An anti-sputtering insulating guide device for vacuum coating
By setting up an anti-sputtering mechanism on the upper part of the guide mechanism of the magnetron sputtering coating system and setting up an insulating sealing mechanism on the lower part, using insulating materials and increasing anti-sputtering shielding and maze sealing, the problem of insulation failure caused by non-insulating the guide wheel from the cavity and sputtering dust is solved, and the insulation of the guide wheel and the efficient operation of the system are achieved.
Patent Information
- Application Number
- CN202421531296.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-01
- Publication Date
- 2025-04-08
- Estimated Expiration
- 2034-07-01
AI Technical Summary
In the existing magnetron sputtering coating system, the guide wheel is not insulated from the cavity or requires a larger space for insulation, and sputtered dust is easily entered, resulting in insulation failure.
An anti-sputtering mechanism is provided on the upper part of the guide mechanism and an insulating sealing mechanism is provided on the lower part. The guide wheel, anti-sputtering plate and labyrinth seal are all insulating materials, and anti-sputtering shielding and maze sealing are added to prevent dust from entering.
The insulation of the guide wheel is realized, and insulation failure is avoided. It has a simple structure, strong reliability, good insulation, and low cost, saving costs and improving working efficiency.
Smart Images
Figure CN222729882U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of magnetron sputtering coating, in particular to an anti-sputtering insulating guide device for vacuum coating. Background Art
[0002] In the field of photovoltaic cell chip manufacturing, PVD technology is a process technology for preparing thin films on substrates. PVD equipment usually rotates the cathode to improve the utilization rate of the target material and save costs. In existing magnetron sputtering coating systems, most of them use deep groove ball bearings or bushings directly connected to the rotating shaft to guide the operation of the carrier without any obstruction. Using deep groove ball bearings or bushings directly connected to the rotating shaft will result in the guide wheel and the cavity being uninsulated, or more space will be required for insulation in other positions of the cavity; the guide wheel rotation position is unobstructed, and sputtering dust can easily enter and get stuck or the insulation fails. Utility Model Content
[0003] In view of the shortcomings of the existing background technology, the purpose of the utility model is to provide an anti-sputtering insulating guide device for vacuum coating that is simple in structure and easy to use. The utility model is provided with an anti-sputtering mechanism on the upper part of the guide mechanism and an insulating sealing mechanism on the lower part, and the guide wheel, the anti-sputtering plate in the anti-sputtering mechanism and the labyrinth seal in the insulating sealing mechanism are all made of insulating materials, so that only a small space range is required to achieve the insulation of the guide wheel; in addition, the rotating bearing is increased with an anti-sputtering shield and a labyrinth seal, so that the insulation does not fail; the anti-sputtering insulating guide device for vacuum coating has a simple structure, strong reliability, good insulation, and low cost, which greatly saves costs and improves work efficiency.
[0004] To achieve the above, the technical solution of the utility model is: an anti-sputtering insulating guide device for vacuum coating, comprising a fixed seat and a guide mechanism, also comprising an anti-sputtering mechanism and an insulating sealing mechanism, wherein the guide mechanism is installed on the fixed seat, and the guide mechanism guides the operation of the carrier plate, the anti-sputtering mechanism is installed in the guide wheel of the guide mechanism and is located at the upper part of the guide wheel, and the insulating sealing mechanism is installed at the lower part of the guide wheel installed on the guide mechanism, and the guide wheel, the anti-sputtering plate in the anti-sputtering mechanism and the labyrinth seal in the insulating sealing mechanism are all made of insulating materials.
[0005] Furthermore, the guide mechanism includes a guide wheel, a guide wheel shaft and a rotating bearing, one end of the guide wheel shaft is connected to a fixed seat, the other end of the guide wheel shaft is tightly connected to the inner ring of the rotating bearing, and the guide wheel is tightly sleeved on the outer ring of the rotating bearing.
[0006] Furthermore, one end of the guide wheel shaft connected to the rotating bearing is provided with a shoulder, and the diameter of the shoulder is larger than the diameter of the inner ring of the rotating bearing and smaller than the diameter of the outer ring of the rotating bearing.
[0007] Furthermore, a slot and a threaded hole are provided at one end of the guide wheel shaft connected to the fixed seat, and a clamping block corresponding to the slot is provided on the fixed seat. During installation, the clamping block is clamped in the slot and cooperates with the threaded hole through a fastener to fix the guide wheel shaft on the fixed seat.
[0008] Furthermore, the anti-splashing mechanism includes an anti-splashing plate, which is arranged in the guide wheel above the rotating bearing, and covers the rotating bearing.
[0009] Furthermore, the anti-sputtering mechanism also includes a retaining spring, and an annular retaining groove cooperating with the retaining spring is provided on the inner wall of the guide wheel. The retaining spring is located above the anti-sputtering plate to position the anti-sputtering plate, and the edge of the retaining spring is clamped in the annular retaining groove.
[0010] Furthermore, the insulating sealing mechanism includes a labyrinth seal, which is arranged below the rotating bearing. The labyrinth seal is tightly sleeved on the guide wheel shaft, the bottom surface of the labyrinth seal is in contact with the surface of the fixed seat, and the upper part of the labyrinth seal extends into the interior of the guide wheel and is tightly in contact with the lower surface of the rotating bearing.
[0011] The advantages of adopting the technical solution of the utility model are:
[0012] The utility model arranges an anti-sputtering mechanism on the upper part of the guide mechanism and an insulating sealing mechanism on the lower part, and the guide wheel, the anti-sputtering plate in the anti-sputtering mechanism and the labyrinth sealing member in the insulating sealing mechanism are all made of insulating materials, so that the insulation of the guide wheel can be achieved in a relatively small space; in addition, the rotating bearing is increased with an anti-sputtering shield and a labyrinth seal, so that the insulation does not fail; the anti-sputtering insulating guide device for vacuum coating has a simple structure, strong reliability, good insulation and low cost, which greatly saves costs and improves work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0013] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only for the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0014] Figure 1 The utility model is a schematic structural diagram of an anti-sputtering insulating guide device for vacuum coating.
[0015] The marks in the above figure are: 1, fixing seat; 11, clamping block; 2, guide wheel; 3, anti-splash plate; 4, labyrinth seal; 5, guide wheel shaft; 51, shoulder; 52, clamping groove; 53, threaded hole; 6, rotating bearing; 7, retaining spring; 8, carrier plate. DETAILED DESCRIPTION
[0016] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with specific embodiments.
[0017] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the present invention should be understood by people with ordinary skills in the field to which the present invention belongs. The words "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.
[0018] like Figure 1 As shown, an anti-sputtering insulating guide device for vacuum coating comprises a fixed seat 1 and a guide mechanism, and also comprises an anti-sputtering mechanism and an insulating sealing mechanism. The guide mechanism is mounted on the fixed seat 1, and the guide mechanism guides the operation of the carrier plate 8. The anti-sputtering mechanism is mounted in the guide wheel 2 of the guide mechanism and is located at the upper part of the guide wheel 2. The insulating sealing mechanism is mounted at the lower part of the guide wheel 2 mounted on the guide mechanism. The guide wheel 2, the anti-sputtering plate 3 in the anti-sputtering mechanism, and the labyrinth seal 4 in the insulating sealing mechanism are all made of insulating materials. The utility model sets an insulating sealing mechanism at the upper part of the guide mechanism and sets an insulating sealing mechanism at the lower part of the guide mechanism, and the guide wheel, the anti-sputtering plate in the anti-sputtering mechanism, and the labyrinth seal in the insulating sealing mechanism are all made of insulating materials, so that only a small space range is required to achieve the insulation of the guide wheel; in addition, the rotating bearing increases the anti-sputtering shielding and the labyrinth seal, so that the insulation does not fail; the anti-sputtering insulating guide device for vacuum coating has a simple structure, strong reliability, good insulation, and low cost, which greatly saves costs and improves work efficiency.
[0019] The guide mechanism includes a guide wheel 2, a guide wheel shaft 5 and a rotating bearing 6, one end of the guide wheel shaft 5 is connected to the fixed seat 1, the other end of the guide wheel shaft 5 is tightly connected to the inner ring of the rotating bearing 6, and the guide wheel 2 is tightly sleeved on the outer ring of the rotating bearing 6. The rotating bearing 6 in the utility model can also be replaced by a rotating bearing bush, which can be selected according to actual needs.
[0020] The end of the guide wheel shaft 5 connected to the rotating bearing 6 is provided with a shoulder 51, and the diameter of the shoulder 51 is larger than the diameter of the inner ring of the rotating bearing 6 and smaller than the diameter of the outer ring of the rotating bearing 6. The end of the guide wheel shaft 5 connected to the fixed seat 1 is provided with a clamping groove 52 and a threaded hole 53, and the fixed seat 1 is provided with a clamping block 11 corresponding to the clamping groove 52. When installing, the clamping block 11 is clamped in the clamping groove 52 and cooperates with the threaded hole 53 through a fastener, so that the guide wheel shaft 5 is fixedly installed on the fixed seat 1.
[0021] The anti-splash mechanism includes an anti-splash plate 3, which is arranged in the guide wheel 2 above the rotating bearing 6, and the anti-splash plate 3 covers the rotating bearing 6. The anti-splash mechanism also includes a clamping spring 7, and an annular groove matching the clamping spring 7 is provided on the inner wall of the guide wheel 2, and the clamping spring 7 is located above the anti-splash plate 3 to position the anti-splash plate 3, and the edge of the clamping spring 7 is clamped in the annular groove.
[0022] The insulating sealing mechanism includes a labyrinth seal 4, which is arranged below the rotating bearing 6. The labyrinth seal 4 is tightly sleeved on the guide wheel shaft 5. The bottom surface of the labyrinth seal 4 is in contact with the surface of the fixed seat 1. The upper part of the labyrinth seal 4 extends into the interior of the guide wheel 2 and is tightly in contact with the lower surface of the rotating bearing 6.
[0023] Specifically, the guide wheel in the utility model uses a bearing or a bushing as a rotating component, and the guide wheel, the anti-sputtering plate and the labyrinth seal are made of insulating materials and are positioned using a retaining spring. During the operation of the equipment, the target material can only be sputtered onto the surface of the guide wheel, and a labyrinth seal is used underneath to prevent tiny dust from entering.
[0024] During long-term operation, the guide wheel surface will be coated with a conductive film. However, due to the effect of the labyrinth seal below, it is difficult for tiny dust to form a stable and continuous conductive film inside the guide wheel, thus causing insulation failure. At the same time, the labyrinth seal also protects the bearing from being affected by tiny dust. This ensures that the guide wheel is stable in long-term operation without insulation failure.
[0025] The utility model shields the inside of the guide wheel, has a small size, low cost and is easy to implement; and has a good insulation effect, will not be affected by the sputtering target material, and has high stability; in addition, a rubber ring can be put on the outer ring of the guide wheel to increase the buffer and reduce the impact strength of the guide wheel on the carrier plate.
[0026] Those skilled in the art should understand that the discussion of any of the above embodiments is merely illustrative and is not intended to imply that the scope of the present invention is limited to these examples; under the concept of the present invention, the technical features in the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of the different aspects of the present invention as described above, which are not provided in detail for the sake of simplicity. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.
Claims
1. An anti-sputtering insulating guide device for vacuum coating, comprising a fixing seat (1) and a guide mechanism, characterized in that: The invention also comprises an anti-sputtering mechanism and an insulating sealing mechanism, wherein the guide mechanism is mounted on a fixed seat (1), the guide mechanism guides the operation of a carrier plate (8), the anti-sputtering mechanism is mounted in a guide wheel (2) of the guide mechanism and is located at the upper part of the guide wheel (2), the insulating sealing mechanism is mounted at the lower part of the guide wheel (2) mounted on the guide mechanism, and the guide wheel (2), the anti-sputtering plate (3) in the anti-sputtering mechanism and the labyrinth seal (4) in the insulating sealing mechanism are all made of insulating materials.
2. The sputtering-proof insulating guide device for vacuum coating according to claim 1, characterized in that: The guide mechanism comprises a guide wheel (2), a guide wheel rotating shaft (5) and a rotating bearing (6); one end of the guide wheel rotating shaft (5) is connected to a fixed seat (1); the other end of the guide wheel rotating shaft (5) is tightly connected to an inner ring of the rotating bearing (6); and the guide wheel (2) is tightly sleeved on an outer ring of the rotating bearing (6).
3. The sputtering-proof insulating guide device for vacuum coating according to claim 2, characterized in that: One end of the guide wheel shaft (5) connected to the rotary bearing (6) is provided with a shoulder (51), and the diameter of the shoulder (51) is larger than the diameter of the inner ring of the rotary bearing (6) and smaller than the diameter of the outer ring of the rotary bearing (6).
4. The sputtering-proof insulating guide device for vacuum coating according to claim 3, characterized in that: One end of the guide wheel shaft (5) connected to the fixing seat (1) is provided with a clamping groove (52) and a threaded hole (53); the fixing seat (1) is provided with a clamping block (11) corresponding to the clamping groove (52); during installation, the clamping block (11) is clamped in the clamping groove (52) and cooperates with the threaded hole (53) through a fastener, so that the guide wheel shaft (5) is fixedly installed on the fixing seat (1).
5. An anti-sputtering insulating guide device for vacuum coating according to any one of claims 2 to 4, characterized in that: The anti-splashing mechanism comprises an anti-splashing plate (3), which is arranged inside the guide wheel (2) and above the rotating bearing (6), and the anti-splashing plate (3) covers the rotating bearing (6).
6. The sputtering-proof insulating guide device for vacuum coating according to claim 5, characterized in that: The anti-splashing mechanism also includes a retaining spring (7). An annular retaining groove cooperating with the retaining spring (7) is provided on the inner wall of the guide wheel (2). The retaining spring (7) is located above the anti-splashing plate (3) to position the anti-splashing plate (3). The edge of the retaining spring (7) is engaged in the annular retaining groove.
7. The sputtering-proof insulating guide device for vacuum coating according to claim 6, characterized in that: The insulating sealing mechanism comprises a labyrinth seal (4), which is arranged below the rotating bearing (6), and the labyrinth seal (4) is tightly sleeved on the guide wheel shaft (5), the bottom surface of the labyrinth seal (4) is in contact with the surface of the fixing seat (1), and the upper part of the labyrinth seal (4) extends into the interior of the guide wheel (2) and is tightly in contact with the lower surface of the rotating bearing (6).