Mounting mechanism and temperature measuring equipment

Abstract

The utility model relates to the technical field of semiconductor processing, in particular to an installation mechanism and temperature measurement equipment, and solves the problem that an installation structure which can facilitate installation and separation of a temperature measurement piece and has the capability of adapting to angle change is lacked in the prior art. According to the mounting mechanism and the temperature measuring equipment, the first fixing piece and the first mounting piece are detachably connected, the temperature measuring piece can be conveniently disassembled and assembled, the first fixing piece and the first mounting piece can relatively rotate, on one hand, the difficulty of mounting or disassembling the temperature measuring piece is further reduced, on the other hand, the angle adjustment requirement of the temperature measuring piece can be met, and the temperature measuring piece can be conveniently assembled and disassembled. And damage caused by scratching with the furnace tube is avoided.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor processing technology, and in particular to a mounting mechanism and a temperature measuring device. Background Art

[0002] In the semiconductor manufacturing process, diffusion equipment, such as horizontal furnaces, plays a vital role. As the diffusion equipment continues to operate, the problem of heating uniformity gradually emerges, which directly affects the product yield and performance stability.

[0003] In order to solve this problem, it is necessary to accurately measure and calibrate the temperature of the constant temperature zone of each furnace tube of the diffusion equipment. At present, the common practice is to manually carry the temperature measuring piece to measure the temperature. This method is cumbersome and inefficient.

[0004] In order to realize the automatic movement of the temperature measuring part and improve the measurement efficiency and accuracy, a temperature measuring device is needed to replace manual handling. The temperature measuring device requires an installation structure so that the temperature measuring part can be installed and separated quickly and conveniently when needed, and needs to have the ability to adapt to angle changes to avoid the temperature measuring part from being damaged by scratching the furnace tube during movement. However, in the prior art, there is still a lack of installation structures that can meet these requirements at the same time. Utility Model Content

[0005] In view of this, the embodiments of the present disclosure provide a mounting mechanism and a temperature measuring device, which solve the problem in the prior art that there is a lack of a mounting structure that can facilitate the installation and separation of the temperature measuring component and has the ability to adapt to angle changes.

[0006] In a first aspect, an embodiment of the present disclosure provides a mounting mechanism applied to a temperature measuring device, wherein the temperature measuring device includes a moving mechanism and a temperature measuring component, and the temperature measuring component includes a non-temperature measuring section; wherein the mounting mechanism includes: a first mounting component, used to connect to the moving mechanism; an adapter, detachably rotatably connected to the first mounting component; and a first fixing component, connected to the adapter and detachably connected to the non-temperature measuring section.

[0007] In some embodiments, the first mounting member is provided with a mounting portion, and the mounting portion is a mounting groove or a countersunk hole, and the mounting groove or the countersunk hole passes through the first mounting member; the adapter is rotatably inserted into the mounting groove or the countersunk hole, one end of the adapter is located on the first side of the first mounting member and is connected to the first fixing member, and the other end of the adapter is located on the second side of the first mounting member and is provided with a limiting portion, and the limiting portion overlaps and cooperates with the second side of the first mounting member.

[0008] In some embodiments, the first mounting member has a first side wall connecting a first side of the first mounting member and a second side of the first mounting member; when the mounting portion is the mounting groove, one side of the mounting groove extends to the first side wall to form a lateral opening at the position of the first side wall, and the size of the lateral opening is greater than or equal to the diameter of the portion of the adapter located in the mounting groove.

[0009] In some embodiments, the invention further comprises: a locking member having a first state and a second state. In the first state, the locking member blocks the lateral opening. In the second state, the locking member opens the lateral opening.

[0010] In some embodiments, the first mounting member has a second side wall, the second side wall connects the first side of the first mounting member and the second side of the first mounting member, and intersects with the first side wall, the first mounting member is also provided with a locking pin hole, the locking pin hole is connected to the mounting slot, and at least one end of the locking pin hole extends to the second side wall, the locking member is a locking pin structure, in the first state, the locking member is plugged into and matched with the first mounting member through the locking pin hole, and a partial section of the locking member is located in the mounting slot to block the lateral opening, in the second state, the locking member is located outside the mounting slot to open the lateral opening; or, the first mounting member is also provided with a locking slot, the locking slot is connected to the mounting slot, the locking member is a plate-like structure, in the first state, the locking member is plugged into and matched with the first mounting member through the locking slot, and a partial section of the locking member is located in the mounting slot to block the lateral opening, in the second state, the locking member is located outside the mounting slot to open the lateral opening.

[0011] In some embodiments, the first fixing member is provided with a first hook groove, the first hook groove penetrates the first fixing member, and the first fixing member is hooked and matched with the non-temperature measuring section through the first hook groove.

[0012] In some embodiments, the first hook groove includes: a first constituent segment, a side of which is provided with a first opening; a second constituent segment, located at the lower side of the first constituent segment, and a top of the second constituent segment is connected to a side of the first constituent segment away from the first opening.

[0013] In some embodiments, a limiting protrusion is provided on at least one side of the top of the first constituent segment.

[0014] In some embodiments, the temperature measuring component also includes a connecting wire, which is connected to the non-temperature measuring section, and the installation mechanism also includes: at least one second fixing component, which is fixedly connected to the first installation component, and the second fixing component is provided with a second hook groove, and the second fixing component is hooked and cooperated with the connecting wire through the second hook groove.

[0015] In some embodiments, there are multiple second fixing members, and the multiple second fixing members are arranged in sequence at intervals; the mounting mechanism also includes: a second mounting member, which is arranged at intervals from the first mounting member, and the side of the second mounting member close to the first mounting member is fixedly connected to the multiple second fixing members, and the side of the second mounting member away from the first mounting member is connected to the moving mechanism.

[0016] In a second aspect, an embodiment of the present disclosure provides a temperature measuring device, comprising: a temperature measuring component; a mounting mechanism as described in the first aspect, detachably connected to the temperature measuring component; a moving mechanism, connected to the mounting mechanism, and the moving mechanism is configured to drive the mounting mechanism to move horizontally.

[0017] The embodiments of the present disclosure provide a mounting mechanism and a temperature measuring device, wherein the first fixing member and the first mounting member are detachably connected, and the first fixing member can be removed from the first mounting member to facilitate the connection or removal between the first fixing member and the temperature measuring member. After the connection or removal operation between the first fixing member and the temperature measuring member is completed, the first fixing member can be installed on the first mounting member, which has the advantage of convenient installation and removal. The first fixing member and the first mounting member can rotate relative to each other. On the one hand, the relative rotation between the first fixing member and the first mounting member can further reduce the difficulty of installing or removing the temperature measuring member. On the other hand, the relative rotation between the first fixing member and the first mounting member can meet the angle adjustment requirements of the temperature measuring member, and avoid damage caused by scratching the temperature measuring member with the furnace pipe. Therefore, the embodiments of the present disclosure provide a mounting mechanism and a temperature measuring device that can not only realize the rapid installation and removal of the temperature measuring member, but also adapt to angle changes to avoid damage to the temperature measuring member, and have the advantages of being easy to use and safe. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 Shown is a three-dimensional view of a mounting mechanism provided in accordance with an embodiment of the present disclosure.

[0019] Figure 2 The figure shows a three-dimensional diagram of the installation mechanism provided by an embodiment of the present disclosure, showing the coordination relationship between the installation mechanism and the temperature measuring component.

[0020] Figure 3 The figure shows a front view of the installation mechanism provided by one embodiment of the present disclosure, showing the matching relationship between the installation mechanism and the temperature measuring component.

[0021] Figure 4Shown is an exploded view of a mounting mechanism provided in accordance with an embodiment of the present disclosure.

[0022] Figure 5 Shown is a top view of a temperature measuring device provided in one embodiment of the present disclosure.

[0023] Figure 6 Shown is a schematic diagram showing the coordination relationship between the mounting mechanism and the moving mechanism in a temperature measuring device provided in an embodiment of the present disclosure.

[0024] Figure 7 Shown is an exploded view of a moving mechanism in a temperature measuring device provided in an embodiment of the present disclosure.

[0025] Figure 8 for Figure 7 Enlarged view of point A in .

[0026] Fig. 9 Shown is a schematic diagram of a temperature measuring device provided by an embodiment of the present disclosure in use.

[0027] Reference numerals:

[0028] 100, temperature measuring member; 101, temperature measuring section; 102, non-temperature measuring section; 103, connecting line; 200, mounting mechanism; 210, first mounting member; 201, mounting slot; 202, locking pin hole; 203, first through hole; 204, slot; 220, adapter; 221, limiting portion; 230, first fixing member; 231, first hooking groove; 232, first constituting section; 233, second constituting section; 234, limiting protrusion; 240, locking member; 250, second fixing member; 251, second hooking groove; 252, The third component section; 253, the fourth component section; 260, the second mounting member; 261, the limiting groove; 262, the second through hole; 300, the moving mechanism; 301, the sliding seat; 302, the moving slider; 303, the moving drive assembly; 304, the fixed seat; 305, the lateral limiting member; 306, the end limiting member; 307, the rolling member; 308, the slot-type photoelectric sensor; 309, the induction sheet; 310, the first anti-slip plate; 311, the second anti-slip plate; 400, the diffusion device; 410, the furnace pipe; 430, the gas cabinet platform. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiment is only a sub-embodiment of the present disclosure, rather than the embodiment of the whole. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0030] In the semiconductor manufacturing process, diffusion equipment 400, such as a horizontal furnace, plays a vital role. Such equipment ensures that semiconductor materials are processed under specific temperature conditions by precisely controlling the heating process, thereby improving the quality and yield of the product. However, as the diffusion equipment 400 continues to operate, the problem of heating uniformity gradually emerges, which directly affects the yield and performance stability of the product.

[0031] In order to solve this problem, it is necessary to accurately measure and calibrate the temperature of each furnace tube 410 of the diffusion device 400. The constant temperature zone is usually divided into multiple sections, and each section needs to be temperature-detected by the temperature measuring element 100. At present, it is common to manually carry the temperature measuring element 100 to measure the temperature. This method is not only cumbersome and inefficient, but also due to the limitations of manual operation, it is difficult to accurately determine the specific position of the constant temperature zone section of each furnace tube 410, resulting in large measurement errors and failure to obtain temperature data in a timely and accurate manner.

[0032] In order to realize the automatic movement of the temperature measuring element 100 and improve the measurement efficiency and accuracy, a temperature measuring device is needed to replace manual handling. The temperature measuring device requires an installation structure so that the temperature measuring element 100 can be installed and separated quickly and conveniently when needed.

[0033] In addition, since the temperature measuring element 100 is easily scratched against the constant temperature zone of the furnace tube 410 during movement, if the mounting structure is improperly designed, it is easy to cause damage to the temperature measuring element 100 or the furnace tube 410 due to scratches. Therefore, such a mounting structure also needs to have the ability to adapt to angle changes to avoid damage caused by scratches between the temperature measuring element 100 and the furnace tube 410 during movement.

[0034] However, in the prior art, there is still a lack of an installation structure that can simultaneously meet these requirements.

[0035] In view of the above problems, the embodiment of the present disclosure provides a mounting mechanism 200 and a temperature measuring device, wherein the first fixing member 230 and the first mounting member 210 are detachably connected, and the first fixing member 230 can be removed from the first mounting member 210 to facilitate the connection or disassembly between the first fixing member 230 and the temperature measuring member 100. After completing the connection or disassembly operation between the first fixing member 230 and the temperature measuring member 100, the first fixing member 230 can be installed on the first mounting member 210, which has the advantage of convenient installation and disassembly. The first fixing member 230 and the first mounting member 210 can rotate relative to each other. On the one hand, the relative rotation between the first fixing member 230 and the first mounting member 210 can further reduce the difficulty of installing or disassembling the temperature measuring member 100. On the other hand, the relative rotation between the first fixing member 230 and the first mounting member 210 can meet the angle adjustment requirement of the temperature measuring member 100, thereby avoiding damage caused by scratching the furnace tube 410. Therefore, the installation mechanism 200 and the temperature measuring device provided by the embodiment of the present disclosure can not only realize the rapid installation and disassembly of the temperature measuring component 100, but also adapt to the angle change and avoid damage to the temperature measuring component 100, and have the advantages of being easy to use and safe.

[0036] Combine the following Figures 1 to 9 The mounting mechanism 200 according to the embodiment of the present disclosure is described.

[0037] The mounting mechanism 200 of the embodiment of the present disclosure is applied to a temperature measuring device, which includes a moving mechanism 300 and a temperature measuring component 100. The temperature measuring component 100 includes a temperature measuring section 101 and a non-temperature measuring section 102. The temperature measuring section 101 is used for temperature measurement, and the non-temperature measuring section 102 is connected to the temperature measuring section 101 for supporting and fixing the temperature measuring section 101.

[0038] like Figure 1 , Figure 2 and Figure 3 As shown, the mounting mechanism 200 includes a first mounting member 210, an adapter 220 and a first fixing member 230. The first mounting member 210 is used to connect with the moving mechanism 300. The adapter 220 is detachably rotatably connected to the first mounting member 210, and the rotation direction of the adapter 220 is horizontal. The first fixing member 230 is connected to the adapter 220, and the first fixing member 230 is configured to be detachably connected to the non-temperature measuring section 102.

[0039] refer to Fig. 9When the temperature of the constant temperature zone of the furnace tube 410 of the diffusion device 400 is detected, it is necessary to first insert the temperature measuring element 100 into the constant temperature zone of the furnace tube 410, and then connect the temperature measuring element 100 to the temperature measuring device. In this process, if the connection between the temperature measuring element 100 and the temperature measuring device is completed by constantly adjusting the position of the temperature measuring device, it will be difficult to operate, affect the work efficiency, and easily cause damage to the components. In this embodiment, the first fixing member 230 and the first mounting member 210 are detachably connected. When the temperature measuring element 100 needs to be installed on the first fixing member 230, the first fixing member 230 can be removed from the first mounting member 210, and after the first fixing member 230 is connected to the temperature measuring element 100, the first fixing member 230 is installed on the first mounting member 210. Therefore, the connection between the first fixing member 230 and the temperature measuring element 100 is not completed on the temperature measuring device, and there is no need to repeatedly adjust the position of the temperature measuring device, which is conducive to reducing the difficulty of operation and preventing damage to components such as the temperature measuring element 100.

[0040] During the measurement process, the orientation of the temperature measuring element 100 may be inconsistent with the required angle. If the position and orientation of the temperature measuring device are adjusted to correct the situation, it will be difficult to operate and the accuracy will be relatively low. In this embodiment, the first fixing member 230 and the first mounting member 210 are rotatably connected through the adapter 220, which can meet the angle adjustment requirements of the temperature measuring element 100. In addition, it can also prevent the temperature measuring element 100 from being scratched against the constant temperature zone of the furnace tube 410 during movement, thereby preventing the temperature measuring element 100 from being damaged.

[0041] Combination Figure 1 and Figure 4 In some embodiments of the present disclosure, the first mounting member 210 is provided with a mounting portion, and the mounting portion is a mounting groove 201 or a countersunk hole.

[0042] In an optional solution, the mounting portion is a mounting groove 201, and the mounting groove 201 passes through the first mounting member 210. The adapter 220 is rotatably arranged in the mounting groove 201, one end of the adapter 220 is located at a first side of the first fixing member 230, and is fixedly connected to the first mounting member 210, and the other end of the adapter 220 is provided with a limiting portion 221, and the limiting portion 221 overlaps and cooperates with the second side of the first mounting member 210.

[0043] Specifically, the first mounting member 210 can adopt a horizontally arranged plate structure, for example, a rectangular plate as shown in the figure. The lower side of the first mounting member 210 serves as the first side, and the upper side serves as the second side. The mounting groove 201 penetrates the first mounting member 210 in the vertical direction. The adapter 220 adopts a pin structure, the adapter 220 is vertically arranged, and can be rotatably passed through the mounting groove 201, and its lower end extends to the first side of the first mounting member 210, and is fixedly connected to the upper end of the first fixing member 230. A limiting portion 221 is provided at the upper end of the adapter 220, and the limiting portion 221 overlaps and cooperates with the first mounting member 210 to prevent the adapter 220 from falling off or detaching.

[0044] Optionally, the limiting portion 221 is an annular protrusion provided on the upper end of the adapter 220 , and the diameter thereof is greater than the width of the mounting groove 201 , thereby achieving limiting with the first mounting member 210 .

[0045] Optionally, a hidden groove is provided on the upper side of the first mounting member 210, the hidden groove is located outside the top of the mounting groove 201, and forms a stepped groove structure with the mounting groove 201, and the limiting portion 221 is located in the hidden groove. The hidden groove can, on the one hand, prevent the limiting portion 221 from being exposed to the outside and interfering with other components, and on the other hand, limit the limiting portion 221 to make the rotation of the adapter 220 more stable.

[0046] In this embodiment, the adapter 220 and the first fixing member 230 can be connected by a detachable connection method such as threaded connection or snap connection, or by a non-detachable connection method such as welding or bonding. Preferably, the adapter 220 and the first fixing member 230 are connected by a detachable connection method.

[0047] In some embodiments of the present disclosure, the first mounting member 210 has a first side wall connecting the first side of the first mounting member 210 and the second side of the first mounting member 210, and one side of the mounting groove 201 extends to the first side wall to form a lateral opening at the position of the first side wall, and the size of the lateral opening is greater than or equal to the diameter of the portion of the adapter 220 located in the mounting groove 201.

[0048] Specifically, the mounting groove 201 adopts a U-shaped groove structure, whose opening faces the first side wall of the first mounting member 210 and extends to the first side wall position to form a lateral opening at the first side wall position of the first mounting member 210. The size of the lateral opening is greater than or equal to the diameter of the portion of the adapter 220 located in the mounting groove 201, so that the adapter 220 can enter and exit the mounting groove 201 through the lateral opening, thereby facilitating the installation and disassembly of the first fixing member 230.

[0049] Combination Figure 4In some embodiments of the present disclosure, the mounting mechanism 200 further includes a locking member 240, and the locking member 240 has a first state and a second state. In the first state, the locking member 240 blocks the lateral opening, and in the second state, the locking member 240 opens the lateral opening.

[0050] The lateral opening serves as the entry and exit channel of the adapter 220, which can facilitate the entry and exit of the adapter 220, thereby meeting the disassembly and assembly requirements of the first fixing member 230. However, in the actual measurement process, if the adapter 220 is not limited, the temperature measuring device cannot drive the first fixing member 230 and the temperature measuring member 100 installed on the first fixing member 230 to move through the first mounting member 210. The locking member 240 can solve this problem. Specifically, in the first state, the locking member 240 blocks the lateral opening, which can prevent the adapter 220 from sliding out, and can create conditions for the temperature measuring device to drive the first fixing member 230 and the temperature measuring member 100 installed on the first fixing member 230 to move through the first mounting member 210. In the second state, the locking member 240 opens the lateral opening, which can facilitate the disassembly and assembly of the first fixing member 230.

[0051] In some embodiments of the present disclosure, the first mounting member 210 has a second side wall, which connects the first side of the first mounting member 210 and the second side of the first mounting member 210 and intersects with the first side wall. The first mounting member 210 is also provided with a locking pin hole 202, which is connected to the mounting groove 201, and at least one end of the locking pin hole 202 extends to the second side wall of the first mounting member 210; the locking member 240 is a locking pin structure. In the first state, the locking member 240 is plugged into and matched with the first mounting member 210 through the locking pin hole 202, and a partial section of the locking member 240 is located in the mounting groove 201 to block the lateral opening. In the second state, the locking member 240 is located outside the mounting groove 201 to open the lateral opening.

[0052] The extension direction of the locking pin hole 202 intersects with the extension direction of the mounting groove 201. Preferably, the extension direction of the locking pin hole 202 is perpendicular to the extension direction of the mounting groove 201. For example, the extension direction of the mounting groove 201 is perpendicular to the first side wall and forms a lateral opening on the first side wall. The extension direction of the locking pin hole 202 is parallel to the first side wall.

[0053] At least one end of the locking pin hole 202 extends to the side wall of the first mounting member 210 to serve as the inlet and outlet of the locking member 240. Preferably, both ends of the locking pin hole 202 extend to the side walls of the first mounting member 210 in the width direction respectively, and the locking member 240 can be inserted into the locking pin hole 202 from either end.

[0054] The extension path of the locking pin hole 202 passes through the installation groove 201 , so that after the locking member 240 is inserted into the locking pin hole 202 to a certain depth, a portion of the locking member 240 is located in the installation groove 201 , thereby blocking the lateral opening.

[0055] The locking piece 240 in this embodiment can adopt a steel ball spring lock pin, one end of which is provided with a pull ring to facilitate the plugging and unplugging operation. The side wall of the locking piece 240 is provided with a steel ball structure supported by a spring. After the locking piece 240 is inserted into the locking pin hole 202, the steel ball structure can play a limiting role to prevent the locking piece 240 from accidentally detaching.

[0056] In other embodiments of the present disclosure, the first mounting member 210 is provided with a locking groove, and the locking pin hole 202 in the above embodiment is replaced by the locking groove. The locking groove is connected to the mounting groove 201, and the extension direction of the locking groove can be parallel to the extension direction of the mounting groove 201, and can also intersect with the extension direction of the mounting groove 201. The locking member 240 is a plate-like structure. In the first state, the locking member 240 is plugged and matched with the first mounting member 210 through the locking groove, and a part of the locking member 240 is located in the mounting groove 201 to block the lateral opening. In the second state, the locking member 240 is located outside the mounting groove 201 to open the lateral opening.

[0057] In the above two optional forms, a mounting groove 201 is provided on the first mounting member 210, the adapter 220 is installed in the mounting groove 201, the adapter is installed or removed through the lateral opening of the mounting groove 201, and the locking member 240 is used as a limit.

[0058] In another optional solution of the present disclosure, the mounting portion is a countersunk hole, which vertically penetrates the first mounting member 210, and the adapter 220 is rotatably arranged in the countersunk hole. The upper end of the adapter 220 is provided with a limiting portion 221 for limiting the adapter 220 to prevent the adapter 220 from sliding out, and the lower end of the adapter 220 is detachably connected to the first fixing member 230 by, for example, threaded connection or clamping. This type of installation does not require the provision of a locking member 240.

[0059] Combination Figure 1 and Figure 2 In some embodiments of the present disclosure, the first fixing member 230 is provided with a first hook groove 231 , the first hook groove 231 penetrates the first fixing member 230 , and the first fixing member 230 is hooked and matched with the non-temperature measuring section 102 through the first hook groove 231 .

[0060] The first fixing member 230 can adopt a vertically arranged plate structure, the first hook groove 231 penetrates the first fixing member 230 in the horizontal direction, and the first hook groove 231 forms an opening on one side of the first fixing member 230, and the non-temperature measuring section 102 can enter and exit the first hook groove 231 through the opening position of the first hook groove 231, thereby realizing quick installation and removal.

[0061] Optionally, the first hook groove 231 includes a first component segment 232 and a second component segment 233, a first opening is provided on one side of the first component segment 232, the second component segment 233 is located at the lower side of the first component segment 232, and the top of the second component segment 233 is connected to the side of the first component segment 232 away from the first opening.

[0062] The non-temperature measuring section 102 can enter the first component section 232 through the first opening, move along the first component section 232 to the joint position of the first component section 232 and the second component section 233, and further slide down to the bottom of the second component section 233 to complete the installation process. Since the second component section 233 is located at the lower side of the first component section 232, under the action of gravity, the installation of the temperature measuring element 100 can be more stable.

[0063] In some embodiments of the present disclosure, a limiting protrusion 234 is provided on at least one side of the top of the first component section 232. The limiting protrusion 234 is a protruding structure protruding inward from the top of the inner wall of the first component section 232. The limiting protrusion 234 can reduce the top width of the first component section 232. When the non-temperature measuring section 102 passes through the position of the limiting protrusion 234 and reaches the lower part of the first component section 232, the limiting protrusion 234 can prevent the non-temperature measuring section 102 from sliding out of the first component section 232, thereby increasing the stability of the fixation of the temperature measuring element 100.

[0064] In some embodiments of the present disclosure, the temperature measuring component 100 further includes a connecting wire 103, which is connected to the non-temperature measuring section 102, and the mounting mechanism 200 further includes at least one second fixing component 250, which is fixedly connected to the first mounting component 210, and the second fixing component 250 is provided with a second hook groove 251, and the second fixing component 250 is hooked and matched with the connecting wire 103 through the second hook groove 251. The second fixing component 250 can support and limit the connecting wire 103, so as to prevent the connecting wire 103 from affecting the rotation of the non-temperature measuring section 102 and the temperature measuring section 101, and protect the connecting wire 103 to prevent the connecting wire 103 from breaking. In addition, the limiting of the connecting wire 103 by the second fixing component 250 and the limiting of the non-temperature measuring section 102 by the first fixing component 230 work together to achieve better fixing and anti-slip effects.

[0065] The first hook groove 231 includes a third component section 252 and a fourth component section 253. A second opening is provided on one side of the third component section 252. The fourth component section 253 is located at the lower side of the third component section 252. The top of the fourth component section 253 is connected to the side of the third component section 252 away from the second opening. The connecting line 103 can enter the third component section 252 through the second opening, and enter the fourth component section 253 from the position where the third component section 252 and the fourth component section 253 are connected.

[0066] Optionally, in the initial state where the first fixing member 230 does not rotate, the opening directions of the first hook groove 231 and the second hook groove 251 are opposite. Thus, the direction of the first opening is opposite to the direction of the second opening, which can achieve a better limiting and anti-dropping effect on the temperature measuring member 100.

[0067] In some embodiments of the present disclosure, there are multiple second fixing members 250, and the multiple second fixing members 250 are arranged in sequence. In order to reduce the bending of the connecting line 103, the first component and the multiple second fixing members 250 are arranged in sequence along the same direction (for example, the length direction of the first mounting member 210). The second openings of the multiple second fixing members 250 face the same direction, and the connecting line 103 can enter the multiple second fixing members 250 in the same direction, which is more convenient for operation.

[0068] The mounting mechanism 200 further includes a second mounting member 260, which is parallel to the first mounting member 210 and spaced apart from the first mounting member 210. The side of the second mounting member 260 close to the first mounting member 210 is respectively fixedly connected to the plurality of second fixing members 250, and the side of the second mounting member 260 away from the first mounting member 210 is connected to the moving mechanism 300. The second mounting member 260 can reduce the force at the connection position between the first mounting member 210 and the second fixing member 250, thereby improving the overall stability of the mounting mechanism 200. In addition, the second mounting member 260 can also serve as the connection position between the mounting mechanism 200 and other components of the temperature measuring device to support the mounting mechanism 200 as a whole.

[0069] Optionally, a slot 204 for cooperating with multiple second fixing members 250 is provided on one side of the first mounting member 210 close to the second mounting member 260, a limiting groove 261 for cooperating with multiple second fixing members 250 is provided on one side of the second mounting member 260 close to the first mounting member 210, and the first mounting member 210 is provided with a first through hole 203, and the second mounting member 260 is provided with a second through hole 262, the first through hole 203 is connected to the slot 204, and the second through hole 262 is connected to the limiting groove 261, the first mounting member 210 and the second fixing member 250 are fixedly connected by a bolt that passes through the first through hole 203 and the slot 204 and is threadedly engaged with the end of the second fixing member 250, and the second mounting member 260 and the second fixing member 250 are fixedly connected by a bolt that passes through the second through hole 262 and the limiting groove 261 and is engaged with the end of the second fixing member 250. The slot 204 on the first mounting member 210 and the limiting slot 261 on the second mounting member 260 can limit the second fixing member 250 and improve the structural stability.

[0070] Combination Figure 5 and Fig. 9 , the disclosed embodiment also provides a temperature measuring device, including a temperature measuring component 100, the above-mentioned mounting mechanism 200 and a moving mechanism 300. The mounting mechanism 200 is detachably connected to the temperature measuring component 100, and the moving mechanism 300 is connected to the mounting mechanism 200, and the moving mechanism 300 is configured to drive the mounting mechanism 200 to move horizontally. When the moving mechanism 300 drives the mounting mechanism 200 to translate, the position of the temperature measuring component 100 can be adjusted. Taking a horizontal furnace as an example, the furnace tube 410 of the horizontal furnace is horizontal. When the moving mechanism 300 drives the mounting mechanism 200 to translate to adjust the position of the temperature measuring component 100, the plugging and unplugging operation of the temperature measuring component 100 with respect to the furnace tube 410 can be realized.

[0071] like Figure 6 and Figure 7 As shown, in some embodiments, the moving mechanism 300 includes a slide 301, a moving slider 302 and a moving drive assembly 303. The slide 301 is connected to the lifting mechanism. The moving slider 302 is slidably connected to the slide 301 and is connected to the temperature measuring element 100. The moving drive assembly 303 is connected to the moving slider 302, and the moving drive assembly 303 is configured to drive the moving slider 302 to slide back and forth along the slide 301.

[0072] Through the driving action of the mobile driving assembly 303, the mobile slider 302 can slide smoothly along the slide seat 301, thereby driving the temperature measuring component 100 to perform accurate temperature measurement operations.

[0073] In this embodiment, the mobile mechanism 300 can realize the rapid and accurate movement of the temperature measuring element 100, thereby improving the efficiency of the temperature measuring operation, and by adjusting the working parameters of the mobile driving component 303, the moving speed and distance of the temperature measuring element 100 can be conveniently controlled to meet different temperature measurement requirements. In addition, the mobile mechanism 300 has high stability and reliability, and can ensure the safety and stability of the temperature measuring element 100 during the movement process.

[0074] In an optional form, the mobile driving assembly 303 includes a first translation driving motor and a translation synchronous belt structure, the first translation driving motor is connected to the synchronous wheel of the translation synchronous belt structure, and the synchronous belt of the translation synchronous belt structure is connected to the mobile slider 302. The first translation driving motor is used as a power source, and the rotational motion is converted into translational motion by connecting the synchronous wheel of the translation synchronous belt structure. The synchronous belt is connected to the mobile slider 302, and the driving force of the motor is transmitted to the slider, so as to realize the reciprocating sliding of the slider. It has the advantages of simple structure, high transmission efficiency, high positioning accuracy, etc.

[0075] In another optional form, the mobile drive assembly 303 includes a second translation drive motor and a lead screw nut structure, the second translation drive motor is connected to the lead screw of the lead screw nut structure, and the nut of the lead screw nut structure is connected to the mobile slider 302. The second translation drive motor drives the lead screw to rotate, and the nut in the lead screw nut structure cooperates with the lead screw to convert the rotational motion into linear motion. The nut is connected to the mobile slider 302, thereby driving the slider to slide back and forth on the slide seat 301. It has the advantages of stable transmission, strong load-bearing capacity, and high positioning accuracy.

[0076] Combination Figure 7 and Fig. 9 In some embodiments, the diffusion device 400 further includes a gas cabinet platform 430, and the moving mechanism 300 further includes a fixed seat 304, at least two lateral stoppers 305, and an end stopper 306. The fixed seat 304 is fixedly connected to the sliding seat 301. The lateral stoppers 305 are fixedly connected to the gas cabinet platform 430, and are disposed on both sides of the fixed seat 304, and are slidably contacted and matched with the fixed seat 304. The end stopper 306 is located on the side of the lateral stopper 305 close to the constant temperature zone, and the end stopper 306 is fixedly connected to the at least two lateral stoppers 305, or the end stopper 306 is fixedly connected to the gas cabinet platform 430.

[0077] In this embodiment, the gas cabinet platform 430 provides a stable operating environment for the mobile mechanism 300 of the temperature measuring device. On the gas cabinet platform 430, at least two lateral limiters 305 are detachably fixed, and at least two lateral limiters 305 are disposed on both sides of the fixed seat 304 and are slidably contacted and matched with the fixed seat 304. It is ensured that the fixed seat 304 always remains on the predetermined track during the movement, avoiding deviation or shaking. In addition, the end limiter 306 is located on the side of the lateral limiter 305 close to the constant temperature zone, and the end limiter 306 is fixedly connected to at least two lateral limiters 305 or to the gas cabinet platform 430. The main function of the end limiter 306 is to prevent the fixed seat 304 and the slide seat 301 from excessively extending forward, thereby ensuring that the temperature measuring element 100 does not exceed the safety range when moving toward the constant temperature zone. Collision and interference between devices are effectively avoided, and overall safety is improved.

[0078] In some embodiments, a rolling member 307 is disposed on one side of at least two lateral limiting members 305 facing the fixing seat 304 , and the rolling member 307 is in rolling contact with the fixing seat 304 .

[0079] The setting of the rolling member 307 changes the contact mode between the fixed seat 304 and the lateral stopper 305 from sliding to rolling during the movement. The friction resistance is reduced, so that the moving mechanism 300 can move more easily and smoothly on the gas cabinet platform 430. At the same time, the rolling contact also reduces the wear of the parts and prolongs the service life of the equipment.

[0080] Specifically, the rolling element 307 can be in the form of a roller, a ball or a bearing. The rolling element 307 is installed on the inner side of the lateral limiter 305 and fits tightly with the outer side of the fixed seat 304. When the fixed seat 304 moves on the gas cabinet platform 430, the rolling element 307 rolls accordingly to provide stable support and guidance for the fixed seat 304. This not only improves the stability and operating efficiency of the mobile mechanism 300, but also reduces maintenance costs. Since rolling contact reduces friction and wear, it reduces the heat and noise generated by friction, making the entire temperature measurement process quieter and smoother.

[0081] In some embodiments of the present disclosure, the moving mechanism 300 further includes a position detection unit, which is used to obtain position information of the moving slider 302. By grasping the position of the moving slider 302 in real time, the movement of the temperature measuring element 100 can be more accurately controlled, thereby improving the accuracy and efficiency of temperature measurement.

[0082] Optionally, the position detection unit is connected to the control system signal of the mobile drive component 303. When the position detection unit obtains the position information of the mobile slider 302, the information can be immediately transmitted to the control system. The control system can adjust the working parameters of the mobile drive component 303, such as speed, direction, etc., according to the received position information, so as to achieve accurate control of the position of the mobile slider 302.

[0083] like Figure 8 As shown, optionally, the position detection unit includes a slot-type photoelectric sensor 308 and a sensing sheet 309, wherein the slot-type photoelectric sensor 308 is fixedly connected to the fixed seat 304, and the sensing sheet 309 is fixedly connected to the moving slider 302. When the moving slider 302 moves on the slide seat 301, the sensing sheet 309 will also move accordingly. When the sensing sheet 309 enters the sensing range of the slot-type photoelectric sensor 308, the sensor will send a signal indicating that the moving slider 302 has reached a predetermined position. In this way, the position information of the moving slider 302 can be accurately obtained. Thus, the position of the moving slider 302 can be detected in a simple, reliable and cost-effective manner. Moreover, since the combination of the slot-type photoelectric sensor 308 and the sensing sheet 309 has high sensitivity and response speed, real-time and accurate detection of the position of the moving slider 302 can be achieved.

[0084] The implementation of the position detection unit is not limited to the combination of the slot-type photoelectric sensor 308 and the induction sheet 309, and may also be replaced by, for example, an encoder, a laser displacement sensor, a visual recognition system or a proximity switch.

[0085] Optionally, a first anti-slip plate 310 is provided at one end of the slide seat 301 , and a second anti-slip plate 311 is provided at the other end. The first anti-slip plate 310 and the second anti-slip plate 311 can prevent the movable slider 302 from detaching from the slide seat 301 .

[0086] Since the temperature measuring device includes the mounting mechanism 200 , all technical features and technical effects of the temperature measuring device including the mounting mechanism 200 are not described in detail here.

[0087] The phrases "one embodiment", "an embodiment", etc. mentioned in the specification indicate that the embodiment described may include a specific feature, structure or characteristic, but not every embodiment may include the specific feature, structure or characteristic. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such feature, structure or characteristic in conjunction with other embodiments, whether explicitly or not explicitly described.

[0088] It should be understood that “on,” “above,” and “over” in this disclosure should be interpreted in the broadest manner, so that “on” not only means “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” not only includes the meaning of “above” or “over,” but also may include the meaning of “above” or “over something” with no intervening features or layers therebetween (i.e., directly on something).

[0089] Additionally, spatially relative terms, such as "below," "below," "beneath," "above," "above," etc., may be used herein for ease of description to describe the relationship of one item or feature to other items or features as shown in the figures. The spatially relative terms are intended to encompass different orientations of the components in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein may likewise be interpreted accordingly.

[0090] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.

[0091] The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A mounting mechanism, characterized in that: Applied to a temperature measuring device, the temperature measuring device comprises a moving mechanism and a temperature measuring component, and the temperature measuring component comprises a non-temperature measuring section; Wherein, the installation mechanism comprises: A first mounting member, used to connect with the moving mechanism; A transfer member, detachably and rotatably connected to the first mounting member; The first fixing member is connected to the adapter and is detachably connected to the non-temperature measuring section.

2. The mounting mechanism according to claim 1, characterized in that: The first mounting member is provided with a mounting portion, the mounting portion is a mounting groove or a countersunk hole, and the mounting groove or the countersunk hole passes through the first mounting member; The adapter can be rotatably inserted into the mounting groove or the countersunk hole, one end of the adapter is located on the first side of the first mounting member and is connected to the first fixing member, the other end of the adapter is located on the second side of the first mounting member and is provided with a limiting portion, and the limiting portion overlaps and cooperates with the first mounting member.

3. The mounting mechanism according to claim 2, characterized in that: The first mounting member has a first side wall connecting a first side of the first mounting member and a second side of the first mounting member; When the mounting portion is the mounting groove, one side of the mounting groove extends to the first side wall to form a lateral opening at the first side wall, and the size of the lateral opening is greater than or equal to the diameter of the portion of the adapter located in the mounting groove.

4. The mounting mechanism according to claim 3, characterized in that: Also includes: The locking member has a first state and a second state. In the first state, the locking member blocks the lateral opening. In the second state, the locking member opens the lateral opening.

5. The mounting mechanism according to claim 4, characterized in that: The first mounting member has a second side wall, the second side wall connects the first side of the first mounting member and the second side of the first mounting member, and intersects with the first side wall, the first mounting member is further provided with a locking pin hole, the locking pin hole is connected to the mounting slot, and at least one end of the locking pin hole extends to the second side wall, the locking member is a locking pin structure, in the first state, the locking member is plug-fitted with the first mounting member through the locking pin hole, and a partial section of the locking member is located in the mounting slot to block the lateral opening, and in the second state, the locking member is located outside the mounting slot to open the lateral opening; Alternatively, the first mounting member is further provided with a locking groove, which is connected to the mounting groove, and the locking member is a plate-like structure. In the first state, the locking member is plug-fitted with the first mounting member through the locking groove, and a partial section of the locking member is located in the mounting groove to block the lateral opening. In the second state, the locking member is located outside the mounting groove to open the lateral opening.

6. The mounting mechanism according to any one of claims 1 to 5, characterized in that: The first fixing member is provided with a first hook groove, the first hook groove penetrates the first fixing member, and the first fixing member is hooked and matched with the non-temperature measuring section through the first hook groove.

7. The mounting mechanism according to claim 6, characterized in that: The first hook groove comprises: A first component segment, wherein a first opening is provided on one side of the first component segment; The second component segment is located at the lower side of the first component segment, and the top of the second component segment is communicated with the side of the first component segment away from the first opening.

8. The mounting mechanism according to claim 7, characterized in that: A limiting protrusion is provided on at least one side of the top of the first constituent segment.

9. The mounting mechanism according to claim 7 or 8, characterized in that: The temperature measuring component further includes a connecting wire, which is connected to the non-temperature measuring section, and the mounting mechanism further includes: At least one second fixing member is fixedly connected to the first mounting member, the second fixing member is provided with a second hook groove, and the second fixing member is hooked and matched with the connecting line through the second hook groove.

10. The mounting mechanism according to claim 9, characterized in that: There are multiple second fixing members, and the multiple second fixing members are arranged in sequence and at intervals; The mounting mechanism further comprises: The second mounting member is spaced apart from the first mounting member, and a side of the second mounting member close to the first mounting member is fixedly connected to the plurality of second fixing members respectively, and a side of the second mounting member away from the first mounting member is connected to the moving mechanism.

11. A temperature measuring device, characterized in that: include: Temperature measuring parts; The mounting mechanism according to any one of claims 1 to 10, detachably connected to the temperature measuring element; The moving mechanism is connected to the mounting mechanism, and the moving mechanism is configured to drive the mounting mechanism to move horizontally.

Images