Combined material conveying track

Abstract

The utility model relates to the technical field of semiconductor processing equipment, and specifically to a combined material conveying track, including an x-direction conveying track and a y-direction conveying track. By adopting multi-track conveying in the x-axis direction, that is, arranging multiple groups of x-direction conveying tracks in parallel along the z-axis direction, and adopting single-track conveying in the y-axis direction, that is, arranging multiple y-direction conveying tracks in parallel along the x-axis direction, it is possible to realize conveying in different directions and multiple tracks during semiconductor processing, which is more convenient to use and improves the space utilization of the overall conveying track. Specifically, multiple groups of x-direction conveying tracks are arranged in the height direction, and each group of x-direction conveying tracks can independently perform conveying work, which can meet the conveying requirements of different processing workpieces at different processing stations. At the same time, multiple y-direction conveying tracks are arranged in parallel, which can meet the simultaneous processing of multiple processing workpieces or the conveying requirements at different processing stations, improve processing efficiency, and also improve space utilization.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing equipment, in particular to a combined material conveying track. Background Art

[0002] In the field of semiconductor processing technology, there are usually multiple process steps, and conveying equipment is required on each process manufacturing equipment or between process steps. The track layout of the conveying equipment in the prior art is relatively simple, with low work efficiency, poor applicability, and a large footprint; in addition, the traditional conveying structure is implemented using common rollers or chains and other structures. Friction during operation will inevitably cause debris or particles. These particles will infiltrate into subsequent processing links and cause greater pollution, reducing the life of the process chamber and processing equipment and the processing yield of semiconductor workpieces, and cannot meet the needs of dust-free production. Therefore, based on the above problems, the prior art needs to be further improved. Utility Model Content

[0003] The purpose of the utility model is to provide a combined material conveying track to solve the prior art problems existing in the above-mentioned background technology.

[0004] In order to solve the above-mentioned technical problems, the technical solution provided by the utility model is as follows: a combined material conveying track is provided, including an x-direction conveying track and a y-direction conveying track, which is used for the reciprocating motion of the workpiece in the x- and y-axis directions; the x-direction conveying track is provided with multiple groups and arranged in parallel along the z-axis direction, and the y-direction conveying track is provided with multiple columns and arranged in parallel along the x-axis direction.

[0005] Based on the above technical solution, two groups of x-direction conveying tracks are staggered along the z-axis direction.

[0006] Based on the above technical solution, the x-direction conveying track is symmetrically arranged at both ends of the y-direction conveying track.

[0007] Based on the above technical solution, a plurality of common workstations are arranged on the x-direction conveying track.

[0008] Based on the above technical solution, a plurality of processing stations are correspondingly arranged on one side of the Y-direction conveying track.

[0009] Based on the above technical solution, the x-direction conveying track and the y-direction conveying track both adopt a magnetic suspension structure.

[0010] Based on the above technical solution, a workpiece buffer area is arranged between the two Y-direction conveying tracks at the end.

[0011] The beneficial effects of the technical solution provided by the utility model are:

[0012] The utility model provides a combined material conveying track, which adopts multi-track conveying in the x-axis direction, that is, multiple groups of x-direction conveying tracks are arranged in parallel along the z-axis direction, and adopts single-track conveying in the y-axis direction, that is, multiple y-direction conveying tracks are arranged in parallel along the x-axis direction, so that conveying in different directions and multiple tracks can be realized in the semiconductor processing process, which is more convenient to use and improves the space utilization rate of the overall conveying track. Specifically, multiple groups of x-direction conveying tracks are arranged in the height direction, and each group of x-direction conveying tracks can independently perform conveying work, which can meet the conveying requirements of different processing workpieces at different processing stations, and multiple y-direction conveying tracks are arranged in parallel, which can meet the simultaneous processing of multiple processing workpieces or the conveying requirements at different processing stations, improve processing efficiency, and also improve space utilization rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0014] Figure 2 It is a top view of the utility model;

[0015] Figure 3 It is a side view of the utility model;

[0016] Figure 4 It is a partial cross-sectional view of the x-direction conveying track in the utility model;

[0017] Figure 5 It is a structural schematic diagram of the stator assembly and the mover assembly of the magnetic suspension structure in the utility model;

[0018] Figure 6 It is a structural schematic diagram of the stator assembly in the utility model; DETAILED DESCRIPTION

[0019] The utility model is further described below in conjunction with the accompanying drawings and embodiments:

[0020] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0021] In the description of the present invention, it should be understood that the terms "left", "right", "front", "back", "top", "bottom", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.

[0022] like Figures 1 to 6 As shown, a combined material conveying track includes an x-direction conveying track 1 and a y-direction conveying track 2, which are used for reciprocating motion of workpieces in the x- and y-axis directions; the x-direction conveying track 1 is provided with multiple groups and arranged in parallel along the z-axis direction, and the y-direction conveying track 2 is provided with multiple columns and arranged in parallel along the x-axis direction.

[0023] The utility model provides a combined material conveying track, which adopts multi-track conveying in the x-axis direction, that is, multiple groups of x-direction conveying tracks 1 are arranged in parallel along the z-axis direction, and adopts single-track conveying in the y-axis direction, that is, multiple y-direction conveying tracks 2 are arranged in parallel along the x-axis direction, so that conveying in different directions and multiple tracks can be realized in the semiconductor processing process, which is more convenient to use and improves the space utilization rate of the overall conveying track. Specifically, multiple groups of x-direction conveying tracks 1 are arranged in the height direction, and each group of x-direction conveying tracks 1 can independently perform conveying work, which can meet the conveying requirements of different processing workpieces at different processing stations, and multiple y-direction conveying tracks 2 are arranged in parallel, which can meet the simultaneous processing of multiple processing workpieces or the conveying requirements at different processing stations, improve processing efficiency, and also improve space utilization.

[0024] Based on the above technical solution, two groups of x-direction conveying tracks 1 are staggeredly arranged along the z-axis direction.

[0025] In a preferred embodiment, the x-direction conveying track 1 is provided with two groups, namely Figure 1 As shown, a double-track conveying method is adopted in the x-axis direction, and two sets of x-direction conveying tracks 1 are arranged side by side along the z-axis direction, that is, in the height direction. By staggered arrangement in the height direction, the conveying work can be carried out independently to meet the conveying needs of different workpieces processed in different stations; by setting up double tracks to work simultaneously, the work efficiency is higher, multi-station work can be provided, and the space utilization rate is high.

[0026] Based on the above technical solution, the x-direction conveying track 1 is symmetrically arranged at both ends of the y-direction conveying track 2 .

[0027] Preferably, multiple groups of x-direction conveying tracks 1 are provided at both ends of the y-direction conveying track 2. More preferably, in the present embodiment, double-track conveying is adopted for conveying in the x-axis direction on both sides, which can not only realize more efficient conveying procedures and complete different processing techniques, but also allow the double-track conveying on one side to be used as a backup track to ensure normal conveying and processing when one side of the track fails. At the same time, the setting of a conveying track with better openness has a better correction effect during the processing, protects the processed workpiece, provides more possibilities for workpiece transportation, and has good flexibility. In actual application, more diversified choices can be made according to the process flow.

[0028] On the basis of the above technical solution, a plurality of common workstations 3 are arranged on the x-direction conveying track 1. On the basis of the above technical solution, a plurality of processing workstations 4 are arranged on one side of the y-direction conveying track 2.

[0029] Preferably, the x-direction conveying track 1 is provided with a plurality of common workstations 3, which can serve as temporary storage or recycling bins during the conveying process, provide more diversified conveying for workpiece processing, and can be selected according to actual processing requirements. By providing a plurality of processing workstations 4 on one side of the y-direction conveying track 2, different processing requirements of the workpiece can be met, and the reciprocating motion of the y-direction conveying track 2 makes the operation more convenient.

[0030] On the basis of the above technical solution, the x-direction conveying track 1 and the y-direction conveying track 2 both adopt a magnetic suspension structure.

[0031] In a preferred embodiment, the x-direction conveying track 1 and the y-direction conveying track 2 are both configured as non-contact magnetic levitation conveying structures; by adopting the non-contact magnetic levitation conveying structure as the conveying track structure, the workpiece can be driven to reciprocate in the x-axis direction and the y-axis direction, and reciprocatingly conveyed between processing stations of different processing techniques, which is more convenient to operate and has high conveying efficiency; the adverse effects of debris or particulate matter caused by friction of traditional conveying components on the process space and equipment service life and semiconductor processing yield are avoided; at the same time, a dust-free clean space for semiconductor production can be ensured, reducing maintenance costs.

[0032] Preferably, Figure 5 and Figure 6As shown, the magnetic suspension structure in this embodiment adopts the method of stator assembly 5 and mover assembly 6, wherein the stator assembly 5 adopts a permanent magnet array, and the mover assembly 6 adopts a coil with an iron core. The permanent magnet array can form a static magnetic field. The mover is installed above the stator, and the stator is arranged in N / S poles. The PLC generates a pulse voltage / current to the mover's driver to drive the coil to generate a magnetic field that is mutually exclusive with the stator, so that the mover produces relative motion. The number of pulses generated forms a closed-loop control with the encoder, so that the distance of the mover's movement can be accurately controlled. It should be noted that the movement between the stator assembly and the mover assembly is achieved through the interaction of magnetic field forces, which is based on the working principle in the prior art, and the present application does not involve improvements to this specific structure and principle.

[0033] On the basis of the above technical solution, a workpiece buffer area 7 is provided between the two Y-direction conveying tracks 2 at the end.

[0034] In a preferred embodiment, a workpiece buffer area 7 is also provided in this embodiment, and is arranged between two y-direction conveying rails 2, for temporary storage of workpiece fixtures after workpiece loading, which is more convenient to use; the corresponding workpiece is loaded onto the y-direction conveying rail 2, and then conveyed to the x-direction conveying rail 1, and then transported to the position requiring processing, that is, the y-direction conveying rail 2 of the corresponding column, and then conveyed to the corresponding workstation through the y-direction conveying rail 2, and then transported between different processing stations through the reciprocating motion of the y-direction conveying rail 2 to complete the processing of the workpiece in different processes.

[0035] The basic principle and main features of the utility model are shown and described above. For those skilled in the art, it is obvious that the utility model is not limited to the details of the above exemplary embodiments. Therefore, the embodiments should be regarded as exemplary and non-restrictive. The scope of the utility model is limited by the appended claims rather than the above description. Therefore, it is intended to include all changes within the meaning and scope of the equivalent elements of the claims in the utility model.

[0036] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A combined material conveying track, characterized in that: It comprises an x-direction conveying track (1) and a y-direction conveying track (2), which are used for reciprocating movement of a workpiece in the x-axis and y-axis directions; the x-direction conveying track (1) is provided in multiple groups and arranged in parallel along the z-axis direction, and the y-direction conveying track (2) is provided in multiple columns and arranged in parallel along the x-axis direction.

2. A combined material conveying track according to claim 1, characterized in that: The x-direction conveying tracks (1) are arranged in two groups in an alternating manner along the z-axis direction.

3. The combined material conveying track according to claim 1, characterized in that: The x-direction conveying track (1) is symmetrically arranged at two ends of the y-direction conveying track (2).

4. The combined material conveying track according to claim 1, characterized in that: A plurality of common workstations (3) are arranged on the x-direction conveying track (1).

5. The combined material conveying track according to claim 1, characterized in that: A plurality of processing stations (4) are correspondingly arranged on one side of the Y-direction conveying track (2).

6. The combined material conveying track according to claim 1, characterized in that: The x-direction conveying track (1) and the y-direction conveying track (2) both adopt a magnetic suspension structure.

7. The combined material conveying track according to claim 1, characterized in that: A workpiece buffer area (7) is provided between two Y-direction conveying tracks (2) located at the end portions.

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