Silicon ring visual inspection system

Abstract

The utility model provides a visual inspection system for a silicon ring, which comprises a plane vision mechanism used for carrying out image acquisition detection on plane parts on the front side and the back side of the silicon ring; the side ring surface visual mechanism is used for performing image acquisition detection on a boss side ring surface, a groove side ring surface and an outer ring surface on the front side and the back side of the silicon ring; the inner ring surface vision mechanism is used for carrying out image capturing detection on the inner ring surface of the silicon ring and comprises a camera and a first driver for driving the silicon ring to rotate, and when the silicon ring rotates, the camera captures an image of the inner ring surface of the silicon ring; the multi-axis manipulator is used for taking and placing the silicon ring, and the taking and placing range of the multi-axis manipulator comprises the detection station of the plane vision mechanism, the detection station of the side ring surface vision mechanism and the inner ring surface vision mechanism; and the turn-over mechanism is used for being matched with the multi-axis manipulator to turn over the silicon ring. Through the arrangement, all surfaces of the silicon ring can be comprehensively and automatically detected, the efficiency is high, the structure is compact, and the occupied space is small.

Description

Technical Field

[0001] The utility model relates to the technical field of optical automatic detection, in particular to a silicon ring visual detection system. Background Art

[0002] The silicon ring is an auxiliary component in the integrated circuit manufacturing process. It is mainly used in the etching process to support and fix the silicon wafer. If there is damage on the surface of the silicon ring, impurities will be generated during the etching process, causing contamination to the silicon wafer to be etched, affecting the yield of the final product. Therefore, it is generally necessary to ensure that the surface of the silicon ring is a flawless polished surface. In the traditional silicon ring inspection mode, quality inspectors need to visually observe the surface of the silicon ring or use an optical microscope to determine whether it is qualified. This manual inspection mode has the disadvantages of low efficiency, low detection accuracy, and high cost. In addition, the surface of the silicon ring generally has a ring groove structure, so the silicon ring needs to be inspected in all directions, and there is currently no automated visual inspection equipment for the surface of the silicon ring.

[0003] Therefore, it is necessary to design a silicon ring visual inspection system to solve the above problems. Utility Model Content

[0004] The utility model aims to provide a silicon ring visual inspection system which can comprehensively and automatically inspect all surfaces of the silicon ring.

[0005] To achieve the above purpose, the utility model adopts the following technical solution: a silicon ring visual detection system, which includes

[0006] Planar vision mechanism, used to take images and detect the planar parts on both sides of the silicon ring;

[0007] Side ring surface vision mechanism, used to take images and inspect the boss side ring surface, groove side ring surface and outer ring surface on both sides of the silicon ring;

[0008] An inner ring surface visual mechanism is used to detect the inner ring surface of the silicon ring, and includes a camera and a first drive for driving the silicon ring to rotate. When the silicon ring rotates, the camera takes an image of the inner ring surface of the silicon ring;

[0009] Multi-axis manipulator, used for picking up and placing silicon rings, its picking up and placing range includes the inspection station of the plane vision mechanism, the inspection station of the side ring surface vision mechanism and the inner ring surface vision mechanism;

[0010] The flipping mechanism is used to cooperate with the multi-axis manipulator to flip the silicon ring.

[0011] As a further improved technical solution of the utility model, the turning mechanism includes a bracket and a horizontally arranged shelf disposed on the bracket, and the shelf is provided with a notch penetrating from top to bottom.

[0012] As a further improved technical solution of the utility model, the inner ring surface visual mechanism includes a bearing part, the bearing part is arranged on the first drive, the bearing part includes a support plate and a plurality of vacuum adsorption parts arranged on the support plate, and the vacuum adsorption parts are used to adsorb the silicon ring.

[0013] As a further improved technical solution of the utility model, the bearing part also includes a plurality of pads, and the plurality of pads are distributed in a circle above the support plate. A limit plate is provided on the outer side of each pad. When the silicon ring is placed on the pad, the plurality of limit plates are located on the outer periphery of the silicon ring.

[0014] As a further improved technical solution of the utility model, the inner annular surface visual mechanism also includes a reflector, the viewing angle range of the camera includes the reflective surface of the reflector, and when the silicon ring rotates, the reflective range of the reflector includes the inner annular surface of the silicon ring.

[0015] As a further improved technical solution of the utility model, the inner annular surface visual mechanism also includes a second drive and a movable module, the camera and the reflector are arranged on the second drive and are synchronously lifted and lowered under the drive of the second drive, and the first drive is arranged on the movable module.

[0016] As a further improved technical solution of the utility model, the inner annular surface visual mechanism also includes a light source, and the light source is arranged on the second drive.

[0017] As a further improved technical solution of the utility model, the plane vision mechanism includes a first camera and a first light source, the first camera and the first light source are both arranged on the bracket and located below the shelf, and the lens of the first camera faces downward; the side annular surface vision mechanism includes a second camera and a second light source, and the lens of the second camera faces horizontally.

[0018] As a further improved technical solution of the utility model, the multi-axis manipulator includes multiple connecting shafts and pneumatic fingers, and the pneumatic fingers are supported inside the inner ring of the silicon ring to grasp the silicon ring.

[0019] As a further improved technical solution of the utility model, it also includes a loading mechanism and a unloading mechanism, the loading mechanism includes a loading rack, a loading roller, a material frame for placing silicon rings and a limit block, and the unloading mechanism includes a unloading rack, a unloading roller, a material frame for placing silicon rings and a limit block.

[0020] It can be seen from the above technical scheme that the silicon ring visual inspection system of the utility model realizes visual inspection of the plane parts of the front and back sides of the silicon ring and the side ring surface and outer ring surface parts by setting a multi-axis manipulator to grab the silicon ring to the inspection station of the plane vision mechanism and the side ring surface vision mechanism. The flexible grasping ability and multi-position rotation ability of the multi-axis manipulator enable it to have the functions of both a material transfer mechanism and a detection fixture; the multi-axis manipulator cooperates with different vision mechanisms, which not only has high detection efficiency, but also has a compact overall structure of the equipment and occupies little space; in addition, by setting an inner ring surface vision mechanism to carry and drive the silicon ring to rotate, so as to detect its inner ring surface, the system can realize comprehensive inspection of the appearance of the silicon ring. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a three-dimensional diagram of a silicon ring visual inspection system according to an embodiment of the present invention.

[0022] Figure 2 for Figure 1 Three-dimensional diagram of the feeding mechanism.

[0023] Figure 3 for Figure 1 A three-dimensional diagram of the multi-axis robot.

[0024] Figure 4 for Figure 1 Stereoscopic diagram of the middle flip mechanism and the plane vision mechanism.

[0025] Figure 5 for Figure 1 Stereoscopic view of the mediolateral torus visual mechanism.

[0026] Figure 6 for Figure 1 Partial stereogram of the inner torus visual mechanism.

[0027] Figure 7 for Figure 1 Partial stereogram of the inner torus visual mechanism.

[0028] Figure 8 for Figure 1 Enlarged view of the middle rectangular portion. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention is described in detail below with reference to the accompanying drawings and specific embodiments.

[0030] Please refer to Figure 1 As shown, the utility model provides a silicon ring visual inspection system, which includes a loading mechanism 10, a multi-axis manipulator 20, a flipping mechanism 30, a plane vision mechanism 40, a side ring surface vision mechanism 50, an inner ring surface vision mechanism 60, a qualified product unloading mechanism 71 and a failed product unloading mechanism 72.

[0031] Please also refer to Figure 2 As shown, the feeding mechanism 10 includes a feeding rack 11, a feeding roller 12, a material frame 13 for placing silicon rings, and a stop block 14. When working, the fully loaded material frame 13 is manually placed on the feeding rack 11 and pushed in by the feeding roller 12. When the material frame 13 abuts against the stop block 14 on one side of the feeding rack 11, the material frame 13 is in place. The unloading mechanism includes a qualified product unloading mechanism 71 and a unqualified product unloading mechanism 72. The qualified product unloading mechanism 71 and the unqualified product unloading mechanism 72 have the same structure as the feeding mechanism 10, including an unloading rack, a unloading roller, a material frame for placing silicon rings, and a stop block.

[0032] Please refer to Figure 3 As shown, the multi-axis manipulator 20 is used to pick up and place the silicon ring, and its pick-up and placement range includes the loading mechanism 10, the flipping mechanism 30, the inspection station of the plane vision mechanism 40, the inspection station of the side ring surface vision mechanism 50, the inner ring surface vision mechanism 60, the qualified product unloading mechanism 71 and the unqualified product unloading mechanism 72. Specifically, the multi-axis material transfer manipulator 20 can be a six-axis manipulator, which includes a base 21, a first connecting shaft 22 arranged on the top of the base 21, a second connecting shaft 23 arranged at the other end of the first connecting shaft 22, a third connecting shaft 24 arranged at the other end of the second connecting shaft 23, a fourth connecting shaft 25 arranged at the other end of the third connecting shaft 24, a fifth connecting shaft 26 arranged at the other end of the fourth connecting shaft 25, a sixth connecting shaft 27 arranged at the other end of the fifth connecting shaft 26, and a pneumatic finger 28 arranged at the end of the sixth connecting shaft 27. The multi-axis manipulator 20 can be used to grasp the silicon ring, flexibly load and unload the silicon ring, and clamp the silicon ring for inspection at the inspection stations of the plane vision mechanism 40 and the side ring surface vision mechanism 50.

[0033] The flipping mechanism 30 is used to cooperate with the multi-axis manipulator 20 to flip the silicon ring. Figure 4 As shown, the flipping mechanism 30 includes a bracket 31 and a horizontally arranged shelf 32 on the bracket 31. The shelf 32 is preferably circular, and is provided with a notch 321 that runs through the upper and lower parts, and the inner diameter of the notch 321 is larger than the inner diameter of the silicon ring. The multi-axis manipulator 20 places the silicon ring on the upper surface of the shelf 32 from above the shelf 32, and then the multi-axis manipulator 20 moves to the bottom of the shelf 32, grabs the silicon ring from the bottom, and completes the flipping action of the silicon ring. A plurality of gaskets 33 are provided on the upper surface of the shelf 32 to prevent the surface of the silicon wafer from being worn.

[0034] The plane vision mechanism 40 is used to detect the plane parts on both sides of the silicon ring, including the bottom surface of the groove, the top surface of the boss and other plane parts on both sides. Figure 4As shown, the plane vision mechanism 40 includes a bracket 41, a first camera 42 and a first light source 43. The first camera 43 and the first light source 45 are both located below the shelf 32, and the viewing angle of the first camera 42 (i.e., the lens of the first camera 42) faces downward. During inspection, the silicon ring is moved by the multi-axis manipulator 20 to the inspection station of the plane vision mechanism 40 for front inspection; after the front inspection, the multi-axis manipulator 20 turns the silicon ring at a certain angle to make the silicon ring parallel to the shelf 32, and places the silicon ring on the shelf 32; the multi-axis manipulator 20 takes the silicon ring from below the shelf 32, and further moves to the inspection station to inspect the back.

[0035] The side ring surface visual mechanism 50 is used to take images of the convex side ring surface, the groove side ring surface and the outer ring surface on both sides of the silicon ring. Figure 5 As shown, the side ring surface vision mechanism 50 includes a bracket 51, a second camera 52 and a second light source 53. The viewing angle of the second camera 52 (i.e., the lens of the second camera 52) is oriented in the horizontal direction, and the second light source 53 and the second camera 52 are located in the same horizontal plane. During the inspection, the silicon ring is moved to the inspection station of the side ring surface vision mechanism 50 by the multi-axis manipulator 20. The multi-axis manipulator 20 drives the silicon ring to adjust the angle and position so that the outer ring of the silicon ring is located within the viewing angle range of the second camera 52. The multi-axis manipulator 20 further drives the silicon ring to rotate, and the second camera 52 completes the acquisition of the outer ring image; then the multi-axis manipulator 20 adjusts a certain angle and position to sequentially complete the inspection of the boss side ring surface and the groove side ring surface; further, the multi-axis manipulator 20 and the flipping mechanism 30 cooperate to flip the silicon ring, and repeat the above actions to complete the inspection of the boss side ring surface and the groove side ring surface on the other side of the silicon ring.

[0036] The inner ring surface visual mechanism 60 is used to detect the inner ring surface of the silicon ring. Figure 6 and Figure 7 As shown, the inner annular surface vision mechanism 60 includes a moving module 61 , a first drive 62 , a carrying portion 63 , a second drive 64 , a camera 65 , a reflector 66 and a light source 67 .

[0037] The first drive 62 is arranged on the mobile module 61, and the mobile module 61 is preferably a linear slide. The bearing part 63 is arranged on the first drive 62, and the first drive 62 drives the bearing part 63 to rotate in the horizontal direction. The silicon ring is arranged on the bearing part 63 and rotates around its own axis under the drive of the first drive 62. The bearing part 63 includes a support plate 631, a plurality of pads 632 and a plurality of vacuum adsorbents 633. The vacuum adsorbent 633 is used to adsorb the silicon ring, and the vacuum adsorbent 633 includes a cavity 6331 having an air inlet 6332, an air outlet 6333 and an adsorption hole, and a suction nozzle 6334 arranged at the adsorption hole.

[0038] A plurality of pads 632 are distributed in a circle above the support plate 631, and a limit plate 6321 is provided on the outer side of each pad 632. When the silicon ring is placed on the pad 632, the plurality of limit plates 6321 are located on the outer periphery of the silicon ring. The viewing angle range of the camera 65 includes the reflection surface of the reflector 66. When the silicon ring rotates, the reflection range of the reflector 66 includes the inner ring surface of the silicon ring. A plurality of adjustment holes 6311 are evenly spaced outward from the center of rotation of the support plate 631. The pads 632 are fixed to the adjustment holes 6311 by bolts, so that silicon rings of a larger specification range can be compatible. Preferably, the support plate 631 is cross-shaped, and the number of pads 632 is four, which are respectively arranged at the four ends of the cross, and each branch of the cross is provided with two rows of adjustment holes 6311.

[0039] The second drive 64 is disposed on the bracket 601, and the camera 65, the reflector 66 and the light source 67 are disposed on the second drive 64 and are synchronously raised and lowered under the drive of the second drive 64. Figure 8 As shown, a horizontally arranged mounting plate 602 is provided on the second driver 64, and a camera 65 is vertically arranged on the mounting plate 602. A reflector 66 is arranged below the camera 65, and the viewing angle range of the camera 65 covers the reflective surface of the reflector 66. A mounting plate 603 is also provided below the mounting plate 602, and the reflector 66 and the light source 67 are arranged on the mounting plate 603, and the angle between the reflective surface of the reflector 66 and the optical axis of the camera 65 is 45°. When the second driver 64 drives the reflector 66 to move to be flush with the silicon ring, the first driver 62 drives the silicon ring to rotate, and the reflective range of the reflector 66 covers the inner ring surface of the silicon ring. The light source 67 is flush with the reflector 66 in the horizontal direction to provide light to the inner ring surface of the silicon ring.

[0040] During inspection, first, the mobile module 61 drives the bearing part 63 to move to the loading position of the multi-axis manipulator 20, the multi-axis manipulator 20 grabs the silicon ring and places it on the bearing part 63, and the vacuum suction part 633 on the bearing part 63 is started to adsorb and fix the silicon ring; then, the mobile module 61 moves the silicon ring to the inspection station of the camera 65; after the silicon ring is in place, the second drive 64 drives the camera 65, the reflector 66 and the light source 67 to descend into the inner ring of the silicon ring, and the first drive 62 drives the silicon ring to rotate in the horizontal direction to complete the imaging inspection of the inner ring of the silicon ring; after the inspection is completed, the vacuum is turned off, and the multi-axis manipulator 20 puts the silicon ring into the qualified product unloading mechanism 71 or the unqualified product unloading mechanism 72 according to the inspection results.

[0041] It should be noted that when the silicon ring visual inspection system in this embodiment performs inspection work, the silicon ring is inspected in sequence by the plane visual mechanism 40, the side ring surface visual mechanism 50, and the inner ring surface visual mechanism 60. In other embodiments, the position and inspection order of each visual mechanism can be adjusted as needed, which is not limited here.

[0042] Terms such as "upper" and "lower" used herein to indicate spatial relative positions are used for the purpose of convenience to describe the relationship of one feature relative to another feature as shown in the drawings. It is understood that, depending on the placement of the product, the terms of spatial relative positions may be intended to include different orientations other than those shown in the drawings, and should not be construed as limitations on the claims.

[0043] In addition, the above embodiments are only used to illustrate the present invention and are not intended to limit the technical solutions described in the present invention. The understanding of this specification should be based on the technical personnel in the relevant technical field. Although this specification has described the present invention in detail with reference to the above embodiments, ordinary technical personnel in the field should understand that the technical personnel in the relevant technical field can still modify or make equivalent substitutions to the present invention, and all technical solutions and improvements thereof that do not depart from the spirit and scope of the present invention should be included in the scope of the claims of the present invention.

Claims

1. A silicon ring visual inspection system, characterized in that: include Planar vision mechanism, used to take images and detect the planar parts on both sides of the silicon ring; Side ring surface vision mechanism, used to take images and inspect the boss side ring surface, groove side ring surface and outer ring surface on both sides of the silicon ring; An inner ring surface visual mechanism is used to detect the inner ring surface of the silicon ring, and includes a camera and a first drive for driving the silicon ring to rotate. When the silicon ring rotates, the camera takes an image of the inner ring surface of the silicon ring; Multi-axis manipulator, used for picking up and placing silicon rings, its picking up and placing range includes the inspection station of the plane vision mechanism, the inspection station of the side ring surface vision mechanism and the inner ring surface vision mechanism; The flipping mechanism is used to cooperate with the multi-axis manipulator to flip the silicon ring.

2. The silicon ring visual inspection system according to claim 1, characterized in that: The turning mechanism comprises a bracket and a horizontally arranged shelf arranged on the bracket, and the shelf is provided with a notch penetrating from top to bottom.

3. The silicon ring visual inspection system according to claim 1, characterized in that: The inner ring surface visual mechanism includes a bearing part, which is arranged on the first drive. The bearing part includes a support plate and a plurality of vacuum adsorption parts arranged on the support plate, and the vacuum adsorption parts are used to adsorb the silicon ring.

4. The silicon ring visual inspection system according to claim 3, characterized in that: The bearing part also includes a plurality of pads, which are distributed in a circle above the support plate. A limiting plate is provided on the outer side of each pad. When the silicon ring is placed on the pad, the plurality of limiting plates are located on the outer periphery of the silicon ring.

5. The silicon ring visual inspection system according to claim 3, characterized in that: The inner annular surface visual mechanism also includes a reflector, the viewing angle range of the camera includes the reflective surface of the reflector, and when the silicon ring rotates, the reflective range of the reflector includes the inner annular surface of the silicon ring.

6. The silicon ring visual inspection system according to claim 5, characterized in that: The inner annular surface visual mechanism also includes a second drive and a moving module. The camera and the reflector are arranged on the second drive and are synchronously lifted and lowered under the drive of the second drive. The first drive is arranged on the moving module.

7. The silicon ring visual inspection system according to claim 6, characterized in that: The inner annular surface visual mechanism also includes a light source, and the light source is arranged on the second drive.

8. The silicon ring visual inspection system according to claim 2, characterized in that: The plane vision mechanism includes a first camera and a first light source, both of which are arranged on the bracket and located below the shelf, and the lens of the first camera faces downward; the side annular surface vision mechanism includes a second camera and a second light source, and the lens of the second camera faces horizontally.

9. The silicon ring visual inspection system according to claim 1, characterized in that: The multi-axis manipulator includes a plurality of connecting axes and pneumatic fingers, wherein the pneumatic fingers support the inner ring of the silicon ring to grasp the silicon ring.

10. The silicon ring visual inspection system according to claim 1, characterized in that: It also includes a loading mechanism and a unloading mechanism. The loading mechanism includes a loading rack, a loading roller, a material frame for placing silicon rings and a limit block. The unloading mechanism includes a unloading rack, a unloading roller, a material frame for placing silicon rings and a limit block.

Images