Silicon carbide wafer cleaning device with protective structure

Abstract

The utility model discloses a silicon carbide wafer cleaning device with a protective structure, which comprises a cleaning box, a supporting net is arranged below the middle part of the cleaning box, and a clean water spray head is arranged above the inner part of the cleaning box; a protection assembly is arranged on the upper surface of the supporting net, and limiting mechanisms are arranged on the two sides of the upper surface of the supporting net; the protection assembly comprises a bottom box, the top of the bottom box is rotationally connected with a cover box, the side edge of the bottom box is connected with a limiting sliding rod in a penetrating mode, and the end, located in the bottom box, of the limiting sliding rod is fixedly connected with a limiting sliding plate. Protrusions on the two sides of the bottom box are fixedly connected with threaded sleeves, the threaded sleeves are in threaded connection with rotary sleeves, and the limiting sliding rods sequentially penetrate through the rotary sleeves, the threaded sleeves and the bottom box from outside to inside. And through a limiting sliding plate and a limiting sliding rod, the clamping plug boxes of different sizes can be temporarily clamped after being placed in the bottom box, and the clamping plug boxes are prevented from shaking in the transferring and washing process.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon carbide wafer production, in particular to a silicon carbide wafer cleaning device provided with a protective structure. Background Art

[0002] When cleaning wafers, workers are generally required to use clamps to place the turnover plug box containing the wafers to be cleaned into the cleaning machine for cleaning, and then take out the entire plug box and spin dry it after cleaning. Due to the high temperature of the cleaning liquid, it is inconvenient for workers to use clamps to take and put the plug box, and the clamps are often unstable, causing the plug box to fall and break the wafers.

[0003] A Chinese patent discloses a silicon carbide wafer cleaning device (publication number: CN211757266U), which includes a base, a handle, at least one support rod and a plurality of fences; the handle is connected to the base through the support rod; the plurality of fences are respectively connected to the base, and the plurality of fences, the support rod and the base are combined to form a receiving space. This device can efficiently and stably clean and transport a plurality of plug boxes containing wafers, and can also be used for temporary storage of plug boxes, which is very convenient for workers to operate and use, and can also prevent losses caused by the plug boxes falling, effectively ensuring production efficiency and product quality;

[0004] The above device can only be used for plug boxes of a single size. It cannot fix plug boxes of different lengths, and the plug boxes will shake randomly inside the device. Moreover, since the above device is not a completely closed frame, it may tilt or even fall due to hand slip during transportation, causing the plug box inside to be scattered together with the silicon carbide wafer. Moreover, when flushing, the above device can only be flushed unidirectionally from the side, and the water flow on the other side will be blocked by several support rods, affecting the flushing effect. Utility Model Content

[0005] The technical problems to be solved by the utility model are as follows:

[0006] 1. The device is not a completely enclosed frame, and may cause the items inside to scatter when it falls. It is also not suitable for jam boxes of different lengths, and its practicality is limited.

[0007] The purpose of the utility model can be achieved through the following technical solutions:

[0008] A silicon carbide wafer cleaning device with a protective structure comprises a cleaning box, a support net is installed at the lower middle part of the cleaning box, and a clean water nozzle is arranged at the upper part of the cleaning box;

[0009] A protective component is provided on the upper surface of the support net, and limiting mechanisms are provided on both sides of the upper surface of the support net;

[0010] The protection assembly comprises a bottom box, the top of the bottom box is rotatably connected to a cover box, the side of the bottom box is penetrated and connected to a limit slide bar, and one end of the limit slide bar located inside the bottom box is fixedly connected to a limit slide plate;

[0011] The protrusions on both sides of the bottom box are fixedly connected with screw sleeves, the screw sleeves are threadedly connected with rotary sleeves, and the limiting sliding rod passes through the rotary sleeve, the screw sleeve and the bottom box in sequence from outside to inside.

[0012] As a further solution of the utility model: a spiral pattern is provided at one end of the outer side of the screw sleeve, the spiral pattern is threadedly connected to the rotary sleeve, a fixed sleeve is fixedly connected to the inside of the screw sleeve, the fixed sleeve is penetrated by a limiting sliding rod, and the side of the rotary sleeve is fitted with the outer side of the fixed sleeve.

[0013] As a further solution of the utility model: a limiting buckle plate is fixedly connected to the middle of the front side of the base box, a pulling groove is opened in the middle of the front side of the cover box, and the limiting buckle plate is connected with a buckle block.

[0014] As a further solution of the utility model: the top of the cover box is symmetrically slidably connected with a sliding mesh cover, and the top ends of the two sliding mesh covers are fixedly connected with lifting rods, and the lifting rods are made of PVC plastic plates.

[0015] As a further solution of the utility model: a buckle groove is provided at one end of the two lifting rods close to each other, and the two lifting rods are buckled and connected through the buckle groove.

[0016] As a further solution of the utility model: the bottom and side edges of the bottom box are both installed with screens, and the four sides of the cover box are also installed with screens.

[0017] As a further solution of the utility model: the limiting mechanism includes electric push rods symmetrically installed on both sides of the cleaning box, the output end of the electric push rods is fixedly connected to an auxiliary spring, and one end of the auxiliary spring is fixedly connected to an anti-shifting plate.

[0018] Beneficial effects of the utility model:

[0019] 1. By setting a protective component with a limit slide plate and a limit slide bar, the plug boxes of different sizes can be temporarily clamped after being placed in the bottom box to prevent them from shaking during transportation. It can also prevent the plug boxes from being washed away by the water flow during the flushing process, causing the local plug boxes to be out of the flushing of the water flow, thereby ensuring the flushing effect. In addition, through the cover box and the sliding mesh cover, if they fall during the transportation process, the sliding mesh cover can prevent the plug boxes and wafers from falling out, and the sliding mesh cover can be opened during flushing to ensure the flushing effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The utility model is further described below in conjunction with the accompanying drawings.

[0021] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0022] Figure 2 is a schematic diagram of the side view structure of the protection component;

[0023] Figure 3 It is a schematic diagram of the structure when the bottom box and the cover box are opened from above;

[0024] Figure 4 It is a schematic diagram of the connection structure between the screw sleeve and the rotary sleeve;

[0025] Figure 5 It is a schematic diagram of the top view of the cover box.

[0026] In the figure: 1, cleaning box; 101, water nozzle; 102, support net;

[0027] 2. Protective components; 201. Bottom box; 202. Cover box; 203. Screw sleeve; 204. Rotary sleeve; 205. Limiting slide bar; 206. Fixed clamping sleeve; 207. Limiting buckle plate; 208. Pulling groove; 209. Buckle block; 210. Sliding net cover; 211. Lifting rod; 212. Buckle groove; 213. Limiting slide plate;

[0028] 3. Limiting mechanism; 301. Electric push rod; 302. Auxiliary spring; 303. Anti-shifting plate. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0030] like Figure 1-5 As shown, a silicon carbide wafer cleaning device with a protective structure includes a cleaning box 1, a support net 102 is installed at the lower middle part of the cleaning box 1, and a clean water nozzle 101 is arranged at the upper part of the cleaning box 1;

[0031] A protective component 2 is provided on the upper surface of the support net 102, and a limiting mechanism 3 is provided on both sides of the upper surface of the support net 102;

[0032] The protection assembly 2 includes a bottom box 201, the top of the bottom box 201 is rotatably connected to a cover box 202, the side of the bottom box 201 is penetrated and connected to a limit slide bar 205, and one end of the limit slide bar 205 located inside the bottom box 201 is fixedly connected to a limit slide plate 213;

[0033] The protrusions on both sides of the bottom box 201 are fixedly connected with screw sleeves 203, and the screw sleeves 203 are threadedly connected with rotary sleeves 204. The limiting sliding rod 205 passes through the rotary sleeve 204, the screw sleeve 203 and the bottom box 201 from the outside to the inside.

[0034] A spiral pattern is formed at one end of the outer side of the screw sleeve 203, and the spiral pattern is threadedly connected to the rotary sleeve 204. A fixed sleeve 206 is fixedly connected to the interior of the screw sleeve 203. The fixed sleeve 206 penetrates and is connected to the limiting slide bar 205. The side of the rotary sleeve 204 fits the outer side of the fixed sleeve 206. When the rotary sleeve 204 rotates, it will move along the spiral pattern, thereby squeezing the fixed sleeve 206, causing it to shrink and clamp the limiting slide bar 205.

[0035] A limiting buckle plate 207 is fixedly connected to the middle of the front side of the base box 201, and a pulling groove 208 is provided in the middle of the front side of the cover box 202, and the limiting buckle plate 207 is engaged and connected with a buckle block 209; when the cover box 202 needs to be opened, it is only necessary to pull the groove 208 to deform the limiting buckle plate 207 outward, thereby disengaging the limiting buckle plate 207 from the buckle block 209.

[0036] The top of the cover box 202 is symmetrically and slidably connected with a sliding net cover 210, and the tops of the two sliding net covers 210 are fixedly connected with lifting rods 211, which are made of PVC plastic plates; the ends of the two lifting rods 211 close to each other are provided with snap grooves 212, and the two lifting rods 211 are snapped and connected through the snap grooves 212; when the two lifting rods 211 are pulled forward and backward respectively, the snap grooves 212 will be disengaged, thereby allowing the sliding net covers 210 to be opened to both sides.

[0037] The bottom and sides of the bottom box 201 are all installed with screens, and the four sides of the cover box 202 are also installed with screens; the structure of the screens allows water to flow out and prevents water from accumulating inside the bottom box 201.

[0038] The limiting mechanism 3 includes an electric push rod 301 symmetrically installed on both sides of the cleaning box 1, and the output end of the electric push rod 301 is fixedly connected to an auxiliary spring 302, and one end of the auxiliary spring 302 is fixedly connected to an anti-displacement plate 303; the auxiliary spring 302 can prevent the electric push rod 301 from pushing the anti-displacement plate 303 excessively, causing the bottom box 201 to undergo an irreversible deformation.

[0039] The working principle of this utility model:

[0040] When the utility model is working, the plug box is first placed in the bottom box 201, and then the limiting slide bar 205 is pushed from both sides to make the limiting slide plate 213 close to the side of the plug box, and then the rotary sleeve 204 is rotated to make the rotary sleeve 204 move along the spiral pattern, so that the extrusion fixing sleeve 206 is retracted and clamped to the limiting slide bar 205;

[0041] Then, the cover box 202 is rotated so that the limit buckle plate 207 is engaged with the buckle block 209;

[0042] Then, the bottom box 201 is placed on the support net 102, and then the lifting rods 211 are pulled forward and backward to deform them, so that the two lifting rods 211 are separated through the buckle slots 212, and then the sliding net cover 210 is opened laterally;

[0043] Finally, the electric push rod 301 is started to make the anti-movement plate 303 fit and push the bottom box 201 to move it below the clean water nozzle 101, and finally the flushing is completed.

[0044] The above is a detailed description of an embodiment of the utility model, but the content is only a preferred embodiment of the utility model and cannot be considered to limit the scope of implementation of the utility model. All equivalent changes and improvements made within the scope of application of the utility model should still fall within the scope of the patent coverage of the utility model.

Claims

1. A silicon carbide wafer cleaning device provided with a protective structure, comprising a cleaning box (1), a support net (102) being installed at the lower middle portion of the cleaning box (1), and a clean water nozzle (101) being arranged at the upper inner portion of the cleaning box (1); Features: A protective component (2) is provided on the upper surface of the support net (102), and limiting mechanisms (3) are provided on both sides of the upper surface of the support net (102); The protection component (2) comprises a bottom box (201), the top of the bottom box (201) is rotatably connected to a cover box (202), the side of the bottom box (201) is penetrated by a limit slide bar (205), and one end of the limit slide bar (205) located inside the bottom box (201) is fixedly connected to a limit slide plate (213); The protrusions on both sides of the bottom box (201) are fixedly connected with screw sleeves (203), the screw sleeves (203) are threadedly connected with rotary sleeves (204), and the limiting sliding rod (205) passes through the rotary sleeves (204), the screw sleeves (203) and the bottom box (201) in sequence from outside to inside.

2. The silicon carbide wafer cleaning device with a protective structure according to claim 1, characterized in that: A spiral pattern is formed at one end of the outer side of the screw sleeve (203), and the spiral pattern is threadedly connected to the rotary sleeve (204). A fixed sleeve (206) is fixedly connected to the inside of the screw sleeve (203), and the fixed sleeve (206) is connected through a limited sliding rod (205). The side of the rotary sleeve (204) is in contact with the outer side of the fixed sleeve (206).

3. The silicon carbide wafer cleaning device with a protective structure according to claim 1, characterized in that: A limiting buckle plate (207) is fixedly connected to the middle of the front face of the base box (201), a pulling groove (208) is provided in the middle of the front face of the cover box (202), and the limiting buckle plate (207) is connected to a buckle block (209).

4. The silicon carbide wafer cleaning device with a protective structure according to claim 1, characterized in that: The top of the cover box (202) is symmetrically slidably connected to a sliding mesh cover (210), and the top ends of the two sliding mesh covers (210) are fixedly connected to lifting rods (211), which are made of PVC plastic plates.

5. The silicon carbide wafer cleaning device with a protective structure according to claim 4, characterized in that: A buckle groove (212) is provided at one end of the two lifting rods (211) that are close to each other, and the two lifting rods (211) are buckled and connected via the buckle groove (212).

6. The silicon carbide wafer cleaning device with a protective structure according to claim 1, characterized in that: The bottom and sides of the bottom box (201) are both installed with screens, and the four sides of the cover box (202) are also installed with screens.

7. The silicon carbide wafer cleaning device with a protective structure according to claim 1, characterized in that: The limiting mechanism (3) comprises electric push rods (301) symmetrically mounted on both sides of the cleaning box (1); an output end of the electric push rod (301) is fixedly connected to an auxiliary spring (302); and one end of the auxiliary spring (302) is fixedly connected to an anti-movement plate (303).

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