Boat-racing composite robot

Abstract

The utility model relates to a boat-beating composite robot, comprising: a robot chassis; a boat-beating assembly, comprising a driving assembly and a boat-beating member connected to the driving assembly; the driving assembly is configured to perform a boat-beating operation by adjusting the boat-beating position, boat-beating direction and boat-beating amplitude of the boat-beating member. The utility model realizes the automation of the boat-beating process, reduces labor costs, and improves the effect of boat-beating.

Description

Technical Field

[0001] The utility model relates to the technical field of robots, in particular to a boat-racing composite robot. Background Art

[0002] In the production process of crystalline silicon solar cells, it is very important to ensure the correct contact between the silicon wafer and the graphite boat. Among them, the graphite boat is a tool used to carry silicon wafers for thin film deposition in PECVD (plasma enhanced chemical vapor deposition) equipment. In this process, the silicon wafer needs to be evenly placed on the boat blade of the graphite boat and maintain stable contact with the card point (used to fix the position of the silicon wafer). If the silicon wafer is not in good contact with the boat blade or the card point, it may cause the position of the silicon wafer to be unstable during the PECVD process, which in turn affects the uniformity and quality of the film, and may even cause damage to the silicon wafer or reduce production efficiency.

[0003] In order to solve this problem, the "boat tapping" operation is adopted in the production process. In the prior art, the surface of the graphite boat is manually tapped to make the silicon wafer fall into the card slot in a vibrating manner, thereby ensuring that the silicon wafer is in the correct position and making the silicon wafer better contact with the boat blade and the card point of the graphite boat. In this process, the operator needs to have certain skills and experience, and needs to concentrate during the boat tapping process to ensure that the silicon wafer is effectively in contact with the boat blade and the card point without damaging the silicon wafer and the graphite boat. This process consumes a lot of energy and physical strength of the operator, which not only increases labor costs, but also may cause the operator to make mistakes and cause unsatisfactory boat tapping results. Utility Model Content

[0004] Aiming at the deficiencies of the prior art, the utility model discloses a boat-racing compound robot.

[0005] The technical solution adopted by the utility model is as follows:

[0006] A boat-racing composite robot, comprising:

[0007] Robot chassis;

[0008] The boat-beating assembly comprises a driving assembly and a boat-beating member connected to the driving assembly; the driving assembly is configured to perform a boat-beating operation by adjusting the boat-beating position, boat-beating direction and boat-beating amplitude of the boat-beating member.

[0009] In one embodiment of the present invention, the drive assembly comprises:

[0010] A supporting bracket, arranged on the robot chassis;

[0011] A linear motion mechanism, mounted on the support bracket, for adjusting the position of the boat-beating member at least in the vertical direction and the horizontal direction;

[0012] The rotating mechanism is installed on the linear motion mechanism, and is used for installing the boat-beating member, and swinging the boat-beating member at least in the horizontal direction to adjust the boat-beating direction of the boat-beating member and control the boat-beating amplitude of the boat-beating member.

[0013] In one embodiment of the present invention, the linear motion mechanism comprises:

[0014] The first linear motion mechanism comprises a first linear module fixed to the support bracket in a vertical direction and a first moving seat fixed to the moving part of the first linear module;

[0015] The second linear motion mechanism includes a second linear module installed on the first movable seat in the horizontal direction, a second movable seat fixed on the movable part of the second linear module, a third linear module installed on the second movable seat in the horizontal direction, and a third movable seat fixed on the movable part of the third linear module; the third movable seat is used to install the rotating mechanism.

[0016] In one embodiment of the utility model, the first linear motion mechanism also includes a first guide rail vertically installed on the support bracket and a first slider slidably connected to the first guide rail and fixed to the first movable seat; the first guide rail is located on one side of the first linear module along the extension direction of the second linear motion mechanism.

[0017] In one embodiment of the utility model, the second linear motion mechanism also includes a second guide rail installed on the first moving seat and a second slider slidably connected to the second guide rail and fixed to the second moving seat; the second guide rail is located above the second linear module.

[0018] In one embodiment of the present invention, the rotating mechanism comprises:

[0019] A first mounting seat, mounted on the linear motion mechanism;

[0020] A first motor, vertically fixed to the first mounting seat;

[0021] A second mounting seat, fixedly mounted on the output shaft of the first motor;

[0022] A second motor, horizontally fixed to the second mounting base;

[0023] A rotating shaft, horizontally rotatably mounted on the second mounting seat and drivingly connected to the second motor;

[0024] The third mounting seat is fixed to the rotating shaft and is used for mounting the boat-beating member.

[0025] In one embodiment of the utility model, the rotating mechanism further comprises:

[0026] A driving wheel, coaxially fixed to an output end of the second motor;

[0027] A driven wheel, coaxially fixed to the rotating shaft;

[0028] A transmission belt is tensioned and wound around the driving wheel and the driven wheel so that the driving wheel and the driven wheel rotate synchronously.

[0029] In one embodiment of the present invention, the boat-slapping member includes a rod portion detachably mounted on the third mounting seat and a boat-slapping portion fixed to the end of the rod portion.

[0030] In one embodiment of the present invention, the transverse dimension of the boat flapping portion is greater than the transverse dimension of the rod portion.

[0031] In one embodiment of the present invention, it also includes:

[0032] A storage box is arranged on the robot chassis, one side of which is open and extends horizontally inward to form a storage cavity; the boat-beating component is accommodated in the storage box; when the boat needs to be beat, the driving component is configured to move the boat-beating component out of the storage box for boat beating.

[0033] The above technical solution of the utility model has the following advantages compared with the prior art:

[0034] The boat-patting composite robot of the utility model realizes the automation of the boat-patting process, reduces the labor cost and improves the effect of the boat-patting.

[0035] The boat-beating composite robot described in the utility model can achieve uniform boat-beating force under the premise of achieving large-scale boat-beating, thereby avoiding the occurrence of situations such as silicon chip damage caused by excessive local beating force.

[0036] The boat-beating composite robot of the utility model is adaptable to graphite boats of different sizes, thereby ensuring the boat-beating effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to make the content of the utility model more clearly understood, the utility model is further described in detail below based on specific embodiments of the utility model in combination with the accompanying drawings.

[0038] Figure 1 It is a structural diagram of the Paizhou composite robot.

[0039] Figure 2 It is a structural diagram of the boat-racing assembly.

[0040] Figure 3 It is a structural schematic diagram of the support bracket and the first linear motion mechanism.

[0041] Figure 4 It is a structural schematic diagram of the second linear motion mechanism.

[0042] Figure 5 It is a structural diagram of the rotating mechanism and the boat-beating component.

[0043] Figure 6 It is a schematic diagram of the transmission connection between the second motor and the rotating shaft.

[0044] Explanation of the reference numerals in the specification: 10. robot chassis; 20. storage box; 30. boat-beating assembly; 40. supporting bracket; 401. horizontal bracket; 402. vertical bracket; 403. tilting bracket; 50. first linear motion mechanism; 501. first linear module; 502. first moving seat; 503. first guide rail; 504. first slider; 60. second linear motion mechanism; 601. second linear module; 602. second moving seat; 603. third linear module; 604. third moving seat; 605. second guide rail; 606. second slider; 70. rotating mechanism; 701. first mounting seat; 702. first motor; 703. second mounting seat; 704. second motor; 705. rotating shaft; 706. third mounting seat; 707. driving wheel; 708. driven wheel; 80. boat-beating member; 801. rod; 802. boat-beating member. DETAILED DESCRIPTION

[0045] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it, but the embodiments are not intended to limit the present invention.

[0046] In the prior art, the surface of the graphite boat is manually tapped to make the silicon wafer fall into the card slot in a vibrating manner, thereby ensuring that the silicon wafer is in the correct position and that the silicon wafer is in better contact with the boat blade and the card point of the graphite boat. In this process, the operator needs to have certain skills and experience, and needs to concentrate during the boat tapping process to ensure that the silicon wafer is effectively in contact with the boat blade and the card point without damaging the silicon wafer and the graphite boat. This process consumes the energy and physical strength of the operator, which not only increases the labor cost, but also may cause the operator to make mistakes and cause the boat tapping effect to be unsatisfactory.

[0047] In order to solve the above problems, this embodiment discloses a boat-racing compound robot.

[0048] like Figure 1 As shown, this embodiment discloses a boat-striking compound robot, including a robot chassis 10 , a storage box 20 and a boat-striking assembly 30 .

[0049] The robot chassis 10 is used to support the storage box 20 and the boat-racing assembly 30. The robot chassis 10 can be a fixed base. The robot chassis 10 can also be a movable chassis structure. In this embodiment, the robot chassis 10 can adopt a chassis structure of the type of IGV (Intelligent Guided Vehicle), AGV (Automated Guided Vehicles) or AMR (Autonomous Mobile Robot) to realize the autonomous movement of the boat-racing composite robot between different positions.

[0050] One side of the receiving box 20 is opened to Figure 1 For illustration, the right side of the storage box 20 is defined as an opening. And a storage cavity is formed by horizontally extending inward from the opening. For this embodiment, the storage cavity is configured to store the boat assembly 30. Specifically, the storage box 20 can adopt a frame structure, and side panels or a top panel are provided on other surfaces except the opening side so as to form a hollow storage cavity inside.

[0051] The boat-beating assembly 30 is accommodated in the receiving box 20. The boat-beating assembly 30 includes a driving assembly and a boat-beating member 80. The driving assembly is configured to perform a boat-beating operation by adjusting the boat-beating position, boat-beating direction, and boat-beating amplitude of the boat-beating member 80. When the boat needs to be beaten, the driving assembly is configured to move the boat-beating member 80 out of the receiving box 20 for boat-beating. Thereby, the automation of the boat-beating process is achieved, the labor cost is reduced, and the boat-beating effect is improved. In this embodiment, at least one group of boat-beating assemblies 30 is arranged in the receiving cavity. In some possible embodiments, the boat-beating assembly 30 can be arranged in two groups or more, and can be designed according to the receiving cavity volume of the receiving box 20 and / or the length of the graphite boat to be beat. These boat-beating assemblies 30 can be arranged horizontally side by side. Specifically, this embodiment illustrates the case of one boat-beating assembly 30.

[0052] Combination Figure 1 and Figure 2 The driving assembly includes a support bracket 40 disposed on the robot chassis 10, a linear motion mechanism installed on the support bracket 40, and a rotating mechanism 70 installed on the linear motion mechanism. The linear motion mechanism is used to adjust the position of the boat-slapping member 80 at least in the vertical direction and the horizontal direction, and the rotating mechanism 70 is used to install the boat-slapping member 80 and swing the boat-slapping member 80 at least in the horizontal direction to adjust the boat-slapping direction and control the boat-slapping amplitude of the boat-slapping member 80. It should be noted that, for this embodiment, the vertical direction is the height direction of the storage box 20, and the horizontal direction is the width direction of the storage box 20.

[0053] Among them, Figure 3As shown, the support bracket 40 includes a transverse bracket 401, a vertical bracket 402 and an inclined bracket 403. The transverse bracket 401 is horizontally and laterally fixed in the receiving box 20. Specifically, the transverse bracket 401 is installed on the top surface of the robot chassis 10. The vertical bracket 402 is vertically fixed to the transverse bracket 401. One side of the inclined bracket 403 is fixed to the transverse bracket 401, and the other side of the inclined bracket 403 is fixed to the vertical bracket 402. The inclined bracket 403 enhances the strength and rigidity of the support bracket 40 and improves the bearing capacity of the support bracket 40.

[0054] Combination Figure 3 and Figure 4 The linear motion mechanism includes a first linear motion mechanism 50 and a second linear motion mechanism 60 .

[0055] like Figure 3 As shown, the first linear motion mechanism 50 includes a first linear module 501 fixed to the support bracket 40 along the vertical direction and a first moving seat 502 fixed to the moving part of the first linear module 501. The first linear module 501 can be a linear module of the lead screw type.

[0056] Furthermore, the first linear motion mechanism 50 also includes a first guide rail 503 vertically mounted on the vertical bracket 402 and a first slider 504 slidably connected to the first guide rail 503. The first guide rail 503 is located on one side of the first linear module 501 along the elongation direction of the second linear motion mechanism 60. The first slider 504 is fixed to the first moving seat 502, and the first slider 504 contacts the slide surface on the first guide rail 503. While vertically guiding the first moving seat 502, it bears the torque applied by the second linear motion mechanism 60, reducing the possibility of the rotating mechanism 70 and the boat-beating member 80 sagging at the end.

[0057] Combination Figure 3 and Figure 4 The second linear motion mechanism 60 includes a second linear module 601 installed on the first moving seat 502 in the horizontal direction, a second moving seat 602 fixed on the moving part of the second linear module 601, a third linear module 603 installed on the second moving seat 602 in the horizontal direction, and a third moving seat 604 fixed on the moving part of the third linear module 603. The second linear module 601 and the third linear module 603 can both be linear modules of the lead screw type.

[0058] Furthermore, the second linear motion mechanism 60 also includes a second guide rail 605 mounted on the first moving seat 502 and a second slider 606 slidably connected to the second guide rail 605. The second guide rail 605 is located above the second linear module 601. The second slider 606 is fixed to the second moving seat 602, and the second slider 606 contacts the slideway surface on the second guide rail 605. While guiding the second moving seat 602 horizontally, it bears the torque applied by the third linear module 603, reducing the possibility of the rotating mechanism 70 and the boat-beating member 80 sagging at the end.

[0059] like Figure 5 As shown, the rotating mechanism 70 includes a first mounting seat 701, a first motor 702, a second mounting seat 703, a second motor 704, a rotating shaft 705 and a third mounting seat 706. Among them, the first mounting seat 701 is mounted on the second linear motion mechanism 60. Specifically, the first mounting seat 701 is fixed to the third moving seat 604 on the moving part of the third linear module 603 in the horizontal direction. The first motor 702 is vertically fixed to the first mounting seat 701. The second mounting seat 703 is fixed to the output shaft of the first motor 702. The second motor 704 is horizontally fixed to the second mounting seat 703. The rotating shaft 705 is horizontally connected to the second mounting seat 703. In a possible embodiment, the second mounting seat 703 includes a horizontal mounting portion and a vertical mounting portion. Among them, the horizontal mounting portion is connected to the output shaft of the first motor 702. The vertical mounting portion is connected to the second motor 704 and the rotating shaft 705. The second motor 704 is transmission-connected to the rotating shaft 705. The third mounting base 706 is fixed to the rotating shaft 705 and is used to mount the boat-beating member 80 .

[0060] like Figure 6 As shown, the rotating mechanism 70 also includes a driving wheel 707, a driven wheel 708 and a transmission belt (not shown in the figure). The driving wheel 707 is coaxially fixed to the output end of the second motor 704. The driven wheel 708 is coaxially fixed to the rotating shaft 705. The transmission belt is tensioned around the driving wheel 707 and the driven wheel 708 so that the driving wheel 707 and the driven wheel 708 rotate synchronously. Among them, the driving wheel 707 and the driven wheel 708 can adopt synchronous wheels, and the transmission belt adopts a synchronous belt to achieve accurate control of the rotation process of the boat-beating member 80. Alternatively, the transmission connection method can also adopt a driving gear and a driven gear of meshing transmission, the driving gear is connected to the output end of the second motor 704, and the driven gear is sleeved on the rotating shaft 705. Another alternative method can also be a sprocket transmission structure, which is not repeated here. Thus, the driven wheel 708 is connected to the rotating shaft 705 to obtain power to make the rotating shaft 705 and the driven wheel 708 coaxially rotate.

[0061] like Figure 5As shown, the boat-beating member 80 includes a rod 801 detachably mounted on the third mounting seat 706 and a boat-beating member 802 fixed to the end of the rod 801. The lateral dimension of the area of ​​the boat-beating member 802 is larger than the lateral dimension of the rod 801. The boat-beating member 802 will not cause excessive impact on the graphite boat during the contact and beating process with the graphite boat. The boat-beating force is evenly applied to avoid the occurrence of excessive local beating force causing damage to the silicon wafer. The rotating mechanism 70 can drive the boat-beating member 80 to rotate in the horizontal direction and the vertical direction to beat the graphite boat.

[0062] Here, “detachably mounted” is understood to mean that the rod 801 and the third mounting seat 706 can be fixedly connected by a fastening element such as a bolt. When it is necessary to separate the rod 801 and the third mounting seat 706, the fastening element can be loosened to remove the rod 801 from the third mounting seat 706.

[0063] The working principle of this embodiment is as follows:

[0064] S1. The robot chassis 10 moves to a position near the graphite boat to be beaten.

[0065] S2, according to the specific position of the graphite boat to be beaten, start the first linear motion mechanism 50 and / or the second linear motion mechanism 60, and adjust the position of the boat-beating member 80 in the vertical direction and / or the horizontal direction. Specifically, the first linear module 501 drives the first moving seat 502 to move in the vertical direction, and the first moving seat 502 drives the second linear motion mechanism 60 to move in the vertical direction, so that the second linear motion mechanism 60 is close to the graphite boat to be beaten in the vertical direction, and the boat-beating member 80 is also close to the graphite boat to be beaten in the vertical direction. The second linear module 601 drives the second moving seat 602 to move in the horizontal direction, and the second moving seat 602 drives the third linear module 603 to move in the horizontal direction, so that the third linear module 603 extends out of the opening of the receiving box 20, so as to move the boat-beating member 80 out of the receiving box 20 for beating the boat. The third linear module 603 drives the third movable seat 604 to move in the horizontal direction, and the third movable seat 604 drives the rotating mechanism 70 to move in the horizontal direction, so that the rotating mechanism 70 is horizontally close to the graphite boat to be beaten, and the boat beating member 80 is horizontally close to the graphite boat to be beaten.

[0066] S3, according to the position of the silicon wafer on the graphite boat, the first motor 702 drives the second mounting seat 703 to rotate horizontally to expand the boat beating range of the boat beating member 80. The second motor 704 drives the rotating shaft 705 to rotate, and the rotating shaft 705 drives the boat beating member 80 to rotate, thereby beating the graphite boat.

[0067] The first linear motion mechanism 50 and / or the second linear motion mechanism 60 are moved to the silicon wafer at the position to be corrected on the graphite boat, and step S3 is repeated, so as to adapt to graphite boats of different sizes and ensure the boat beating effect.

[0068] Obviously, the above embodiments are merely examples for the purpose of clear explanation and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from these are still within the scope of protection of the invention of the utility model.

Claims

1. A boat-racing composite robot, characterized in that: include: Robot chassis (10); The boat-beating assembly (30) comprises a driving assembly and a boat-beating member (80) connected to the driving assembly; the driving assembly is configured to perform a boat-beating operation by adjusting the boat-beating position, boat-beating direction and boat-beating amplitude of the boat-beating member (80).

2. The boat-racing composite robot according to claim 1, characterized in that: The drive assembly comprises: A supporting bracket (40) is arranged on the robot chassis (10); A linear motion mechanism, mounted on the support bracket (40), and used to adjust the position of the boat-beating member (80) at least in the vertical direction and the horizontal direction; The rotating mechanism (70) is mounted on the linear motion mechanism and is used to mount the boat-beating member (80) and to swing at least in a horizontal direction to adjust the boat-beating direction of the boat-beating member (80) and to control the boat-beating amplitude of the boat-beating member (80).

3. The boat-racing composite robot according to claim 2, characterized in that: The linear motion mechanism comprises: A first linear motion mechanism (50) comprises a first linear module (501) fixed to the support bracket (40) in a vertical direction, and a first moving seat (502) fixed to a moving part of the first linear module (501); The second linear motion mechanism (60) comprises a second linear module (601) mounted on the first movable seat (502) in a horizontal direction, a second movable seat (602) fixed on the movable part of the second linear module (601), a third linear module (603) mounted on the second movable seat (602) in a horizontal direction, and a third movable seat (604) fixed on the movable part of the third linear module (603); the third movable seat (604) is used for mounting the rotating mechanism (70).

4. The boat-racing composite robot according to claim 3, characterized in that: The first linear motion mechanism (50) further comprises a first guide rail (503) vertically mounted on the support bracket (40) and a first slider (504) slidably connected to the first guide rail (503) and fixed to the first movable seat (502); the first guide rail (503) is located on one side of the first linear module (501) along the extension direction of the second linear motion mechanism (60).

5. The boat-racing composite robot according to claim 3, characterized in that: The second linear motion mechanism (60) further comprises a second guide rail (605) mounted on the first movable seat (502) and a second slider (606) slidably connected to the second guide rail (605) and fixed to the second movable seat (602); the second guide rail (605) is located above the second linear module (601).

6. The boat-racing composite robot according to claim 2, characterized in that: The rotating mechanism (70) comprises: A first mounting seat (701) mounted on the linear motion mechanism; A first motor (702) is vertically fixed to the first mounting seat (701); A second mounting seat (703) fixedly mounted on the output shaft of the first motor (702); A second motor (704) is horizontally fixed to the second mounting seat (703); A rotating shaft (705) is mounted on the second mounting seat (703) for horizontal rotation and is drivingly connected to the second motor (704); The third mounting seat (706) is fixed to the rotating shaft (705) and is used to mount the boat-beating member (80).

7. The boat-racing composite robot according to claim 6, characterized in that: The rotating mechanism (70) further comprises: A driving wheel (707) coaxially fixed to an output end of the second motor (704); A driven wheel (708) coaxially fixed to the rotating shaft (705); A transmission belt is tensioned and wound around the driving wheel (707) and the driven wheel (708) so that the driving wheel (707) and the driven wheel (708) rotate synchronously.

8. The boat-racing composite robot according to claim 6, characterized in that: The boat-beating member (80) comprises a rod portion (801) detachably mounted on the third mounting seat (706) and a boat-beating portion (802) fixed to the end of the rod portion (801).

9. The boat-racing composite robot according to claim 8, characterized in that: The transverse dimension of the area of ​​the boat portion (802) is greater than the transverse dimension of the rod portion (801).

10. The boat-racing composite robot according to claim 1, characterized in that: Also includes: A storage box (20) is arranged on the robot chassis (10), one side of the storage box (20) is open and extends horizontally inward to form a storage cavity; the boat-beating component (30) is accommodated in the storage box (20); when boat beating is required, the driving component is configured to move the boat-beating component (80) out of the storage box (20) to perform boat beating.

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