Lifting mechanism and temperature measuring equipment

Abstract

The utility model relates to the technical field of semiconductor processing, in particular to a lifting mechanism and temperature measuring equipment, and solves the problem that height positioning is difficult to accurately perform due to the fact that a temperature measuring device is moved up and down in a bare-handed carrying mode in related technologies. The lifting mechanism comprises the supporting assembly, the connecting piece, the lifting driving assembly and the at least one limiting structure, the connecting piece can be driven to ascend and descend through the lifting driving assembly, then the temperature measuring device is driven to ascend and descend, the manual carrying mode is replaced, the operation difficulty can be effectively lowered, the time consumed for position adjustment is shortened, and the working efficiency is improved. The height of the connecting piece and the height of the temperature measuring device on the connecting piece can be accurately positioned through the limiting structure, so that the operation error is effectively reduced, and the temperature data of the constant-temperature area of each furnace tube can be accurately and timely acquired.

Description

Technical Field

[0001] The present disclosure relates to the technical field of semiconductor processing, and in particular to a lifting mechanism and a temperature measuring device. Background Art

[0002] After the semiconductor diffusion equipment has undergone several process steps, in order to ensure that the semiconductor diffusion equipment (such as horizontal furnace equipment or vertical furnace equipment) is heated evenly, thereby improving the quality rate of process products, it is usually necessary to use a temperature measuring device to measure and calibrate the temperature of the constant temperature zones of multiple furnace tubes in the semiconductor diffusion equipment in turn.

[0003] At present, the temperature measuring device is often moved up and down by hand, which is inconvenient and time-consuming to operate. It is difficult to accurately position the height, the operation error is large, and the temperature data of the constant temperature zone of each furnace tube cannot be accurately and timely obtained. Utility Model Content

[0004] In view of this, the embodiments of the present disclosure provide a lifting mechanism and a temperature measuring device, which solve the problem in the related art that it is difficult to accurately position the temperature measuring device by moving it up and down manually.

[0005] In a first aspect, an embodiment of the present disclosure provides a lifting mechanism, which is applied to a temperature measuring device, wherein the temperature measuring device includes a temperature measuring device; wherein the lifting mechanism includes: a support assembly; a connecting member, which is slidably connected to the support assembly and is used to connect the temperature measuring device; a lifting drive assembly, which is arranged on the support assembly and connected to the connecting member, and the lifting drive assembly is configured to drive the connecting member to lift and lower; at least one limiting structure, which is arranged on the support assembly, and the limiting structure has a locked state and an unlocked state; in the locked state, the limiting structure is connected to the connecting member to lock the position of the connecting member, and in the unlocked state, the limiting structure is disengaged from the connecting member.

[0006] In some embodiments, there are multiple limiting structures, and the multiple limiting structures are arranged at intervals in the vertical direction.

[0007] In some embodiments, the side wall of the connector has a positioning pin hole; the limiting structure includes: a spring pin assembly, connected to the support assembly and extending toward the positioning pin hole; wherein, in the locked state, the spring pin assembly is plugged into and fitted with the positioning pin hole, and in the unlocked state, the spring pin assembly is disengaged from the positioning pin hole.

[0008] In some embodiments, the spring pin assembly includes: a sleeve structure fixedly connected to the support assembly, wherein the sleeve structure is provided with a first locking pin hole at one end close to the connecting member and a second locking pin hole at one end away from the connecting member; a sliding locking pin slidably arranged in the sleeve structure, wherein the first end of the sliding locking pin faces the first locking pin hole and the second end of the sliding locking pin is passed through the second locking pin hole; a first limit block located on the outside of the sleeve structure and fixedly connected to the second end of the sliding locking pin; and an elastic member connected to the sliding locking pin, wherein the elastic member is configured to provide an elastic force to the sliding locking pin toward the first locking pin hole.

[0009] In some embodiments, a first mating hole and a second mating hole are provided on one side of the sleeve structure close to the first limit block, and the depth of the first mating hole is greater than the depth of the second mating hole; the spring pin assembly also includes a fixing pin, the first end of the fixing pin is fixedly connected to the first limit block, and the second end of the fixing pin is plugged into and matched with the first mating hole or the second mating hole; when the second end of the fixing pin is plugged into and matched with the first mating hole, the first end of the sliding lock pin is located on the outside of the sleeve structure, and when the second end of the fixing pin is plugged into and matched with the second mating hole, the first end of the sliding lock pin is located on the inside of the sleeve structure.

[0010] In some embodiments, the sleeve structure includes: a sleeve fixing seat, fixedly connected to the support assembly, the sleeve fixing seat is provided with the first locking pin hole; a second limiting block, provided with the second locking pin hole; a cylinder, one end of the cylinder is fixedly connected to the sleeve fixing seat, the other end of the cylinder is fixedly connected to the second limiting block, the inner hole of the cylinder is respectively connected to the first locking pin hole and the second locking pin hole, and the cylinder is sleeved on the outside of the sliding locking pin.

[0011] In some embodiments, the lifting drive assembly includes: a first synchronous belt assembly, vertically arranged on the support assembly, the first synchronous belt assembly includes a first belt body, and the first belt body is fixedly connected to the connecting member; a manual wheel, rotatably arranged on the support assembly and transmission connected to the first synchronous belt assembly.

[0012] In some embodiments, the first synchronous belt assembly also includes a first fixed seat, a second fixed seat, a first synchronous wheel and a second synchronous wheel, the first fixed seat and the second fixed seat are arranged vertically and are fixedly connected to the support assembly respectively, the first synchronous wheel is rotatably connected to the first fixed seat, the second synchronous wheel is rotatably connected to the second fixed seat, one of the first synchronous wheel and the second synchronous wheel is transmission connected to the manual wheel, and the first belt body is simultaneously wrapped around the outside of the first synchronous wheel and the second synchronous wheel.

[0013] In some embodiments, the lifting drive assembly also includes: a second synchronous belt assembly, the second synchronous belt assembly includes a third synchronous wheel, a fourth synchronous wheel and a second belt body, the third synchronous wheel is coaxially connected to the first synchronous wheel or the second synchronous wheel, the fourth synchronous wheel is rotatably connected to the support assembly and is coaxially connected to the manual wheel, and the second belt body is simultaneously wrapped around the outside of the third synchronous wheel and the fourth synchronous wheel.

[0014] In a second aspect, an embodiment of the present disclosure provides a temperature measurement device, comprising: a temperature measuring device; and a lifting mechanism as described in the first aspect, connected to the temperature measuring device.

[0015] The embodiments of the present disclosure provide a lifting mechanism and a temperature measuring device, which can drive the connection piece to lift and lower through a lifting drive assembly, thereby driving the temperature measuring device to lift and lower, replacing the manual carrying method, which can effectively reduce the difficulty of operation and the time spent on position adjustment. In addition, the connection piece and the temperature measuring device on the connection piece can be accurately positioned in height through a limiting structure, effectively reducing operating errors, which is conducive to accurately and timely obtaining the temperature data of the constant temperature zone of each furnace tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 Shown is a schematic diagram of the structure of a temperature measuring device provided in one embodiment of the present disclosure.

[0017] Figure 2 Shown is a schematic diagram of the internal structure of a lifting mechanism provided in one embodiment of the present disclosure.

[0018] Figure 3 Shown is a top view of a lifting mechanism provided in one embodiment of the present disclosure.

[0019] Figure 4 Shown Figure 3 View of the AA section.

[0020] Figure 5 Shown is an exploded view of a lifting mechanism provided in one embodiment of the present disclosure.

[0021] Figure 6 Shown is a cross-sectional view of a limiting structure provided in one embodiment of the present disclosure.

[0022] Figure 7 Shown is an exploded view of a limiting structure provided in an embodiment of the present disclosure.

[0023] Figure 8 Shown is a schematic structural diagram of a lifting drive assembly provided in one embodiment of the present disclosure.

[0024] Fig. 9Shown is a cross-sectional view of a guide wheel mounting structure in a counterweight assembly provided in an embodiment of the present disclosure.

[0025] Fig.10 Shown is a schematic diagram showing a tensioning structure in a lifting mechanism provided in an embodiment of the present disclosure.

[0026] Fig.11 Shown is a schematic diagram of a counterweight assembly provided in one embodiment of the present disclosure.

[0027] Fig.12 Shown is a schematic diagram of an application scenario of a temperature measurement device provided by an embodiment of the present disclosure.

[0028] Reference numerals:

[0029] 100, temperature measuring element; 200, mounting mechanism; 300, moving mechanism; 400, lifting mechanism; 410, supporting assembly; 4101, fixing bracket; 4102, bottom bracket; 4103, first panel; 4104, second panel; 4105, third panel; 4106, fourth panel; 4107, top panel; 4108, bottom panel; 4109, walking wheel; 4110, lifting rail; 4111, lifting slider; 4112, lifting fixed plate; 4113, fixing block; 420, connecting piece; 421, positioning pin hole; 430, lifting drive assembly; 4310, first synchronous belt assembly; 4311, first belt body; 4312, first fixed seat; 4313, second fixed seat; 4314, first synchronous wheel; 4315, second synchronous wheel; 4320, manual wheel; 4330, second synchronous belt assembly; 433 1. The third synchronous wheel; 4332. The fourth synchronous wheel; 4333. The second belt body; 4334. The third fixed seat; 440. The limiting structure; 4410. The sleeve structure; 4411. The sleeve fixed seat; 4412. The cylinder; 4413. The second limiting block; 4414. The first matching hole; 4415. The second matching hole; 4420. The sliding lock pin; 4430. The first limiting block; 4440. The elastic member; 4450. Fixing pin; 4501, first fixing plate; 4502, first bolt; 4503, second fixing plate; 4504, second bolt; 4505, third fixing plate; 4506, third bolt; 460, counterweight assembly; 461, counterweight; 462, guide wheel; 463, traction rope; 464, wheel seat; 465, guide cover; 610, control panel; 620, electric cabinet; 700, diffusion equipment; 710, furnace tube. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0031] After the semiconductor diffusion equipment 700 performs several process steps, in order to ensure that the semiconductor diffusion equipment 700 (such as a horizontal furnace equipment or a vertical furnace equipment) is heated evenly, thereby improving the quality rate of the process products, it is usually necessary to use a temperature measuring device to measure and calibrate the temperature of the constant temperature zones of multiple furnace tubes 710 of the semiconductor diffusion equipment 700 in turn.

[0032] At present, the temperature measuring device is often moved up and down by hand, which is inconvenient and time-consuming to operate, difficult to accurately position at a high position, and has large operating errors. It is also impossible to accurately and timely obtain the temperature data of the constant temperature zone of each furnace tube 710.

[0033] In response to the above-mentioned problems, the embodiment of the present disclosure provides a lifting mechanism 400 and a temperature measuring device, which can drive the connecting piece 420 to rise and fall through the lifting drive assembly 430, thereby driving the temperature measuring device to rise and fall, replacing the method of manual carrying, which can effectively reduce the difficulty of operation and the time spent on position adjustment. In addition, the connecting piece 420 and the temperature measuring device on the connecting piece 420 can be accurately positioned in height through the limiting structure 440, effectively reducing operating errors, which is conducive to accurately and timely obtaining the temperature data of the constant temperature zone of each furnace tube 710.

[0034] Combine the following Figures 1 to 12 The lifting mechanism 400 according to the embodiment of the present disclosure is described.

[0035] The lifting mechanism 400 of the embodiment of the present disclosure is applied to a temperature measuring device, and the temperature measuring device includes a temperature measuring device.

[0036] Combination Figures 1 to 5 The lifting mechanism 400 includes a support assembly 410, a connector 420, a lifting drive assembly 430 and at least one limiting structure 440. The connector 420 is slidably connected to the support assembly 410, and the connector 420 is used to connect the temperature measuring device. The lifting drive assembly 430 is disposed on the support assembly 410 and connected to the connector 420. The lifting drive assembly 430 is configured to drive the connector 420 to rise and fall. The limiting structure 440 is disposed on the support assembly 410, and the limiting structure 440 has a locked state and an unlocked state. In the locked state, the limiting structure 440 is connected to the connector 420 to lock the position of the connector 420. In the unlocked state, the limiting structure 440 is separated from the connector 420.

[0037] When the temperature measuring device is working, the operator can manually drive the lifting drive assembly 430 to control the lifting movement of the connecting member 420, thereby driving the temperature measuring device to lift and lower. After the temperature measuring device reaches the predetermined measuring position, the limiting structure 440 performs height positioning, and the temperature of the constant temperature zone of each furnace tube 710 of the semiconductor diffusion device 700 is measured.

[0038] The limiting structure 440 is arranged on the support assembly 410, and is usually located on the lifting path of the connecting member 420. The limiting structure 440 has two states: a locked state and an unlocked state. In the locked state, the limiting structure 440 will form an effective connection or contact with the connecting member 420, thereby limiting its further movement. This connection can be a physical direct connection or an indirect connection achieved through a certain mechanism. In the unlocked state, there is no direct connection or constraint between the limiting structure 440 and the connecting member 420, and the connecting member 420 can freely perform lifting and lowering movements.

[0039] By operating the position limiting structure 440, the switching between the locked and unlocked states can be easily realized. For example, the position limiting structure 440 may adopt a mechanical locking mechanism to realize locking and unlocking through manual operation or mechanical drive. Alternatively, the position limiting structure 440 may also adopt an electric or pneumatic control mechanism to control its locking and unlocking through an electrical signal or a pneumatic signal.

[0040] In addition, the limiting structure 440 can also be used as a safety protection device. When an abnormal situation occurs in the lifting mechanism 400 (such as motor failure, transmission belt breakage, etc.), the limiting structure 440 can be automatically or manually switched to a locked state to prevent the connecting member 420 and the temperature measuring device from falling or being damaged due to loss of support.

[0041] Combination Figure 2 and Figure 4 In some embodiments of the present disclosure, there are multiple limiting structures 440, and the multiple limiting structures 440 are arranged at intervals along the vertical direction. It can be ensured that within the entire lifting range of the lifting mechanism 400, there is a corresponding limiting structure 440 to lock and unlock the connecting member 420.

[0042] Specifically, a plurality of limiting structures 440 are evenly or spaced apart according to specific requirements on the support assembly 410 to form a row vertically. Each limiting structure 440 has a locked state and an unlocked state, and can independently lock or unlock the connector 420.

[0043] When the lifting mechanism 400 needs to stay at a certain height, the operator can select the corresponding limit structure 440 to lock it as needed. In this way, the lifting mechanism 400 can stay stably at multiple different heights to meet different application requirements.

[0044] Through a plurality of limiting structures 440 arranged at intervals in the vertical direction, the lifting mechanism 400 of the present disclosure is further improved in terms of safety, stability and flexibility, providing a more reliable and efficient solution for the temperature measurement of the semiconductor diffusion equipment 700.

[0045] Combination Figure 5 , Figure 6 and Figure 7 In some embodiments of the present disclosure, the limiting structure 440 includes a spring pin assembly, which is connected to the support assembly 410 and extends toward the positioning pin hole 421; the spring pin assembly cooperates with the positioning pin hole 421 set on the side wall of the connecting member 420 to achieve a simple and effective locking and unlocking function.

[0046] In the lifting mechanism 400, the spring pin assembly is arranged on the support assembly 410 and corresponds to the positioning pin hole 421 arranged on the side wall of the connecting member 420. When the position of the connecting member 420 needs to be locked, the operator can extend the spring pin assembly by some means (such as manual pressing or mechanical driving) and insert it into the positioning pin hole 421 on the side wall of the connecting member 420. Once the spring pin assembly is plugged into the positioning pin hole 421, the position of the connecting member 420 will be firmly locked and cannot be lifted or lowered further.

[0047] When it is necessary to unlock the connector 420, the operator can shrink the spring pin assembly in the same or different manner to disengage from the positioning pin hole 421. Once the spring pin assembly is separated from the positioning pin hole 421, the connector 420 can freely perform lifting and lowering movements.

[0048] The matching mode of the spring pin assembly and the positioning pin hole 421 has the advantages of simple structure, convenient operation, reliable locking, etc. It can not only effectively prevent the connecting member 420 from accidentally moving or falling off during the lifting process, but also quickly realize the locking and unlocking operation, thereby improving the use efficiency and convenience of the lifting mechanism 400.

[0049] In some embodiments of the present disclosure, the spring pin assembly includes a sleeve structure 4410 , a sliding locking pin 4420 , a first limiting block 4430 and an elastic member 4440 .

[0050] The sleeve structure 4410 serves as the basic support part of the spring pin assembly and is fixedly connected to the support assembly 410. The sleeve structure 4410 is provided with a first locking pin hole at one end close to the connecting member 420 and a second locking pin hole at one end away from the connecting member 420, allowing the sliding locking pin 4420 to slide in the sleeve structure 4410 and interact with the external structure through the first locking pin hole and the second locking pin hole.

[0051] The sliding lock pin 4420 is slidably disposed in the sleeve structure 4410. Its first end faces the first lock pin hole, and the second end is penetrated in the second lock pin hole, so that the sliding lock pin 4420 can slide in the sleeve structure 4410 under the action of external force, thereby achieving plugging or disengagement with the positioning pin hole 421.

[0052] The first limit block 4430 is located outside the sleeve structure 4410 and is fixedly connected to the second end of the sliding lock pin 4420. By operating the first limit block 4430, the operator can conveniently control the sliding of the sliding lock pin 4420, thereby locking or unlocking the connecting member 420.

[0053] The elastic member 4440 is connected to the sliding lock pin 4420 and is configured to provide an elastic force toward the first lock pin hole to the sliding lock pin 4420. In this embodiment, the elastic member 4440 is a compression spring, which is sleeved on the outer side of the pin body of the sliding lock pin 4420. One end of the compression spring abuts against the lock pin convex ring on the outer side of the sliding lock pin 4420, and the other end abuts against the sleeve structure 4410. This design enables the compression spring to push the sliding lock pin 4420 to automatically return to the initial position, that is, toward the direction of the first lock pin hole, when the external force disappears.

[0054] In addition, optionally, the sleeve structure 4410 may further include a sleeve fixing seat 4411, a cylinder 4412 and a second stopper 4413. The sleeve fixing seat 4411 is fixedly connected to the support assembly 410 and is provided with a first lock pin hole. The cylinder 4412 is fixedly arranged on a side of the sleeve fixing seat 4411 away from the connecting member 420 and is aligned with the first lock pin hole, and its inner hole is connected to the first lock pin hole. The second stopper 4413 is fixedly connected to an end of the cylinder 4412 away from the sleeve fixing seat 4411 and is provided with a second lock pin hole, and the sliding lock pin 4420 can be slidably penetrated in the second lock pin hole, and the second stopper 4413 abuts against an end of the elastic member 4440 away from the lock pin convex ring toward the side of the sleeve fixing seat 4411.

[0055] In this embodiment, the spring pin assembly realizes a simple, reliable and efficient locking and unlocking function. When the connecting member 420 needs to be locked, the operator can slide the sliding lock pin 4420 outward through the first limit block 4430, and then release the external force, and the sliding lock pin 4420 is inserted into the positioning pin hole 421 under the push of the compression spring. When unlocking is required, the first limit block 4430 is operated again to disengage the sliding lock pin 4420 from the positioning pin hole 421.

[0056] The lifting mechanism 400 disclosed in the present invention realizes a simple, reliable and efficient locking and unlocking function by adopting the above-mentioned spring pin assembly structure, thereby providing safer and more stable support for the temperature measurement of the semiconductor diffusion equipment 700.

[0057] Combination Figure 7 In some embodiments of the present disclosure, a first matching hole 4414 and a second matching hole 4415 are provided on one side of the sleeve structure 4410 close to the first limiting block 4430, and the depth of the first matching hole 4414 is greater than that of the second matching hole 4415;

[0058] The spring pin assembly also includes a fixing pin 4450, a first end of which is fixedly connected to the first limit block 4430, and a second end of the fixing pin 4450 is plugged into and matched with the first matching hole 4414 or the second matching hole 4415; when the second end of the fixing pin 4450 is plugged into and matched with the first matching hole 4414, the first end of the sliding lock pin 4420 is located on the outside of the sleeve structure 4410, and when the second end of the fixing pin 4450 is plugged into and matched with the second matching hole 4415, the first end of the sliding lock pin 4420 is located on the inside of the sleeve structure 4410.

[0059] The sleeve structure 4410 is provided with a first matching hole 4414 and a second matching hole 4415 on one side close to the first limit block 4430. The first matching hole 4414 is deeper than the second matching hole 4415, so that the fixing pin 4450 can be plugged into the matching holes of different depths, thereby adjusting the extension length of the sliding locking pin 4420.

[0060] The first end of the fixing pin 4450 is fixedly connected to the first limiting block 4430, and the second end is plugged into the first matching hole 4414 or the second matching hole 4415. By rotating the first limiting block 4430, the fixing pin 4450 can be aligned with different matching holes (the first matching hole 4414 or the second matching hole 4415) and inserted therein.

[0061] When the second end of the fixing pin 4450 is plugged into the first matching hole 4414, the first end of the sliding locking pin 4420 (i.e., the end facing the first locking pin hole) will be located outside the sleeve structure 4410 and extend out of the first locking pin hole. At this time, the sliding locking pin 4420 can be plugged into the positioning pin hole 421 on the connecting member 420 to achieve the locking function.

[0062] When the second end of the fixing pin 4450 is plugged into the second matching hole 4415, the first end of the sliding locking pin 4420 will be located inside the sleeve structure 4410 and will not extend out of the first locking pin hole. In this way, the sliding locking pin 4420 will not interfere with the lifting and lowering movement of the connecting member 420, so that the lifting mechanism 400 can be freely lifted and lowered when locking is not required.

[0063] Optionally, both the first matching hole 4414 and the second matching hole 4415 are blind holes, or the first matching hole 4414 is a through hole, and the second matching hole 4415 is a blind hole.

[0064] In this embodiment, the extension length of the sliding lock pin 4420 can be flexibly adjusted according to actual needs to achieve the switching of the locking and unlocking functions. At the same time, the flexibility and applicability of the lifting mechanism 400 are increased, so that it can adapt to more application scenarios.

[0065] In some embodiments, guide slopes are respectively provided on both sides of the top and bottom of the connecting member 420. When the connecting member 420 moves vertically upward or vertically downward to contact the sliding locking pin 4420, the sliding locking pin 4420 can be automatically retracted under the pushing action of the guide slopes until the sliding locking pin 4420 contacts the side walls of the connecting member 420 and is aligned with the positioning pin hole 421 and inserted into the positioning pin hole 421 to achieve locking.

[0066] Combination Figure 5 In some embodiments of the present disclosure, the support assembly 410 includes a frame, a first panel 4103 disposed outside the frame, a second panel 4104, a third panel 4105, a fourth panel 4106, a top panel 4107 and a bottom panel 4108.

[0067] The rack includes a fixed bracket 4101 and a bottom bracket 4102. The fixed bracket 4101 is a rectangular parallelepiped frame with a solid structure and sufficient load-bearing capacity to support the entire lifting mechanism 400 and the temperature measuring equipment connected thereto. The bottom bracket 4102 is designed as a horizontally arranged rectangular frame to provide a stable bottom support for the entire mechanism. The upper side of the bottom bracket 4102 is connected to the bottom end of the fixed bracket 4101 by welding or other fixed connection methods to ensure the overall stability and structural strength of the rack. The first panel 4103, the second panel 4104, the third panel 4105 and the fourth panel 4106 are respectively installed on the four side walls of the fixed bracket 4101. Among them, the first panel 4103 and the second panel 4104 are arranged relative to each other, and the third panel 4105 and the fourth panel 4106 are also arranged relative to each other. These panels not only provide additional support and protection for the lifting mechanism 400, but also close the side of the rack, enhancing the overall aesthetics and safety. The top panel 4107 is arranged on the top of the frame, which can cover the top opening of the fixed bracket 4101 and protect the internal mechanism and the connector 420 from the intrusion of dust and other debris. The bottom panel 4108 is arranged on the upper side of the bottom bracket 4102, which provides a complete enclosure for the bottom bracket 4102 and also helps to increase the load-bearing capacity of the entire support assembly 410. The connector 420 is slidably connected to the frame and can slide vertically along the frame. The lifting drive assembly 430 is arranged on the frame. The operator can manually turn the manual wheel 4320 of the lifting drive assembly 430, and after transmission and conversion, the connector 420 is driven to perform lifting and lowering movements. This manual driving method is simple and intuitive, and is convenient for operators to operate.

[0068] In this embodiment, the frame adopts a combination design of a cuboid frame and a rectangular frame, combined with the closure of multiple panels, so that the entire support assembly 410 has a stable structure and can withstand a large load, ensuring the stable operation of the lifting mechanism 400; the setting of the lifting drive assembly 430 allows the operator to drive the connecting member 420 to perform lifting movements through simple manual operations. The operation process is intuitive and convenient, reducing the difficulty of operation; the sliding connection between the connecting member 420 and the frame can achieve precise lifting movements, so that the temperature measuring device can accurately reach the predetermined measurement position, thereby improving the accuracy of the measurement.

[0069] In this embodiment, the bottom bracket 4102 is also provided with a plurality of running wheels 4109. Optionally, the running wheels 4109 are made of wear-resistant and non-slip materials, which can ensure the stability and safety of the lifting mechanism 400 during movement. By installing the running wheels 4109, the operator can easily push the lifting mechanism 400 to move to different working positions, thereby improving the flexibility and convenience of the equipment. The design of the running wheels 4109 of the bottom bracket 4102 enables the lifting mechanism 400 to be easily moved to different working positions, thereby improving the flexibility and work efficiency of the equipment.

[0070] The running wheel 4109 is an important component of the bottom bracket 4102 of the lifting mechanism 400, and is responsible for realizing the convenient movement of the equipment. However, if the running wheel 4109 is used for movement only, after reaching the predetermined position, the equipment may slide or shift due to uneven ground or external force. Therefore, the running wheel 4109 in this embodiment is preferably a brake wheel, and the brake wheel structure is based on the ordinary running wheel or universal wheel, and a brake device is added. When the lifting mechanism 400 moves to the desired position, the operator can simply operate the brake device to limit the rotation of the running wheel 4109, so as to achieve stable parking. Not only the convenience of movement brought by the running wheel 4109 is retained, but also the stability of the equipment when parked is greatly improved. Further, the running wheel 4109 is provided with an adjustment structure, and the adjustment structure is, for example, a screw structure, and the support height of the running wheel 4109 can be adjusted by the adjustment structure, so as to facilitate adjustment when the ground is uneven or tilted to achieve stable support.

[0071] In some embodiments, the support assembly 410 further includes a lifting rail 4110 and a lifting slider 4111 .

[0072] The lifting rails 4110 and the lifting sliders 4111 are both located on the side of the first panel 4103 close to the second panel 4104. A pair of lifting rails 4110 are arranged in parallel on the side of the fixed bracket 4101 close to the first panel 4103 to ensure the stability of the lifting mechanism 400 during the lifting process. Each lifting rail 4110 is correspondingly slidably connected to at least one lifting slider 4111, and the lifting slider 4111 can slide freely on the lifting rail 4110. The connecting member 420 is connected to the lifting slider 4111, so that the connecting member 420 can be lifted and lowered as the lifting slider 4111 slides. When the number of the lifting sliders 4111 is more than two, each lifting slider 4111 is respectively connected to the connecting member 420.

[0073] Combination Figure 5 and Figure 8In some embodiments of the present disclosure, the lifting drive assembly 430 includes a first synchronous belt assembly 4310, which is vertically arranged inside the support assembly 410. The first synchronous belt assembly 4310 includes a first belt body 4311, which is fixedly connected to the connecting member 420. When the first belt body 4311 moves, it can drive the connecting member 420 to perform corresponding lifting and lowering movements.

[0074] The first belt body 4311 is directly fixedly connected to the connecting member 420; or, the lifting drive assembly 430 also includes a fixed block 4113, the first belt body 4311 is fixedly connected to the fixed block 4113, and the fixed block 4113 is fixedly connected to the connecting member 420 by bolt connection or welding; or, the lifting drive assembly 430 also includes a fixed block 4113 and a lifting fixed plate 4112, the first belt body 4311 is fixedly connected to the fixed block 4113, the lifting fixed plate 4112 and the fixed block 4113 are clamped on both sides of the first belt body 4311, and the lifting fixed plate 4112 is fixedly connected to the connecting member 420 and the fixed block 4113 respectively.

[0075] Optionally, when the lifting drive assembly 430 also includes a fixed block 4113 and the number of lifting sliders 4111 is two, the two lifting sliders 4111 are respectively fixedly connected to the connecting member 420, and the fixed block 4113 is located between the two lifting sliders 4111 and fixedly connected to the middle protrusion of the connecting member 420.

[0076] Optionally, the first panel 4103 is provided with a vertical slide. When the first belt 4311 is directly fixedly connected to the connecting member 420, the vertical slide can be used as a slideway for the connecting position of the connecting member 420 and the first belt 4311; when the first belt 4311 is fixedly connected to the fixed block 4113, and the fixed block 4113 is fixedly connected to the connecting member 420, the vertical slide serves as a slideway for the connecting position of the connecting member 420 and the fixed block 4113; when the first belt 4311 is fixedly connected to the fixed block 4113, the lifting and fixing plate 4112 is clamped on both sides of the first belt 4311, and the lifting and fixing plate 4112 is fixedly connected to the connecting member 420 and the fixed block 4113 respectively, the vertical slide serves as a slideway for the connecting position of the lifting and fixing plate 4112 and the connecting member 420.

[0077] Combination Figure 8 In some embodiments of the present disclosure, the lifting drive assembly 430 further includes a manual wheel 4320. The manual wheel 4320 is rotatably disposed at an appropriate position of the support assembly 410, so that the operator can hold and rotate the manual wheel 4320. The manual wheel 4320 is transmission-connected to the first synchronous belt assembly 4310, and this transmission connection mode can be direct or indirect, for example, through a series of transmission gears or transmission belts.

[0078] When the operator turns the manual wheel 4320, the power of the manual wheel 4320 is transmitted to the first synchronous belt assembly 4310, so that the first belt body 4311 of the first synchronous belt assembly 4310 starts to rotate. Since the first belt body 4311 is directly or indirectly fixedly connected to the connecting member 420, when the first belt body 4311 rotates, the connecting member 420 will also rise and fall, thereby driving the temperature measuring device to perform corresponding lifting and lowering movements. The operator can achieve lifting and lowering control of the temperature measuring device through simple manual operation, which greatly improves the convenience of operation and lifting and lowering efficiency.

[0079] The lifting drive assembly 430 disclosed in the present invention realizes convenient lifting control of the temperature measuring device through the first synchronous belt assembly 4310 and the manual wheel 4320, etc., which not only improves the convenience of operation and lifting efficiency, but also enhances the safety and stability of the lifting mechanism 400.

[0080] Combination Figure 8 In some embodiments of the present disclosure, the first synchronous belt assembly 4310 further includes a first fixed seat 4312 , a second fixed seat 4313 , a first synchronous wheel 4314 and a second synchronous wheel 4315 .

[0081] The first fixing seat 4312 and the second fixing seat 4313 are arranged vertically and are respectively fixedly connected to the supporting assembly 410. The first synchronous wheel 4314 is rotatably connected to the first fixing seat 4312, and the second synchronous wheel 4315 is rotatably connected to the second fixing seat 4313.

[0082] One of the first synchronous wheel 4314 and the second synchronous wheel 4315 is connected to the manual wheel 4320. Specifically, the first synchronous wheel 4314 can be directly connected to the manual wheel 4320, or can be indirectly connected to the manual wheel 4320 through a series of transmission mechanisms. This transmission connection method ensures that when the manual wheel 4320 rotates, it can drive the corresponding synchronous wheel to rotate, thereby driving the first belt body 4311 to move.

[0083] The first belt body 4311 is wound around the outside of the first synchronous wheel 4314 and the second synchronous wheel 4315. This winding method allows the first belt body 4311 to move with the rotation of the synchronous wheels, thereby achieving power transmission. At the same time, since the belt body is wound around the two synchronous wheels, the first belt body 4311 can move continuously and smoothly.

[0084] When the operator turns the manual wheel 4320, the power of the manual wheel 4320 is transmitted to the synchronous wheel (the first synchronous wheel 4314 or the second synchronous wheel 4315) connected thereto, causing the synchronous wheel to start rotating. Since the first belt body 4311 is wound around two synchronous wheels at the same time, when one synchronous wheel rotates, it will drive the first belt body 4311 to move along the periphery of the synchronous wheel. As the first belt body 4311 moves, the connecting member 420 fixedly connected thereto will also rise and fall, thereby driving the temperature measuring device to perform corresponding rising and falling movements.

[0085] The lifting drive assembly 430 and the first synchronous belt assembly 4310 of the present disclosure realize the smooth and accurate lifting and lowering control of the temperature measuring device through the first fixed seat 4312, the second fixed seat 4313, the first synchronous wheel 4314 and the second synchronous wheel 4315. This not only improves the stability and reliability of the lifting mechanism 400, but also enhances the convenience and efficiency of operation.

[0086] Combination Figure 8 In some embodiments of the present disclosure, the lifting drive assembly 430 also includes a second synchronous belt assembly 4330, the second synchronous belt assembly 4330 includes a third synchronous wheel 4331, a fourth synchronous wheel 4332 and a second belt body 4333, the third synchronous wheel 4331 is coaxially connected to one of the first synchronous wheel 4314 and the second synchronous wheel 4315, the fourth synchronous wheel 4332 is rotatably connected to the support assembly 410, and is coaxially connected to the manual wheel 4320, and the second belt body 4333 is simultaneously wrapped around the outside of the third synchronous wheel 4331 and the fourth synchronous wheel 4332.

[0087] In this embodiment, the fourth synchronous wheel 4332 is rotatably connected to the support assembly 410 and is coaxially connected to the manual wheel 4320. This arrangement enables the manual wheel 4320 to directly drive the fourth synchronous wheel 4332 to rotate when rotating. Since the fourth synchronous wheel 4332 is coaxial with the manual wheel 4320, it is possible to ensure that the power of the manual wheel 4320 can be fully and effectively transmitted to the fourth synchronous wheel 4332.

[0088] The second belt body 4333 is simultaneously wound around the outside of the third synchronous wheel 4331 and the fourth synchronous wheel 4332. When the fourth synchronous wheel 4332 is driven by the manual wheel 4320 to rotate, it drives the third synchronous wheel 4331 to rotate through the second belt body 4333, and then transmits power to the connecting member 420 and the temperature measuring device through the first synchronous belt assembly 4310, thereby realizing the lifting function.

[0089] The second synchronous belt assembly 4330 enables the operator to easily control the raising and lowering of the temperature measuring device through simple manual operation, thereby meeting different measurement requirements.

[0090] In addition, the introduction of the second synchronous belt assembly 4330 also makes the lifting mechanism 400 more flexible and diverse in power transmission. By adjusting the transmission ratio and connection method between the first synchronous belt assembly 4310 and the second synchronous belt assembly 4330, different lifting speeds and lifting heights can be achieved, thereby adapting to a wider range of application scenarios.

[0091] In some optional embodiments of the present disclosure, the second synchronous belt assembly 4330 is tilted, the third synchronous wheel 4331 in the second synchronous belt assembly 4330 is coaxially connected to the second synchronous wheel 4315 located at the bottom, and the fourth synchronous wheel 4332 is arranged on the upper side of the third synchronous wheel 4331.

[0092] Specifically, the second synchronous belt assembly 4330 is designed to be tilted, and at the same time, the fourth synchronous pulley is arranged on the upper side of the third synchronous pulley. This makes the setting height of the manual wheel 4320 (coaxially connected to the fourth synchronous pulley) more suitable, which is convenient for the operator to operate. The operator can easily turn the manual wheel 4320 to control the lifting movement of the lifting mechanism 400 without bending over or overextending the arm. The convenience and comfort of operation are enhanced. The operator can complete the lifting operation of the temperature measuring device more easily and efficiently, improving work efficiency and measurement accuracy.

[0093] In this embodiment, the inclination angle and setting position of the second synchronous belt assembly 4330 can be adjusted and optimized according to actual use requirements to achieve the best use effect.

[0094] In this embodiment, the first synchronous belt assembly 4310, the second synchronous belt assembly 4330 and the manual wheel 4320 can change the transmission efficiency by setting different wheel diameters, so as to flexibly adapt to different usage requirements. For example, by increasing the diameter of the manual wheel 4320, the transmission ratio can be improved, and the height of the connecting member 420 is increased for each rotation of the manual wheel 4320, and the lifting efficiency is higher, while reducing the diameter of the manual wheel 4320 can reduce the transmission ratio, and it is more labor-saving when rotating the manual wheel 4320.

[0095] Combination Figure 5 and Fig.10 In some embodiments, the lifting mechanism 400 further includes a tensioning assembly, which is disposed on the supporting assembly 410 , and the tensioning assembly is configured to be able to adjust the tension of at least one of the first belt body 4311 and the second belt body 4333 .

[0096] The belt body (whether the first belt body 4311 or the second belt body 4333) may become loose after long-term use or under the influence of external factors. Such looseness may not only affect the transmission efficiency of the lifting mechanism 400, but also cause instability or errors during the lifting process. Therefore, adjusting the tension of the belt body by the tensioning assembly is of great significance to ensure the stability and reliability of the lifting mechanism 400.

[0097] The specific structure and working principle of the tensioning assembly can be designed according to the actual application requirements. For example, it can be a mechanism that adjusts the belt tension by mechanical means, or it can be a device that achieves automatic tensioning by electric or pneumatic means. During the adjustment process, the tensioning assembly can act on one or more positions of the belt or the synchronous wheel to achieve the purpose of adjusting the tension by increasing or decreasing the tension of the belt.

[0098] The performance and reliability of the lifting mechanism 400 are enhanced by the tensioning assembly, so that the entire lifting mechanism 400 can play a more stable and efficient role in the temperature measurement of the semiconductor diffusion device 700.

[0099] Optionally, the tensioning assembly is configured to be able to adjust the distance between the first synchronous wheel 4314 and the second synchronous wheel 4315 to adjust the tension of the first belt body 4311 .

[0100] Optionally, the tensioning assembly is configured to be able to adjust the distance between the third synchronous wheel 4331 and the fourth synchronous wheel 4332 to adjust the tension of the second belt body 4333 .

[0101] The specific implementation of the tensioning assembly can be designed according to the actual application requirements. For example, it can include a retractable support frame, the two ends of which are respectively connected to the third synchronous wheel 4331 and the fourth synchronous wheel 4332. By adjusting the length of the support frame, the spacing between the synchronous wheels can be conveniently changed. In addition, the tensioning assembly can also include some auxiliary components, such as springs, sliders and locking mechanisms, to achieve fine-tuning and locking functions of the tension.

[0102] In actual application, the operator can change the spacing between the first synchronous wheel 4314 and the second synchronous wheel 4315 or the spacing between the third synchronous wheel 4331 and the fourth synchronous wheel 4332 by adjusting the tensioning assembly according to the actual tension of the first belt body 4311 and the second belt body 4333. When the first belt body 4311 or the second belt body 4333 is too loose, the spacing between the synchronous wheels can be increased to increase the tension; when the first belt body 4311 or the second belt body 4333 is too tight, the spacing between the synchronous wheels can be reduced to reduce the tension. In this way, the tension of the first belt body 4311 and the second belt body 4333 can be flexibly adjusted to ensure the normal operation of the lifting mechanism 400.

[0103] In combination with FIG. , FIG. , and FIG. , in some embodiments, the tensioning assembly includes a first fixing plate 4501 , a first bolt 4502 , a second fixing plate 4503 , a second bolt 4504 , a third fixing plate 4505 , and a third bolt 4506 .

[0104] The first fixing plate 4501, the second fixing plate 4503 and the third fixing plate 4505 are respectively fixed to the supporting assembly 410, the first fixing plate 4501 and the second fixing plate 4503 are arranged vertically, the first fixing plate 4501 is located above the second fixing plate 4503, and the third fixing plate 4505 is located at the rear side of the second fixing plate 4503 and above the second fixing plate 4503. The first fixing plate 4501, the second fixing plate 4503 and the third fixing plate 4505 are respectively provided with threaded holes.

[0105] The first synchronous wheel 4314 is rotatably connected to the first fixed seat 4312 via a rotating shaft, the second synchronous wheel 4315 and the third synchronous wheel 4331 are rotatably connected to the second fixed seat 4313 via a rotating shaft, and the fourth synchronous wheel 4332 is rotatably connected to the third fixed seat 4334 via a rotating shaft. To increase stability, the first fixed seat 4312, the second fixed seat 4313 and the third fixed seat 4334 can be provided in plurality, for example, the third fixed seat 4334 is provided with two, one end of the rotating shaft of the fourth synchronous wheel 4332 is rotatably connected to one of the third fixed seats 4334, and the other end is rotatably connected to the other third fixed seat 4334.

[0106] The first fixing seat 4312, the second fixing seat 4313 and the third fixing seat 4334 are respectively provided with adjustment holes. The first fixing seat 4312 is connected with the threaded hole of the first fixing plate 4501 by means of bolts passing through the adjustment holes thereof, the second fixing seat 4313 is connected with the threaded hole of the second fixing plate 4503 by means of bolts passing through the adjustment holes thereof, and the third fixing seat 4334 is connected with the threaded hole of the third fixing plate 4505 by means of bolts passing through the adjustment holes thereof. In this embodiment, the adjustment hole can be set as a long hole structure extending vertically, and the relative position adjustment can be achieved by adjusting the position of the bolt in the adjustment hole. Alternatively, a plurality of vertically arranged adjustment holes can be set on the first fixing seat 4312, the second fixing seat 4313 and the third fixing seat 4334, respectively, and the relative position adjustment can be achieved by replacing the adjustment holes.

[0107] The first bolt 4502 is threadedly connected to the first fixing plate 4501, the first bolt 4502 faces the direction away from the second fixing plate 4503, and abuts against the side of the first fixing seat 4312 close to the second fixing seat 4313; the second bolt 4504 is threadedly connected to the second fixing plate 4503, the second bolt 4504 faces the direction away from the first fixing plate 4501, and abuts against the side of the second fixing seat close to the first fixing seat 4312; the third bolt 4506 is threadedly connected to the third fixing plate 4505, the third bolt 4506 is set upward, and abuts against the lower side of the third fixing seat 4334.

[0108] In this embodiment, the tension of the first belt body 4311 can be adjusted by rotating the first bolt 4502 or the second bolt 4504 , and the tension of the second belt body 4333 can be adjusted by rotating the second bolt 4504 or the third bolt 4506 .

[0109] Combination Figure 2 , Figure 5 and Fig.11 In some embodiments, the lifting mechanism 400 further includes a counterweight assembly 460 , which is disposed on the support assembly 410 and connected to the connecting member 420 or the lifting drive assembly 430 . The counterweight assembly 460 is configured to provide an upward pulling force to the connecting member 420 .

[0110] The specific design and implementation of the counterweight assembly 460 can be flexibly adjusted according to actual application requirements. For example, a weight block, a spring or other mechanical structure that can provide stable pulling force can be used. The selection and configuration of these components need to comprehensively consider factors such as the weight, lifting speed, and working environment of the lifting mechanism 400 to ensure that the counterweight assembly 460 can provide just the right pulling force, which is neither too large to cause the lifting mechanism 400 to be overly tight, nor too small to cause the lifting mechanism 400 to shake during the lifting process.

[0111] In practical applications, the temperature measurement device usually has a certain weight, especially when performing high-precision measurements, which may require complex equipment and sensors. If this weight is not properly balanced, it may not only cause the lifting mechanism 400 to shake or become unstable during the lifting process, but may also affect the accuracy and reliability of the temperature measurement.

[0112] The introduction of the counterweight assembly 460 is to solve this problem. The upward pulling force provided by the counterweight assembly 460 balances the gravity of the temperature measuring device as much as possible. In this way, even if the temperature measuring device is heavy, the lifting mechanism 400 can maintain stable and smooth movement, greatly improving the accuracy and reliability of the measurement.

[0113] In addition, the counterweight assembly 460 can also reduce the energy consumption and wear of the lifting mechanism 400 during the lifting process. The energy consumed by the lifting mechanism 400 to overcome gravity is reduced, thereby reducing energy consumption and making it easier for operators to lift the temperature measuring device. At the same time, the friction and wear caused by unbalanced gravity are reduced, extending the service life of the lifting mechanism 400.

[0114] In some embodiments, the counterweight assembly 460 includes a counterweight 461 , a guide wheel 462 , and a traction rope 463 , which work together to provide a stable pulling force and balance gravity to the connecting member 420 .

[0115] The counterweight 461 is usually made of a material with high density and stable quality, such as carbon steel, to ensure that sufficient pulling force can be provided. The design and weight selection of the counterweight 461 need to be accurately calculated according to actual application requirements to achieve effective balance of the gravity of the connecting member 420 and the temperature measuring device.

[0116] The guide wheel 462 is rotatably connected to the support assembly 410 and is located above the connecting member 420 and the counterweight member 461. The setting of the guide wheel 462 enables the traction rope 463 to slide smoothly on its upper side, thereby reducing the friction and resistance of the traction rope 463 during the movement, and improving the efficiency and stability of the entire lifting mechanism 400.

[0117] The traction rope 463 is made of high-strength, wear-resistant material, such as steel wire rope, to ensure that it can maintain good performance during long-term use.

[0118] One end of the traction rope 463 is connected to the counterweight 461 , and the other end is connected to the connecting member 420 , or the traction rope 463 is connected to the fixing block 4113 or the lifting fixing plate 4112 in the lifting drive assembly 430 .

[0119] At the same time, the part of the traction rope 463 located between the counterweight 461 and the connecting member 420 overlaps and cooperates with the upper side of the guide wheel 462. In this way, when the traction rope 463 is subjected to tension, the guiding effect of the guide wheel 462 can make the tension be smoothly transmitted directly to the connecting member 420 or indirectly transmitted to the connecting member 420 through the lifting drive assembly 430.

[0120] In this embodiment, the counterweight assembly 460 can effectively provide an upward pulling force for the connecting member 420, balance the gravity of the temperature measuring device, and keep the lifting mechanism 400 stable and balanced during the lifting process. At the same time, the cooperation between the guide wheel 462 and the traction rope 463 also reduces the friction and resistance during the movement, thereby improving the efficiency and reliability of the lifting mechanism 400.

[0121] Optionally, a plurality of traction ropes 463 are provided, and each of the plurality of traction ropes 463 is correspondingly connected to at least one guide wheel 462 .

[0122] By using multiple traction ropes 463, the pulling force can be effectively dispersed, reducing the force burden of a single traction rope 463, thereby improving the durability and service life of the entire counterweight assembly 460. At the same time, the arrangement of multiple traction ropes 463 also makes the pulling force transmission more uniform and stable, reducing the vibration and shaking caused by uneven force.

[0123] In addition, each traction rope 463 is connected to at least one guide wheel 462, which ensures that all traction ropes 463 can slide smoothly during movement, reducing friction and resistance. The setting of the guide wheel 462 can also guide the traction rope 463 to move along a predetermined path, further improving the stability and accuracy of the lifting mechanism 400.

[0124] In practical applications, the number and arrangement of the traction ropes 463 and the guide wheels 462 can be determined according to specific requirements. For example, the number of traction ropes 463 and the layout of the guide wheels 462 can be selected appropriately according to factors such as the height, weight, and working environment of the lifting mechanism 400 to achieve the best balance and stability.

[0125] Optionally, each traction rope 463 is correspondingly provided with two guide wheels 462 , the two guide wheels 462 are arranged horizontally, and the traction rope 463 passes around the two guide wheels 462 in sequence.

[0126] By providing two guide wheels 462, the traction rope 463 can be better guided and supported during the movement, reducing the risk of wear and breakage caused by friction and uneven force. Secondly, the horizontal arrangement of the guide wheels 462 makes the movement trajectory of the traction rope 463 more stable and smooth, further improving the stability and accuracy of the lifting mechanism 400. In addition, this design also increases the contact area between the traction rope 463 and the guide wheel 462, disperses the force, and thus improves the durability and reliability of the entire counterweight assembly 460.

[0127] Optionally, the counterweight assembly 460 further includes a wheel seat 464, which provides a stable installation foundation for the guide wheel 462. The wheel seat 464 is fixedly arranged on the top of the support assembly 410, specifically fixed to the upper end of the fixed bracket 4101, to ensure the stability and reliability of the guide wheel 462. The rotating shafts of the multiple guide wheels 462 are rotatably connected to the wheel seat 464. This design enables the guide wheel 462 to rotate flexibly when needed, thereby smoothly guiding the movement of the traction rope 463. At the same time, the position and height of the wheel seat 464 can also be adjusted as needed to adapt to different configurations and usage requirements of the lifting mechanism 400.

[0128] Combination Figure 8 , Fig. 9 Optionally, the guide wheel 462 is rotatably connected to the wheel seat 464 through the installation shaft 466 and the first bearing 467. Specifically, the inner ring of the first bearing 467 is sleeved on the outer side of the installation shaft 466, and the guide wheel 462 is sleeved on the outer side of the first bearing 467 and fixedly connected to the outer ring of the first bearing 467. The wheel seat 464 includes a top plate 4641 and two side plates 4642 located below the top plate 4641 and opposite to each other. The two ends of the first bearing 467 are fixedly connected to the two side plates 4642 of the wheel seat 464 respectively.

[0129] Optionally, each mounting shaft 466 is correspondingly provided with a plurality of guide wheels 462, and a limiting cylinder 468 is respectively provided between adjacent guide wheels 462 and between the guide wheel 462 adjacent to the side plate 4642 and the side plate 4642. The limiting cylinder 468 is sleeved on the mounting shaft 466, and the outer diameter of the limiting cylinder 468 is larger than the inner ring diameter of the first bearing 467, so that the limiting cylinder 468 can limit the first bearing 467 to ensure a fixed spacing between the guide wheels 462.

[0130] Optionally, there are two mounting shafts 466, which are arranged in parallel and spaced apart, and two guide wheels 462 are arranged on each mounting shaft 466. There are two traction ropes 463, and eyebolts 469 are respectively arranged at both ends of the traction rope 463, wherein the eyebolt 469 at one end is connected to the counterweight 461, and the eyebolt 469 at the other end is connected to the eyebolt 469 connector, or connected to the fixed block or lifting fixed plate in the lifting drive assembly. The portion of the traction rope 463 located between the eyebolts 469 at both ends is overlapped with a guide wheel 462 of one mounting shaft 466 and the corresponding guide wheel 462 of the other mounting shaft 466.

[0131] Optionally, limiting planes are set on the lower sides of both ends of the mounting shaft 466, and the side plates 4642 of the wheel seat 464 are set with mounting holes. The two ends of the mounting shaft 466 are plugged into the mounting holes, and the limiting planes at both ends of the mounting shaft 466 are located in the mounting holes. The side plates 4642 of the wheel seat 464 are vertically set with limiting screw holes, which are connected with the mounting holes and extend to the lower side walls of the side plates 4642. Limiting bolts 470 are set in the limiting screw holes, and the end of the limiting bolts 470 abuts against the limiting plane, thereby limiting the mounting shaft 466 to prevent the mounting shaft 466 from axial rotation or axial movement and falling off.

[0132] Optionally, the counterweight assembly 460 further includes a guide cover 465, which is vertically arranged and fixedly connected to the support assembly 410 through the first fixing plate 4501 and the second fixing plate 4503, forming a stable space, and the counterweight 461 is slidably arranged in the guide cover 465. The setting of the guide cover 465 effectively constrains the movement trajectory of the counterweight 461, preventing it from shaking or deflecting during the lifting process. In this way, no matter how the lifting mechanism 400 moves, the counterweight 461 can maintain a stable position and direction, ensuring the normal operation of the counterweight assembly 460.

[0133] Optionally, the counterweight assembly 460 is disposed inside the support assembly 410, and is shielded and protected by the first panel 4103, the second panel 4104, the third panel 4105, the fourth panel 4106, the top panel 4107, and the bottom panel 4108. This not only makes the structure of the entire lifting mechanism 400 more compact and beautiful, but also effectively protects the counterweight assembly 460 from the influence of the external environment, such as dust, debris, etc. At the same time, the shielding and protection of the panel also improves the safety of the lifting mechanism 400, and prevents safety accidents caused by accidental touch or misoperation by personnel.

[0134] Combination Figure 1 and Fig.12 The embodiment of the present disclosure also provides a temperature measuring device, including a temperature measuring device and the above-mentioned lifting mechanism 400.

[0135] Since the temperature measuring device includes the lifting mechanism 400 , all technical features and technical effects of the temperature measuring device including the lifting mechanism 400 are not repeated here.

[0136] In some embodiments, the temperature measurement device includes a temperature measuring element 100, a mounting mechanism 200, and a moving mechanism 300, which work together to achieve more flexible and accurate temperature measurement.

[0137] The temperature measuring element 100 is configured to be inserted into the constant temperature zone of the furnace tube 710 of the semiconductor diffusion device 700. The temperature measuring element 100 generally uses a high-precision, high-stability temperature sensor, such as a thermocouple, a thermal resistor, etc., and can obtain real-time temperature data of the constant temperature zone of the furnace tube 710. The design and structure of the temperature measuring element 100 can be customized according to specific application requirements to adapt to different temperature measurement environments and requirements.

[0138] The mounting mechanism 200 is detachably fixedly connected to the temperature measuring element 100, which facilitates the installation and removal of the temperature measuring element 100. This detachable design enables the temperature measuring device to flexibly adapt to different temperature measurement tasks, and the temperature measuring element 100 can be replaced or adjusted as needed. The mounting mechanism 200 can be mechanically connected, threaded, etc. to ensure the stability and reliability of the temperature measuring element 100 during the temperature measurement process.

[0139] The moving mechanism 300 is connected to the mounting mechanism 200 and is configured to drive the mounting mechanism 200 to move back and forth horizontally. The moving mechanism 300 can be driven by electric, pneumatic or mechanical transmission, and can realize the horizontal movement of the mounting mechanism 200 through a driving device (such as a motor, a cylinder, etc.) and a transmission mechanism (such as a lead screw, a guide rail, etc.). This translation function enables the temperature measuring device to move freely in the horizontal direction, so that the temperature of different positions of the semiconductor diffusion device 700 can be measured, which improves the flexibility and efficiency of temperature measurement.

[0140] Through the coordinated work of the temperature measuring element 100, the mounting mechanism 200 and the moving mechanism 300, the temperature measuring device of the disclosed embodiment can achieve more comprehensive and accurate temperature measurement, which not only improves the performance of the temperature measuring device, but also provides a more reliable temperature measurement solution for the heat treatment process in the semiconductor industry.

[0141] In some embodiments, the temperature measuring device also includes a control panel 610 , which is disposed on the support assembly 410 , for example, on the first panel 4103 , the second panel 4104 , the third panel 4105 , or the fourth panel 4106 of the support assembly 410 .

[0142] Optionally, the control panel 610 includes a display screen, the temperature measuring device also includes an electrical cabinet 620, the electrical cabinet 620 includes a temperature control system, the temperature control system is respectively connected to the display screen and the temperature measuring component 100, and the temperature control system is configured to: control the display screen to display the detected temperature information based on the detection signal of the temperature measuring component 100.

[0143] Optionally, the control panel 610 further includes a control key, which is connected to a controller of the moving mechanism 300 , and the controller of the moving mechanism 300 is configured to control the operation of the moving mechanism 300 based on a selection signal of the control key.

[0144] The embodiments indicated by "one embodiment", "an embodiment", etc. mentioned in the specification may include specific features, structures or characteristics, but not every embodiment may include the specific features, structures or characteristics. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when describing specific features, structures or characteristics in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such features, structures or characteristics in conjunction with other embodiments that are explicitly or not explicitly described.

[0145] It should be understood that “on,” “above,” and “over” in this disclosure should be interpreted in the broadest manner, so that “on” not only means “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” not only includes the meaning of “above” or “over,” but also may include the meaning of “above” or “over something” with no intervening features or layers therebetween (i.e., directly on something).

[0146] Additionally, spatially relative terms, such as "below," "below," "beneath," "above," "above," etc., may be used herein for ease of description to describe the relationship of one component or feature to other components or features as shown in the figures. The spatially relative terms are intended to encompass different orientations of the component in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein may likewise be interpreted accordingly.

[0147] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.

[0148] The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present disclosure shall be included in the protection scope of the present disclosure.

Claims

1. A lifting mechanism, characterized in that: Applicable to a temperature measuring device, the temperature measuring device comprising a temperature measuring device; Wherein, the lifting mechanism comprises: Support components; A connecting member, slidably connected to the supporting assembly and used to connect the temperature measuring device; A lifting drive assembly, disposed on the supporting assembly and connected to the connecting member, wherein the lifting drive assembly is configured to drive the connecting member to lift; At least one limiting structure, disposed on the support assembly, the limiting structure having a locked state and an unlocked state; In the locked state, the limiting structure is connected to the connecting member to lock the position of the connecting member, and in the unlocked state, the limiting structure is separated from the connecting member.

2. The lifting mechanism according to claim 1, characterized in that: There are multiple limiting structures, and the multiple limiting structures are arranged at intervals along the vertical direction.

3. The lifting mechanism according to claim 1 or 2, characterized in that: The side wall of the connecting piece has a positioning pin hole; The limiting structure comprises: A spring pin assembly connected to the support assembly and extending toward the positioning pin hole; Wherein, in the locked state, the spring pin assembly is plug-fitted into the positioning pin hole, and in the unlocked state, the spring pin assembly is disengaged from the positioning pin hole.

4. The lifting mechanism according to claim 3, characterized in that: The spring pin assembly comprises: A sleeve structure, fixedly connected to the support assembly, wherein the sleeve structure has a first locking pin hole at one end close to the connecting member and a second locking pin hole at one end away from the connecting member; A sliding lock pin is slidably disposed in the sleeve structure, wherein a first end of the sliding lock pin faces the first lock pin hole, and a second end of the sliding lock pin is inserted into the second lock pin hole; A first limit block, located outside the sleeve structure and fixedly connected to the second end of the sliding lock pin; An elastic member is connected to the sliding lock pin, and the elastic member is configured to provide an elastic force to the sliding lock pin toward the first lock pin hole.

5. The lifting mechanism according to claim 4, characterized in that: A first matching hole and a second matching hole are provided on one side of the sleeve structure close to the first limiting block, and the depth of the first matching hole is greater than the depth of the second matching hole; The spring pin assembly further comprises a fixing pin, a first end of which is fixedly connected to the first limiting block, and a second end of which is plug-fitted to the first matching hole or the second matching hole; When the second end of the fixing pin is plugged into the first matching hole, the first end of the sliding lock pin is located on the outside of the sleeve structure; when the second end of the fixing pin is plugged into the second matching hole, the first end of the sliding lock pin is located on the inside of the sleeve structure.

6. The lifting mechanism according to claim 4 or 5, characterized in that: The sleeve structure comprises: A sleeve fixing seat, fixedly connected to the support assembly, the sleeve fixing seat being provided with the first locking pin hole; A second limiting block is provided with the second locking pin hole; A cylinder, one end of which is fixedly connected to the sleeve fixing seat, the other end of which is fixedly connected to the second limit block, the inner hole of which is respectively connected to the first locking pin hole and the second locking pin hole, and the cylinder is sleeved on the outer side of the sliding locking pin.

7. The lifting mechanism according to claim 1 or 2, characterized in that: The lifting drive assembly comprises: A first synchronous belt assembly, vertically arranged on the supporting assembly, the first synchronous belt assembly comprising a first belt body, and the first belt body is fixedly connected to the connecting member; The manual wheel is rotatably arranged on the supporting assembly and is drivingly connected to the first synchronous belt assembly.

8. The lifting mechanism according to claim 7, characterized in that: The first synchronous belt assembly also includes a first fixed seat, a second fixed seat, a first synchronous wheel and a second synchronous wheel. The first fixed seat and the second fixed seat are arranged vertically and are fixedly connected to the support assembly respectively. The first synchronous wheel is rotatably connected to the first fixed seat, and the second synchronous wheel is rotatably connected to the second fixed seat. One of the first synchronous wheel and the second synchronous wheel is transmission-connected to the manual wheel, and the first belt body is simultaneously wrapped around the outside of the first synchronous wheel and the second synchronous wheel.

9. The lifting mechanism according to claim 8, characterized in that: The lifting drive assembly also includes: A second synchronous belt assembly, the second synchronous belt assembly includes a third synchronous wheel, a fourth synchronous wheel and a second belt body, the third synchronous wheel is coaxially connected to the first synchronous wheel or the second synchronous wheel, the fourth synchronous wheel is rotatably connected to the support assembly and is coaxially connected to the manual wheel, and the second belt body is simultaneously wound around the outside of the third synchronous wheel and the fourth synchronous wheel.

10. A temperature measuring device, characterized in that: include: Temperature measuring device; The lifting mechanism according to any one of claims 1 to 9, connected to the temperature measuring device.

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