Waste recovery mechanism for large-size silicon wafer feeding

By designing a waste recycling mechanism for loading large-size silicon wafers, and using the combined structure of the box and storage bin, the material accumulation problem caused by the waste recycling mechanism not moving by itself is solved, and the effective collection of silicon wafers and the stability of the device is achieved.

CN222678838UActive Publication Date: 2025-03-28SHANDONG JIUSI NEW MATERIAL TECH CO LTD
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Patent Information

Application Number
CN202421312875.0
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-06-11
Publication Date
2025-03-28
Estimated Expiration
2034-06-11

AI Technical Summary

Technical Problem

In the production of large-size silicon wafers, the waste recycling mechanism does not move on its own, resulting in material accumulation and storage capacity reduction, affecting the use of the device.

Method used

A large-size silicon wafer loading waste recycling mechanism is designed, including a box, silicon wafer sorting equipment body and storage bin. The box support device is stable, and the storage compartment is arranged inclined on the surface of the support mechanism, and the stable limit and movement of the storage compartment are achieved through the limit frame and the fixed path.

Benefits of technology

Through the tilt and limit frame design of the storage compartment, effective collection and position adjustment of the silicon wafer are achieved, avoiding the storage compartment slippage and improving the stability and use efficiency of the device.

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Abstract

The utility model relates to the technical field of silicon wafer recovery, in particular to a waste recovery mechanism for large-size silicon wafer feeding, which comprises a box body, a silicon wafer sorting equipment body and a storage bin, the silicon wafer sorting equipment body is arranged at the upper end of the box body, a supporting mechanism is arranged on the side face of the box body, and the storage bin is arranged at the upper end of the supporting mechanism. The storage bin is obliquely arranged on the surface of the supporting mechanism; when the device is used, the storage bin is used for collecting the silicon wafers, the position of the storage bin is continuously adjusted in the collecting process, so that the positions of the silicon wafers are adjusted, and when the limiting frame makes contact with the storage bin, the limiting frame rotates to drive the storage bin to move reversely, so that the silicon wafers can be stored in the storage bin. The storage bin can avoid rotation of the limiting frame, and the stability of the device is improved; and when the storage bin is treated, the storage bin can be limited through a fixing plate and a fixing shaft, and the stability of the storage bin in the moving process is improved.
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Description

Technical Field

[0001] The utility model relates to the technical field of silicon chip recycling, in particular to a waste material recycling mechanism for feeding large-size silicon chips. Background Art

[0002] Defective products will be generated in the production of large-size silicon wafers. The defective products will be sorted out by sorting equipment and then stored by waste recycling mechanisms, so that the defective products can be centrally processed. However, when general waste recycling mechanisms are in use, since the waste recycling mechanisms will not move on their own, the materials will accumulate in one place of the waste recycling mechanism, resulting in less material stored in the waste recycling mechanism, which is not conducive to the use of the device. Utility Model Content

[0003] The utility model aims to provide a waste material recovery mechanism for large-size silicon wafer loading to solve the problems raised in the above-mentioned background technology.

[0004] A waste recovery mechanism for loading large-size silicon wafers comprises a box body, a silicon wafer sorting equipment body and a storage bin: the silicon wafer sorting equipment body is arranged on the upper end of the box body, a supporting mechanism is arranged on the side of the box body, a storage bin is arranged on the upper end of the supporting mechanism, and the storage bin is arranged on the surface of the supporting mechanism in an inclined state.

[0005] When the device is in use, the box body can support the device to ensure the stability of the device during use. A discharge port and a waste port are respectively provided at both ends of the silicon wafer sorting equipment body. Silicon wafers can be sorted through the silicon wafer sorting equipment body, and good products are discharged from the discharge port, and defective products are discharged from the waste port.

[0006] Preferably, the support mechanism comprises a support frame and a support column, the support frame is horizontally arranged on the side of the box body, the support column is connected below one end of the support frame away from the box body, and the other end of the support column is connected to the box body.

[0007] When the device is in use, the support frame can support the storage bin, and the support column can support the support frame, thereby ensuring the stability of the support column when in use.

[0008] Preferably, one end of the support frame away from the box body is symmetrically rotationally connected to the limiting frame, and the limiting frame is in a bent shape.

[0009] When the device is in use, the limit frame can effectively limit the storage bin. Only when the limit frame rotates so that it is no longer in contact with the storage bin, the limit on the storage bin will be released. When the limit frame limits the storage bin, since the limit frame needs to push the storage bin to move in the opposite direction when it rotates, the limiting effect of the limit frame on the storage bin is effectively increased.

[0010] Preferably, a fixing track with a cross-shaped longitudinal section is provided inside the support frame, and the longitudinal section of one end of the fixing track close to the box body is T-shaped.

[0011] When the device is in use, the storage bin is limited by the fixed track, and since an opening is provided at one end of the fixed track close to the box body, the two can be disconnected. When the storage bin is moved outward, the fixed track can effectively ensure the stability of the storage bin during movement.

[0012] Preferably, an "L"-shaped connecting rod is provided at the lower end of the storage bin, the other end of the connecting rod is rotatably connected to a fixing plate, and fixing shafts are symmetrically provided on both sides of the fixing plate.

[0013] When the storage bin moves on the surface of the support frame, the fixed plate and the fixed shaft will limit the storage bin, thereby preventing the storage bin and the support frame from slipping and increasing the stability of the device during use. At the same time, when the storage bin moves to the outermost side, the storage bin and the connecting rod are rotated to tilt the storage bin, thereby recovering unqualified cabinet silicon wafers in the storage bin.

[0014] Preferably, the rotation angle between the fixed plate and the fixed shaft is -5-5°.

[0015] When processing silicon wafers in the storage bin, the fixed plate and the fixed shaft can be slightly rotated, so that the operator can rotate the storage bin more conveniently.

[0016] Preferably, a handle is provided on the side of the storage bin.

[0017] The storage bin can be operated through the handle, and a rubber pad is provided on the outer side of the handle to further cushion the operator's hand and improve the operator's comfort.

[0018] Preferably, a guide path is provided below the side waste opening of the silicon wafer sorting equipment body.

[0019] The guide channel can be used to guide the silicon wafers so that they can enter the storage bin smoothly. The storage bin is inclined, so when the silicon wafers enter the storage bin, they will impact it, causing the storage bin to continuously move outward, thereby adjusting the position of the storage bin so that the silicon wafers will move to different positions in the storage bin.

[0020] The beneficial effects of the utility model are:

[0021] 1. When the device is in use, the storage bin will be used to collect silicon wafers, and the position of the storage bin will be continuously adjusted during the collection process, thereby adjusting the position of the silicon wafers, and when the limit frame contacts the storage bin, the rotation of the limit frame will drive the storage bin to move in the opposite direction, and the storage bin can avoid the rotation of the limit frame, thereby improving the stability of the device; and when the storage bin is processed, the fixed plate and the fixed shaft can limit the storage bin, thereby increasing the stability of the storage bin when it moves. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0023] Figure 1 It is a schematic diagram of the overall front view structure of the utility model;

[0024] Figure 2 This is a schematic diagram of the top view structure of the support frame of the utility model;

[0025] Figure 3 This is a schematic diagram of the storage bin and connecting rod installation structure of the utility model;

[0026] Figure 4 This is a schematic diagram of the side view structure of the support frame and the fixing plate of the utility model;

[0027] Figure 5 Schematic diagram of the change of contact surface when the limit frame rotates.

[0028] In the figure: 1. Box body; 2. Silicon wafer sorting equipment body; 3. Support frame; 4. Fixed track; 5. Storage bin; 6. Connecting rod; 7. Fixed plate; 8. Fixed shaft; 9. Support column; 10. Limiting frame; 11. Handle; 12. Guide track. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0030] When implementing: Figure 1-5As shown, a waste recovery mechanism for large-size silicon wafer loading includes a box body 1, a silicon wafer sorting equipment body 2 and a storage bin 5: the silicon wafer sorting equipment body 2 is arranged at the upper end of the box body 1, a supporting mechanism is arranged on the side of the box body 1, and a storage bin 5 is arranged at the upper end of the supporting mechanism, and the storage bin 5 is arranged on the surface of the supporting mechanism in an inclined state.

[0031] When the device is in use, the box body 1 can support the device to ensure the stability of the device during use. The two ends of the silicon wafer sorting equipment body 2 are respectively provided with a discharge port and a waste port. Silicon wafers can be sorted through the silicon wafer sorting equipment body 2, and good products are discharged from the discharge port, and defective products are discharged from the waste port.

[0032] The support mechanism includes a support frame 3 and a support column 9. The support frame 3 is horizontally arranged on the side of the box body 1. The support column 9 is connected to the lower side of one end of the support frame 3 away from the box body 1, and the other end of the support column 9 is connected to the box body 1.

[0033] When the device is in use, the support frame 3 can support the storage bin 5, and the support column 9 can support the support frame 3, thereby ensuring the stability of the support column 9 when in use.

[0034] One end of the support frame 3 away from the box body 1 is symmetrically rotatably connected to the limiting frame 10, and the limiting frame 10 is bent.

[0035] When the device is in use, the limit frame 10 can effectively limit the storage bin 5. Only when the limit frame 10 rotates so that it is no longer in contact with the storage bin 5, the limitation on the storage bin 5 will be released. When the limit frame 10 limits the storage bin 5, since the limit frame 10 needs to push the storage bin 5 to move in the opposite direction when it rotates, the limiting effect of the limit frame 10 on the storage bin 5 is effectively increased.

[0036] A fixing channel 4 with a cross-shaped longitudinal section is provided inside the support frame 3 , and a longitudinal section of one end of the fixing channel 4 close to the box body 1 is in a T-shaped longitudinal section.

[0037] When the device is in use, the storage bin 5 is limited by the fixed track 4, and since an opening is provided at one end of the fixed track 4 close to the box body 1, the two can be disconnected. When the storage bin 5 is moved outward, the fixed track 4 can effectively ensure the stability of the storage bin 5 during movement.

[0038] An L-shaped connecting rod 6 is disposed at the lower end of the storage bin 5 , and a fixing plate 7 is rotatably connected to the other end of the connecting rod 6 . Fixed shafts 8 are symmetrically disposed on both sides of the fixing plate 7 .

[0039] When the storage bin 5 moves on the surface of the support frame 3, the fixed plate 7 and the fixed shaft 8 will limit the storage bin 5, thereby preventing the storage bin 5 and the support frame 3 from slipping, increasing the stability of the device when in use; at the same time, when the storage bin 5 moves to the outermost side, the storage bin 5 and the connecting rod 6 are rotated, so that the storage bin 5 is tilted, thereby recovering the unqualified cabinet silicon wafers in the storage bin 5.

[0040] The rotation angle between the fixed plate 7 and the fixed shaft 8 is -5-5°.

[0041] When the silicon wafers in the storage bin 5 are being processed, the fixing plate 7 and the fixing shaft 8 can be slightly rotated, so that the operator can rotate the storage bin 5 more conveniently.

[0042] A handle 11 is provided on the side of the storage bin 5 .

[0043] The storage bin 5 can be operated through the handle 11, and a rubber pad is provided on the outer side of the handle 11 to further cushion the operator's hand and improve the operator's comfort.

[0044] A guide path 12 is provided below the waste opening on the side of the silicon wafer sorting equipment body 2 .

[0045] The silicon wafers can be guided by the guide path 12 so that they can smoothly enter the storage bin 5 , and the storage bin 5 is inclined, so when the silicon wafers enter the storage bin 5 , they will impact it, causing the storage bin 5 to continuously move outward, and then adjust the position of the storage bin 5 so that the silicon wafers will move to different positions in the storage bin 5 .

[0046] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0047] Finally, it should be noted that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art can still modify the technical solutions described in the above embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A waste material recovery mechanism for large-size silicon wafer loading, characterized in that: The invention comprises a box body (1), a silicon wafer sorting device body (2) and a storage bin (5): the silicon wafer sorting device body (2) is arranged at the upper end of the box body (1), a supporting mechanism is arranged on the side of the box body (1), the storage bin (5) is arranged at the upper end of the supporting mechanism, and the storage bin (5) is arranged on the surface of the supporting mechanism in an inclined manner.

2. A waste material recovery mechanism for large-size silicon wafer loading according to claim 1, characterized in that: The support mechanism comprises a support frame (3) and a support column (9); the support frame (3) is horizontally arranged on the side of the box body (1); the support column (9) is connected to the lower side of one end of the support frame (3) away from the box body (1); and the other end of the support column (9) is connected to the box body (1).

3. A waste material recovery mechanism for large-size silicon wafer loading according to claim 2, characterized in that: One end of the support frame (3) away from the box body (1) is symmetrically rotatably connected to the limiting frame (10), and the limiting frame (10) is in a bent shape.

4. A waste material recovery mechanism for large-size silicon wafer loading according to claim 2, characterized in that: A fixing track (4) having a cross-shaped longitudinal section is provided inside the support frame (3); the fixing track (4) has a T-shaped longitudinal section at one end close to the box body (1).

5. A waste material recovery mechanism for large-size silicon wafer loading according to claim 4, characterized in that: An L-shaped connecting rod (6) is provided at the lower end of the storage bin (5), and the other end of the connecting rod (6) is rotatably connected to a fixing plate (7), and fixing shafts (8) are symmetrically provided on both sides of the fixing plate (7).

6. A waste material recovery mechanism for large-size silicon wafer loading according to claim 5, characterized in that: The rotation angle between the fixed plate (7) and the fixed shaft (8) is -5-5°.

7. A waste material recovery mechanism for large-size silicon wafer loading according to claim 1, characterized in that: A handle (11) is provided on the side of the storage bin (5).

8. The waste material recovery mechanism for large-size silicon wafer loading according to claim 1, characterized in that: A guide path (12) is provided below the waste material opening on the side of the silicon wafer sorting equipment body (2).