Intelligent loading and unloading transport vehicle for silicon carbide crystal growth furnace thermal field and thermal field loading and unloading system of intelligent loading and unloading transport vehicle

Abstract

The utility model relates to the field of silicon carbide crystal production, and discloses an intelligent loading and unloading transport vehicle for a silicon carbide crystal growth furnace thermal field and a thermal field loading and unloading system thereof. By arranging the intelligent grabbing device, the hydraulic mechanism is connected with the mechanical claw, so that the mechanical claw can accurately grab the thermal field; the AGV with an automatic walking function is further arranged, and the ground guide belt is recognized through the sensing assembly, so that the vehicle is accurately guided to run. And the man-machine interaction monitoring platform is arranged to obtain working data of the transport vehicle, the silicon carbide crystal growth furnace, the thermal field processing platform and the like in real time, so that a proper control instruction is formulated, execution of all mechanisms and equipment is controlled, and cross-platform linkage control and intelligent integrated production are realized.

Description

Technical Field

[0001] The utility model relates to the field of silicon carbide crystal production, and in particular to an intelligent loading and unloading transport vehicle for a thermal field of a silicon carbide crystal growth furnace and a thermal field loading and unloading system thereof. Background Art

[0002] The modern scientific and technological field has increasingly higher requirements for electronic devices with high frequency, high power, high temperature resistance, good chemical stability and the ability to work in strong radiation environments. Semiconductor silicon carbide single crystal material is the first generation of semiconductor materials represented by silicon materials. It has the characteristics of wide band gap, high critical electric field, high thermal conductivity, high carrier saturation drift velocity, etc. It has great potential in high temperature, high frequency, high power, optoelectronics and radiation resistance, and is an important third-generation semiconductor material.

[0003] Physical Vapor Transport (PVT) is one of the mainstream methods for preparing silicon carbide crystals. The corresponding silicon carbide crystal growth furnace of this crystal growth method mainly uses induction coil heating. Usually, a silicon carbide wafer is placed on the top of the crucible as a seed crystal, and the material source is placed at the bottom of the graphite crucible. The crucible is heated by an induction coil to make the internal temperature of the crucible reach above 2000°C. After the crystal growth process is completed, the heat field (including the three-part structure of insulation material, crucible and silicon carbide crystal / seed crystal) needs to be transported to the processing area.

[0004] In response to the problem of loading and transporting the hot field of the silicon carbide crystal growth furnace, the industry has conducted relevant research and designs, such as hot field loading equipment and semiconductor process system (CN113981527A), which includes a workstation transfer base and a hot field transmission device arranged on the workstation transfer base. The hot field transmission device is used to fix the hot field and drive the hot field to move up and down relative to the workstation transfer base and move horizontally. The workstation transfer base is used to drive the hot field transmission device to move back and forth between multiple workstations in the semiconductor process system.

[0005] However, the hot field loading equipment provided by the above-mentioned prior art has a complex structure, slow movement and low positioning accuracy; during the loading and unloading process of the hot field of the crystal growth furnace, it cannot be linked with the loading and unloading control system of the crystal growth furnace and the data of the hot field storage area, and has a single function and low operating efficiency. Utility Model Content

[0006] In order to solve the above-mentioned existing technical problems, the utility model provides an intelligent loading and unloading transport vehicle for the thermal field of a silicon carbide crystal growth furnace;

[0007] Another object of the utility model is to provide a hot field loading and unloading system using an intelligent loading and unloading transport vehicle.

[0008] In order to solve the above technical problems, the technical solution of the utility model is as follows:

[0009] An intelligent loading and unloading transport vehicle for a silicon carbide crystal growth furnace hot field, comprising an AGV transport vehicle, an intelligent grabbing device, a receiving bottom plate and an intelligent control screen; the AGV transport vehicle is detachably connected with the intelligent grabbing device; the receiving bottom plate is sleeved with the bottom of the AGV transport vehicle; the intelligent control screen is arranged on the AGV transport vehicle;

[0010] The AGV transport vehicle includes an unmanned vehicle body, a sensor component and an intelligent lifting component; the sensor component is arranged on the unmanned vehicle body and is used to sense the walking route and the thermal field position; a seat is arranged at the rear of the unmanned vehicle, and the intelligent lifting component is arranged on the seat of the unmanned vehicle;

[0011] The intelligent grasping device comprises a mechanical claw, a hydraulic mechanism and a telescopic arm; the hydraulic mechanism is connected to the mechanical claw to drive the mechanical claw to perform a grasping action; the telescopic arm is connected to the hydraulic mechanism to drive the mechanical claw to perform a telescopic action.

[0012] Preferably, the mechanical claw comprises two symmetrical chucks, and the hydraulic mechanism is connected to the two chucks of the mechanical claw via a piston rod, so as to drive the chucks to rotate.

[0013] Preferably, a detection device for silicon carbide crystals is provided at one end of the silicon carbide crystal growth furnace, and the detection device is electrically connected to the intelligent control panel.

[0014] Furthermore, the sensing component includes a rotating camera, a magnetic tape sensor and an optical sensor, a ranging sensor, a gyroscope sensor, etc.; the magnetic tape sensor and the optical sensor are arranged on the front of the unmanned vehicle body to guide the driving route of the unmanned vehicle body; the ranging sensor and the gyroscope sensor are arranged in the intelligent lifting component to sense the posture of the intelligent lifting component and the position of the thermal field.

[0015] Furthermore, the intelligent lifting assembly includes a hydraulic base, a first lifting platform and a second lifting platform; the hydraulic base is provided with multiple groups of hydraulic devices and multiple groups of slide frames; the first lifting platform is arranged on the slide frame of the hydraulic base and connected to the hydraulic device, and can move along the height direction of the slide frame; the second lifting platform is arranged on another slide frame of the hydraulic base and connected to another hydraulic device, and can move along the height direction of the slide frame.

[0016] Furthermore, a shovel head is provided at the bottom of the first lifting platform, and a plurality of open grooves are provided at the bottom of the receiving base plate. The shovel head of the first lifting platform is sleeved with the open grooves at the bottom of the receiving base plate to drive the receiving base plate to lift up and down.

[0017] Furthermore, the telescopic arm is connected to the second lifting platform; a group of hydraulic devices of the intelligent lifting assembly is connected to the telescopic arm to drive the telescopic arm to perform telescopic movement.

[0018] Preferably, the first lifting platform and the second lifting platform are respectively connected to different groups of hydraulic devices of the intelligent lifting component, and the up and down lifting movements between the first lifting platform and the second lifting platform do not interfere with each other.

[0019] Furthermore, a wireless signal transceiver module and a control terminal are provided in the intelligent control screen, and the control terminal is electrically connected to the sensor component, the intelligent lifting component and the hydraulic mechanism respectively; the control terminal is also connected to the transportation system cloud through the wireless signal transceiver module.

[0020] Furthermore, a chuck is provided on the top of the receiving bottom plate, and the shape of the inner wall of the chuck is set according to the shape of the thermal field, so that after the thermal field is placed in the chuck, the thermal field abuts against the chuck.

[0021] Furthermore, the intelligent loading and unloading transport vehicle also includes a guide belt, which is arranged on the ground along the driving route of the transport vehicle; the magnetic tape sensor and the optical sensor are used to identify the guide belt.

[0022] Preferably, the magnetic tape sensor and the optical sensor transmit the path information of the guide tape to the control terminal, and the control terminal formulates the driving route of the transport vehicle according to the path information of the guide tape.

[0023] Preferably, the guide tape is configured as a combination of a magnetic tape and a color tape, which can provide the magnetic tape sensor and the optical sensor with identification guide information respectively.

[0024] A hot field loading and unloading system using the intelligent loading and unloading transport vehicle, the hot field loading and unloading system comprising:

[0025] A silicon carbide crystal growth furnace, wherein the silicon carbide crystal growth furnace is provided with a lifting mechanism for driving the thermal field component to rise and fall, a furnace chassis opening and closing mechanism, and a control system;

[0026] A thermal field treatment platform, comprising a thermal field storage area and a thermal field preparation area;

[0027] A human-machine interactive monitoring platform, which obtains the working data of the silicon carbide crystal growth furnace, the working data of the intelligent loading and unloading transport vehicle, and the working data of the thermal field treatment platform from the control system communication, formulates control instructions through data processing, and feeds back the control instructions to the silicon carbide crystal growth furnace, the intelligent loading and unloading transport vehicle and the thermal field treatment platform to realize intelligent control of thermal field loading and unloading, handling and storage

[0028] The thermal field loading and unloading system also includes:

[0029] The server is communicatively connected with the human-machine interaction monitoring platform, and obtains and stores the working data of multiple intelligent loading and unloading transport vehicles through the human-machine interaction monitoring platform.

[0030] A control method for the thermal field loading and unloading system comprises the following steps:

[0031] The human-machine interactive monitoring platform interacts with the control system of the silicon carbide crystal growth furnace to obtain the working status data of the silicon carbide crystal growth furnace, including the unloading data and loading data of the thermal field, the action data of the lifting mechanism, the control data of the furnace chassis opening and closing mechanism, and the position coordinate data of the silicon carbide crystal growth furnace;

[0032] The human-machine interactive monitoring platform interacts with the control system of the thermal field treatment platform to obtain thermal field data of the thermal field storage area and the thermal field preparation area of ​​the thermal field treatment platform, including thermal field storage position information, free position information, and thermal field status information;

[0033] The human-computer interaction monitoring platform plans and controls the motion path of the intelligent loading and unloading transport vehicle, the action instructions of the intelligent lifting component, the action instructions of the lifting mechanism and the furnace chassis opening and closing mechanism, and the storage position of the hot field according to the working status data of the silicon carbide crystal growth furnace, the hot field treatment platform and the silicon carbide crystal growth furnace, so as to realize the loading and unloading of the hot field.

[0034] The human-computer interaction monitoring platform can also import the work monitoring video of the silicon carbide crystal growth furnace workshop, make adjustment instructions according to the position data of the intelligent loading and unloading transport vehicle in the video, and respond to the adjustment instructions by sending control instructions to the intelligent loading and unloading transport vehicle through the human-computer interaction monitoring platform to control the intelligent loading and unloading transport vehicle to adjust the corresponding work data.

[0035] Preferably, the human-computer interaction monitoring platform can also import monitoring videos of the intelligent loading and unloading transport vehicles working in the silicon carbide crystal growth furnace workshop, summarize and formulate instructions for the first priority driving route based on information such as the transport vehicle position, pedestrian position, and spatial position of the intelligent loading and unloading transport vehicles in the video, and update the instructions for the first priority driving route at a preset time frequency.

[0036] Furthermore, the human-computer interaction monitoring platform is communicatively connected with the wireless signal transceiver module and the control terminal of the intelligent loading and unloading transport vehicle. The human-computer interaction monitoring platform sends control instructions to the wireless signal transceiver module, thereby loading the control instructions into the control terminal. The control terminal adjusts the work plan of the intelligent loading and unloading transport vehicle according to the control instructions.

[0037] Preferably, when the control terminal receives the first priority driving route through the wireless signal transceiver module, the first priority driving route is replaced by the path planning of the guide belt originally formulated by the transport vehicle, and the first priority driving route formulated by the human-computer interaction monitoring platform is updated in real time.

[0038] Preferably, when the control terminal does not receive an instruction to update the first priority driving route within 6 seconds, the path planning formulated by the guide belt is implemented.

[0039] Preferably, when the transport vehicle's rotating camera transmits information about obstacles, pedestrians, etc. to the control terminal, and when the control terminal analyzes and summarizes the information transmitted by the rotating camera and formulates new instructions, the priority of its instructions is higher than the first priority driving route instructions formulated by the human-computer interaction monitoring platform.

[0040] Compared with the prior art, the beneficial effects of the technical solution of the utility model are:

[0041] ① Set up intelligent grabbing devices to reduce workers’ fatigue;

[0042] The utility model connects the hydraulic mechanism with the mechanical claw by arranging an intelligent grasping device. The hydraulic mechanism can control the size and direction of the mechanical claw's gripping force by controlling the hydraulic oil pressure and hydraulic oil flow of the hydraulic actuator, thereby realizing the mechanical claw's accurate grasping of the thermal field. When necessary, the length of the telescopic arm can be adjusted according to changes in demand to realize the mobile grasping of objects at different distances from the mechanical claw. When necessary, the telescopic arm is extended to allow the mechanical claw to grasp the thermal field, and then the thermal field grasping is placed on the upper end of the receiving bottom plate and fixed.

[0043] ② Set up an automatic AGV transport vehicle to realize automated transportation;

[0044] The utility model sets an AGV transport vehicle that can walk automatically, and sets a guide belt on the ground, so as to accurately guide the travel of the AGV transport vehicle, adapt to high-intensity production environments, and improve production efficiency and quality control levels; by setting the guide belt as a combination of a magnetic tape and a colored tape, the magnetic tape sensor and the optical sensor can be respectively given identification guidance, so as to make the route planning of the intelligent loading and unloading transport vehicle more accurate; when necessary, the information of obstacles, pedestrians, etc. can be transmitted to the control terminal through a rotating camera, and the control terminal analyzes and summarizes the information transmitted by the rotating camera and formulates new instructions, and formulates a path according to the instructions.

[0045] ③ Set up a hot field loading and unloading system for intelligent loading and unloading transport vehicles to improve the efficiency and safety of hot field loading and unloading and transportation;

[0046] The utility model sets a human-machine interactive monitoring platform, obtains the working video of the intelligent loading and unloading transport vehicle workshop in real time, adjusts the instruction of the first priority driving route according to the transport vehicle position, pedestrian position, spatial position and other information of the intelligent loading and unloading transport vehicle in the video, and updates the instruction of the first priority driving route according to a preset time frequency, sends control instructions to the intelligent loading and unloading transport vehicle through the human-machine interactive monitoring platform, communicates with the wireless signal transceiver module of the intelligent loading and unloading transport vehicle and the control terminal, thereby importing the control instructions into the control terminal, and the control terminal adjusts the driving trajectory of the intelligent loading and unloading transport vehicle according to the control instructions. The work plan can enable the intelligent loading and unloading transport vehicle to select the optimal route according to the actual situation to avoid possible obstacles and congested sections, thereby improving transportation efficiency.

[0047] During the loading and unloading process of the hot field of the silicon carbide crystal growth furnace, the intelligent loading and unloading transport vehicle is linked with the loading and unloading control system of the silicon carbide crystal growth furnace and the data of the hot field storage area to realize cross-platform linkage control and intelligent integrated production. BRIEF DESCRIPTION OF THE DRAWINGS

[0048] In order to more clearly illustrate the technical solution of the present invention, the drawings required for use in the implementation mode will be briefly introduced below. Obviously, the drawings described below are only some implementation modes of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0049] Figure 1 It is a schematic diagram of the coordination between the intelligent loading and unloading transport vehicle and the silicon carbide crystal growth furnace;

[0050] Figure 2 It is a structural diagram of an intelligent loading and unloading transport vehicle;

[0051] Figure 3 It is a schematic diagram of the coordination between the intelligent loading and unloading transport vehicle and the guide belt;

[0052] Figure 4 It is a schematic diagram of the coordination between the hydraulic device and the slide frame.

[0053] The reference numerals are as follows:

[0054] 1. AGV transport vehicle; 101. Unmanned vehicle body; 102. Sensor component; 1021. Rotating camera; 1022. Magnetic tape sensor; 1023. Optical sensor; 103. Intelligent lifting component; 1031. Hydraulic base; 1032. First lifting platform; 1033. Second lifting platform; 2. Intelligent grasping device; 201. Mechanical claw; 202. Hydraulic mechanism; 203. Telescopic arm; 3. Supporting bottom plate; 301. Chuck; 4. Shovel head; 5. Intelligent control screen; 6. Guide belt; 7. Hydraulic device; 8. Slide rack. DETAILED DESCRIPTION

[0055] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme of the present application will be clearly and completely described below in conjunction with the drawings of the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. Based on the described embodiments, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0056] Unless otherwise defined, the technical terms or scientific terms used in this application should be understood by people with ordinary skills in the field to which this application belongs. "First", "second" and similar words used in this application do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0057] Example 1

[0058] like Figure 1-4 As shown, this embodiment discloses an intelligent loading and unloading transport vehicle for the hot field of a silicon carbide crystal growth furnace, comprising an AGV transport vehicle 1, an intelligent grabbing device 2, a receiving bottom plate 3 and an intelligent control screen 5; the AGV transport vehicle 1 is detachably connected with the intelligent grabbing device 2; the receiving bottom plate 3 is sleeved with the bottom of the AGV transport vehicle 1; the intelligent control screen 5 is arranged on the AGV transport vehicle 1;

[0059] The AGV transport vehicle 1 includes an unmanned vehicle body 101, a sensor component 102 and an intelligent lifting component 103; the sensor component 102 is arranged on the unmanned vehicle body 101; a seat is arranged at the rear of the unmanned vehicle, and the intelligent lifting component 103 is arranged on the seat of the unmanned vehicle;

[0060] The intelligent grasping device 2 includes a mechanical claw 201, a hydraulic mechanism 202 and a telescopic arm 203; the hydraulic mechanism 202 is connected to the mechanical claw 201 to drive the mechanical claw 201 to grasp; the telescopic arm 203 is connected to the hydraulic mechanism 202 to drive the mechanical claw 201 to perform a telescopic action.

[0061] This embodiment combines the AGV transport vehicle 1 with the intelligent grasping device 2. The intelligent grasping device 2 grasps the thermal field of the silicon carbide crystal growth furnace, and then the AGV transport vehicle 1 transports it to a storage point for placement.

[0062] A chuck 301 is also provided on the top of the receiving bottom plate 3 , and the shape of the inner wall of the chuck 301 is set according to the shape of the thermal field, so that after the thermal field is placed in the chuck 301 , the bottom of the thermal field abuts against the chuck 301 .

[0063] When necessary, the hydraulic mechanism 202 is driven to control the size and direction of the gripping force of the mechanical claw 201, so as to achieve accurate grasping of the thermal field by the mechanical claw 201, extend the telescopic arm 203, make the mechanical claw 201 grasp the thermal field, and then place the thermal field grasping on the receiving base plate 3 and fix its chuck 301 against it.

[0064] As a specific implementation, the sensing component 102 includes a rotating camera 1021, a magnetic tape sensor 1022 and an optical sensor 1023; the magnetic tape sensor 1022 and the optical sensor 1023 are arranged on the front of the unmanned vehicle body 101, and are used to guide the driving route of the unmanned vehicle body 101; the intelligent loading and unloading transport vehicle is adapted to the guide belt 6, and the guide belt 6 is arranged on the ground along the driving route of the transport vehicle; the magnetic tape sensor 1022 and the optical sensor 1023 are used to identify the guide belt 6.

[0065] The sensor component 102 also includes a distance sensor, a gyroscope sensor, etc. The distance sensor and the gyroscope sensor are arranged in the intelligent lifting component 103 to sense the posture of the intelligent lifting component 103 and the position of the thermal field.

[0066] Taking into account that the guide belt 6 of the AGV transport vehicle 1 is easily contaminated, resulting in poor path detection effect, this embodiment ensures the driving path of the AGV transport vehicle 1 by setting up multiple sensors; the magnetic tape sensor 1022 and the optical sensor 1023 can ensure that the AGV transport vehicle 1 perceives the guide belt 6 on the transport route; when necessary, the rotating camera 1021 can detect its own surrounding environment and the situation in front of the transport vehicle, and input the information into the control terminal to formulate route adjustments and path planning, thereby realizing the prediction and automatic obstacle avoidance of the AGV transport vehicle 1, preventing the AGV transport vehicle 1 from encountering dangerous situations during transportation, and effectively improving the safety of transportation.

[0067] As a specific implementation, the intelligent lifting assembly 103 includes a hydraulic base 1031, a first lifting platform 1032 and a second lifting platform 1033; the hydraulic base 1031 is provided with multiple groups of hydraulic devices and multiple groups of slide frames; the first lifting platform 1032 is arranged on the slide frame of the hydraulic base 1031 and is connected to the hydraulic device, and can move along the height direction of the slide frame; the second lifting platform 1033 is arranged on another slide frame of the hydraulic base 1031 and is connected to another hydraulic device, and can move along the height direction of the slide frame; a shovel head 4 is also provided at the bottom of the first lifting platform 1032, and a plurality of open grooves are provided at the bottom of the receiving base plate 3. The shovel head 4 of the first lifting platform 1032 is socketed with the open grooves at the bottom of the receiving base plate 3, which is used to drive the receiving base plate 3 to lift up and down; the telescopic arm 203 is connected to the second lifting platform 1033; a group of hydraulic devices of the intelligent lifting assembly 103 is connected to the telescopic arm 203, which is used to drive the telescopic arm 203 to perform telescopic movement.

[0068] Considering that the transport vehicle needs to be stable in transporting the heat field, the intelligent lifting component 103 is provided in this embodiment to achieve stable transport of the heat field;

[0069] When necessary, the hydraulic mechanism 202 is connected to the two chucks of the mechanical claw 201 through a piston rod to drive the chucks to rotate; a buffer material is provided on the contact surface between the mechanical claw 201 and the heat field, and a flexible contact surface is provided on the surface of the chuck 301; specifically, when the silicon carbide crystal growth furnace needs to unload the heat field, the second lifting platform 1033 is adjusted up and down to a suitable position, and the hydraulic mechanism 202 is driven to enable the mechanical claw 201 to accurately grasp the heat field, and then the telescopic arm 203 holds it out, and then the first lifting platform 1032 rises, and then the chuck 301 on the upper end of the bottom plate 3 is received and abutted against the heat field and fixed, so that the heat field can be automatically transported while ensuring its safety and non-damage.

[0070] Specifically, multiple groups of hydraulic devices 7 and slide frames 8 are provided in the hydraulic base 1031, wherein two groups of slide frames 8 are arranged on the hydraulic base 1031, a first lifting platform 1032 is arranged on the slide frame 8 of the hydraulic base 1031 and connected to one group of hydraulic devices 7, and a second lifting platform 1033 is arranged on another slide frame 8 of the hydraulic base 1031 and connected to another hydraulic device 7, and can move along the height direction of the other slide frame 8. During operation, when the detection device on the silicon carbide crystal growth furnace detects that the hot field needs to be unloaded, it communicates to the control terminal of the transport vehicle. When the control terminal controls the second lifting platform 1033 to adjust up and down to the appropriate position, the hot field is accurately grasped by the mechanical claw 201, and then the telescopic arm 203 stretches it back, and then the first lifting platform 1032 is raised, and then the chuck 301 at the upper end of the base plate 3 is in contact with the hot field and fixed; then the control terminal identifies the guide belt 6 according to the magnetic tape sensor 1022 and the optical sensor 1023 and makes a path planning, so that the AGV transport vehicle 1 travels along the planned path.

[0071] Example 2

[0072] like Figure 1-4 As shown, this embodiment discloses an intelligent loading and unloading transport vehicle for the hot field of a silicon carbide crystal growth furnace, comprising an AGV transport vehicle 1, an intelligent grabbing device 2, a receiving bottom plate 3 and an intelligent control screen 5; the AGV transport vehicle 1 is detachably connected with the intelligent grabbing device 2; the receiving bottom plate 3 is sleeved with the bottom of the AGV transport vehicle 1; the intelligent control screen 5 is arranged on the AGV transport vehicle 1;

[0073] The AGV transport vehicle 1 includes an unmanned vehicle body 101, a sensor component 102 and an intelligent lifting component 103; the sensor component 102 is arranged on the unmanned vehicle body 101; a seat is arranged at the rear of the unmanned vehicle, and the intelligent lifting component 103 is arranged on the seat of the unmanned vehicle;

[0074] The intelligent grasping device 2 includes a mechanical claw 201, a hydraulic mechanism 202 and a telescopic arm 203; the hydraulic mechanism 202 is connected to the mechanical claw 201 to drive the mechanical claw 201 to grasp; the telescopic arm 203 is connected to the hydraulic mechanism 202 to drive the mechanical claw 201 to perform a telescopic action.

[0075] As a specific implementation method, a wireless signal transceiver module and a control terminal are provided in the intelligent control screen 5, and the control terminal is electrically connected to the sensor component 102, the intelligent lifting component 103 and the hydraulic mechanism 202 respectively; the control terminal is also connected to the transportation system cloud through the wireless signal transceiver module.

[0076] When necessary, the control terminal is connected to the human-computer interaction monitoring platform. The control terminal can upload the real-time monitoring transportation data and equipment status of the intelligent loading and unloading transport vehicle to the human-computer interaction monitoring platform to realize centralized monitoring and management of the intelligent loading and unloading transport vehicle. On the human-computer interaction monitoring platform, the location, operating status, transportation route, power status and other information of the intelligent loading and unloading transport vehicle can also be viewed in real time to optimize the itinerary of the intelligent loading and unloading transport vehicle. At the same time, the human-computer interaction monitoring platform can also send instructions to the control terminal to realize remote control of the intelligent loading and unloading transport vehicle and adjust the walking trajectory.

[0077] Example 3

[0078] A hot field loading and unloading system using the intelligent loading and unloading transport vehicle of embodiment 1 or 2, the hot field loading and unloading system comprising:

[0079] The silicon carbide crystal growth furnace is provided with a lifting mechanism for driving the lifting and lowering of the thermal field components, a furnace chassis opening and closing mechanism and a control system.

[0080] The lifting mechanism includes a crucible rotating mechanism, a crucible lifting mechanism, a frame and a lifting plate. A linear guide is installed on the frame. The slider on the linear guide is connected to the lifting plate. The crucible rotating mechanism and the crucible lifting mechanism are fixed on the lifting plate.

[0081] Thermal field treatment platform, which includes thermal field storage area and thermal field preparation area;

[0082] The hot field storage area includes the hot field loading area and the hot field unloading area, which are used to place the hot field; the hot field preparation area includes functions such as taking out crystals from the hot field and placing seed crystals in the crucible.

[0083] The thermal field treatment platform is also equipped with a charging station for charging intelligent loading and unloading transport vehicles with insufficient power supply; and a synthetic material area for preparing the raw materials needed for silicon carbide semiconductors.

[0084] The human-machine interactive monitoring platform obtains the working data of the silicon carbide crystal growth furnace, the working data of the intelligent loading and unloading transport vehicle, and the working data of the thermal field treatment platform through communication with the control system, formulates control instructions through data processing, and feeds back the control instructions to the silicon carbide crystal growth furnace, the intelligent loading and unloading transport vehicle and the thermal field treatment platform to realize intelligent control of thermal field loading, unloading, handling and storage.

[0085] The hot field loading and unloading system also includes: a server, which is communicated with a human-computer interaction monitoring platform, and obtains and stores the working data of multiple intelligent loading and unloading transport vehicles through the human-computer interaction monitoring platform.

[0086] The hot field loading and unloading system of this embodiment can realize that the intelligent loading and unloading transport vehicle can transport the hot field between the hot field treatment platform and multiple silicon carbide crystal growth furnaces, and place the hot field on the lifting mechanism of the silicon carbide crystal growth furnace, or remove it from the lifting mechanism. The human-machine interactive monitoring platform of the hot field loading and unloading system intelligently plans the control instructions of the hot field loading and unloading according to the information data linkage of production plan instructions, silicon carbide crystal growth furnaces, intelligent loading and unloading transport vehicles and hot field treatment platforms, and controls the execution of various mechanisms and equipment, realizing cross-platform linkage control and intelligent integrated production.

[0087] Example 4

[0088] A control method for a thermal field loading and unloading system according to embodiment 3 comprises the following steps:

[0089] The human-machine interactive monitoring platform interacts with the control system of the silicon carbide crystal growth furnace to obtain the working status data of the silicon carbide crystal growth furnace, including the unloading data and loading data of the thermal field, the action data of the lifting mechanism, the control data of the furnace chassis opening and closing mechanism, and the position coordinate data of the silicon carbide crystal growth furnace;

[0090] The human-machine interactive monitoring platform interacts with the control system of the thermal field treatment platform to obtain the thermal field data of the thermal field storage area and thermal field preparation area of ​​the thermal field treatment platform, including thermal field storage position information, free position information, and thermal field status information;

[0091] The human-computer interaction monitoring platform plans and controls the motion path of the intelligent loading and unloading transport vehicle, the action instructions of the intelligent lifting components, the action instructions of the lifting mechanism and the furnace chassis opening and closing mechanism, and the storage position of the hot field according to the working status data of the silicon carbide crystal growth furnace, the thermal field treatment platform and the silicon carbide crystal growth furnace, so as to realize the loading and unloading of the hot field.

[0092] The human-computer interaction monitoring platform can also import work monitoring videos of the silicon carbide crystal growth furnace workshop, make adjustment instructions based on the position data of the intelligent loading and unloading transport vehicle in the video, and respond to the adjustment instructions by sending control instructions to the intelligent loading and unloading transport vehicle through the human-computer interaction monitoring platform to control the intelligent loading and unloading transport vehicle to adjust the corresponding work data.

[0093] The human-computer interaction monitoring platform can also import monitoring videos of the intelligent loading and unloading vehicles working in the silicon carbide crystal growth furnace workshop, summarize the information such as the position of the intelligent loading and unloading vehicles, the position of pedestrians, and the spatial position in the video, and formulate instructions for the first priority driving route, and update the instructions for the first priority driving route at a preset time frequency.

[0094] The human-machine interactive monitoring platform communicates with the wireless signal transceiver module and the control terminal of the intelligent loading and unloading transport vehicle. The human-machine interactive monitoring platform sends control instructions to the wireless signal transceiver module, so that the control instructions are loaded into the control terminal. The control terminal adjusts the work plan of the intelligent loading and unloading transport vehicle according to the control instructions. The intelligent loading and unloading transport vehicle can select the optimal route according to the actual situation to avoid possible obstacles and congested sections, thereby improving transportation efficiency.

[0095] Specifically, when the control terminal receives the first priority driving route through the wireless signal transceiver module, the first priority driving route is replaced by the path planning of the guide belt 6 originally formulated by the transport vehicle, and the first priority driving route formulated by the human-computer interaction monitoring platform is updated in real time.

[0096] Specifically, when the control terminal does not receive an instruction to update the first priority driving route within 6 seconds, the path planning formulated by the guide belt is implemented.

[0097] When the rotating camera 1021 of the transport vehicle transmits information such as obstacles and pedestrians to the control terminal, and when the control terminal analyzes and summarizes the information transmitted by the rotating camera 1021 and formulates new instructions, the priority of its instructions is higher than the first priority driving route instructions formulated by the human-computer interaction monitoring platform.

[0098] One of the specific implementation methods of thermal field unloading

[0099] The control method of the thermal field loading and unloading system comprises the following steps:

[0100] When the hot field needs to be unloaded, the human-computer interaction monitoring platform obtains the working status data of the silicon carbide crystal growth furnace unloading hot field, the hot field number data (such as product number, order number, etc.) and the position coordinate data of the silicon carbide crystal growth furnace, as well as the data of the hot field processing platform and the intelligent loading and unloading transport vehicle; after comprehensive analysis, the platform feeds back data such as the time when the intelligent loading and unloading transport vehicle arrives to the silicon carbide crystal growth furnace; the platform feeds back the position coordinate data of the silicon carbide crystal growth furnace, time data, the position data of the hot field, and the vacant position information of the hot field preparation area to the intelligent loading and unloading transport vehicle.

[0101] The control system of the silicon carbide crystal growth furnace controls the actions of the lifting mechanism and the furnace chassis opening and closing mechanism based on the acquired data, including the rise of the lifting plate through the linear guide channel, the position reached by the crucible lifting mechanism, the action information of the furnace chassis opening and closing mechanism, and the decrease of the thermal field, etc., and exchanges real-time working data with the human-machine interactive monitoring platform.

[0102] The intelligent loading and unloading transport vehicle arrives at the designated position of the corresponding silicon carbide crystal growth furnace, and controls the action of the intelligent grasping device 2 according to the acquired thermal field position data and the data of the sensor component 102 acquired by itself, including the action of the intelligent lifting component 103, the telescopic arm 203, the mechanical claw 201, etc., to grasp the thermal field and place it on the chuck 301.

[0103] The human-computer interaction monitoring platform plans the operation path of the intelligent loading and unloading transport vehicle according to the vacant position information of the thermal field preparation area; the intelligent loading and unloading transport vehicle transports the thermal field to the vacant position of the designated thermal field preparation area, and controls the action of the intelligent grasping device 2, including the action of the intelligent lifting component 103, the telescopic arm 203, the mechanical claw 201, etc., to grasp the thermal field and place it in the vacant position.

[0104] The thermal field preparation area feeds back the location information of the thermal field storage and the location change data of the thermal field preparation area to the human-machine interactive monitoring platform. The user can accurately understand the thermal field data that has been unloaded and transported based on the data on the human-machine interactive monitoring platform to arrange the next step, such as transporting the crystals to the thermal field preparation area to take them out of the thermal field.

[0105] One of the specific implementation methods of thermal field loading

[0106] The control method of the thermal field loading and unloading system comprises the following steps:

[0107] When the thermal field needs to be loaded, the human-computer interaction monitoring platform obtains the data of the thermal field processing platform, including the thermal field data of the thermal field processing platform (such as storage location information, production number, product number, order information, production process, etc.) and the thermal field preparation status data of the thermal field preparation area.

[0108] The human-computer interaction monitoring platform obtains the working status data of the silicon carbide crystal growth furnace loading thermal field, the numbering data of the corresponding thermal field (such as product number, order number, etc.) and the position coordinate data or number of the silicon carbide crystal growth furnace, as well as the data of the intelligent loading and unloading transport vehicle.

[0109] After comprehensive analysis, the time of arrival of the intelligent loading and unloading transport vehicle and other data are fed back to the silicon carbide crystal growth furnace; the position coordinate data, time data, position data of the hot field, location information of the hot field storage in the hot field preparation area, etc. of the silicon carbide crystal growth furnace are fed back to the intelligent loading and unloading transport vehicle, and the operation route of the intelligent loading and unloading transport vehicle is planned.

[0110] The intelligent loading and unloading transport vehicle arrives at the designated position of the hot field preparation area, and controls the action of the intelligent grasping device 2, including the action of the intelligent lifting component 103, the telescopic arm 203, the mechanical claw 201, etc., based on the acquired hot field position data and the data acquired by the sensor component 102, to grasp the hot field and place it on the chuck 301. Then, the hot field is transported to the designated silicon carbide crystal growth furnace.

[0111] The control system of the silicon carbide crystal growth furnace controls the actions of the lifting mechanism and the furnace chassis opening and closing mechanism based on the acquired data, including the rise / descent of the lifting plate through the linear guide channel, the position reached by the crucible lifting mechanism, the action information of the furnace chassis opening and closing mechanism, and the heat field rise, etc., and exchanges real-time working data with the human-machine interactive monitoring platform.

[0112] The intelligent loading and unloading transport vehicle controls the action of the intelligent grabbing device 2, including the action of the intelligent lifting assembly 103, the telescopic arm 203, the mechanical claw 201, etc., to grab the hot field and place it on the lifting mechanism. Then, the control system of the silicon carbide crystal growth furnace controls the loading of the hot field, etc. according to the acquired data.

[0113] In idle state, the human-computer interaction monitoring platform obtains the data of the intelligent loading and unloading transport vehicle based on its own power or working conditions, charging station, etc., and plans the charging instructions and parking location of the intelligent loading and unloading transport vehicle.

[0114] Obviously, the above embodiments of the utility model are only examples for clearly explaining the utility model, and are not intended to limit the implementation methods of the utility model. For ordinary technicians in the relevant field, other different forms of changes or modifications can be made on the basis of the above description. It is not necessary and impossible to list all the implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the utility model should be included in the protection scope of the claims of the utility model.

Claims

1. An intelligent loading and unloading transport vehicle for the thermal field of a silicon carbide crystal growth furnace, characterized in that: The invention comprises an AGV transport vehicle (1), an intelligent grabbing device (2), a receiving bottom plate (3) and an intelligent control screen (5); the intelligent grabbing device (2) is detachably connected to the AGV transport vehicle (1); the receiving bottom plate (3) is sleeved with the bottom of the AGV transport vehicle (1); and the intelligent control screen (5) is arranged on the AGV transport vehicle (1); The AGV transport vehicle (1) comprises an unmanned vehicle body (101), a sensor component (102) and an intelligent lifting component (103); the sensor component (102) is arranged on the unmanned vehicle body (101) and is used to sense the walking route and the thermal field position; a seat is arranged at the rear of the unmanned vehicle, and the intelligent lifting component (103) is arranged on the seat of the unmanned vehicle; The intelligent grasping device (2) comprises a mechanical claw (201), a hydraulic mechanism (202) and a telescopic arm (203); the hydraulic mechanism (202) is connected to the mechanical claw (201) and is used to drive the mechanical claw (201) to perform a grasping action; the telescopic arm (203) is connected to the hydraulic mechanism (202) and is used to drive the mechanical claw (201) to perform a telescopic action.

2. The intelligent loading and unloading transport vehicle for the thermal field of a silicon carbide crystal growth furnace according to claim 1, characterized in that: The sensing component (102) comprises a rotating camera (1021), a magnetic tape sensor (1022), an optical sensor (1023), a distance sensor, and a gyroscope sensor; the magnetic tape sensor (1022) and the optical sensor (1023) are arranged on the front of the unmanned vehicle body (101) to guide the driving route of the unmanned vehicle body (101); the distance sensor and the gyroscope sensor are arranged on the intelligent lifting component (103) to sense the posture of the intelligent lifting component (103) and the position of the thermal field.

3. The intelligent loading and unloading transport vehicle for the thermal field of a silicon carbide crystal growth furnace according to claim 1, characterized in that: The intelligent lifting component (103) includes a hydraulic base (1031), a first lifting platform (1032) and a second lifting platform (1033); the hydraulic base (1031) is provided with a plurality of hydraulic devices and a plurality of slide frames; the first lifting platform (1032) is arranged on the slide frame of the hydraulic base (1031) and is connected to the hydraulic device, and can move along the height direction of the slide frame; the second lifting platform (1033) is arranged on another slide frame of the hydraulic base (1031) and is connected to another hydraulic device, and can move along the height direction of the slide frame.

4. The intelligent loading and unloading transport vehicle for the thermal field of a silicon carbide crystal growth furnace according to claim 3, characterized in that: A shovel head (4) is also provided at the bottom of the first lifting platform (1032), and a plurality of open grooves are provided at the bottom of the receiving base plate (3). The shovel head (4) of the first lifting platform (1032) is sleeved with the open grooves at the bottom of the receiving base plate (3) to drive the receiving base plate (3) to lift up and down.

5. The intelligent loading and unloading transport vehicle for the thermal field of a silicon carbide crystal growth furnace according to claim 3, characterized in that: The telescopic arm (203) is connected to the second lifting platform (1033); a group of hydraulic devices of the intelligent lifting component (103) is connected to the telescopic arm (203) and is used to drive the telescopic arm (203) to perform telescopic movement.

6. The intelligent loading and unloading transport vehicle for the thermal field of a silicon carbide crystal growth furnace according to claim 5, characterized in that: The first lifting platform and the second lifting platform are respectively connected to different groups of hydraulic devices of the intelligent lifting component, and the up and down lifting movements between the first lifting platform and the second lifting platform do not interfere with each other.

7. The intelligent loading and unloading transport vehicle for the thermal field of a silicon carbide crystal growth furnace according to claim 1, characterized in that: The intelligent control panel (5) is provided with a wireless signal transceiver module and a control terminal, and the control terminal is electrically connected to the sensor component (102), the intelligent lifting component (103) and the hydraulic mechanism (202) respectively; the control terminal is also connected to the transportation system cloud through the wireless signal transceiver module.

8. The intelligent loading and unloading transport vehicle for the thermal field of a silicon carbide crystal growth furnace according to claim 1, characterized in that: A chuck (301) is also provided on the top of the receiving bottom plate (3), and the shape of the inner wall of the chuck (301) is set according to the shape of the thermal field, so that after the thermal field is placed in the chuck (301), the thermal field abuts against the chuck (301).

9. The intelligent loading and unloading transport vehicle for the thermal field of a silicon carbide crystal growth furnace according to claim 2, characterized in that: The intelligent loading and unloading transport vehicle further comprises a guide belt (6), wherein the guide belt (6) is arranged on the ground along the travel route of the transport vehicle; the magnetic tape sensor (1022) and the optical sensor (1023) are used to identify the guide belt (6).

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