Position-adjustable evaporating crucible
By designing an evaporation crucible with adjustable position in a vacuum coating machine, the movement and adjustment of the crucible is achieved using slot-shaped holes and motor-driven rotating shafts, the problem of the inability to index the crucible in traditional systems is solved, and the flexibility and efficiency of the coating process are improved.
Patent Information
- Application Number
- CN202420742661.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-11
- Publication Date
- 2025-03-28
- Estimated Expiration
- 2034-04-11
AI Technical Summary
The evaporation crucible in a traditional vacuum coating machine cannot be indexed, resulting in the inability to adjust the distance from the crucible to the substrate when debugging performance or production process changes.
An evaporation crucible with adjustable position is designed. By providing groove holes and sealing rings on the fixed plate, combined with a motor driving the rotating shaft, the crucible can be moved under sealing conditions, and a scale is set on the fixed plate to observe the moving distance.
The distance between the crucible and the substrate is adjusted while ensuring sealing, which simplifies process adjustments in equipment debugging and production processes, and improves the flexibility and efficiency of the coating process.
Smart Images
Figure CN222684731U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of vacuum coating, in particular to an evaporation crucible with adjustable position. Background Art
[0002] When the vacuum coating machine is coating, the evaporation crucible sometimes needs to be indexed, so a transmission system outside the vacuum box is required to drive the crucible to index. In traditional systems, the crucible is usually installed in a fixed space, so the crucible evaporation point is permanently fixed after installation. In the coating process, the distance from the crucible to the substrate is very important. Therefore, during equipment debugging and production, if the debugging performance does not meet the standards or the production process changes and the distance from the crucible to the substrate needs to be changed, it is difficult to start. Utility Model Content
[0003] The utility model aims to provide an evaporation crucible with adjustable position, so as to solve the problem that the evaporation crucible in the traditional vacuum coating machine cannot be indexed.
[0004] In order to solve the above technical problems, the utility model adopts the following technical solutions:
[0005] A position-adjustable evaporating crucible comprises a box body, a bottom plate of which is provided with a conducting mounting hole, a fixing plate fixedly mounted on the bottom of the bottom plate, a slot-shaped hole connected to the mounting hole is arranged on the fixing plate, a movable plate is arranged on the bottom of the fixing plate, a plurality of strip holes are arranged on the movable plate, the movable plate is threadedly connected to the fixing plate through a plurality of bolts passing through the strip holes, a motor bracket is fixedly mounted on the bottom of the movable plate, a motor is fixedly mounted on the motor bracket, a crucible is arranged inside the box body, a sealing seat is arranged at the bottom of the crucible, the bottom of the sealing seat is fixedly connected to the movable plate after passing through the mounting hole and the slot-shaped hole, a rotating shaft is arranged inside the sealing seat, the top end of the rotating shaft is fixedly connected to the crucible, and the bottom end of the rotating shaft is transmission-connected to the motor after passing through the movable plate.
[0006] A further technical solution is that a first gear is fixedly mounted on the output shaft of the motor, a second gear is fixedly connected to the bottom end of the rotating shaft, and the second gear is meshed with the first gear.
[0007] A further technical solution is that a groove-shaped sealing ring is fixedly installed on the hole wall of the groove-shaped hole.
[0008] A further technical solution is to provide a scale on the bottom surface of the fixing plate.
[0009] Compared with the prior art, the beneficial effects of the utility model are:
[0010] The utility model allows the crucible to move under the premise of ensuring sealing by means of the slotted hole arranged on the fixed plate, so that during the coating process, the distance from the crucible to the substrate can be adjusted, and the slotted sealing ring is arranged in the slotted hole to further enhance the sealing, and the scale is arranged on the fixed plate to facilitate observation of the moving distance of the crucible. BRIEF DESCRIPTION OF THE DRAWINGS
[0011] Figure 1 It is a three-dimensional diagram of the utility model;
[0012] Figure 2 It is a structural schematic diagram of the utility model;
[0013] Figure 3 It is a structural schematic diagram of the fixing plate in the utility model;
[0014] Figure 4 It is a structural schematic diagram of the movable plate in the utility model.
[0015] Icons: 1-base plate, 2-mounting hole, 3-fixed plate, 4-slot hole, 5-movable plate, 6-bar hole, 7-motor bracket, 8-motor, 9-first gear, 10-sealing seat, 11-rotating shaft, 12-second gear, 13-slot sealing ring, 14-scale, 15-crucible. DETAILED DESCRIPTION
[0016] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.
[0017] Figures 1 to 4 This is an embodiment of the utility model.
[0018] Embodiment 1:
[0019] A position-adjustable evaporation crucible comprises a box body, a bottom plate 1 of the box body is provided with a conducting mounting hole 2, a fixing plate 3 is fixedly installed at the bottom of the bottom plate 1, a slotted hole 4 communicating with the mounting hole 2 is provided on the fixing plate 3, a movable plate 5 is provided at the bottom of the fixing plate 3, a plurality of strip holes 6 are provided on the movable plate 5, the movable plate 5 is threadedly connected to the fixing plate 3 through a plurality of bolts passing through the strip holes 6, a motor bracket 7 is fixedly installed at the bottom of the movable plate 5, a motor 8 is fixedly installed on the motor bracket 7, a crucible 15 is provided inside the box body, a sealing seat 10 is provided at the bottom of the crucible 15, the bottom of the sealing seat 10 is fixedly connected to the movable plate 5 after passing through the mounting hole 2 and the slotted hole 4, a rotating shaft 11 is provided inside the sealing seat 10, the top end of the rotating shaft 11 is fixedly connected to the crucible 15, and the bottom end of the rotating shaft 11 is transmission-connected to the motor 8 after passing through the movable plate 5.
[0020] Figure 1-4 A preferred embodiment of a position-adjustable evaporation crucible of the utility model is shown, and this embodiment specifically includes: when the utility model is put into use, after the motor 8 is started, the shaft 11 rotates, and the shaft 11 can drive the crucible 15 to rotate synchronously, so that the crucible 15 can complete the corresponding vacuum coating work. When the crucible 15 needs to be indexed, the bolts on the movable plate 5 are first loosened, and then the movable plate 5 is pushed with force to realize the indexing work of the crucible 15. The range of movement of the movable plate 5 is limited by the length of the strip hole 6, so the slotted hole 4 will not be connected to the external air, ensuring the normal operation of the vacuum coating machine. When the crucible 15 is indexed to the specified position, the bolts are tightened again to make the position of the crucible 15 stable and immovable.
[0021] Embodiment 2:
[0022] A position-adjustable evaporation crucible comprises a box body, a bottom plate 1 of the box body is provided with a conducting mounting hole 2, a fixing plate 3 is fixedly installed at the bottom of the bottom plate 1, a slotted hole 4 communicating with the mounting hole 2 is provided on the fixing plate 3, a movable plate 5 is provided at the bottom of the fixing plate 3, a plurality of strip holes 6 are provided on the movable plate 5, the movable plate 5 is threadedly connected to the fixing plate 3 through a plurality of bolts passing through the strip holes 6, a motor bracket 7 is fixedly installed at the bottom of the movable plate 5, a motor 8 is fixedly installed on the motor bracket 7, a crucible 15 is provided inside the box body, a sealing seat 10 is provided at the bottom of the crucible 15, the bottom of the sealing seat 10 is fixedly connected to the movable plate 5 after passing through the mounting hole 2 and the slotted hole 4, a rotating shaft 11 is provided inside the sealing seat 10, the top end of the rotating shaft 11 is fixedly connected to the crucible 15, and the bottom end of the rotating shaft 11 is transmission-connected to the motor 8 after passing through the movable plate 5.
[0023] A first gear 9 is fixedly mounted on the output shaft of the motor 8 , and a second gear 12 is fixedly connected to the bottom end of the rotating shaft, and the second gear 12 is meshed with the first gear 9 .
[0024] A groove-shaped sealing ring 13 is fixedly mounted on the hole wall of the groove-shaped hole 4 .
[0025] A scale 14 is provided on the bottom surface of the fixing plate 3 .
[0026] Figure 1-4 A preferred embodiment of a position-adjustable evaporation crucible of the utility model is shown, and this embodiment specifically includes: when the utility model is put into use, a second gear 12 is meshed with a first gear 9 for rotational connection, which is not only simple in structure but also convenient for inspection and maintenance, and a grooved sealing ring 13 is arranged on the grooved hole 4 to enhance the sealing between the fixed plate 3 and the movable plate 5, and a scale 14 is arranged on the fixed plate 3 to facilitate the staff to observe the moving distance of the crucible 15.
[0027] Although the utility model is described herein with reference to a plurality of illustrative embodiments of the utility model, it should be understood that those skilled in the art may devise many other modifications and implementations that fall within the scope and spirit of the principles disclosed herein. More specifically, within the scope of the drawings and claims disclosed herein, various modifications and improvements may be made to the components and / or layout of the subject combination layout. In addition to the modifications and improvements made to the components and / or layout, other uses will also be apparent to those skilled in the art.
Claims
1. A position-adjustable evaporation crucible, characterized in that: The invention comprises a box body, wherein a conductive mounting hole (2) is arranged on a bottom plate (1) of the box body, a fixing plate (3) is fixedly mounted on the bottom of the bottom plate (1), a slot-shaped hole (4) connected to the mounting hole (2) is arranged on the fixing plate (3), a movable plate (5) is arranged at the bottom of the fixing plate (3), a plurality of strip holes (6) are arranged on the movable plate (5), the movable plate (5) is threadedly connected to the fixing plate (3) by means of a plurality of bolts passing through the strip holes (6), and a motor bracket (7) is fixedly mounted on the bottom of the movable plate (5). ), a motor (8) is fixedly mounted on the motor bracket (7), a crucible (15) is arranged inside the box, a sealing seat (10) is arranged at the bottom of the crucible (15), the bottom of the sealing seat (10) passes through the mounting hole (2) and the slot hole (4) and is fixedly connected to the moving plate (5), a rotating shaft (11) is arranged inside the sealing seat (10), the top end of the rotating shaft (11) is fixedly connected to the crucible (15), and the bottom end of the rotating shaft (11) passes through the moving plate (5) and is transmission-connected to the motor (8).
2. The position-adjustable evaporator crucible according to claim 1, characterized in that: A first gear (9) is fixedly mounted on the output shaft of the motor (8), and a second gear (12) is fixedly connected to the bottom end of the rotating shaft, wherein the second gear (12) meshes with the first gear (9).
3. The position-adjustable evaporator crucible according to claim 1, characterized in that: A grooved sealing ring (13) is fixedly mounted on the hole wall of the grooved hole (4).
4. The position-adjustable evaporator crucible according to claim 1, characterized in that: A scale (14) is provided on the bottom surface of the fixing plate (3).