Winding type vacuum evaporator

Abstract

The utility model relates to the technical field of evaporators, and discloses a winding type vacuum evaporator which comprises a machine box, an unwinding cavity, a winding cavity, a first evaporation cavity, a second evaporation cavity and a pre-cooling cavity are arranged in the machine box, an unwinding roller for winding a base material is arranged in the unwinding cavity, a winding roller is arranged in the winding cavity, and the first evaporation cavity and the second evaporation cavity are arranged in the pre-cooling cavity. The first evaporation cavity and the second evaporation cavity are each internally provided with an evaporation mechanism, the pre-cooling cavity is located between the first evaporation cavity and the second evaporation cavity, and a second water cooling plate is arranged in the pre-cooling cavity. According to the utility model, the first evaporation cavity and the second evaporation cavity are arranged and are matched with the evaporation mechanism and the guide roller, so that the double-sided coating operation of the base material can be realized in one period, and meanwhile, the pre-cooling cavity is additionally arranged between the first evaporation cavity and the second evaporation cavity, and after the surface of the base material is coated in the first evaporation cavity, the double-sided coating operation of the base material can be realized. And the pre-cooling cavity cools and solidifies the coating which is just coated, so that the coating is prevented from being adhered to the guide roller when being in contact with the guide roller, and the coating is prevented from being damaged.

Description

Technical Field

[0001] The utility model relates to the technical field of vapor deposition machines, in particular to a winding type vacuum vapor deposition machine. Background Art

[0002] Vacuum winding coating technology is a technology that prepares one or more layers of functional thin films on the surface of a rolled substrate in a vacuum chamber through magnetron sputtering technology and other methods. It can be applied to electromagnetic shielding films, flexible circuit boards, optical films, flexible optoelectronic products and many other fields.

[0003] Announcement No. CN218345540U discloses a double-sided coating winding device and a winding coating equipment based on a flexible substrate. A winding device is provided in a vacuum chamber of the device, and the winding device includes: a unwinding mechanism, a first tension zone, a first cooling coating roller, a second tension zone, a second cooling coating roller, a third tension zone and a winding mechanism. The substrate released by the unwinding mechanism passes through the first tension zone, the first cooling coating roller, the second tension zone, the second cooling coating roller and the third tension zone in sequence, and is then wound up by the winding mechanism; the first tension zone, the second tension zone and the third tension zone each include at least one tension measuring roller, at least one flattening roller and a plurality of guide rollers, which can realize double-sided continuous coating within one working cycle, can improve production efficiency, and can also solve the problem of maintaining tension stability during the coating process, thereby improving the coating quality.

[0004] However, in the above scheme, the third guide roller and the fifth guide roller are respectively in contact with the surface of the newly coated substrate. Since the coating has just been coated, if it is not cured or stable, it will adhere to the surface of the guide roller when in contact with the guide roller, causing damage to the coating.

[0005] Therefore, we propose a roll-to-roll vacuum evaporation machine to solve the above problems. Utility Model Content

[0006] 1. Technical issues to be resolved

[0007] In view of the deficiencies of the prior art in the above background technology, the purpose of the present invention is to provide a roll-to-roll vacuum evaporation machine to solve the problems raised in the above background technology.

[0008] (II) Technical solution

[0009] In order to achieve the above objectives, the present invention is implemented through the following technical solutions:

[0010] A winding type vacuum evaporation machine comprises a chassis, wherein an unwinding chamber, a winding chamber, a first evaporation chamber, a second evaporation chamber and a precooling chamber are arranged in the chassis, an unwinding roller for winding a substrate is arranged in the unwinding chamber, a winding roller is arranged in the winding chamber, evaporation mechanisms are arranged in the first evaporation chamber and the second evaporation chamber, the precooling chamber is located between the first evaporation chamber and the second evaporation chamber, a second water-cooling plate is arranged in the precooling chamber, the second water-cooling plate is located below the substrate and is spaced from the substrate, and the substrate passes through the unwinding chamber, the first evaporation chamber, the precooling chamber, the second evaporation chamber and the winding chamber in sequence.

[0011] Furthermore, the unwinding chamber, the winding chamber, the first evaporation chamber and the second evaporation chamber are stacked, and the first evaporation chamber and the second evaporation chamber are respectively located below the unwinding chamber and the winding chamber.

[0012] Furthermore, a guide roller is provided in the second evaporation chamber, and the guide roller is located on the right side of the evaporation mechanism in the second evaporation chamber.

[0013] Furthermore, the evaporation mechanism includes two evaporation rollers arranged vertically and an evaporation source arranged parallel to the axis connecting the two evaporation rollers.

[0014] Preferably, a first water-cooling plate in contact with the substrate is provided between the two evaporation rollers.

[0015] Preferably, a tensioning roller is provided in the unwinding chamber, and flattening rollers are provided in both the unwinding chamber and the unwinding roller.

[0016] Preferably, a pressure roller in contact with the winding roller is swingably installed in the winding chamber.

[0017] (III) Beneficial effects

[0018] Compared with the prior art, the beneficial effects of the utility model are:

[0019] By setting the first evaporation chamber and the second evaporation chamber, cooperating with the evaporation mechanism and the guide roller, the substrate can be double-sided coated in one cycle. At the same time, a pre-cooling chamber is added between the first evaporation chamber and the second evaporation chamber. After the substrate surface is coated in the first evaporation chamber, the pre-cooling chamber cools and solidifies the coating just coated to prevent the coating from adhering to the guide roller when contacting the guide roller, thereby preventing the coating from being damaged. At the same time, the evaporation mechanism sets parallel evaporation sources and evaporation rollers. The two evaporation rollers make the surface of the substrate smooth. Compared with traditional curved surface evaporation, the evaporation coating is more uniform. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic structural diagram of the winding type vacuum evaporation machine of the utility model.

[0021] In the figure: an unwinding chamber 11, a winding chamber 12, a first evaporation chamber 13, a second evaporation chamber 14, a pre-cooling chamber 15, an unwinding roller 2, a winding roller 3, an evaporation mechanism 4, an evaporation roller 41, an evaporation source 42, a first water-cooled plate 43, a first water-cooled plate 43, a second water-cooled plate 5, a guide roller 6, a tensioning roller 7, a flattening roller 8, and a pressure roller 9. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the utility model will be described clearly and completely below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only a part of the embodiments of the utility model, rather than all of the embodiments. It should be noted that the words "front", "back", "left", "right", "up" and "down" used in the following description refer to the directions in the drawings, and the words "bottom surface" and "top surface", "inside" and "outside" refer to the directions toward or away from the geometric center of a specific component, respectively. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.

[0023] See also Figure 1 As shown, the utility model provides a winding type vacuum evaporation machine, including a chassis, which is divided into a stacked unwinding chamber 11, a winding chamber 12, a first evaporation chamber 13 and a second evaporation chamber 14, the first evaporation chamber 13 and the second evaporation chamber 14 are respectively located below the unwinding chamber 11 and the winding chamber 12, the winding chamber 12 is located inside the unwinding chamber 11, a unwinding roller 2 for winding a substrate is arranged in the unwinding chamber 11, a winding roller 3 is arranged in the winding chamber 12, evaporation mechanisms 4 are arranged in the first evaporation chamber 13 and the second evaporation chamber 14, a precooling chamber 15 is located between the first evaporation chamber 13 and the second evaporation chamber 14, a second water-cooling plate 5 is arranged in the precooling chamber 15, and the second water-cooling plate 5 is located below the substrate and is spaced apart from the substrate.

[0024] The evaporation mechanism 4 includes two vertically arranged evaporation rollers 41, an evaporation source 42 arranged parallel to the axis connecting the two evaporation rollers 41, and a first water-cooled plate 43. The first water-cooled plate 43 is located between the evaporation rollers 41 and contacts the surface of the substrate away from the evaporation source 42.

[0025] When the substrate passes through the evaporation mechanism inside the first evaporation chamber 13, one side of the substrate is subjected to evaporation coating. Then, when the substrate passes through the pre-cooling chamber 15, the second water-cooling plate 5 in the pre-cooling chamber 1 performs non-contact cooling on the side of the substrate that has just been coated, thereby accelerating its solidification efficiency. Then, after being guided by the guide roller 6, the evaporation mechanism in the second evaporation chamber 14 performs evaporation coating on the other side of the substrate. Since the coating is accelerated to solidify by the second water-cooling plate 5, it is prevented from sticking to the guide roller 6.

[0026] Since the evaporation roller 41 and the evaporation source 42 of the evaporation mechanism 4 are parallel, the evaporation roller 41 makes the surface of the substrate flat, making the coating on the surface of the substrate more uniform during evaporation.

[0027] As a preferred technical solution of the utility model: a tensioning roller 7 is arranged in the unwinding chamber 11, and a flattening roller 8 is arranged in the unwinding chamber 11 and the unwinding roller 2. The setting of the tensioning roller 7 can adjust the tension of the substrate surface, and the flattening roller 8 can prevent wrinkles from appearing on the substrate surface.

[0028] As a preferred technical solution of the utility model: a pressure roller 9 is arranged in the winding chamber 12, and the surface of the pressure roller 9 rolls and fits on the surface of the winding roller 3. A support rod is rotatably installed on the pressure roller 9, and one end of the support rod away from the pressure roller 9 is rotatably connected to the inner wall of the winding chamber 12, that is, the pressure roller 9 can swing in the winding chamber 12. When the winding roller 3 rolls up the substrate, the pressure roller 9 is pressed on the surface of the substrate under the action of gravity, so that the winding of the winding roller 3 is more neat.

[0029] The electrical components mentioned in this article can be electrically connected to an external controller, and the controller can be electrically connected to an external 220V mains power supply, and the controller can be a conventional known device such as a computer that performs control.

[0030] Although the present invention has been described in detail with reference to the aforementioned embodiments, it should be noted that, in the present invention, unless otherwise clearly specified and limited, the terms such as “set”, “install”, “connected”, “connected”, “fixed”, etc. should be understood in a broad sense. For example, it can be a fixed connection or a detachable connection; it can also be indirectly connected through an intermediate medium.

[0031] In the description of the present invention, relational terms such as first and second, etc. are merely used to distinguish one entity or operation from another entity or operation, but do not necessarily require or imply any actual relationship or order between these entities or operations.

[0032] For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances; for technicians in this field, they can still modify the technical solutions recorded in the aforementioned embodiments, or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present utility model should be included in the protection scope of the present utility model.

Claims

1. A roll-to-roll vacuum evaporation machine, comprising a chassis, characterized in that: The chassis is provided with an unwinding chamber (11), a winding chamber (12), a first evaporation chamber (13), a second evaporation chamber (14) and a precooling chamber (15); the unwinding chamber (11) is provided with an unwinding roller (2) for winding a substrate; the winding chamber (12) is provided with a winding roller (3); both the first evaporation chamber (13) and the second evaporation chamber (14) are provided with an evaporation mechanism (4); the precooling chamber (15) is located between the first evaporation chamber (13) and the second evaporation chamber (14); the precooling chamber (15) is provided with a second water-cooling plate (5); the second water-cooling plate (5) is located below the substrate and is spaced from the substrate; the substrate passes through the unwinding chamber (11), the first evaporation chamber (13), the precooling chamber (15), the second evaporation chamber (14) and the winding chamber (12) in sequence.

2. A roll-to-roll vacuum evaporation machine according to claim 1, characterized in that: The unwinding chamber (11), the winding chamber (12), the first evaporation chamber (13) and the second evaporation chamber (14) are stacked, and the first evaporation chamber (13) and the second evaporation chamber (14) are respectively located below the unwinding chamber (11) and the winding chamber (12).

3. A roll-to-roll vacuum evaporation machine according to claim 2, characterized in that: A guide roller (6) is provided in the second evaporation chamber (14), and the guide roller (6) is located on the right side of the evaporation mechanism (4) in the second evaporation chamber (14).

4. A roll-to-roll vacuum evaporation machine according to claim 3, characterized in that: The evaporation mechanism (4) comprises two evaporation rollers (41) arranged vertically and an evaporation source (42) arranged parallel to the axis connecting the two evaporation rollers (41).

5. A roll-to-roll vacuum evaporation machine according to claim 4, characterized in that: A first water-cooling plate (43) in contact with the substrate is arranged between the two evaporation rollers (41).

6. A roll-to-roll vacuum evaporation machine according to claim 1, characterized in that: A tensioning roller (7) is arranged in the unwinding chamber (11), and a flattening roller (8) is arranged in both the unwinding chamber (11) and the unwinding roller (2).

7. The roll-to-roll vacuum evaporation machine according to claim 1, characterized in that: A pressure roller (9) that fits closely to the winding roller (3) is swingably mounted in the winding chamber (12).

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