A crystal bar sheet material taking chuck and a crystal bar sheet taking component

Abstract

The utility model discloses a wafer taking chuck for a crystal rod sheet material and a wafer taking component thereof, belonging to the technical field of wafer taking equipment. The device comprises a first clamping block, a mounting seat and a second clamping block connected in sequence in the Z-axis direction; in the Y-axis direction, the clamping end of the first clamping block and the clamping end of the second clamping block are arranged toward the same side; at least two clamping wire groups are connected between the clamping end of the first clamping block and the clamping end of the second clamping block; the clamping wire groups are arranged at intervals along the X-axis direction; by arranging a plurality of clamping wire groups arranged at intervals between the first clamping block and the second clamping block, the clamping wire groups can be embedded in the gap between the sheet material and the remaining silicon crystal rods while the two clamping blocks are embracing the outer cylindrical surface of the sheet material, so that the clamping wire groups are closely attached to both sides of the sheet material in the thickness direction, thereby limiting the sheet material and preventing the sheet material from tipping over.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer picking equipment, and particularly relates to a wafer picking chuck for crystal rod wafers and a wafer picking component thereof. Background Art

[0002] After the single crystal furnace pulls out the silicon crystal rod, the approximately cylindrical silicon crystal rod needs to be cut according to the specified length specifications to obtain short silicon crystal rods; then the cut silicon crystal rods are subjected to processing procedures such as squaring and slicing to obtain the required finished silicon wafers. In the process of cutting the silicon crystal rod, in addition to cutting out rods of a certain length, a certain number of sheets need to be cut out to test the silicon crystal rod. In order to achieve the above effects, a silicon rod cutting mechanism is disclosed in the Chinese utility model patent with application number 202021635886.4. The double-wire cutting wheel system used in the cutting structure can slice while cutting the silicon crystal rod, thereby improving the overall work efficiency.

[0003] In order to make the detected data better reflect the real situation of the silicon crystal rod, so as to timely control the production quality of the silicon crystal rod, it is usually chosen to slice and sample in the middle of the silicon crystal rod. However, the current market mainly uses the truncated machine chip unloading mechanism disclosed in the Chinese utility model patent with application number 202220356378.5 to carry out the chip unloading work of silicon wafers; but due to structural limitations, this type of chip unloading mechanism can only be set at the head and tail ends of the silicon crystal rod, so it is impossible to complete the chip unloading work in the middle, and thus due to the distortion of the detection results, the production process of the silicon crystal rod cannot be adjusted in time, which affects the production quality of the silicon rod; and even if this type of chip unloading mechanism can be set in the middle of the silicon rod, it will be easy to overturn when the chip is taken because the chip unloading device used at the clamping end is a suction cup. Utility Model Content

[0004] The technical problem to be solved by the utility model is: how to provide a chip removal chuck and chip removal assembly which can perform chip removal work at various positions of a silicon crystal rod, especially chip removal from the middle of a silicon rod, and can also prevent the crystal rod chip from tipping over during chip removal.

[0005] In order to solve the above technical problems, the technical solution adopted by the utility model is:

[0006] A crystal bar sheet removal chuck comprises a first clamping block, a mounting seat and a second clamping block connected in sequence in the Z-axis direction;

[0007] In the Y-axis direction, the clamping end of the first clamping block and the clamping end of the second clamping block are arranged toward the same side;

[0008] At least two clamping wire groups are connected between the clamping end of the first clamping block and the clamping end of the second clamping block;

[0009] The clamping wire groups are arranged at intervals along the X-axis direction.

[0010] Further, in the X-axis direction, at least two first limiting grooves are spaced apart on the clamping end of the first clamping block;

[0011] At least two second limiting grooves corresponding to the first limiting grooves are arranged at intervals on the clamping end of the second clamping block;

[0012] A clamping wire group is provided between the first limiting groove and the corresponding second limiting groove.

[0013] Furthermore, the extending direction of the clamping wire group is parallel to the Z-axis direction.

[0014] Further, the clamping wire group includes at least two elastic wires;

[0015] The plurality of elastic threads are arranged side by side along the X-axis direction.

[0016] Furthermore, the diameter of the elastic thread is 0.2 mm to 0.6 mm.

[0017] Furthermore, the first clamping block and the second clamping block are both elastically connected to the mounting seat;

[0018] In the Z-axis direction, both the first clamping block and the second clamping block can move relative to the mounting seat.

[0019] Furthermore, it also includes a connecting portion and an elastic movable flap;

[0020] The first clamping block and the second clamping block are connected to the mounting seat through a connecting portion;

[0021] In the X-axis direction, elastic movable flaps are provided on both sides of the connecting portion;

[0022] The fixed end of the elastic movable flap is arranged between the gap between the connecting portion and the mounting seat;

[0023] The movable end of the elastic movable flap can move relative to the connecting portion along the X-axis direction.

[0024] Further, in the Y-axis direction, the clamping end of the first clamping block and the clamping end of the second clamping block are both arranged at a preset interval from the connecting portion.

[0025] Further, in the Y-axis direction, a side of the connecting portion close to the first clamping block is a curved surface.

[0026] Furthermore, a wafer removal assembly is provided, comprising a support frame, two driving devices and two wafer removal chucks for the above-mentioned crystal rod wafers;

[0027] The two crystal rod sheet chucks are respectively connected to the movable ends of the corresponding driving devices;

[0028] The two crystal bar sheet taking chucks are respectively connected to the support frame through corresponding driving devices;

[0029] The clamping ends of the two crystal rod sheet taking chucks are arranged opposite to each other.

[0030] The beneficial effect of the utility model is that the crystal rod sheet material removal chuck provided by the utility model can embed the clamping wire group into the gap between the sheet material and the remaining silicon crystal rod while the two clamping blocks are engaged with the outer cylindrical surface of the sheet material, by arranging a plurality of clamping wire groups arranged at intervals between the first clamping block and the second clamping block, so that the clamping wire group is tightly attached to both sides of the sheet material in the thickness direction, thereby limiting the sheet material and preventing the sheet material from overturning. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 The figure shows a schematic structural diagram of a crystal bar sheet removal chuck (omitting the clamping wire assembly and the mounting seat) according to a specific embodiment of the utility model;

[0032] Figure 2 The figure shows a left side view of a wafer removal chuck for a crystal ingot wafer according to a specific embodiment of the utility model (without the clamping wire assembly and the mounting seat);

[0033] Figure 3 The figure is a schematic structural diagram of a crystal bar sheet removal chuck according to a specific embodiment of the utility model;

[0034] Figure 4 Shown Figure 3 A magnified view of point A;

[0035] Figure 5 The figure shows a schematic structural diagram of a crystal bar sheet taking chuck and a sheet body according to a specific embodiment of the utility model;

[0036] Figure 6 The figure shows a schematic structural diagram of a crystal bar sheet taking chuck and a driving device according to a specific embodiment of the utility model;

[0037] Figure 7 Shown is a structural schematic diagram of a sheet taking assembly according to a specific embodiment of the utility model;

[0038] Description of labels:

[0039] 1. First clamping block; 11. First limiting groove;

[0040] 2. Connecting part; 21. Arc surface;

[0041] 3. Second clamping block; 31. Second limiting groove;

[0042] 4. Clamping wire group; 41. Elastic wire;

[0043] 5. Mounting seat;

[0044] 6. Elastic movable flap;

[0045] 7. The sheet body;

[0046] 8. Support frame; 81. Double-wire cutting gear train; 82. Electromagnetic coupling device; 83. Sliding assembly;

[0047] 9. Driving device. DETAILED DESCRIPTION

[0048] In order to explain the technical content, achieved objectives and effects of the present invention in detail, the following is an explanation in conjunction with the implementation modes and the accompanying drawings.

[0049] The most critical concept of the utility model is that by arranging a plurality of clamping wire groups arranged at intervals between the first clamping block and the second clamping block, the clamping wire groups can be embedded in the gap between the sheet and the remaining silicon crystal rods while the two clamping blocks are engaged with the outer cylindrical surface of the sheet, so that the clamping wire groups are tightly attached to both sides of the sheet in the thickness direction, thereby limiting the sheet and preventing the sheet from tipping over.

[0050] Please refer to Figures 1 to 7 The crystal bar sheet chuck provided by the utility model comprises a first clamping block 1, a mounting seat 5 and a second clamping block 3 connected in sequence in the Z-axis direction;

[0051] In the Y-axis direction, the clamping end of the first clamping block 1 and the clamping end of the second clamping block 3 are arranged toward the same side;

[0052] At least two clamping wire groups 4 are connected between the clamping end of the first clamping block 1 and the clamping end of the second clamping block 3;

[0053] The clamping wire groups 4 are arranged at intervals along the X-axis direction.

[0054] From the above description, it can be seen that the beneficial effects of the utility model are: providing a crystal rod sheet taking chuck, by arranging a plurality of spaced clamping wire groups 4 between the first clamping block 1 and the second clamping block 3, the clamping wire group 4 can be embedded in the gap between the sheet and the remaining silicon crystal rod while the two clamping blocks are engaged with the outer cylindrical surface of the sheet, so that the clamping wire group 4 is tightly attached to both sides of the thickness direction of the sheet; compared with the existing crystal rod sheet taking device, not only can the corresponding sheet clamping work be performed at any position of the silicon crystal rod, but also, because the clamping wire group 4 can be attached to both sides of the thickness direction of the sheet, it can play a certain limiting role on the sheet, thereby providing structural support for preventing the sheet from overturning during subsequent taking.

[0055] Further, in the X-axis direction, at least two first limiting grooves 11 are spaced apart on the clamping end of the first clamping block 1;

[0056] At least two second limiting grooves 31 corresponding to the first limiting grooves 11 are arranged at intervals on the clamping end of the second clamping block 3;

[0057] A clamping wire group 4 is provided between the first limiting groove 11 and the corresponding second limiting groove 31 .

[0058] Furthermore, the extending direction of the clamping wire group 4 is parallel to the Z-axis direction.

[0059] Further, the clamping wire group 4 includes at least two elastic wires 41;

[0060] The plurality of elastic threads 41 are arranged side by side along the X-axis direction.

[0061] Specifically, the elastic wire 41 can be stretched along its own length direction, thereby providing structural support for the first clamping block 1 and the second clamping block 3 to automatically adjust the opening and closing degree according to the size of the silicon crystal rod. And the clamping wire group 4 can also be arranged between the first clamping block 1 and the second clamping block 3 in an S-shaped winding manner between the first limiting groove 11 and the second limiting groove 31.

[0062] Further, the diameter of the elastic thread 41 is 0.2 mm to 0.6 mm. Preferably, the diameter of the elastic thread 41 may be 0.2 mm, 0.25 mm, 0.3 mm, 0.35 mm, 0.4 mm, 0.45 mm, 0.5 mm, 0.55 mm or 0.6 mm.

[0063] As can be seen from the above description, the design has made specific improvements to the structure of the first clamping block 1 and the second clamping block 3, the connection relationship between the clamping wire group 4 and the first clamping block 1 and the second clamping block 3, and the composition structure and size parameters of the clamping wire group 4. By setting the corresponding first limiting groove 11 and the second limiting groove 31, the clamping wire group 4 can be limited to avoid the tendency of the clamping wire group 4 and the first clamping block 1 and the second clamping block 3 to slide against each other during the clamping process, thereby reducing the clamping stability of the film taking chuck; and while ensuring that the elastic wires 41 constituting the clamping wire group 4 are arranged side by side along the X-axis, the diameter of the elastic wires 41 is further determined, so that when the film taking chuck clamps the sheet material, at least two elastic wires 41 will be embedded in the corresponding cutting seam, and when the excess material on both sides of the thickness direction of the sheet material is removed, as the cutting seam gradually expands, more elastic wires 41 will be closely attached to both sides of the thickness direction of the sheet material, thereby improving the clamping stability of the sheet taking chuck to the sheet material, so as to better avoid the problem of the sheet material overturning.

[0064] Furthermore, the first clamping block 1 and the second clamping block 3 are both elastically connected to the mounting seat 5;

[0065] In the Z-axis direction, the first clamping block 1 and the second clamping block 3 can move relative to the mounting seat 5 .

[0066] Specifically, the first clamp block 1 and the second clamp block 3 are both made of any commercially available flexible adaptive material, such as nitrile rubber, so that the connection between the mounting seat 5 and the first clamp block 1 and the second clamp block 3 forms an elastic connection structure, providing structural support for the first clamp block 1 and the second clamp block 3 to move relative to the mounting seat 5 in the Z-axis direction; at the same time, on the basis that the first clamp block 1 and the second clamp block 3 are both made of any commercially available flexible adaptive material, corresponding any commercially available elastic devices, such as torsion springs, etc., can be provided on the first clamp block 1 and the mounting seat 5, and the second clamp block 3 and the mounting seat 5, so that the first clamp block 1 and the second clamp block 3 are both elastically connected to the mounting seat 5.

[0067] From the above description, it can be seen that this design can improve the flexibility of the first clamping block 1 and the second clamping block 3, so that the first clamping block 1 and the second clamping block 3 can freely adjust the clamping range according to the size of the sheet to be clamped, thereby improving the applicability of the sheet picking chuck.

[0068] Furthermore, the above-mentioned crystal rod sheet material removal chuck also includes a connecting portion 2 and an elastic movable flap 6;

[0069] The first clamping block 1 and the second clamping block 3 are connected to the mounting seat 5 through the connecting portion 2;

[0070] In the X-axis direction, elastic movable flaps 6 are provided on both sides of the connecting portion 2;

[0071] The fixed end of the elastic movable flap 6 is arranged between the gap between the connecting portion 2 and the mounting seat 5;

[0072] The movable end of the elastic movable flap 6 can move relative to the connecting portion 2 along the X-axis direction.

[0073] Specifically, the connecting portion 2 and the elastic movable flap 6 are both made of any commercially available flexible adaptive material, such as nitrile rubber; and the first clamping block 1, the connecting portion 2, the second clamping block 3 and the elastic movable flap 6 are an integrated structure.

[0074] As can be seen from the above description, the mounting seat 5 can provide structural support for the connection between the film-taking chuck and the peripheral equipment, but there is a certain gap after the connection part 2 is connected to the mounting seat 5. The gap will not only affect the stability of the film-taking chuck when taking the film, but also the silicon crystal rod will produce corresponding dust and debris during the processing. If the dust and debris are embedded in the gap for a long time and are not cleaned, it is easy to shorten the service life of the material-taking chuck; therefore, the elastic movable flap 6 is provided to effectively solve the above problems, and when the film-taking chuck embraces the silicon crystal rod from the outer side of the silicon crystal rod, it can not only play the role of soft contact to avoid damage to the silicon crystal rod, but also can gradually expand in the process of resisting and fitting the silicon crystal rod, so that the clamping line group 4 is as close to the center of the sheet as possible, to provide structural support to prevent the sheet from overturning during the clamping process.

[0075] Furthermore, in the Y-axis direction, the clamping end of the first clamping block 1 and the clamping end of the second clamping block 3 are both arranged at a preset distance from the connecting portion 2, that is, Figure 2 α in .

[0076] Furthermore, in the Y-axis direction, a side of the connecting portion 2 close to the first clamping block 1 is a curved surface 21 .

[0077] From the above description, it can be seen that by setting the clamping end of the first clamping block 1 and the clamping end of the second clamping block 3 at a preset distance from the connecting part 2, a gap can be formed between the clamping line group 4 and the connecting part 2, so that the clamping line group 4 can move along the cross-section of the sheet toward the center of the sheet, thereby providing structural support for the clamping line group 4 to be tightly attached to both sides of the thickness direction of the sheet; at the same time, in the Y-axis direction, the side of the connecting part 2 close to the first clamping block 1 is further set as an arc surface 21, which not only allows the sheet picking clamp to better fit the outer side surface of the sheet, but also allows the clamping line group 4 that completes the clamping action to be closer to the center of the sheet, thereby avoiding the sheet from tipping over during the clamping process.

[0078] The utility model also provides a wafer taking assembly, comprising a support frame 8, two drive devices 9 and two wafer taking chucks for taking wafers of the crystal rod wafer of any one of the above items;

[0079] The two crystal bar sheet chucks are respectively connected to the movable ends of the corresponding driving devices 9;

[0080] The two crystal bar sheet chucks are connected to the support frame 8 through corresponding driving devices 9 respectively;

[0081] The clamping ends of the two crystal rod sheet taking chucks are arranged opposite to each other.

[0082] From the above description, it can be seen that the design provides a specific structure that can clamp crystal rod sheets. The driving device 9 drives the two relatively arranged crystal rod sheet chucks to approach each other. After the clamping ends of the sheet chucks come into contact with the outer cylindrical surface of the sheet, the sheet is restricted between the clamping line groups 4 of the two sheet chucks, thereby avoiding the problem of the sheet tipping over during the sheet picking process.

[0083] Furthermore, the above-mentioned film taking assembly also includes a driver;

[0084] A double-wire cutting gear train 81 is provided on the support frame 8;

[0085] The cutting end of the double-wire cutting wheel train 81 is arranged between the clamping ends of the two crystal rod sheet taking chucks;

[0086] The driver can drive the support frame 8 to reciprocate along the Z-axis direction. That is, the cutting end of the double-wire cutting wheel train 81 can also reciprocate along the Z-axis direction synchronously with the support frame 8 under the action of the driver.

[0087] Specifically, the structure of the double-wire cutting wheel train 81 can refer to the specific arrangement of the first roller, the second roller, the first cutting wire, the second cutting wire, the first tension wheel, the second tension wheel, the swing arm component, the heavy hammer, the first driven wheel and the second driven wheel of a silicon rod cutting mechanism disclosed in the Chinese utility model patent with application number 202021635886.4. Thus, the double-wire cutting wheel train 81 can simultaneously complete the work of slicing at the cutting position while cutting the silicon crystal rod, thereby improving the overall work efficiency.

[0088] Specifically, the driving device 9 is any commercially available device that can drive an object to move in a straight line, such as a cylinder, etc. Preferably, the driving device 9 of the utility model is connected to an induction check valve in two chambers of the cylinder respectively, and the induction check valve is controlled by a three-position five-way solenoid valve so that the driving device 9 can maintain a fixed posture even under the action of an external force when it stops working, thereby improving the stability when clamping the sheet material and avoiding the problem of the sheet material overturning.

[0089] Furthermore, the support frame 8 is also provided with an electromagnetic coupling device 82 and a sliding assembly 83;

[0090] The moving direction of the sliding assembly 83 and the Z axis are parallel to each other;

[0091] The fixed end of the driving device 9 is connected to the movable end of the sliding assembly 83;

[0092] The coupling end of the electromagnetic coupling device 82 is located on the moving path of the driving device 9 in the Z-axis direction, and the coupling end of the electromagnetic coupling device 82 is arranged toward the fixed end of the driving device 9 .

[0093] Specifically, the electromagnetic coupling device 82 is an electromagnet. When the electromagnetic coupling device 82 is electrically connected to a peripheral power supply device, the electromagnetic coupling device 82 can generate magnetism, thereby achieving the function of adsorbing and fixing the object.

[0094] From the above description, it can be known that when the double-wire cutting wheel train 81 cuts the silicon crystal rod, the fixed end of the driving device 9 is coupled through the electromagnetic coupling device 82, so that the sheet-taking chuck of the crystal rod sheet moves synchronously with the double-wire cutting wheel train 81; when the double-wire cutting wheel train 81 cuts the silicon crystal rod to a position convenient for the sheet-taking chuck of the crystal rod sheet to subsequently embrace the sheet, the electromagnetic coupling device 82 is turned off, so that the electromagnetic coupling device 82 is decoupled from the fixed end of the driving device 9. At this time, the fixed end of the driving device 9 can move relative to the double-wire cutting wheel train 81 along the moving direction of the sliding component 83, that is, when the sheet-taking chuck of the crystal rod sheet and the sheet-embracing are in a relatively static state, the double-wire cutting wheel train 81 can still continue to perform the cutting work independently until the silicon crystal rod and the corresponding sheet are completely cut off; thereby completing the embracing and fixing work of the sheet in advance while cutting the rod, thereby improving the stability of the subsequent sheet-embracing work.

[0095] The crystal rod sheet material taking chuck of the utility model can be used for the work of clamping any sheet material, and is particularly suitable for the work of clamping the sheet material whose cut-off position is in the middle of the silicon crystal rod.

[0096] Please refer to Figures 1 to 5 , Embodiment 1 of the present utility model is:

[0097] A chuck for removing crystal rod sheets comprises, in the Z-axis direction, a first clamping block 1, a connecting portion 2, and a second clamping block 3 which are connected in sequence; the first clamping block 1 and the second clamping block 3 are both elastically connected to the connecting portion 2, and the first clamping block 1 and the second clamping block 3 can both move relative to a mounting seat 5 of the connecting portion 2; in the Y-axis direction, the clamping end of the first clamping block 1 and the clamping end of the second clamping block 3 are arranged toward the same side; the clamping end of the first clamping block 1 and the clamping end of the second clamping block 3 are both arranged at a preset interval; a side of the connecting portion 2 close to the first clamping block 1 is an arc surface 21; in the X-axis direction, five first limiting grooves 11 are arranged at intervals on the clamping end of the first clamping block 1; five second limiting grooves 31 corresponding to the first limiting grooves 11 are arranged at intervals on the clamping end of the second clamping block 3; a clamping line group 4 is provided between the first limiting groove 11 and the corresponding second limiting groove 31.

[0098] The extension direction of the clamping wire group 4 is parallel to the Z-axis direction; the clamping wire group 4 includes three elastic wires 41, and all the elastic wires 41 are arranged side by side along the X-axis direction; the diameter of the elastic wire 41 is 0.2mm to 0.6mm.

[0099] The difference between the second embodiment of the present invention and the first embodiment is that:

[0100] On the basis of the crystal rod sheet material removal chuck of Example 1, it also includes a mounting seat 5 and an elastic movable flap 6; the first clamp block 1 and the second clamp block 3 are connected to the mounting seat 5 through the connecting part 2; in the X-axis direction, elastic movable flaps 6 are provided on both sides of the connecting part 2; the fixed end of the elastic movable flap 6 is arranged between the gap between the connecting part 2 and the mounting seat 5; the movable end of the elastic movable flap 6 can move relative to the connecting part 2 along the X-axis direction.

[0101] Please refer to Figure 6 to Figure 7 , Embodiment 3 of the present utility model is:

[0102] A wafer picking assembly comprises a support frame 8, two driving devices 9 and two wafer picking chucks for the crystal rod sheet material in the second embodiment; the two wafer picking chucks for the crystal rod sheet material are respectively connected to the movable ends of the corresponding driving devices 9; the two wafer picking chucks for the crystal rod sheet material are respectively connected to the support frame 8 through the corresponding driving devices 9; the clamping ends of the two wafer picking chucks for the crystal rod sheet material are arranged opposite to each other.

[0103] The working principle of the utility model is as follows: first, two wafer taking chucks of the crystal rod sheet material which are arranged opposite to each other are moved to the outer side surface of the silicon crystal rod where the wafer material needs to be clamped; then the wafer taking chuck is driven to move toward the wafer material to be clamped; when the wafer taking chuck drives the elastic movable petal 6 to contact the outer surface of the silicon crystal rod and further move toward the center of the wafer material, the first clamping block 1, the second clamping block 3 and the elastic movable petal 6 are gradually unfolded, until the wafer taking chuck is moved into place, the elastic movable petal 6 and the arc surface 21 of the connecting part 2 are respectively attached to the outer surface of the silicon crystal rod and the outer circular surface of the wafer material, and at the same time, part of the elastic wire 41 is also tightly attached to both sides of the thickness direction of the wafer material to limit the movement of the wafer material; then, the excess material on both sides of the thickness direction of the wafer material is removed by the peripheral displacement device, and at this time, the cutting seam of the wafer material is gradually expanded, so that more elastic wires 41 are tightly attached to both sides of the thickness direction of the wafer material; finally, the wafer taking chuck holding the wafer material is reset, and the clamping work of the wafer material is completed.

[0104] In summary, the utility model provides a crystal rod sheet material taking chuck, which can embed the clamping wire group into the gap between the sheet material and the remaining silicon crystal rod while the two clamping blocks are engaged with the outer cylindrical surface of the sheet material, so that the clamping wire group is tightly attached to both sides of the thickness direction of the sheet material by arranging multiple clamping wire groups arranged at intervals between the first clamping block and the second clamping block; compared with the existing crystal rod sheet material taking device, not only can the corresponding sheet material clamping work be performed at any position of the silicon crystal rod, but also, because the clamping wire group can be attached to both sides of the thickness direction of the sheet material, and the clamping wire group is composed of multiple thin and tough elastic wires, when the excess material on both sides of the thickness direction of the sheet material is removed, as the cutting seam gradually expands, more elastic wires will be tightly attached to both sides of the thickness direction of the sheet material, thereby improving the clamping stability of the sheet material by the taking chuck, so as to play a certain limiting role on the sheet material, so that the sheet material can be prevented from overturning during subsequent taking.

[0105] The above description is only an embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent transformations made using the contents of the specification and drawings of the present invention, or directly or indirectly applied in the relevant technical field, are also included in the patent protection scope of the present invention.

Claims

1. A chuck for removing crystal ingot sheets, characterized in that: In the Z-axis direction, it includes a first clamping block, a mounting seat, and a second clamping block connected in sequence; In the Y-axis direction, the clamping end of the first clamping block and the clamping end of the second clamping block are arranged toward the same side; At least two clamping wire groups are connected between the clamping end of the first clamping block and the clamping end of the second clamping block; The clamping wire groups are arranged at intervals along the X-axis direction.

2. The crystal bar sheet removal chuck according to claim 1, characterized in that: In the X-axis direction, at least two first limiting grooves are arranged at intervals on the clamping end of the first clamping block; At least two second limiting grooves corresponding to the first limiting grooves are arranged at intervals on the clamping end of the second clamping block; A clamping wire group is provided between the first limiting groove and the corresponding second limiting groove.

3. The crystal bar sheet removal chuck according to claim 2, characterized in that: The extending direction of the clamping wire group is parallel to the Z-axis direction.

4. The crystal bar sheet removal chuck according to claim 2, characterized in that: The clamping wire group includes at least two elastic wires; The plurality of elastic threads are arranged side by side along the X-axis direction.

5. The crystal bar sheet removal chuck according to claim 4, characterized in that: The diameter of the elastic thread is 0.2 mm to 0.6 mm.

6. The crystal bar sheet removal chuck according to claim 1, characterized in that: The first clamping block and the second clamping block are both elastically connected to the mounting seat; In the Z-axis direction, both the first clamping block and the second clamping block can move relative to the mounting seat.

7. The crystal bar sheet removal chuck according to claim 1, characterized in that: It also includes a connecting portion and an elastic movable flap; The first clamping block and the second clamping block are connected to the mounting seat through a connecting portion; In the X-axis direction, elastic movable flaps are provided on both sides of the connecting portion; The fixed end of the elastic movable flap is arranged between the gap between the connecting portion and the mounting seat; The movable end of the elastic movable flap can move relative to the connecting portion along the X-axis direction.

8. The crystal bar sheet removal chuck according to claim 7, characterized in that: In the Y-axis direction, the clamping end of the first clamping block and the clamping end of the second clamping block are both arranged at a preset distance from the connecting portion.

9. The crystal bar sheet removal chuck according to claim 7, characterized in that: In the Y-axis direction, a side of the connecting portion close to the first clamping block is an arc surface.

10. A film taking assembly, characterized in that: It comprises a supporting frame, two driving devices and two crystal rod sheet material removal chucks according to any one of claims 1 to 9; The two crystal rod sheet chucks are respectively connected to the movable ends of the corresponding driving devices; The two crystal bar sheet taking chucks are respectively connected to the support frame through corresponding driving devices; The clamping ends of the two crystal rod sheet taking chucks are arranged opposite to each other.

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