Heater and single crystal furnace

Abstract

The embodiment of the utility model provides a heater and a single crystal furnace. The heater comprises a foot plate and an annular heater body. Wherein the heater body is provided with a plurality of first open seams, the first open seams extend downwards from the top of the heater body, and the first open seams are sequentially arranged in the circumferential direction of the heater body at intervals; the heater body is further provided with a plurality of second open seams, the second open seams extend upwards from the bottom of the heater body to the position between every two adjacent first open seams, and the second open seams are sequentially arranged in the circumferential direction of the heater body at intervals. The height of the second slot is greater than that of the first slot; the foot plate is electrically connected to the heater body. The heater can heat the upper portion and the lower portion of the crucible at the same time, stable crystal pulling is achieved, the oxygen content of a crystal bar can be reduced, and the heater is simple in structure and low in energy consumption.

Description

Technical Field

[0001] The present application belongs to the field of photovoltaic processing technology, and specifically relates to a heater and a single crystal furnace. Background Art

[0002] In recent years, photovoltaic power generation, as a green energy and a major energy source for sustainable human development, has been increasingly valued and vigorously developed by countries around the world. Silicon wafers, as a basic material for photovoltaic power generation, have a wide market demand. Silicon wafers are usually obtained by slicing silicon rods. Therefore, the quality of silicon rods greatly affects the quality of silicon wafers. In the process of making silicon wafers into solar cells, silicon wafers usually need to be treated at high temperatures. The native oxygen defects in the silicon wafers will precipitate and grow during the high-temperature treatment of the solar cells, causing quality defects such as concentric circles in the solar cells, affecting the photoelectric conversion efficiency of the solar cells. In order to reduce the native oxygen defects in silicon wafers, it is usually necessary to reduce the oxygen content of silicon rods.

[0003] In the prior art, in order to reduce the oxygen content of the silicon rod, a plurality of vertically arranged heaters are usually used to heat the melt in the crucible. Generally, the heating power of the heater located at the top is relatively large, so that the temperature of the solid-liquid interface of the melt can meet the requirements of crystal pulling, and the heating power of the heater located at the bottom is relatively small, so that the temperature of the bottom of the melt in the crucible is not too cold to increase the turbulence of the melt, so as to achieve stable crystal pulling, and at the same time, it can avoid overheating of the bottom of the melt to increase the release of oxygen-containing substances in the melt, thereby reducing the oxygen content of the silicon rod.

[0004] However, the use of multiple vertically placed heaters requires the installation of multiple power cabinets and multiple electrodes inside the single crystal furnace, which not only complicates the structure of the heater and increases the structural cost of the single crystal furnace, but also adds electrodes in the single crystal furnace to form new leakage hot spots, increasing heating energy consumption. Utility Model Content

[0005] The present application aims to provide a heater and a single crystal furnace to solve the problems of complex structure and high energy consumption of existing heaters.

[0006] In order to solve the above technical problems, this application is implemented as follows:

[0007] In a first aspect, the present application discloses a heater, comprising: a foot plate and an annular heater body; wherein:

[0008] The heater body is provided with a plurality of first slits, the first slits extending downward from the top of the heater body, and the plurality of first slits are sequentially spaced along the circumference of the heater body;

[0009] The heater body is also provided with a plurality of second slits, the second slits extending upward from the bottom of the heater body to between two adjacent first slits, and the plurality of second slits are sequentially spaced along the circumference of the heater body;

[0010] The height of the second slit is greater than the height of the first slit;

[0011] The foot plate is electrically connected to the heater body.

[0012] Optionally, the height of the first slit is a first height, the height of the second slit is a second height, and the ratio of the second height to the first height is greater than or equal to 2:1.

[0013] Optionally, a distance h2 between the top of the second slit and the top of the heater body is in the range of 20-100 mm.

[0014] Optionally, the area from the top of the first slit to a preset distance from the bottom of the first slit is the heating area, and the area on the heater body other than the heating area is the heat transfer area, and the preset distance is 20-100 mm;

[0015] In the heat generating area, a heat generating portion is formed between two adjacent first slits, and in the heat transferring area, a heat transferring portion is formed between two adjacent second slits;

[0016] The heat generating portion and the heat transfer portion are an integrally formed structure, or the heat generating portion and the heat transfer portion are separate structures.

[0017] Optionally, the number of the heat transfer parts is less than the number of the heat generating parts.

[0018] Optionally, the heat transfer parts are evenly arranged along the circumference of the heater body, or the heat transfer parts are symmetrically arranged relative to the center of the heater body.

[0019] Optionally, the heater body is provided with a gap between the heating area and the heat transfer area.

[0020] Optionally, there are multiple notches, and the multiple notches are arranged at intervals along the circumference of the heater body.

[0021] Optionally, the notch is an annular notch extending along the circumference of the heater body.

[0022] Optionally, the foot plate and the heater body are an integrally formed structure, or the foot plate and the heater body are a split structure.

[0023] And / or, the heater body is an integrally formed structure or a split structure.

[0024] In a second aspect, the present application further discloses a single crystal furnace, which comprises: a furnace body, a crucible and a heater as described in any one of the above items; wherein:

[0025] The crucible and the heater are both arranged in the furnace body;

[0026] The heater is sleeved outside the crucible.

[0027] Optionally, a height of a heater body of the heater is smaller than a height of the crucible.

[0028] In the embodiment of the present application, due to the partitioning effect of the first slit and the second slit, after the foot plate passes current to the heater body, the current needs to bypass the first slit and the second slit, and the current flows through a longer path in the upper part of the heater body, with a larger resistance, and therefore, generates a larger amount of heat. Correspondingly, almost no current flows through the lower part of the heater body, and the heat generated is extremely small, and only the heat of the upper part of the heater can be conducted. In this way, when the heater is sleeved outside the crucible, a high-temperature zone can be formed in the upper part of the crucible, so that the temperature of the solid-liquid interface of the melt in the crucible can meet the requirements of crystal pulling, and the temperature of the bottom of the melt in the crucible can be prevented from being overcooled or overheated, so as to achieve stable crystal pulling and reduce the oxygen content of the crystal rod. That is, the heater described in the embodiment of the present application can heat the upper and lower parts of the crucible at the same time, achieve stable crystal pulling and reduce the oxygen content of the crystal rod, and has a simple structure and low energy consumption.

[0029] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0031] Figure 1 is a structural schematic diagram of a heater described in an embodiment of the present application;

[0032] Figure 2 yes Figure 1 A schematic diagram of the structure of the heater from another angle shown;

[0033] Figure 3 is a schematic structural diagram of another heater described in an embodiment of the present application;

[0034] Figure 4 yes Figure 3 A schematic diagram of the structure of the heater from another angle shown;

[0035] Figure 5 is a structural schematic diagram of another heater described in an embodiment of the present application;

[0036] Figure 6 yes Figure 5 A schematic diagram of the structure of the heater from another angle shown;

[0037] Figure 7 is a structural schematic diagram of another heater described in an embodiment of the present application;

[0038] Figure 8 yes Figure 7 A schematic diagram of the structure of the heater from another angle shown;

[0039] Fig. 9 is a structural schematic diagram of a heater described in an embodiment of the present application;

[0040] Fig.10 It is a structural schematic diagram of a heater described in an embodiment of the present application.

[0041] Figure numerals: 10 - foot plate, 11 - heater body, 111 - heating area, 1111 - heating portion, 1112 - first slit, 112 - heat transfer area, 1121 - heat transfer portion, 1122 - second slit, 113 - notch, 114 - first mounting portion, 115 - second mounting portion. DETAILED DESCRIPTION

[0042] The embodiments of the utility model will be described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the utility model, and cannot be understood as limiting the utility model. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.

[0043] The term "first" or "second" in the specification and claims of this application may include one or more of the features explicitly or implicitly. In the description of this utility model, unless otherwise specified, "multiple" means two or more. In addition, "and / or" in the specification and claims means at least one of the connected objects, and the character " / " generally means that the objects connected before and after are in an "or" relationship.

[0044] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0045] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0046] The embodiment of the present application provides a heater, which can be arranged in a single crystal furnace. Specifically, the heater can be arranged around a crucible in the single crystal furnace to heat the silicon material in the crucible.

[0047] Reference Figure 1 , showing a schematic diagram of the structure of a heater according to an embodiment of the present application, referring to Figure 2 , showing Figure 1 The schematic diagram of the heater structure from another angle is shown in FIG. Figure 1 and Figure 2 As shown, the heater may specifically include: a foot plate 10 and an annular heater body 11; wherein, a plurality of first slits 1112 are provided on the heater body 11, the first slits 1112 extend downward from the top of the heater body 11, and the plurality of first slits 1112 are arranged in sequence along the circumference of the heater body 11; a plurality of second slits 1122 are also provided on the heater body 11, the second slits 1122 extend upward from the bottom of the heater body 11 to between two adjacent first slits 1112, and the plurality of second slits 1122 are arranged in sequence along the circumference of the heater body 11; the height of the second slits 1122 is greater than the height of the first slits 1112; the foot plate 10 is electrically connected to the heater body 11.

[0048] In the embodiment of the present application, since the first slit 1112 on the heater body 11 extends downward from the top, and the second slit 1122 extends upward from the bottom to between two adjacent first slits 1112, and the height of the second slit 1122 is greater than the height of the first slit 1112, the first slit 1112 and the second slit 1122 can be staggered in the upper part of the heater body 11, while the lower part of the heater body 11 has only the second slit 1122. Due to the isolation effect of the first slit 1112 and the second slit 1122, after the foot plate 10 passes current into the heater body 11, the current needs to bypass the first slit 1112 and the second slit 1122, and the path of the current flowing through the upper part of the heater body 11 is longer and the resistance is larger, so the heat generation is also larger. Correspondingly, there is almost no current flowing through the lower part of the heater body 11, and the heat generation is extremely small, and only the heat of the upper part of the heater can be conducted.

[0049] In a specific application, the heater body 11 can be sleeved outside the crucible, the upper part of the heater body 11 corresponds to the upper part of the crucible, and the lower part of the heater body 11 can correspond to the lower part of the crucible. Since the upper part of the heater body 11 generates more heat, a large amount of heat can be radiated to the upper part of the crucible, forming a high temperature zone in the upper part of the crucible, so that the temperature of the solid-liquid interface of the melt in the crucible can meet the requirements of crystal pulling. Since the lower part of the heater body 11 only conducts heat, the heat that can be radiated to the lower part of the crucible is correspondingly less. Therefore, the heat radiated from the lower part of the heater body 11 can control the temperature of the bottom of the melt in the crucible within a suitable range, so that the temperature of the bottom of the melt will not be too cold to aggravate the turbulence of the melt, and stable crystal pulling can be achieved. At the same time, it can also avoid overheating of the bottom of the melt to aggravate the release of oxygen-containing substances in the melt, and reduce the oxygen content of the silicon rod. That is, the heater described in the embodiment of the present application can heat the upper and lower parts of the crucible at the same time, achieve stable crystal pulling and reduce the oxygen content of the crystal rod, and has a simple structure and low energy consumption.

[0050] In specific applications, the embodiment of the present application can well control the melt temperature in the crucible with only one heater, achieve stable crystal pulling and reduce the oxygen content of the crystal rod. Compared with the traditional arrangement of multiple heaters, not only is the structure simpler and the energy consumption lower, but the height of the heater can be significantly reduced, which is conducive to the layout of the heater in the single crystal furnace.

[0051] like Figure 1 and Figure 2As shown, there can be two foot plates 10, which can be used not only to support the heater body 11, but also to energize the heater body 11. Specifically, one foot plate 10 can be used to realize current input, and the other foot plate 10 can be used to realize current output, so as to form a current loop on the heater body 11 and realize heating of the heater body 11.

[0052] like Figure 2 As shown, after the current is passed through the left foot plate 10, the current can be as follows Figure 2 The direction indicated by the middle arrow passes through the upper part of the heater body 11 in sequence. Due to the isolation effect of the first slit 1112 and the second slit 1122, the current needs to bypass the first slit 1112 and the second slit 1122 to be output from the right foot plate 10. The path through which the current flows in the upper part of the heater body 11 is longer and the resistance is larger, so the heat generated is also larger. For the lower part of the heater body 11, due to the isolation effect of the second slit 1122, the current basically does not flow through the lower part of the heater body 11. Therefore, the lower part of the heater body 11 can only conduct the heat generated by the upper part of the heater body 11.

[0053] like Figure 1 As shown, the height of the first slit 1112 is the first height L1, the height of the second slit 1122 is the second height L2, and the ratio of the second height L2 to the first height L1 is greater than or equal to 2:1, so that the height of the lower part of the heater body 11 for heat transfer can be greater than or equal to the height of the upper part for heat generation. In practical applications, the greater the ratio of the second height L2 to the first height L1, the greater the difference between the height of the lower part of the heater for heat generation and the height of the upper part of the heater body for heat generation, so as to avoid the heater heating the bottom of the melt in the crucible as much as possible.

[0054] For example, the ratio of the second height L2 to the first height L1 may be 2:1, 3:1, 5:2, 7:3, etc. The embodiment of the present application does not specifically limit the ratio of the second height L2 to the first height L1.

[0055] like Figure 1 As shown, the distance h2 between the top of the second slit 1122 and the top of the heater body 11 is 20-100 mm, so that the heater body 11 can have a high structural strength and meet the heating requirements. In practical applications, when the second distance h2 is less than 20 mm, the strength of the heater body 11 may be low and the structure may be unstable. When the second distance h2 is greater than 100 mm, the current flow path may be too short and the resistance may be too small, making it difficult to meet the heating requirements.

[0056] For example, the second distance h2 may include but is not limited to 20 mm, 40 mm, 56 mm, 93 mm or 100 mm, etc. The embodiment of the present application does not specifically limit the value of the second distance h2.

[0057] like Figure 1 As shown, the area from the top of the first slit 1112 to the preset distance h1 from the bottom of the first slit 1112 is the heating zone 111, and the area on the heater body 11 except the heating zone 111 is the heat transfer zone 112, and the preset distance h1 is 20-100 mm; in the heating zone 111, a heating portion 1111 is formed between two adjacent first slits 1112, and in the heat transfer zone 112, a heat transfer portion 1121 is formed between two adjacent second slits 1122.

[0058] In a specific application, the area where the first slit 1112 is set and the area at a preset distance h1 from the bottom of the first slit 1112 are usually the areas where current flows and generate more heat. Therefore, the area where the first slit is set and the area at a preset distance h1 from the bottom of the first slit 1112 together constitute the heating area 111 of the heater body 11. That is, the height N1 of the heating area 111 is determined by the height L1 of the first slit 1112 and the preset distance h1. Specifically, the height N1 of the heating area 111 = L1 + h1. The area outside the heating area 111 on the heater body 11 can constitute the heat transfer area 112. Basically, no current flows through the heat transfer area 112, and the heat generated by itself is very small. Usually, only the heat generated by the heating area 111 is conducted.

[0059] Specifically, the preset distance h1 may be equal to the second distance h2, that is, the preset distance h1 satisfies 20-100 mm, preferably 40-60 mm.

[0060] like Figure 2 As shown, the current passed through the foot plate 10 mainly flows through the heating part 1111 of the heating zone 111, so that the heating part 1111 generates heat and radiates a large amount of heat, while the heat transfer part 1121 of the heat transfer zone 112 can be used to conduct the heat emitted by the heating part 1111. By providing a plurality of heating parts 1111 and heat transfer parts 1121 arranged in sequence and spaced along the circumference of the heater body 11, the uniformity of the heat radiated by the heating part 1111 and the heat transfer part 1121 can be greatly improved.

[0061] In some optional embodiments of the present application, the height of the heating zone 111 can be less than or equal to the height of the heat transfer zone 112, so that the high-temperature zone formed by the radiant heat of the heating zone 111 can be close to the solid-liquid surface of the melt in the crucible and away from the bottom of the crucible, thereby preventing the heating zone 111 from heating the bottom of the crucible, causing the high temperature at the bottom of the crucible to produce too much oxygen entering the solution; at the same time, the natural convection of the solution is suppressed, reducing the number of oxygen atoms entering the crystal.

[0062] Reference Figure 3 , showing a schematic diagram of the structure of another heater according to an embodiment of the present application, referring to Figure 4 , showing Figure 3 The schematic diagram of the heater structure from another angle is shown in FIG. Figure 5 , shows a schematic diagram of the structure of another heater described in an embodiment of the present application, referring to Figure 6 , showing Figure 5 The schematic diagram of the heater structure from another angle is shown in FIG. Figures 3 to 6 As shown, a gap 113 is provided between the heating zone and the heat transfer zone. The gap 113 can be used to reduce the amount of heat transferred from the heating zone 111 to the heat transfer zone 112, thereby reducing the heat transfer efficiency between the heating zone 111 and the heat transfer zone 112. Thus, the amount of heat that can be radiated from the heat transfer zone 112 to the bottom of the melt can be reduced, thereby preventing the temperature of the bottom of the melt from being too high.

[0063] like Figure 3 and Figure 4 As shown, there are multiple notches 113, and the multiple notches 113 are arranged at intervals along the circumference of the heater body 11, so that they can play a role of heat insulation and are easy to process.

[0064] In a specific application, the notch 113 may or may not penetrate the heater body 11 , which is not limited in the embodiment of the present application.

[0065] like Figure 5 and Figure 6 As shown, the notch 113 is an annular notch 113 extending along the circumference of the heater body 11, so as to evenly reduce the heat conducted from the heating area 111 to the heat transfer area 112, so as to further improve the uniformity of the heat radiated from the heat transfer area 112. Figure 5 and Figure 6 In the case of the annular notch 113 shown, in order to achieve the connection between the heating area 111 and the heat transfer area 112 , the notch 113 should not penetrate the heater body 11 .

[0066] It should be noted that, in a specific application, the number of the notches 113 and the shapes of the notches 113 can be set according to actual conditions, and the embodiments of the present application do not specifically limit this.

[0067] Reference Figure 7 , showing a schematic diagram of the structure of another heater described in an embodiment of the present application, referring to Figure 8 , showing Figure 7 The schematic diagram of the heater structure from another angle is shown in FIG. Figure 7 and Figure 8As shown, the number of the heat transfer parts 1121 is less than the number of the heat generation parts 1111, so as to further reduce the amount of heat that can be radiated to the bottom of the melt by the heat transfer area 112, thereby preventing the temperature of the bottom of the melt from being too high.

[0068] In a specific application, some of the heat transfer parts 1121 may be removed by cutting, so that the number of the heat transfer parts 1121 is less than the number of the heat generating parts 1111 .

[0069] In some optional embodiments of the present application, the heat transfer portion 1121 can be evenly arranged along the circumference of the heater body 11, or the heat transfer portion 1121 can be symmetrically arranged relative to the center of the heater body 11, so that the heat radiated by the heat transfer portion 1121 can be transferred to the lower part of the crucible as evenly as possible, thereby improving the uniformity of the heat radiated by the heat transfer zone 112.

[0070] In some optional embodiments of the present application, the heating portion 1111 and the heat transfer portion 1121 may be an integrally formed structure, so that the heater body 11 can be obtained through one-time processing, thereby reducing the processing steps of the heater body 11 .

[0071] Alternatively, the heating portion 1111 and the heat transfer portion 1121 are separate structures, that is, after the heating portion 1111 and the heat transfer portion 1121 are processed separately, the heating portion 1111 and the heat transfer portion 1121 need to be spliced ​​to obtain the heater body 11. In particular, for a heater in which the number of heat transfer portions 1121 is less than the number of heating portions 1111, the heat transfer portions 1121 can be spliced ​​at appropriate positions, which is conducive to the flexible layout of the heat transfer portions 1121.

[0072] Reference Fig. 9 , shows a schematic diagram of the structure of a heater according to an embodiment of the present application, such as Fig. 9 As shown, the heater body 11 can be a split structure, that is, the heater body 11 can be obtained by splicing. Specifically, a first mounting portion 114 can be set between the two parts of the heater body 11 that need to be spliced, and the two parts that need to be spliced ​​can be formed into a whole by connecting a mounting plate and fasteners such as screws and bolts on the first mounting portion 114. Of course, the heater body 11 can also be as Figures 1 to 8 The overall structure is shown, so that the heater body 11 can be obtained through one-time processing, reducing the processing steps of the heater body 11

[0073] In some optional embodiments of the present application, the foot plate 10 and the heater body 11 may be an integrally formed structure, so that the heater can be obtained through a one-time process, thereby reducing the processing steps of the heater.

[0074] Reference Fig.10 , shows a schematic diagram of the structure of a heater according to an embodiment of the present application, such as Fig.10As shown, the foot plate 10 and the heater body 11 are split structures, that is, after the foot plate 10 and the heater body 11 are processed separately, the foot plate 10 and the heater body 11 need to be spliced ​​to obtain the heater. The processing method of processing the foot plate 10 and the heater body 11 separately can avoid material waste and improve material utilization.

[0075] like Fig.10 As shown, a second mounting portion 115 may be provided at the position on the heater body 11 where it is connected to the foot plate 10. By connecting a mounting plate and fasteners such as screws and bolts to the second mounting portion 115, the foot plate 10 and the heater body 11 may be connected into a whole to obtain the heater.

[0076] In actual applications, compared with traditional heaters, the height of the upper heating zone 111 of the heater of the present application is shorter than that of traditional heaters. The height of the heating zone of traditional heaters is usually about 280-420 mm. The height of the upper heating zone 111 of the heater described in the embodiment of the present application can be 50-250 mm.

[0077] In summary, the heater described in the embodiment of the present application may at least include the following advantages:

[0078] In the embodiment of the present application, due to the partitioning effect of the first slit and the second slit, after the foot plate passes current to the heater body, the current needs to bypass the first slit and the second slit, and the current flows through a longer path in the upper part of the heater body, with a larger resistance, and therefore, generates a larger amount of heat. Correspondingly, almost no current flows through the lower part of the heater body, and the heat generated is extremely small, and only the heat of the upper part of the heater can be conducted. In this way, when the heater is sleeved outside the crucible, a high-temperature zone can be formed in the upper part of the crucible, so that the temperature of the solid-liquid interface of the melt in the crucible can meet the requirements of crystal pulling, and the temperature of the bottom of the melt in the crucible can be prevented from being overcooled or overheated, so as to achieve stable crystal pulling and reduce the oxygen content of the crystal rod. That is, the heater described in the embodiment of the present application can heat the upper and lower parts of the crucible at the same time, achieve stable crystal pulling and reduce the oxygen content of the crystal rod, and has a simple structure and low energy consumption.

[0079] An embodiment of the present application further provides a single crystal furnace, comprising: a furnace body, a crucible, and the heater described in any of the above embodiments; wherein the crucible and the heater are both disposed in the furnace body; and the heater is sleeved outside the crucible.

[0080] It should be noted that in the embodiment of the present application, the structure of the heater is the same as the structure of the heater described in any of the above embodiments, and its beneficial effects are similar, which will not be described in detail here. The single crystal furnace can specifically be a single crystal furnace.

[0081] Optionally, the height of the heater body of the heater is smaller than the height of the crucible, which is beneficial for the heating zone of the heater body to correspond to the upper part of the crucible, and the heat transfer zone of the heater body to correspond to the lower part of the crucible, so as to avoid the heating zone corresponding to the lower part of the crucible directly heating the bottom of the melt.

[0082] Optionally, the ratio of the height of the heater body to the height of the crucible is less than 1:1, preferably 1:2, so that the heating area of ​​the heater body can be as far away from the bottom of the crucible as possible, avoiding the heating area directly heating the bottom of the crucible and intensifying the release of oxygen in the crucible. Thus, the oxygen content of the silicon rod can be reduced and the quality of the silicon rod can be improved.

[0083] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0084] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A heater, characterized in that: The heater comprises: a foot plate and an annular heater body; wherein, The heater body is provided with a plurality of first slits, the first slits extending downward from the top of the heater body, and the plurality of first slits are sequentially spaced along the circumference of the heater body; The heater body is also provided with a plurality of second slits, the second slits extending upward from the bottom of the heater body to between two adjacent first slits, and the plurality of second slits are sequentially spaced along the circumference of the heater body; The height of the second slit is greater than the height of the first slit; The foot plate is electrically connected to the heater body.

2. The heater according to claim 1, characterized in that The height of the first slit is a first height, the height of the second slit is a second height, and the ratio of the second height to the first height is greater than or equal to 2:

1.

3. The heater according to claim 1 or 2, characterized in that: The distance h2 between the top of the second slit and the top of the heater body is 20-100 mm.

4. The heater according to claim 1 or 2, characterized in that: The area from the top of the first slit to the preset distance from the bottom of the first slit is the heating area, and the area on the heater body other than the heating area is the heat transfer area, and the preset distance is 20-100 mm; In the heating area, a heating portion is formed between two adjacent first slits; In the heat transfer area, a heat transfer portion is formed between two adjacent second slits; The heat generating portion and the heat transfer portion are an integrally formed structure, or the heat generating portion and the heat transfer portion are separate structures.

5. The heater according to claim 4, characterized in that The number of the heat transfer parts is less than the number of the heat generating parts.

6. The heater according to claim 4, characterized in that The heat transfer parts are evenly arranged along the circumference of the heater body, or the heat transfer parts are aligned with the center of the heater body. It is called setting.

7. The heater according to claim 4, characterized in that The heater body is provided with a gap between the heating area and the heat transfer area.

8. The heater according to claim 7, characterized in that There are multiple notches, and the multiple notches are arranged at intervals along the circumference of the heater body.

9. The heater according to claim 7, characterized in that The notch is an annular notch extending along the circumference of the heater body.

10. The heater according to claim 1 or 2, characterized in that: The foot plate and the heater body are an integrally formed structure, or the foot plate and the heater body are a split structure; and / or the heater body is an integrally formed structure or a split structure.

11. A single crystal furnace, characterized in that: include: A furnace body, a crucible, and a heater according to any one of claims 1 to 10; wherein, The crucible and the heater are both arranged in the furnace body; The heater is sleeved outside the crucible.

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