cover 121 can be shortened, thereby facilitating the improvement of the operating speed of the vacuum annealing furnace 100. It should be noted that, since the upper furnace cover 121 has a relatively high temperature, the limiting plate 134 can also prevent the upper furnace cover 121 from rotating and accidentally injuring operators, thereby further improving the safety performance of the vacuum annealing furnace 100 .

[0035] Exemplarily, a notch 1341 is provided at the top of the limiting plate 134. When the upper furnace cover 121 is in the first fixed position, the upper furnace cover 121 is engaged with the lower furnace cover 122. When the upper furnace cover 121 is in the second fixed position, the rotating connecting plate 132 is at least partially engaged in the notch 1341. Specifically, when viewed in the vertical direction, the upper furnace cover 121 is limited between the first fixed position and the second fixed position, so that the operator can avoid the space between the first fixed position and the second fixed position, thereby avoiding contact with the upper furnace cover 121, thereby improving the safety of the operator. In addition, the rotating connecting plate 132 is stably engaged in the notch 1341, which is also conducive to improving the connection stability between the rotating connecting plate 132 and the limiting plate 134, thereby improving the structural stability of the vacuum annealing furnace 100.

[0036] like Figure 4 and Figure 5 As shown, as an implementation method, the rotating lifting mechanism 13 also includes a lifting component 135, which is connected to the rotating connecting plate 132. The upper furnace cover 121 is connected to the rotating connecting plate 132 through the lifting component 135, so that the upper furnace cover 121 can move in the vertical direction with the lifting component 135, thereby realizing the connection and separation of the upper furnace cover 121 and the lower furnace cover 122.

[0037] Specifically, the lifting assembly 135 includes a lifting plate 1351, a lifting rail 1352 and a lifting motor 1353. The lifting plate 1351 is slidably connected to the lifting rail 1352. The lifting plate 1351 is transmission-connected to the lifting motor 1353. The lifting motor 1353 is located above the lifting rail 1352 and is fixedly connected to the lifting rail 1352. The lifting motor 1353 drives the lifting plate 1351 to slide on the lifting rail 1352 in a vertical direction.

[0038] Among them, the upper furnace cover 121 is connected to the lifting plate 1351, the lifting track 1352 is fixedly connected to the rotating connecting plate 132 on the side away from the lifting plate 1351, the lifting motor 1353 drives the upper furnace cover 121 to move in the vertical direction, and the lifting track 1352 drives the upper furnace cover 121 and the lifting plate 1351 to rotate. Specifically, when the vacuum annealing furnace 100 needs to be filled or taken out, the lifting motor 1353 starts to work and drives the lifting plate 1351 and the upper furnace cover 121 to move upward in the vertical direction, so that the upper furnace cover 121 is separated from the lower furnace cover 122, thereby realizing the filling and taking out of the vacuum annealing furnace 100. When the vacuum annealing furnace 100 is filled or removed, the lifting motor 1353 drives the upper furnace cover 121 and the lifting plate 1351 to move downward in the vertical direction, so that the upper furnace cover 121 is engaged with the lower furnace cover 122, so that the upper furnace cover 121 can seal the filling port 111. More specifically, in order to increase the speed of filling and removing materials in the vacuum annealing furnace 100, the lifting track 1352 can drive the lifting plate 1351 and the upper furnace cover 121 to rotate, so that the lifting plate 1351 and the upper furnace cover 121 leave from above the filling port 111, so that the filling port 111 is completely exposed, which is conducive to increasing the speed of filling and removing materials in the vacuum annealing furnace 100, and further improving the rationality of the layout of the vacuum annealing furnace 100.

[0039] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the claims attached to this application.

Claims

1. A vacuum annealing furnace, comprising: A furnace body, wherein a filling port is provided at the upper end of the furnace body; A furnace cover, the furnace cover comprising an upper furnace cover and a lower furnace cover which are distributed in the vertical direction and are mutually clamped, the lower furnace cover is connected above the furnace body and is arranged around the filling port, and the upper furnace cover is at least partially located above the lower furnace cover and covers the filling port; A rotary lifting mechanism, wherein the rotary lifting mechanism is connected to the upper furnace cover and the lower furnace cover respectively, and the rotary lifting mechanism is used to control the movement of the upper furnace cover so that the upper furnace cover can cover the filling port; It is characterized in that The vacuum annealing furnace also includes: a first connecting member, wherein the first connecting member is disposed on the upper furnace cover and is relatively fixed to the upper furnace cover, and the rotating lifting mechanism drives the upper furnace cover and the first connecting member to move synchronously; The second connecting member is arranged on the lower furnace cover and remains relatively fixed with the lower furnace cover. The upper furnace cover includes a first fixed position and a second fixed position. The rotating lifting mechanism acts on the upper furnace cover and drives the upper furnace cover to adjust between the first fixed position and the second fixed position. When the upper furnace cover is in the first fixed position, the second connecting member limits the first connecting member in the horizontal direction. When the upper furnace cover is in the first fixed position, the first connecting member and the second connecting member are separated.

2. The vacuum annealing furnace according to claim 1, characterized in that: An upper water channel is provided in the upper furnace cover, the upper water channel is arranged around the circumference of the upper furnace cover and is located above the filling port; a lower water channel is provided in the lower furnace cover, the lower water channel is arranged around the circumference of the lower furnace cover and around the circumference of the filling port.

3. The vacuum annealing furnace according to claim 2, characterized in that: Viewed along the vertical direction, the upper water channel is arranged around the lower water channel.

4. The vacuum annealing furnace according to claim 1, characterized in that: The rotating lifting mechanism includes a mounting support plate, a rotating connecting plate and a rotating shaft, the mounting support plate is connected to the lower furnace cover, the rotating shaft is fixedly connected to the mounting support plate, the rotating connecting plate is sleeved on the rotating shaft and is rotatably connected to the rotating shaft, and the upper furnace cover is connected to the rotating connecting plate and rotates with the rotating connecting plate.

5. The vacuum annealing furnace according to claim 4, characterized in that: A limit plate is also mounted on the mounting support plate. The limit plate extends along the vertical direction. The limit plate is at least partially located on the rotation path of the rotating connecting plate.

6. The vacuum annealing furnace according to claim 5, characterized in that: A notch is provided at the top of the limiting plate. When the upper furnace cover is in the first fixed position, the upper furnace cover is engaged with the lower furnace cover. When the upper furnace cover is in the second fixed position, the rotating connecting plate is at least partially engaged in the notch.

7. The vacuum annealing furnace according to claim 4, characterized in that: The rotary lifting mechanism further comprises a lifting assembly, wherein the lifting assembly is connected to the rotary connecting plate, and the upper furnace cover is connected to the rotary connecting plate via the lifting assembly.

8. The vacuum annealing furnace according to claim 7, characterized in that: The lifting assembly comprises a lifting plate, a lifting track and a lifting motor, wherein the lifting plate is slidably connected to the lifting track, and the lifting motor drives the lifting plate to slide on the lifting track along the vertical direction; The upper furnace cover is connected to the lifting plate, the lifting track is fixedly connected to the rotating connecting plate on one side away from the lifting plate, the lifting motor drives the upper furnace cover to move along the vertical direction, and the lifting track drives the upper furnace cover and the lifting plate to rotate.

9. The vacuum annealing furnace according to claim 1, characterized in that: The first connecting member is in the form of a ring structure, the second connecting member extends along the vertical direction and forms a cylindrical structure, and the ring structure can be sleeved on the cylindrical structure.

10. The vacuum annealing furnace according to claim 9, characterized in that: The top end of the second connecting member is chamfered, and the top end diameter of the second connecting member is smaller than the inner diameter of the first connecting member.

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