Vacuum coating machine with adjustable coating distance

Abstract

The utility model relates to the technical field of vacuum coating, in particular to a vacuum coating machine with adjustable coating spacing. The vacuum coating machine with the adjustable coating distance comprises a door plate, a vacuum box body is fixedly installed on the top face of the door plate, the bottom of the vacuum box body is communicated with the door plate, a fixing hole communicated with the vacuum box body is formed in the bottom face of the door plate, and a substrate frame is arranged in the vacuum box body. The top of the substrate frame is fixedly connected with a top plate of the vacuum box body, an evaporation source is arranged below the substrate frame, a lifting table is fixedly connected to the bottom face of the evaporation source, a connecting rod is fixedly connected to the bottom face of the lifting table, and an electric cylinder is fixedly installed on the bottom face of the door plate. A lifting rod of the electric cylinder penetrates through the fixing hole and then is fixedly connected with the bottom end of a connecting rod, the connecting rod is sleeved with a vacuum metal corrugated pipe, the top of the vacuum metal corrugated pipe is fixedly connected with the bottom face of the lifting table, and the bottom of the vacuum metal corrugated pipe is fixedly connected with the top face of the door plate.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a vacuum coating machine with adjustable coating spacing. Background Art

[0002] The vacuum coating machine mainly evaporates the surface components of the target material in the form of atomic groups or ions by means of vacuum ion evaporation in a vacuum environment, and then precipitates them on the surface of the substrate through technical means, thereby forming a thin film through the film forming process. The distance between the evaporation source and the substrate is an important parameter in vacuum coating, which is closely related to the coating product and process. Therefore, it is particularly important to make this distance adjustable. Since a large amount of heat will be generated during the coating process in the vacuum chamber, it will affect the sealing of the lifting shaft of the evaporation source. The usual practice is to use a rubber sealing ring to seal the lifting shaft, and then set a water jacket at the sealing point to cool the rubber sealing ring. However, this structure is more complicated and the cost is higher. Utility Model Content

[0003] The utility model aims to provide a vacuum coating machine with adjustable coating spacing, so as to solve the problem that the lifting shaft of the evaporation source affects the sealing performance in a high temperature environment.

[0004] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0005] A vacuum coating machine with adjustable coating spacing comprises a door panel, a vacuum box is fixedly installed on the top surface of the door panel, the bottom of the vacuum box is connected to the door panel, a fixing hole connected to the vacuum box is provided on the bottom surface of the door panel, a substrate rack is provided inside the vacuum box, the top of the substrate rack is fixedly connected to the top plate of the vacuum box, an evaporation source is provided below the substrate rack, a lifting platform is fixedly connected to the bottom surface of the evaporation source, a connecting rod is fixedly connected to the bottom surface of the lifting platform, an electric cylinder is fixedly installed on the bottom surface of the door panel, the lifting rod of the electric cylinder is fixedly connected to the bottom end of the connecting rod after passing through the fixing hole, a vacuum metal bellows is sleeved on the outside of the connecting rod, the top of the vacuum metal bellows is fixedly connected to the bottom surface of the lifting platform, and the bottom is fixedly connected to the top surface of the door panel.

[0006] A further technical solution is that sealing copper pads are provided on the end surfaces of the vacuum metal bellows that are in contact with the lifting platform and the door panel.

[0007] A further technical solution is that a sealing ring is provided between the contact surface of the door panel and the vacuum box.

[0008] A further technical solution is that the vacuum box is fixedly connected to the door panel by a plurality of bolts.

[0009] Compared with the prior art, the beneficial effects of the utility model are:

[0010] The utility model arranges a vacuum metal bellows on the outside of the connecting rod, and the vacuum metal bellows will be lengthened or shortened as the lifting platform moves up and down. At the same time, sealing copper pads are arranged at the connecting positions at both ends of the vacuum metal bellows to ensure that the vacuum box body is not connected to the external air, thereby ensuring the sealing during the coating operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a structural schematic diagram of the utility model;

[0012] Figure 2 for Figure 1 A partial enlarged view of serial number A.

[0013] Icon: 1-door panel, 2-vacuum box, 3-substrate rack, 4-evaporation source, 5-lifting platform, 6-connecting rod, 7-electric cylinder, 701-lifting rod, 8-fixing hole, 9-vacuum metal bellows, 10-sealing copper pad. DETAILED DESCRIPTION

[0014] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0015] Figure 1 to Figure 2 This is an embodiment of the utility model.

[0016] Embodiment 1:

[0017] A vacuum coating machine with adjustable coating spacing comprises a door panel 1, a vacuum box 2 is fixedly mounted on the top surface of the door panel 1, the bottom of the vacuum box 2 is connected to the door panel 1, a fixing hole 8 connected to the vacuum box 2 is provided on the bottom surface of the door panel 1, a substrate rack 3 is fixedly mounted inside the vacuum box 2, an evaporation source 4 is provided below the substrate rack 3, a lifting platform 5 is fixedly connected to the bottom surface of the evaporation source 4, a connecting rod 6 is fixedly connected to the bottom surface of the lifting platform 5, an electric cylinder 7 is fixedly mounted on the bottom surface of the door panel 1, a lifting rod 701 of the electric cylinder 7 passes through the fixing hole 8 and is fixedly connected to the bottom end of the connecting rod 6, a vacuum metal bellows 9 is sleeved on the outside of the connecting rod 6, the top of the vacuum metal bellows 9 is fixedly connected to the bottom surface of the lifting platform 5, and the bottom is fixedly connected to the top surface of the door panel 1.

[0018] Figure 1-2A preferred embodiment of a vacuum coating machine with adjustable coating spacing of the utility model is shown. This embodiment specifically includes: when the utility model is put into use, the electric cylinder 7 is started, and the lifting rod 701 of the electric cylinder 7 is controlled to push the connecting rod 6 to move up and down inside the vacuum box 2, so that the distance between the evaporation source 4 on the lifting platform 5 and the substrate rack 3 can be controlled to ensure that the distance parameters meet the requirements during the vacuum coating operation. In the process of the lifting platform 5 moving up and down, the vacuum metal bellows 9 will be lengthened or shortened as the lifting platform 5 moves, thereby ensuring that the vacuum box 2 will not be connected to the air in the vacuum metal bellows 9, thereby ensuring the sealing during the coating operation.

[0019] Embodiment 2:

[0020] A vacuum coating machine with adjustable coating spacing comprises a door panel 1, a vacuum box 2 is fixedly mounted on the top surface of the door panel 1, the bottom of the vacuum box 2 is connected to the door panel 1, a fixing hole 8 connected to the vacuum box 2 is provided on the bottom surface of the door panel 1, a substrate rack 3 is fixedly mounted inside the vacuum box 2, an evaporation source 4 is provided below the substrate rack 3, a lifting platform 5 is fixedly connected to the bottom surface of the evaporation source 4, a connecting rod 6 is fixedly connected to the bottom surface of the lifting platform 5, an electric cylinder 7 is fixedly mounted on the bottom surface of the door panel 1, a lifting rod 701 of the electric cylinder 7 passes through the fixing hole 8 and is fixedly connected to the bottom end of the connecting rod 6, a vacuum metal bellows 9 is sleeved on the outside of the connecting rod 6, the top of the vacuum metal bellows 9 is fixedly connected to the bottom surface of the lifting platform 5, and the bottom is fixedly connected to the top surface of the door panel 1.

[0021] Sealing copper pads 10 are provided on the end surfaces of the vacuum metal bellows 9 that are in contact with the lifting platform 5 and the door panel 1 .

[0022] A sealing ring is provided between the contact surfaces of the door panel 1 and the vacuum box 2 .

[0023] The vacuum box 2 is fixedly connected to the door panel 1 via a plurality of bolts.

[0024] Figure 1-2 A preferred embodiment of a vacuum coating machine with adjustable coating spacing of the utility model is shown, and this embodiment specifically includes: when the utility model is put into use, by arranging sealing copper pads 10 at the top and bottom ends of the vacuum metal bellows 9, and arranging a sealing ring between the contact surface of the door panel 1 and the vacuum box 2, it is ensured that the vacuum box 2 will not be connected to the external air, thereby ensuring the sealing during coating operation, and the vacuum box 2 is fixed on the door panel 1 by a plurality of bolts, which is convenient for opening and maintenance when a fault occurs inside the vacuum box 2.

[0025] Although the utility model is described herein with reference to a plurality of illustrative embodiments of the utility model, it should be understood that those skilled in the art may devise many other modifications and implementations that fall within the scope and spirit of the principles disclosed herein. More specifically, within the scope of the drawings and claims disclosed herein, various modifications and improvements may be made to the components and / or layout of the subject combination layout. In addition to the modifications and improvements made to the components and / or layout, other uses will also be apparent to those skilled in the art.

Claims

1. A vacuum coating machine with adjustable coating spacing, characterized in that: The invention comprises a door panel (1), a vacuum box (2) is fixedly mounted on the top surface of the door panel (1), the bottom of the vacuum box (2) is connected to the door panel (1), a fixing hole (8) connected to the vacuum box (2) is provided on the bottom surface of the door panel (1), a substrate rack (3) is fixedly mounted inside the vacuum box (2), an evaporation source (4) is provided below the substrate rack (3), a lifting platform (5) is fixedly connected to the bottom surface of the evaporation source (4), a connecting rod (6) is fixedly connected to the bottom surface of the lifting platform (5), an electric cylinder (7) is fixedly mounted on the bottom surface of the door panel (1), a lifting rod (701) of the electric cylinder (7) passes through the fixing hole (8) and is fixedly connected to the bottom end of the connecting rod (6), a vacuum metal bellows (9) is sleeved on the outside of the connecting rod (6), the top of the vacuum metal bellows (9) is fixedly connected to the bottom surface of the lifting platform (5), and the bottom is fixedly connected to the top surface of the door panel (1).

2. The vacuum coating machine with adjustable coating spacing according to claim 1, characterized in that: Sealing copper pads (10) are provided on the end surfaces of the vacuum metal bellows (9) that are in contact with the lifting platform (5) and the door panel (1).

3. The vacuum coating machine with adjustable coating spacing according to claim 1, characterized in that: A sealing ring is provided between the contact surface between the door panel (1) and the vacuum box body (2).

4. The vacuum coating machine with adjustable coating spacing according to claim 1, characterized in that: The vacuum box body (2) is fixedly connected to the door panel (1) via a plurality of bolts.

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