Carrier plate for film coating

Abstract

The utility model relates to the technical field of semiconductor processing equipment, in particular to a carrier plate for coating, which comprises a plurality of flat plates, a plurality of substrates, C-shaped beams 3 and cross beams, the substrates are arranged on the flat plates, two adjacent flat plates are connected through the cross beams, two end parts of each cross beam are connected with the C-shaped beams 3, and a plurality of substrates are uniformly distributed on each flat plate. The carrier plate for film coating is simple in structure and convenient to use, and the C-shaped beam and the cross beam are arranged, so that the structural strength is improved, the distance between substrates on two sides of the cross beam can be reduced, and the utilization rate of the carrier plate is improved; the problem that when temperature difference exists between different parts after heating, a flat plate, used for placing a plurality of substrates, of the Pocket is deformed is solved; the edge of the square tube is easy to have chromatic aberration during sputtering, and the utilization rate of the carrier plate is low.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing equipment, in particular to a carrier plate for coating. Background Art

[0002] PVD is the abbreviation of Physical Vapor Deposition, which refers to the method of using physical methods (such as evaporation, sputtering, etc.) to vaporize the coating material and deposit it on the surface of the substrate into a metal, alloy or compound film. In the field of photovoltaic cell chip manufacturing, PVD technology is a process technology for preparing thin films on substrates. The cell silicon wafers to be coated need to be placed on a carrier to carry the substrate in and out of the vacuum chamber. The carriers in the prior art are all fixed with oblong holes and square tubes are used as crossbeam supports; when there is a temperature difference between different components after heating, the Pocket (a flat plate for placing multiple substrates) will be deformed; the edges of the square tube are prone to color difference during sputtering, and the utilization rate of the carrier is low. Utility Model Content

[0003] In view of the deficiencies in the prior art, the purpose of the present invention is to provide a coating carrier with a simple structure and easy use. The arrangement of the C-beam and the crossbeam of the present invention not only improves the strength of the structure, but also reduces the distance between the substrates on both sides of the crossbeam, thereby improving the utilization rate of the carrier.

[0004] To achieve the above-mentioned purpose, the technical solution of the utility model is: a carrier plate for coating, including multiple flat plates and multiple substrates, the substrates are arranged on the flat plates, and also include C-beams and cross beams. The adjacent flat plates are connected by cross beams, and the two ends of the cross beams are connected to the C-beams, and each flat plate is evenly distributed with multiple substrates.

[0005] Furthermore, both side portions of each flat plate are mounted on the crossbeam, and both sides of the crossbeam are provided with slots, and the side portions of the flat plate are inserted into the slots.

[0006] Furthermore, the slots are symmetrically arranged on both sides of the crossbeam.

[0007] Furthermore, a mounting hole is provided above the clamping slot on the crossbeam, and a bolt cooperating therewith is provided in the mounting hole.

[0008] Furthermore, the mounting hole is a threaded hole, the mounting hole is connected to the slot, and the end of the bolt passes through the mounting hole and extends into the slot to contact and press the plate.

[0009] Furthermore, the crossbeam is a round tube, the mounting hole is perpendicular to the slot, and a shoulder is provided at the upper end of the mounting hole on the crossbeam.

[0010] Furthermore, two ends of the crossbeam are provided with clamping blocks, and the clamping blocks are clamped in the C-shaped clamping holes on the C-shaped beam.

[0011] The advantages of adopting the technical solution of the utility model are:

[0012] The coating carrier of the utility model has a simple structure and is easy to use, and the arrangement of the C-shaped beam and the cross beam not only improves the strength of the structure, but also reduces the distance between the substrates on both sides of the cross beam, thereby improving the utilization rate of the carrier. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only for the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0014] Figure 1 This is a schematic diagram of the overall structure of the coating carrier of the utility model;

[0015] Figure 2 It is a partial schematic diagram of the coating carrier of the utility model;

[0016] Figure 3 This is a schematic diagram of the crossbeam structure of the utility model.

[0017] The markings in the above figure are: 1, flat plate; 2, substrate; 3, C-beam; 4, crossbeam; 41, slot; 42, mounting hole; 43, shoulder; 5, bolt; 6, block. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with specific embodiments.

[0019] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the present invention should be understood by people with ordinary skills in the field to which the present invention belongs. The words "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0020] like Figures 1 to 3As shown, a coating carrier includes multiple flat plates 1 and multiple substrates 2, and the substrates 2 are arranged on the flat plates 1, and are characterized in that: they also include C-shaped beams 3 and cross beams 4, and the adjacent flat plates 1 are connected by cross beams 4, and the two ends of the cross beams 4 are connected to the C-shaped beams 3, and each flat plate 1 is evenly distributed with multiple substrates 2. The coating carrier of the utility model has a simple structure and is easy to use. The arrangement of the C-shaped beams and cross beams not only improves the strength of the structure, but also reduces the distance between the substrates on both sides of the cross beams, thereby improving the utilization rate of the carrier; it solves the problem that when there is a temperature difference between different parts after heating, the flat plate used in the pocket for placing multiple substrates will be deformed; when the square tube is sputtered, the edges are prone to color difference, and the utilization rate of the carrier is low.

[0021] Both sides of each flat plate 1 are mounted on the crossbeam 4. Both sides of the crossbeam 4 are provided with slots 41, and the side parts of the flat plate 1 are inserted into the slots 41. The slots 41 are symmetrically arranged on both sides of the crossbeam 4. Above the slots 41 on the crossbeam 4, there are mounting holes 42, and bolts 5 are provided in the mounting holes 42 to match them. The mounting holes 42 are threaded holes, and the mounting holes 42 are connected with the slots 41. The ends of the bolts 5 pass through the mounting holes 42 and extend into the slots 41 to contact and press the flat plate 1. The flat plate of the utility model is connected to the crossbeam in a pressing form, which can be stretched and retracted when heated, and the thermal deformation of the flat plate can be reduced.

[0022] The cross beam 4 is a round tube, the mounting hole 42 is perpendicular to the slot 41, and a shoulder 43 is provided at the upper end of the mounting hole 42 on the cross beam 4. The depth of the plate 1 inserted into the slot 41 is less than the length of the slot 41.

[0023] Blocks 6 are provided at both ends of the cross beam 4, and the block 6 is clamped in the C-shaped bayonet on the C-shaped beam 3. The cross beam 4 can also be connected to the C-shaped beam 3 by fasteners such as screws.

[0024] Specifically, the coating carrier of the utility model is composed of a C-shaped beam, a cross beam and a flat plate. The cross beam is made of a round tube and has grooves on both sides. The flat plate is inserted into the groove of the cross beam and is pressed by screws on the cross beam. When the carrier is heated in the cavity, the flat plate can be stretched in the slot after being heated, and the deformation of the flat plate is small, which is beneficial to the coating of the substrate and the automatic placement of the substrate in the carrier.

[0025] The crossbeam is in the form of a circular tube, which not only improves the strength of the structure, but also has little impact on the substrates on both sides of the crossbeam during coating, and can reduce the distance between the substrates on both sides of the crossbeam, thereby improving the utilization rate of the carrier.

[0026] Those skilled in the art should understand that the discussion of any of the above embodiments is merely illustrative and is not intended to imply that the scope of the present invention is limited to these examples; under the concept of the present invention, the technical features in the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of the different aspects of the present invention as described above, which are not provided in detail for the sake of simplicity. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A carrier for coating, comprising a plurality of flat plates (1) and a plurality of substrates (2), wherein the substrates (2) are arranged on the flat plates (1), characterized in that: It also comprises a C-shaped beam (3) and a cross beam (4), wherein the two adjacent flat plates (1) are connected via the cross beam (4), and the two ends of the cross beam (4) are connected to the C-shaped beam (3), and each flat plate (1) is evenly distributed with a plurality of substrates (2).

2. A coating carrier as claimed in claim 1, characterized in that: Both sides of each flat plate (1) are mounted on the crossbeam (4), and both sides of the crossbeam (4) are provided with slots (41), and the side parts of the flat plate (1) are inserted into the slots (41).

3. A coating carrier as claimed in claim 2, characterized in that: The clamping grooves (41) are symmetrically arranged on both sides of the crossbeam (4).

4. A coating carrier as claimed in claim 2 or 3, characterized in that: A mounting hole (42) is provided above the clamping groove (41) on the crossbeam (4), and a bolt (5) cooperating therewith is provided in the mounting hole (42).

5. A coating carrier as claimed in claim 4, characterized in that: The mounting hole (42) is a threaded hole, the mounting hole (42) is connected to the clamping groove (41), and the end of the bolt (5) passes through the mounting hole (42) and extends into the clamping groove (41) to contact and press the plate (1).

6. A coating carrier as claimed in claim 5, characterized in that: The crossbeam (4) is a round tube, the mounting hole (42) is perpendicular to the clamping groove (41), and a shoulder (43) is provided at the upper end of the mounting hole (42) on the crossbeam (4).

7. A coating carrier as claimed in claim 6, characterized in that: The depth of the plate (1) inserted into the card slot (41) is less than the length of the card slot (41).

8. The coating carrier according to claim 1, characterized in that: The two ends of the cross beam (4) are provided with clamping blocks (6), and the clamping blocks (6) are clamped in the C-shaped clamping openings on the C-shaped beam (3).

Images