Ultrahigh-purity graphite heater for semiconductor

Abstract

The utility model belongs to the technical field of heaters, and particularly relates to an ultra-pure graphite heater for a semiconductor, which comprises a bottom plate, a limit ring and a crucible, the upper surface of the bottom plate is uniformly provided with mounting bottom holes by taking the center of the bottom plate as a circle center, heat insulation vertical plates are symmetrically arranged on two sides of the outer part of the bottom plate, and the heat insulation vertical plates are vertically arranged. The limiting ring is arranged above the bottom plate, through holes are evenly formed in the surface of the limiting ring, the through holes correspond to the mounting bottom holes in position one to one, sliding sleeves are symmetrically arranged on the outer side surface of the limiting ring, and the two sliding sleeves are slidably mounted on the surfaces of the two heat insulation vertical plates correspondingly; a plurality of heating graphite rods are fixed through the mounting holes of the bottom plate and the limiting rings, and when the heating graphite rods need to be replaced, the limiting rings can be moved downwards, so that the end parts of the graphite rods exceed the upper surfaces of the limiting rings, the graphite rods can be conveniently taken out through the tops, and the replacement convenience is improved; after replacement, the limiting ring is moved upwards to enable the surface to be flush with the top end face of the graphite rod.

Description

Technical Field

[0001] The utility model belongs to the technical field of heaters, and in particular relates to an ultra-high purity graphite heater for semiconductors. Background Art

[0002] Most of the existing graphite heaters use cylindrical graphite as a resistive heating element for heating. However, under long-term high temperature conditions, if one part of the existing graphite heater is damaged or broken during use, it will affect the temperature balance, thereby affecting the heating effect of the entire heater. In addition, if it is repaired, it is generally replaced as a whole, which wastes a lot of resources and increases production costs.

[0003] For example, the prior art discloses a split single crystal hot field graphite heater (CN 212519455 U), in which the heating rod graphite cylinder is detachable. When a single heating unit is damaged, it can be replaced separately to reduce maintenance costs. However, it is found during use that if the top of the heating rod is fixed by a supporting platform, and the supporting platform is in a fixed position, there is no fulcrum when replacing the heating rod, resulting in inconvenience in replacement. At the same time, the inner crucible is supported by two fixed plates, which results in not only limited stability of the crucible, but also the inability of the heater to adapt to the installation of crucibles of different sizes. Utility Model Content

[0004] In view of the problems existing in the prior art, the purpose of the utility model is to provide an ultra-high purity graphite heater for semiconductors, which can realize the adjustment of the height of the limit ring. When the heating rod needs to be replaced, the limit ring can be moved down to allow the end of the heating rod to leak out, making it easier to take out the heating rod, and can adapt to the installation of crucibles of different sizes.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] An ultra-high purity graphite heater for semiconductors comprises a base plate, a limiting ring and a crucible, wherein the upper surface of the base plate is evenly provided with mounting bottom holes with its center as the center of the circle, thermal insulation upright plates are symmetrically arranged on both sides of the outside of the base plate, the thermal insulation upright plates are vertically arranged, the limiting ring is placed above the base plate, through holes are evenly provided on the surface of the limiting ring, the through holes correspond to the positions of the mounting bottom holes one by one, the outer surface of the limiting ring is symmetrically provided with sliding sleeves, two of the sliding sleeves are respectively slidably installed on the surfaces of the two thermal insulation upright plates, a heating graphite rod is penetrated inside the through hole, the bottom of the heating graphite rod is installed inside the mounting bottom hole, and an electrode connecting piece is arranged on the side where the tops of the two thermal insulation upright plates are close to each other.

[0007] Furthermore, an extension plate is downwardly arranged on one side of the sliding sleeve away from the center of the limiting ring, and a positioning pin is slidably penetrated through the surface of the extension plate.

[0008] Furthermore, the outer side of the heat-insulating vertical plate is evenly provided with limiting holes, a plurality of the limiting holes are vertically distributed, and the end of the positioning pin is adapted to the inner size of the limiting hole.

[0009] Furthermore, four fixing tubes are evenly arranged on the inner side of the limiting ring. The fixing tubes are arranged horizontally, and one side of the fixing tubes close to the center of the limiting ring is open.

[0010] Furthermore, a support slide rod is slidably mounted on the open end of the fixed cylinder, and a positioning hole is opened on the surface of the support slide rod.

[0011] Furthermore, the crucible is placed inside the limiting ring, four ear plates are evenly arranged on the outer side above the crucible, and positioning bolts are arranged at the bottom of the ear plates, and the positioning bolts are matched with the inner size of the positioning holes.

[0012] Compared with the prior art, the beneficial effects of the utility model are as follows: multiple heating graphite rods are fixed through the mounting holes and the limiting rings of the bottom plate. When the heating graphite rod needs to be replaced, the limiting ring can be moved down so that the end of the graphite rod exceeds the upper surface of the limiting ring, and then the graphite rod can be taken out through the top to improve the convenience during replacement. After the replacement is completed, the limiting ring is moved up so that its surface is flush with the top surface of the graphite rod.

[0013] The inner crucible is fixed by four support rods, which can improve the stability of the crucible when in use, and the support slide bar can slide to adjust the distance between the positioning holes on the surface of the support slide bar and the center of the equipment, thereby adapting to the installation of crucibles of different sizes and improving flexibility during use. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0015] Figure 2 This is a schematic diagram of the installation structure of the base plate and the limiting ring of the utility model;

[0016] Figure 3 It is a schematic diagram of the three-dimensional structure of the crucible of the present utility model.

[0017] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0018] 1. Bottom plate; 2. Mounting bottom hole; 3. Insulation vertical plate; 4. Limiting ring; 5. Through hole; 6. Heating graphite rod; 7. Sliding sleeve; 8. Extension plate; 9. Positioning pin; 10. Limiting hole; 11. Electrode connecting piece; 12. Fixing cylinder; 13. Support slide rod; 14. Positioning hole; 15. Crucible; 16. Ear plate; 17. Positioning bolt. DETAILED DESCRIPTION

[0019] In order to make the purpose and advantages of the utility model more clear, the utility model is specifically described in combination with the following embodiments. It should be understood that the following text is only used to describe one or several specific implementations of the utility model, and does not strictly limit the protection scope of the specific request of the utility model.

[0020] Example 1

[0021] Please refer to Figure 1-Figure 2 As shown, an ultra-high purity graphite heater for semiconductors includes a bottom plate 1, a limiting ring 4 and a crucible 15. The upper surface of the bottom plate 1 is evenly provided with mounting bottom holes 2 with its center as the center of the circle. The mounting bottom holes 2 are blind holes. Insulating upright plates 3 are symmetrically arranged on both sides of the outside of the bottom plate 1. The insulating upright plates 3 are vertically arranged. The limiting ring 4 is placed above the bottom plate 1. Through holes 5 are evenly arranged on the surface of the limiting ring 4. The through holes 5 correspond to the mounting bottom holes 2 in one-to-one position. The corresponding through holes 5 and the mounting bottom holes 2 are on the same vertical line. The limiting ring 4 is symmetrically provided with a sliding sleeve 7, and the two sliding sleeves 7 are respectively slidably installed on the surfaces of the two heat-insulating upright plates 3, so that the limit ring 4 can slide in the vertical direction along the heat-insulating upright plates 3, so that the limit ring 4 can be moved down when replaced, so that the end of the heating graphite rod 6 exceeds the upper surface of the limit ring 4, so as to facilitate taking and placing. The heating graphite rod 6 passes through the inner side of the through hole 5, and the bottom of the heating graphite rod 6 is installed on the inner side of the mounting bottom hole 2. The electrode connecting piece 11 is provided on the side where the tops of the two heat-insulating upright plates 3 are close to each other.

[0022] Please refer to Figure 1 and Figure 2 As shown, an extension plate 8 is downwardly arranged on the side of the sliding sleeve 7 away from the center of the limit ring 4, and a positioning pin 9 is slidingly penetrated through the surface of the extension plate 8. Limiting holes 10 are evenly arranged on the outer side of the insulation vertical plate 3, and multiple limiting holes 10 are vertically distributed. The end of the positioning pin 9 is adapted to the internal size of the limiting hole 10, and the positioning pin 9 and the limiting hole 10 are matched to keep the height of the limit ring 4 stable.

[0023] Please refer to Figure 1-Figure 3 As shown, four fixed cylinders 12 are evenly arranged on the inner side of the limiting ring 4, and the fixed cylinder 12 is arranged horizontally. The side of the fixed cylinder 12 close to the center of the limiting ring 4 is open, and a supporting slide bar 13 is slidably installed on the open end of the fixed cylinder 12. A positioning hole 14 is opened on the surface of the supporting slide bar 13. The distance between the positioning hole 14 and the center of the limiting ring 4 can be adjusted by sliding the four supporting slide bars 13 respectively, so as to adapt to the installation of crucibles 15 of different sizes and improve its flexibility in use. The crucible 15 is placed on the inner side of the limiting ring 4, and four ear plates 16 are evenly arranged on the outer side above the crucible 15. A positioning bolt 17 is arranged at the bottom of the ear plate 16. The positioning bolt 17 is adapted to the inner size of the positioning hole 14, and the cooperation of the two ensures the stability of the crucible 15 after installation.

[0024] The working principle of the utility model is as follows: when it is necessary to replace the heating graphite rod 6, the positioning pins 9 on both sides can be removed, so that the sliding sleeve 7 loses its limit. At this time, the limiting ring 4 can be moved down to let the end of the heating graphite rod 6 leak out, so as to facilitate the removal and replacement of the heating graphite rod 6. Conversely, after replacement, the limiting ring 4 can be moved up so that the upper surface of the limiting ring 4 is flush with the top of the heating graphite rod 6 to prevent the exceeding heating graphite rod 6 from causing burns, and the positioning pins 9 and the limiting holes 10 cooperate with each other to keep the height of the limiting ring 4 fixed, and then the raw material to be heated is placed inside the crucible 15, and the crucible 15 is placed between multiple heating graphite rods 6, so that the four ear plates 16 are respectively placed on the upper surfaces of the four supporting slide bars 13, and the positioning bolts 17 and the positioning holes 14 cooperate with each other to keep the crucible 15 stable. The four supporting slide bars 13 can slide along the fixing tube 12 to adjust the distance from the center of the limiting ring 4, and then can adapt to the installation of crucibles 15 of different sizes.

[0025] Example 2

[0026] The bottom plate, insulation plate, limit ring, heating graphite rod, sleeve, extension plate, positioning pin, electrode connecting piece, fixing cylinder, support slide rod, crucible, ear plate, positioning bolt, etc. in the semiconductor ultra-high purity graphite heater are all made of semiconductor ultra-high purity graphite. According to the "Guidelines for the First Batch Application Demonstration of Key New Materials (2024 Edition)", the ash content of the semiconductor ultra-high purity graphite is ≤5ppm; the content of B, Al, and Fe is ≤0.01ppm; the resistivity (μΩ·m) is 11-15.

[0027] The above is only a preferred embodiment of the present invention. It should be noted that, for ordinary technicians in the technical field, several improvements and modifications can be made without departing from the principle of the present invention, and these improvements and modifications should also be regarded as the protection scope of the present invention. The structures, devices and operating methods not specifically described and explained in the present invention shall be implemented according to the conventional means in the field unless otherwise specified and limited.

Claims

1. An ultra-high purity graphite heater for semiconductors, comprising a base plate (1), a limiting ring (4) and a crucible (15), characterized in that: The upper surface of the bottom plate (1) is evenly provided with mounting bottom holes (2) with its center as the center of the circle, and heat insulation upright plates (3) are symmetrically arranged on both sides of the outside of the bottom plate (1), and the heat insulation upright plates (3) are arranged vertically. The limiting ring (4) is placed above the bottom plate (1), and the surface of the limiting ring (4) is evenly provided with through holes (5), and the positions of the through holes (5) and the mounting bottom holes (2) correspond one to one. The outer surface of the limiting ring (4) is symmetrically provided with sliding sleeves (7), and the two sliding sleeves (7) are respectively slidably installed on the surfaces of the two heat insulation upright plates (3). A heating graphite rod (6) passes through the inner side of the through hole (5), and the bottom of the heating graphite rod (6) is installed on the inner side of the mounting bottom hole (2). The tops of the two heat insulation upright plates (3) are close to each other and an electrode connecting sheet (11) is arranged.

2. The ultra-high purity graphite heater for semiconductor according to claim 1, characterized in that: An extension plate (8) is arranged downward on the side of the sliding sleeve (7) away from the center of the limiting ring (4), and a positioning pin (9) is slidably penetrated through the surface of the extension plate (8).

3. The ultra-high purity graphite heater for semiconductor according to claim 2, characterized in that: Limiting holes (10) are evenly arranged on the outer side of the heat-insulating vertical plate (3), a plurality of the limiting holes (10) are vertically distributed, and the end of the positioning pin (9) is adapted to the inner size of the limiting hole (10).

4. The ultra-high purity graphite heater for semiconductor according to claim 1, characterized in that: Four fixing tubes (12) are evenly arranged on the inner side of the limiting ring (4); the fixing tubes (12) are arranged horizontally, and one side of the fixing tubes (12) close to the center of the limiting ring (4) is open.

5. The ultra-high purity graphite heater for semiconductor according to claim 4, characterized in that: A support slide bar (13) is slidably mounted on the open end of the fixed cylinder (12), and a positioning hole (14) is provided on the surface of the support slide bar (13).

6. The ultra-high purity graphite heater for semiconductor according to claim 5, characterized in that: The crucible (15) is placed inside the limiting ring (4), four ear plates (16) are evenly arranged on the outside of the upper part of the crucible (15), and a positioning bolt (17) is arranged at the bottom of the ear plate (16), and the positioning bolt (17) is adapted to the inner size of the positioning hole (14).

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