Heating support platform and welding fixture

Abstract

The utility model relates to the field of semiconductor packaging, a heating support platform and a welding tool, the heating support platform comprising: a heating support platform body, a groove located in the first surface of the heating support platform body and a balance support structure accommodated in the groove; the balance support structure comprises a frame and an extrusion spring sheet, a rigid lower pressing plate and an extrusion locking piece located in the frame, the side of the rigid lower pressing plate is provided with an extrusion spring sheet, and the other side of the extrusion spring sheet is provided with an extrusion locking piece; the force-bearing structure of the rigid lower pressing plate protrudes from the first surface of the heating support platform, and as the force-bearing structure is subjected to downward force, the rigid lower pressing plate is pressed downward, and the extrusion structure of the rigid lower pressing plate applies lateral extrusion force to the extrusion spring sheet, causing the extrusion spring sheet to deform laterally, and stop after being squeezed to the extrusion locking piece, and the rigid lower pressing plate stops pressing downward. In the area where the lead frame is bonded to be ball-welded, sufficient upward support force is given, which can effectively reduce the shaking of the lead frame.

Description

Technical Field

[0001] The present application relates to the field of semiconductor packaging, and in particular to a heating support table and a welding tool. Background Art

[0002] The chip needs to be connected by a ball welding machine during the ball welding process in the packaging process. In the prior art, the heating block and the pressing plate in the ball welding machine squeeze each other to make the lead frame clamped therein fit onto the heating block. This mechanical pressing cannot completely maintain sufficient tightness between the heating block, the lead frame and the pressing plate, resulting in ball welding defects such as cold solder joints, poor solder joints, and failure to press.

[0003] There are also some ball welding machine heating blocks in the prior art. By providing a vacuum hole on the heating block, the gas in the hole is extracted by a vacuum pump, so that the contact between the lead frame and the heating block forms a vacuum contact, which improves the vacuum adsorption strength and the pressing effect, thereby improving the stability of ball welding. On the one hand, vacuum bonding is used, and on the other hand, the heating block and the pressure plate are mechanically contacted. The cooperation of the two makes the lead frame and the heating block fit more stably. However, using the suction force of the air pump to attract the lead frame cannot fix the position of the pressure plate. The lead frame is still prone to displacement due to external vibrations. In addition, multiple fixed vacuum holes cannot adjust the position and cannot adapt to larger chip packages. In addition, some lead frames have inclined surfaces or steps, which makes it impossible to fully achieve the vacuum adsorption effect. The ball welding machine heating block cannot fully support the lead frame. Utility Model Content

[0004] The technical problem to be solved by the present application is to provide a heating support platform and a welding tool, which can provide a certain upward supporting force to the corresponding area in the area where the lead frame is bonded to wait for ball welding, thereby effectively reducing the shaking of the lead frame and effectively improving the welding quality.

[0005] To this end, an embodiment of the present application provides a heating support platform, comprising:

[0006] A heating support platform body, a groove located in the first surface of the heating support platform body, and a balancing support structure accommodated in the groove;

[0007] The balancing support structure comprises a frame and an extrusion spring sheet, a rigid lower pressing plate and an extrusion locking member located in the frame, wherein the lower side of the rigid lower pressing plate is provided with an extrusion spring sheet, and the other side of the extrusion spring sheet is provided with an extrusion locking member;

[0008] The rigid lower pressure plate includes a pressure transmission plate, a force-bearing structure located on the upper surface of the pressure transmission plate, and an extrusion structure located on the lower surface of the pressure transmission plate. The force-bearing structure protrudes from the first surface of the heating support platform. As the force-bearing structure is subjected to downward force, the rigid lower pressure plate is pressed downward, and the extrusion structure applies lateral extrusion force to the extrusion spring piece, causing the extrusion spring piece to deform laterally and stop after being squeezed to the extrusion locking piece, and the rigid lower pressure plate stops pressing downward.

[0009] Optionally, the extrusion structure is a trapezoidal structure or a truncated cone structure, so that the more the rigid lower pressing plate is pressed downward, the greater the lateral extrusion force exerted by the extrusion structure on the extrusion spring sheet.

[0010] Optionally, the side of the extrusion spring sheet facing the extrusion structure has an inclined side structure with a corresponding inclination angle.

[0011] Optionally, the force-bearing structures are located at two ends of the upper surface of the pressure transmission plate, and the extrusion structure is located in the middle of the lower surface of the pressure transmission plate.

[0012] Optionally, the number of the extrusion structures and the number of the extrusion locking members are both plural, and the extrusion structures and the extrusion locking members are staggered.

[0013] Optionally, the balancing support structure is fixed in a groove of the heating support platform through the frame.

[0014] Optionally, the multiple extrusion springs, the multiple rigid lower pressing plates and the multiple extrusion locking members are arranged in parallel, and the extrusion locking members, the extrusion springs, the rigid lower pressing plates, the extrusion springs and the extrusion locking members are arranged in sequence.

[0015] Optionally, the extrusion locking member is a T-shaped spring kit.

[0016] Optionally, the T-shaped spring kit includes a T-shaped spring cap and a spring, the frame has a corresponding spring hole, the cap body structure of the T-shaped spring cap passes through the spring hole and protrudes from the first surface of the heating support platform and the upper surface of the frame, the cap brim of the T-shaped spring cap is located on the lower surface of the frame and is restricted by the spring hole to prevent the T-shaped spring cap from popping up, the bottom of the T-shaped spring cap has an opening to accommodate a spring to lift the T-shaped spring cap, and the outer side wall of the T-shaped spring cap is used for extrusion locking.

[0017] Optionally, the top of the cap body structure of the T-shaped spring cap is higher than the top of the force-bearing structure.

[0018] Optionally, the groove has a bottom groove at the bottom of the balancing support structure, and the depth of the bottom groove is greater than or equal to the maximum distance that the brim of the T-shaped spring cap moves up and down.

[0019] Optionally, a spring limiting hole is provided in the bottom groove at a position corresponding to the spring, and the lower end of the spring is placed in the spring limiting hole.

[0020] Optionally, there are multiple T-shaped spring kits, which are located in the middle of the balancing support structure, and the force-bearing structure of the rigid lower pressure plate is located at the edge of the balancing support structure.

[0021] Optionally, the frame includes an upper frame template and a lower frame template, and a gap is provided between the upper frame template and the lower frame template, and the extrusion spring sheet, the rigid lower pressing plate and the extrusion locking member are arranged in the gap.

[0022] The embodiment of the utility model further provides a welding tool, comprising: a heating support platform, a lead frame located on the surface of the heating support platform, and a pressure plate structure located on the surface of the lead frame.

[0023] Compared with the prior art, the advantages of the technical solution of this application are:

[0024] The utility model comprises a heating support platform, a heating support platform body, a groove located in the first surface of the heating support platform body and a balancing support structure accommodated in the groove; the balancing support structure comprises a frame and an extrusion spring sheet, a rigid lower pressure plate and an extrusion locking piece located in the frame, the side of the rigid lower pressure plate is provided with an extrusion spring sheet, and the other side of the extrusion spring sheet is provided with an extrusion locking piece; the rigid lower pressure plate comprises a pressure transmission plate, a force-bearing structure located on the upper surface of the pressure transmission plate, and an extrusion structure located on the lower surface of the pressure transmission plate, the force-bearing structure protrudes from the first surface of the heating support platform, as the force-bearing structure is subjected to downward force, the rigid lower pressure plate is pressed downward, and the extrusion structure applies lateral extrusion force to the extrusion spring sheet, so that the extrusion spring sheet undergoes lateral deformation, and stops after being squeezed to the extrusion locking piece, and the rigid lower pressure plate stops pressing downward. Since the balanced support structure of the heating support platform can determine the height of the force-bearing structure according to the final height of the lead frame, the force-bearing structure can better support the lead frame, fit the lead frame to be ball-welded, and give a certain upward supporting force to the corresponding area, which can effectively reduce the shaking of the lead frame and effectively improve the welding quality.

[0025] Furthermore, the extrusion locking piece is a T-shaped spring kit, and the cap body structure of the T-shaped spring cap protrudes from the first surface of the heating support platform and the upper surface of the frame, so that when the lead frame is pressed downward and the force-bearing structure stops moving downward, the T-shaped spring cap is strongly supported on the lower surface of the lead frame, so that the lead frame is fully supported. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 This is a schematic structural diagram of a welding tool according to an embodiment of the present application;

[0027] Figure 2 This is a schematic cross-sectional structure diagram of a heating support platform according to an embodiment of the present application;

[0028] Figure 3 It is a partially enlarged cross-sectional schematic diagram of the balancing support structure of an embodiment of the present application;

[0029] Figure 4 This is a schematic diagram of the top view of the heating support platform of an embodiment of the present application;

[0030] Figure 5 A schematic top view of the surface of the balanced support structure frame of an embodiment of the present application;

[0031] Figure 6 This is a schematic diagram of the cross-sectional structure of the heating support platform after being pressed down in an embodiment of the present application;

[0032] Figure 7 It is a partial enlarged cross-sectional schematic diagram of the balancing support structure after being pressed down according to the embodiment of the present application. DETAILED DESCRIPTION

[0033] The specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. When describing the embodiments of the present application in detail, for the sake of convenience, the schematic diagram will not be partially enlarged according to the general proportion, and the schematic diagram is only an example, which should not limit the scope of protection of the present application. In addition, in actual production, the three-dimensional spatial dimensions of length, width and depth should be included. In the present application, the upper surface is the surface of the heating support platform facing the lead frame, and the lower surface is the surface of the lead frame facing the heating support platform.

[0034] The present application embodiment first provides a welding tool, please refer to Figure 1 ,include:

[0035] A heating support platform 10 , a lead frame 20 located on a surface of the heating support platform 10 , and a pressing plate structure 30 located on a surface of the lead frame 20 .

[0036] When ball welding is performed using the welding tool, the lead frame 20 is pressed onto the surface of the heating support platform 10 using the pressure plate structure 30. The heating support platform 10 is located at a position corresponding to the lead frame ball welding operation area. The number of the heating support platforms 10 is one or more.

[0037] The bottom of the heating support platform 10 is further provided with a heating device (not shown), and the heating support platform 10 is heated by the heating device.

[0038] Since the heating block of the prior art ball bonding machine cannot fully support the lead frame, the heating support platform 10 of the present invention has a groove 120, and a balancing support structure (not shown) is arranged in the groove 120, so that the heating support platform 10 fully supports the lead frame.

[0039] Please refer to Figure 2 to Figure 5 , Figure 2 is a schematic diagram of the cross-sectional structure of the heating support platform, Figure 3 is a partially enlarged cross-sectional schematic diagram of the balance support structure, Figure 4 is a schematic diagram of the top view of the heating support platform, Figure 5 It is a schematic top view of the surface of the balancing support structure frame.

[0040] The heating support platform 10 comprises:

[0041] A heating support platform body 110, a groove located in a first surface of the heating support platform body 110, and a balancing support structure accommodated in the groove;

[0042] The balancing support structure includes a frame and a rigid lower pressing plate 140, an extrusion spring 150 and an extrusion locking member 160 located in the frame. The lower side of the rigid lower pressing plate 140 is provided with an extrusion spring 150, and the extrusion locking member 160 is provided on the side of the extrusion spring 150 away from the rigid lower pressing plate 140.

[0043] The rigid lower pressure plate 140 includes a pressure transmission plate 142, a force-bearing structure 141 located on the upper surface of the pressure transmission plate 142, and an extrusion structure 143 located on the lower surface of the pressure transmission plate 142. The force-bearing structure 141 protrudes from the first surface of the heating support platform body 110. As the force-bearing structure 141 is subjected to downward force, the rigid lower pressure plate 140 is pressed downward, and the extrusion structure 143 applies lateral extrusion force to the extrusion spring piece 150, causing the extrusion spring piece 150 to deform laterally and stop after being squeezed to the extrusion locking piece 160, and the rigid lower pressure plate 140 stops pressing downward.

[0044] In this embodiment, the material of the heating support platform body 110 is iron, copper, aluminum, nickel, chromium or other metals or their alloys. The surface of the heating support platform body 110 facing the lead frame serves as the first surface. The first surface of the heating support platform body 110 has a groove 120. The balance support structure is accommodated in the groove, and the balance support structure is used to achieve complete support of the lead frame.

[0045] In this embodiment, the balance support structure is accommodated in the groove, and the upper surface of the frame of the balance support structure is flush with the upper surface of the heating support platform body 110. In other embodiments, the upper surface of the balance support structure may also be slightly lower or slightly higher than the upper surface of the heating support platform body.

[0046] The frame of the balance support structure includes an upper frame template 132 and a lower frame template 131 , and a gap is provided between the upper frame template 132 and the lower frame template 131 , and the rigid lower pressing plate 140 , the extrusion spring sheet 150 and the extrusion locking member 160 are arranged in the gap.

[0047] Please refer to Figure 3 In the present embodiment, the extrusion structure 143 is a truncated cone structure having an inclined side surface. The further away from the pressure transmission plate 142, the smaller the diameter of the truncated cone structure is, and the side surface of the extrusion spring piece 150 facing the extrusion structure 143 has an inclined side surface structure with a corresponding inclination angle, so that the more the rigid lower pressing plate 140 is pressed downward, the greater the lateral extrusion force exerted by the extrusion structure 143 on the extrusion spring piece 150, and the greater the deformation of the extrusion spring piece 150, until the extrusion spring piece 150 stops after being squeezed to the extrusion locking piece 160, the rigid lower pressing plate 140 stops pressing downward, and the force-bearing structure 141 protruding from the first surface of the heating support platform body 110 stops pressing downward, and the force-bearing structure 141 supports the lead frame. Even if the support heating platform of the present application does not adopt a vacuum adsorption structure, the support heating platform can fully support the lead frame.

[0048] In other embodiments, the extrusion structure is a trapezoidal platform structure, and the width of the trapezoidal platform becomes smaller as it is further away from the pressure transmission plate, so that the rigid lower pressure plate is pressed downward more, and the lateral extrusion force exerted by the extrusion structure on the extrusion spring sheet becomes greater.

[0049] In this embodiment, the extrusion spring sheet 150 is a metal spring sheet, and has an inclined side surface structure with a corresponding inclination angle facing the side surface of the extrusion structure 143 .

[0050] In other embodiments, the extrusion spring sheet may also be in other shapes, for example, the side facing the extrusion structure may be a vertical side or an arc side. Since the side of the extrusion structure is an inclined side, the rigid lower pressure plate is pressed downward, and the extrusion structure can apply lateral extrusion force to the extrusion spring sheet.

[0051] In other embodiments, the extrusion spring may also be made of other rigid elastic materials.

[0052] In other embodiments, the extrusion structure may also be in other shapes, and the side facing the extrusion spring may be a vertical side or an arc side. The side of the extrusion spring has an inclined angle, so that the rigid lower pressure plate is pressed downward, and the extrusion structure can apply lateral extrusion force to the extrusion spring.

[0053] In this embodiment, the rigid lower pressure plate 140 includes a pressure transmission plate 142, a force-bearing structure 141 located on the upper surface of the pressure transmission plate 142, and an extrusion structure 143 located on the lower surface of the pressure transmission plate 142. The force-bearing structure 141 is located at both ends of the upper surface of the pressure transmission plate 142, and the extrusion structure 143 is located in the middle position of the lower surface of the pressure transmission plate 142.

[0054] In other embodiments, the force-bearing structure may also be located in the middle of the upper surface of the pressure transmission plate, and the extrusion structure may be located in the middle and / or edge of the lower surface of the pressure transmission plate.

[0055] In this embodiment, please refer to Figure 4 The number of the extrusion structures 143 and the number of the extrusion locking members 160 are both multiple, and the extrusion structures 143 and the extrusion locking members 160 are staggered.

[0056] In this embodiment, the extrusion spring piece 150 , the rigid lower pressing plate 140 and the extrusion locking member 160 are all multiple and distributed throughout the entire ball welding operation area.

[0057] The plurality of extrusion springs 150, the plurality of rigid lower pressing plates 140 and the plurality of extrusion locking members 160 are arranged in parallel, and please refer to Figure 4 The extrusion locking member 160, the extrusion spring sheet 150, the rigid lower pressure plate 140, the extrusion spring sheet 150, and the extrusion locking member 160 are arranged in sequence. Even if there are steps on the bottom surface of the lead frame, the multiple groups of extrusion spring sheets, the rigid lower pressure plate and the extrusion locking member have different degrees of downward pressure, thereby being able to fully support the lead frame.

[0058] In this embodiment, the extrusion locking member 160 is a T-shaped spring kit, which includes a T-shaped spring cap 161 and a spring 162. The upper frame template 132 and the lower frame template 131 have corresponding spring holes. The cap body structure of the T-shaped spring cap 161 passes through the spring hole and protrudes from the first surface of the heating support platform 10 and the upper surface of the upper frame template 132. The cap brim of the T-shaped spring cap 161 is located on the lower surface of the lower frame template 131 and is limited by the spring hole to prevent the T-shaped spring cap from popping up. The bottom of the T-shaped spring cap 161 has an opening to accommodate the spring 162 to lift the T-shaped spring cap, and the outer wall of the T-shaped spring cap 161 is used for extrusion locking.

[0059] In this embodiment, the groove has a bottom groove 121 at the bottom of the balance support structure, and the depth of the bottom groove 121 is greater than or equal to the maximum distance of the cap edge of the T-shaped spring cap 161 moving up and down, so that when the pressure plate structure presses the lead frame downward, the T-shaped spring cap has a certain buffer movement height. And when the T-shaped spring cap is completely released, the top of the cap body structure of the T-shaped spring cap 161 is higher than the top of the force-bearing structure 141, so that when the lead frame is pressed downward, the lead frame first contacts the T-shaped spring cap 161 for buffering, then contacts the force-bearing structure 141 and finally stops pressing downward, and the T-shaped spring cap 161 is strongly supported on the lower surface of the lead frame, forming a force-bearing surface composed of the T-shaped spring cap 161 and the force-bearing structure 141. Even if the lower surface of the lead frame is uneven, the height of the force-bearing surface composed of the T-shaped spring cap 161 and the force-bearing structure 141 can be changed, and the T-shaped spring cap 161 is strongly supported on the lower surface of the lead frame, so that the lead frame is fully supported.

[0060] In this embodiment, a spring limiting hole is provided in the bottom groove 121 at a position corresponding to the spring 162 , and the lower end of the spring 162 is placed in the spring limiting hole.

[0061] In this embodiment, the height of the T-shaped spring kit 160 protruding from the first surface of the heating support platform 10 ranges from 0.2mm to 1mm, for example 0.2mm, 0.5mm, 0.8mm, etc. In other embodiments, the height of the T-shaped spring kit protruding from the first surface of the heating support platform can also be other suitable values.

[0062] Please refer to Figure 6 and Figure 7 , Figure 6 This is a schematic diagram of the cross-sectional structure of the heating support platform after being pressed down in an embodiment of the present application; Figure 7 It is a partial enlarged cross-sectional schematic diagram of the balancing support structure after being pressed down according to the embodiment of the present application.

[0063] When the pressure plate structure presses down the lead frame, the lead frame first presses down the T-shaped spring kit, and then presses down the force-bearing structure 141 of the rigid lower pressure plate 140, driving the extrusion structure 143 of the rigid lower pressure plate 140 to move downward, and insert it between the extrusion spring sheets 150 on both sides, applying lateral extrusion force to the extrusion spring sheets 150, so that the extrusion spring sheets 150 are deformed, and the extrusion spring sheets 150 stop after being squeezed to the T-shaped spring kit, and the rigid lower pressure plate 140 stops pressing down, and the height of the force-bearing structure 141 stops decreasing. Because the spring 162 has an upward elastic force to lift up the T-shaped spring cap 161, the T-shaped spring cap 161 is strongly supported on the lower surface of the lead frame, so that the lead frame is fully supported.

[0064] In this embodiment, when the rigid lower pressure plate 140 stops pressing down, the final heights of the top of the T-shaped spring cap 161 and the top of the force-bearing structure 141 are flush with the first surface A of the heating support platform. In other embodiments, when the rigid lower pressure plate stops pressing down, the final heights of the top of the T-shaped spring cap and the top of the force-bearing structure are slightly higher than the first surface A of the heating support platform.

[0065] Although the present application has been disclosed as above in the form of a preferred embodiment, it is not intended to limit the present application. Any technical personnel in this field can use the methods and technical contents disclosed above to make possible changes and modifications to the technical solution of the present application without departing from the spirit and scope of the present application. Therefore, any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present application without departing from the content of the technical solution of the present application are within the protection scope of the technical solution of the present application.

Claims

1. A heating support table, characterized in that: include: A heating support platform body, a groove located in the first surface of the heating support platform body, and a balancing support structure accommodated in the groove; The balancing support structure includes a frame and an extrusion spring sheet, a rigid lower pressing plate and an extrusion locking member located in the frame, wherein the lower side of the rigid lower pressing plate is provided with an extrusion spring sheet, and the extrusion locking member is provided on the side of the extrusion spring sheet away from the rigid lower pressing plate; The rigid lower pressure plate includes a pressure transmission plate, a force-bearing structure located on the upper surface of the pressure transmission plate, and an extrusion structure located on the lower surface of the pressure transmission plate. The force-bearing structure protrudes from the first surface of the heating support platform. As the force-bearing structure is subjected to downward force, the rigid lower pressure plate is pressed downward, and the extrusion structure applies lateral extrusion force to the extrusion spring piece, causing the extrusion spring piece to deform laterally and stop after being squeezed to the extrusion locking piece, and the rigid lower pressure plate stops pressing downward.

2. The heating support platform according to claim 1, characterized in that: The extrusion structure is a trapezoidal structure or a truncated cone structure, so that the more the rigid lower pressing plate is pressed downward, the greater the lateral extrusion force exerted by the extrusion structure on the extrusion spring sheet.

3. The heating support platform according to claim 2, characterized in that: The side of the extrusion spring sheet facing the extrusion structure has an inclined side surface structure with a corresponding inclination angle.

4. The heating support platform according to claim 1, characterized in that: The force-bearing structures are located at two ends of the upper surface of the pressure transmission plate, and the extrusion structure is located in the middle of the lower surface of the pressure transmission plate.

5. The heating support platform according to claim 1, characterized in that: The number of the extrusion structures and the number of the extrusion locking pieces are both plural, and the extrusion structures and the extrusion locking pieces are arranged alternately.

6. The heating support platform according to claim 1, characterized in that: The balancing support structure is fixed in the groove of the heating support platform through the frame.

7. The heating support platform according to claim 1, characterized in that: The plurality of extrusion springs, the plurality of rigid lower pressing plates and the plurality of extrusion locking members are arranged in parallel, and the extrusion locking members, the extrusion springs, the rigid lower pressing plates, the extrusion springs and the extrusion locking members are arranged in sequence.

8. The heating support platform according to claim 1, characterized in that: The extrusion locking member is a T-shaped spring kit.

9. The heating support platform according to claim 8, characterized in that: The T-shaped spring kit includes a T-shaped spring cap and a spring, the frame has a corresponding spring hole, the cap body structure of the T-shaped spring cap passes through the spring hole and protrudes from the first surface of the heating support platform and the upper surface of the frame, the cap brim of the T-shaped spring cap is located on the lower surface of the frame and is restricted by the spring hole to prevent the T-shaped spring cap from popping up, the bottom of the T-shaped spring cap has an opening to accommodate a spring to lift the T-shaped spring cap, and the outer side wall of the T-shaped spring cap is used for extrusion locking.

10. The heating support platform according to claim 9, characterized in that: The top of the cap body structure of the T-shaped spring cap is higher than the top of the force-bearing structure.

11. The heating support platform according to claim 9, characterized in that: The groove has a bottom groove at the bottom of the balance support structure, and the depth of the bottom groove is greater than or equal to the maximum distance that the brim of the T-shaped spring cap moves up and down.

12. The heating support platform according to claim 11, characterized in that: A spring limiting hole is arranged in the bottom groove at a position corresponding to the spring, and the lower end of the spring is placed in the spring limiting hole.

13. The heating support platform according to claim 9, characterized in that: There are multiple T-shaped spring kits, which are located in the middle of the balance support structure, and the force-bearing structure of the rigid lower pressure plate is located at the edge of the balance support structure.

14. The heating support platform according to claim 1, characterized in that: The frame comprises an upper frame template and a lower frame template, a gap is provided between the upper frame template and the lower frame template, and the extrusion spring sheet, the rigid lower pressing plate and the extrusion locking member are arranged in the gap.

15. A welding tool, characterized in that: include: The heating support platform according to any one of claims 1 to 14, a lead frame located on a surface of the heating support platform and a pressure plate structure located on a surface of the lead frame.

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