Jet mechanism and reaction device

Abstract

The present application provides a jet mechanism and a reaction device, the jet mechanism is used to spray a first precursor and a second precursor to a sheet material in a reaction chamber, so that an atomic film is formed on a plurality of sheet materials, the jet mechanism comprises: an air intake assembly, the air intake assembly is provided with a first air intake port, a second air intake port and a third air intake port, the first air intake port is used to introduce a first precursor, the second air intake port is used to introduce a second precursor, and the third air intake port is used to introduce an inert gas; a jet seat, the jet seat is connected to the air intake assembly, and the jet seat is provided with a plurality of first jet slots, a plurality of second jet slots and a plurality of third jet slots. In this way, the jet mechanism can simultaneously spray a plurality of first precursors, a plurality of second precursors and a plurality of inert gases on the side facing the sheet material, so that the sheet material moving through the first jet slot, the second jet slot and the third jet slot can realize the coating of multiple layers of atomic films in one movement, which can improve the efficiency of coating the sheet material.

Description

Technical Field

[0001] The present application relates to the technical field of photovoltaic and semiconductor product processing, and in particular to an air jet mechanism and a reaction device. Background Art

[0002] In the process of photovoltaic and semiconductor product production, sheet materials need to be deposited by atomic layer deposition (ALD) in the reaction device. During the ALD process, two precursors need to be introduced into the reaction device in sequence to fill the reaction device with the precursors, and inert gas needs to be introduced in the interval between the introduction of one precursor and the introduction of another precursor to clean the precursors that are not involved in the atomic layer deposition in the reaction device. After multiple introductions of two precursors and inert gas, a multi-layer atomic film can be formed on the sheet material.

[0003] At present, it is necessary to introduce the first precursor, the inert gas, the second precursor and the inert gas into the reaction device in turn for many times to form a multi-layer atomic film on the sheet material. Each time the gas is introduced into the reaction device and the gas is filled, a lot of time is consumed, resulting in poor efficiency in processing the sheet material. Utility Model Content

[0004] In view of the above, it is necessary to provide a jet mechanism and a reaction device to solve the above defects.

[0005] In the first aspect, an embodiment of the present application provides a jet mechanism for spraying a first precursor and a second precursor to a sheet material in a reaction chamber so that an atomic film is formed on a plurality of sheet materials, the jet mechanism comprising: an air intake assembly, the air intake assembly being provided with a first air inlet, a second air inlet and a third air inlet, the first air inlet being used to introduce a first precursor, the second air inlet being used to introduce a second precursor, and the third air inlet being used to introduce an inert gas; a jet seat, the jet seat being connected to the air intake assembly, the jet seat being provided with a plurality of first jet slots, a plurality of second jet slots and a plurality of third jet slots; wherein each third jet slot is located between a first jet slot and a second jet slot; a plurality of first jet slots are connected to the first air inlet, a plurality of second jet slots are connected to the second air inlet, a plurality of third jet slots are connected to the third air inlet, the first jet slot is used to spray the first precursor to the sheet material, the second jet slot is used to spray the second precursor to the sheet material, and the third jet slot is used to spray an inert gas to block the first precursor and the second precursor.

[0006] Optionally, the jet seat is also provided with a plurality of first exhaust grooves and a plurality of second exhaust grooves, the first exhaust grooves are used to extract the first precursor and the inert gas, and the second exhaust grooves are used to extract the second precursor and the inert gas; the air intake component is provided with a first exhaust port and a second exhaust port, the first exhaust port is connected to the plurality of first exhaust grooves, and the second exhaust port is connected to the plurality of second exhaust grooves.

[0007] Optionally, the number of the first jet slots is M, the M first jet slots are arranged in sequence along the width direction of the jet seat, and the plurality of second jet slots and the plurality of third jet slots are all located between the 1st first jet slot and the Mth first jet slot; wherein M is an integer greater than 1.

[0008] Optionally, the jet seat is provided with multiple first jet ports, multiple second jet ports, multiple third jet ports, multiple first air extraction ports and multiple second air extraction ports; multiple first jet ports are connected to the first air inlet and the first jet slot, multiple second jet ports are connected to the second air inlet and the second jet slot, and multiple third jet ports are connected to the third air inlet and the third jet slot; each first air extraction port is connected to the corresponding first air extraction slot, and multiple first air extraction ports are connected to the first exhaust port, each second air extraction port is connected to the corresponding second air extraction slot, and multiple second air extraction ports are connected to the second exhaust port.

[0009] Optionally, the air intake assembly includes an air intake seat and a diverter seat, the diverter seat is located between the air intake seat and the jet seat in the vertical direction; the first air inlet, the second air inlet and the third air inlet are opened on the side of the air intake seat away from the diverter seat in the vertical direction; the diverter seat is provided with a plurality of first diverter grooves, a plurality of second diverter grooves and a plurality of third diverter grooves on the side close to the jet seat in the vertical direction, the plurality of first diverter grooves are connected to the first air intake through the first channel, and each first diverter groove is connected to the corresponding first jet groove; the plurality of second diverter grooves are connected to the second air intake through the second channel, and each second diverter groove is connected to the corresponding second jet groove; the plurality of third diverter grooves are connected to the third air intake through the third channel, and each third diverter groove is connected to the corresponding third jet groove.

[0010] Optionally, a first air inlet groove, a second air inlet groove and a third air inlet groove are provided on a side of the air inlet seat close to the diverter seat, the first air inlet groove is connected to the first air inlet port, the second air inlet groove is connected to the second air inlet port, and the third air inlet groove is connected to the third air inlet port; the diverter seat includes a first sub-seat and a second sub-seat, the first sub-seat is connected to the air inlet seat, and a first connecting groove, a second connecting groove and a third connecting groove are provided on a side of the first sub-seat away from the air inlet seat; the second sub-seat is arranged between the first sub-seat and the jet seat, and a plurality of first diverter grooves, a plurality of second diverter grooves and a plurality of third diverter grooves are provided on a side of the second sub-seat facing the jet seat; wherein the first air inlet groove, the first connecting groove and the first diverter groove are connected; the second air inlet groove, the second connecting groove and the second diverter groove are connected; the third air inlet groove, the third connecting groove and the third diverter groove are connected.

[0011] Optionally, multiple first diversion grooves, multiple second diversion grooves and multiple third diversion grooves all extend along the first horizontal direction; the second sub-seat is provided with a first diversion port, a second diversion port and a third diversion port on the side facing the first sub-seat, and the first diversion port, the second diversion port and the third diversion port all extend along the second horizontal direction, the first diversion port is connected to each first diversion groove, the second diversion port is connected to each second diversion groove, and the third diversion port is connected to each third diversion groove; wherein the first horizontal direction, the second horizontal direction and the vertical direction are perpendicular to each other.

[0012] Optionally, the jet mechanism further includes: a heating component, which is disposed on the air inlet component and is used to heat the first precursor introduced from the first air inlet, the second precursor introduced from the second air inlet, and the inert gas introduced from the third air inlet.

[0013] Optionally, an annular groove, a cooling channel, a liquid inlet and a liquid outlet are also provided on the diverter seat, the annular groove is located on the outside of the first diverter groove, the second diverter groove and the third diverter groove, the cooling channel is arranged around the annular groove or the annular groove is arranged around the cooling channel, and the cooling channel is used for allowing coolant to flow through; the injection mechanism also includes a sealing ring, which is accommodated in the annular groove, and the sealing ring is used to abut against the side wall of the reaction chamber when the diverter seat is connected to the side wall of the reaction chamber to seal the reaction chamber.

[0014] In a second aspect, an embodiment of the present application provides a reaction device, comprising: a reaction chamber, the reaction chamber is used to accommodate a plurality of sheet materials; a moving mechanism, the moving mechanism is used to receive and move the sheet materials; and a jet mechanism such as any of the above items, the jet mechanism is used to spray a first precursor and a second precursor onto the sheet materials in the reaction chamber, so as to form an atomic film on the plurality of sheet materials.

[0015] Through the jet mechanism and reaction device provided in the present application, the jet mechanism can simultaneously jet multiple streams of the first precursor, multiple streams of the second precursor and multiple streams of inert gas on the side facing the sheet material, so that the sheet material moving through the first jet slot, the second jet slot and the third jet slot can be coated with multiple layers of atomic films in one movement, which can improve the efficiency of coating the sheet material. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 Schematic diagram of the reaction device in the embodiment of the present application.

[0017] Figure 2 It is a structural schematic diagram of the jet mechanism in the embodiment of the present application.

[0018] Figure 3 It is a first structural schematic diagram of the air intake seat in the embodiment of the present application.

[0019] Figure 4 It is a bottom view of the second sub-seat in the embodiment of the present application.

[0020] Figure 5 It is a top view of the jet seat in the embodiment of the present application.

[0021] Figure 6 It is a bottom view of the jet seat in the embodiment of the present application.

[0022] Figure 7 yes Figure 6 Enlarged view of point VII in the middle.

[0023] Figure 8 It is a schematic diagram of the arrangement of the first jet slot, the second jet slot and the third jet slot in the embodiment of the present application.

[0024] Fig. 9 It is a second structural schematic diagram of the air intake seat in the embodiment of the present application.

[0025] Fig.10 It is a first structural schematic diagram of the first sub-base in the embodiment of the present application.

[0026] Fig.11 It is a second structural schematic diagram of the first sub-base in the embodiment of the present application.

[0027] Fig.12 It is a top view of the second sub-seat in the embodiment of the present application.

[0028] Description of main component symbols:

[0029] 100, reaction device; 101, reaction chamber; 1011, reaction space; 1012, opening; 102, moving mechanism; 103, jet mechanism; 104, fixture; 105, sheet material; 10, jet seat; 11, first jet port; 12, second jet port; 13, third jet port; 14, first jet slot; 15, second jet slot; 16, third jet slot; 17, first exhaust slot; 18, second exhaust slot; 19, first exhaust port; 110, second exhaust port; 20, air inlet seat; 21, first air inlet; 22, second air inlet; 23, third air inlet; 24, first exhaust port; 25, second exhaust port; 26, first air inlet slot; 27, second air inlet slot; 28, third air inlet slot; 29, first exhaust slot; 210, second exhaust slot; 211, heating chamber; 3 0. Diverter seat; 31. First sub-seat; 311. First connecting port; 312. Second connecting port; 313. Third connecting port; 314. First connecting groove; 315. Second connecting groove; 316. Third connecting groove; 317. First collecting port; 318. Second collecting port; 319. First collecting groove; 3110. Second collecting groove; 32. Second sub-seat; 321. First diverter groove; 322. Second diverter groove; 323. Third diverter groove; 324. First recovery groove; 325. Second recovery groove; 326. First diverter port; 327. Second diverter port; 328. Third diverter port; 329. First recovery port; 3210. Second recovery port; 3211. Annular groove; 3212. Liquid inlet; 3213. Liquid outlet; 41. First heating element; 42. Second heating element; 50. Sealing ring. DETAILED DESCRIPTION

[0030] The technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments.

[0031] In the present application, the term "plurality" refers to two or more. In addition, it should be understood that in the description of the present application, the terms "first", "second", etc. are only used for the purpose of distinguishing descriptions, and cannot be understood as indicating or implying relative importance, nor can they be understood as indicating or implying an order.

[0032] In the description of the embodiments of the present application, words such as "exemplary" or "for example" are used to indicate examples, illustrations or descriptions. Any embodiment or design described as "exemplary" or "for example" in the embodiments of the present application should not be interpreted as being more preferred or more advantageous than other embodiments or designs. Specifically, the use of words such as "exemplary" or "for example" is intended to present related concepts in a specific way.

[0033] See also Figure 1 , Figure 1 A reaction device 100 provided in an embodiment of the present application is shown.

[0034] In an embodiment of the present application, the reaction device 100 may include a reaction chamber 101, a moving mechanism 102, and a jet mechanism 103. A reaction space 1011 may be provided in the reaction chamber 101, and the moving mechanism 102 may be disposed in the reaction space 1011. The moving mechanism 102 may carry a fixture 104, and a plurality of sheet materials 105 may be accommodated in the fixture 104. The moving mechanism 102 may drive the fixture 104 to reciprocate in the reaction space 1011. The jet mechanism 103 may be fixedly connected to the side wall of the reaction chamber 101, and the jet mechanism 103 may jet the first precursor and the second precursor to the sheet material 105 in the reaction space 1011, so that an atomic film may be formed on the surface of the sheet material 105.

[0035] It can be understood that the reaction device 100 can perform an atomic layer deposition (ALD) process on the sheet material 105, so that an atomic film is formed on the side of the sheet material 105 that contacts the first precursor and the second precursor. The surface of the sheet material 105 needs to first adsorb the first precursor and then the second precursor to form a layer of atomic film; then the first precursor and the second precursor can be adsorbed on the formed atomic film in sequence to form another layer of atomic film. In this way, multiple layers of atomic films can be formed on the sheet material 105 repeatedly.

[0036] In the embodiments of the present application, the types of the first precursor and the second precursor are not specifically limited. For example, the first precursor may be water, and the second precursor may be trimethyl aluminum (TMA).

[0037] In the embodiment of the present application, there is no specific limitation on the type of the sheet material 105. For example, the sheet material 105 may be, but is not limited to, a silicon sheet, a silicon carbide sheet, or the like.

[0038] In the embodiment of the present application, there is no specific limitation on the type of the moving mechanism 102. For example, the moving mechanism 102 may be, but is not limited to, a conveyor belt mechanism, a linear motor mechanism, a rodless cylinder mechanism, and the like.

[0039] In one embodiment, an opening 1012 is provided on a side wall of the reaction chamber 101, and the opening 1012 is connected to the reaction space 1011. Part of the structure of the jet mechanism 103 can extend into the reaction space 1011 from the opening 1012, and the remaining structure is located outside the reaction space 1011 and fixedly connected to the side wall of the reaction chamber 101. At the same time, the position where the jet mechanism 103 is connected to the side wall of the reaction chamber 101 is sealed to reduce leakage of the first precursor and the second precursor in the reaction space 1011.

[0040] Please also read Figure 2 , Figure 2 1 shows an air jet mechanism 103 provided in an embodiment of the present application. In the embodiment of the present application, the length direction and width direction of the air jet mechanism 103 can be defined as the first horizontal direction and the second horizontal direction, respectively, and the height direction of the air jet mechanism 103 can be defined as the vertical direction. The first horizontal direction, the second horizontal direction and the vertical direction are perpendicular to each other. For example, the first horizontal direction can be Figure 2 The X direction and its reverse direction shown, the second horizontal direction can be Figure 2 The Y direction and its reverse direction are shown, and the vertical direction can be Figure 3 The Z direction and its opposite direction are shown.

[0041] like Figure 2 As shown, in some embodiments, the jet mechanism 103 may include a jet seat 10 and an air intake assembly. The jet seat 10 and the air intake assembly are arranged in a vertical direction, and the jet seat 10 is fixedly connected to the air intake assembly.

[0042] Please also read Figure 3 The air inlet assembly is provided with a first air inlet 21, a second air inlet 22 and a third air inlet 23. The first air inlet 21 can be fed with a first precursor (such as water), the second air inlet 22 can be fed with a second precursor (such as TMA), and the third air inlet 23 can be fed with an inert gas.

[0043] Please also read Figure 4 The air inlet assembly is provided with a plurality of first diverter grooves 321, a plurality of second diverter grooves 322, and a plurality of third diverter grooves 323 on the side facing the jet seat 10. The first air inlet 21 can be connected with each of the first diverter grooves 321 through the first channel in the air inlet assembly, the second air inlet 22 can be connected with each of the second diverter grooves 322 through the second channel in the air inlet assembly, and the third air inlet 23 can be connected with each of the third diverter grooves 323 through the third channel in the air inlet assembly.

[0044] Please also read Figure 5The jet seat 10 is provided with a plurality of first jet ports 11, a plurality of second jet ports 12, and a plurality of third jet ports 13 on one side facing the air inlet assembly. Each first flow diverter groove 321 corresponds to at least one first jet port 11, and is docked and connected with the corresponding first jet port 11. Each second flow diverter groove 322 corresponds to at least one second jet port 12, and is docked and connected with the corresponding second jet port 12. Each third flow diverter groove 323 corresponds to at least one third jet port 13, and is docked and connected with the corresponding third jet port 13.

[0045] Please also read Figure 6 and Figure 7 A plurality of first jet slots 14, a plurality of second jet slots 15 and a plurality of third jet slots 16 are provided on the side of the jet seat 10 away from the air intake assembly. Each first jet slot 14 is connected to at least one first jet port 11, each second jet slot 15 is connected to at least one second jet port 12, and each third jet slot 16 is connected to at least one third jet port 13. The plurality of first jet slots 14, the plurality of second jet slots 15 and the plurality of third jet slots 16 are arranged at intervals in the second horizontal direction. Each third jet slot 16 is located between a first jet slot 14 and a second jet slot 15 in the second horizontal direction.

[0046] The side of the jet seat 10 facing away from the air inlet assembly can be arranged toward the jig 104 and the sheet material 105 on the jig 104. The first jet slot 14 can receive the first precursor through the first channel and the first jet port 11 to spray the first precursor toward the sheet material 105. The second jet slot 15 can receive the second precursor through the second channel and the second jet port 12 to spray the second precursor toward the sheet material 105. The third jet slot 16 can spray an inert gas to block the first precursor from flowing in a direction close to the second precursor, and block the second precursor from flowing in a direction close to the first precursor.

[0047] It can be understood that the first air inlet 21, the second air inlet 22 and the third air inlet 23 can be connected to an air inlet device (not shown). Each air inlet device can drive the gas in the corresponding container to enter the first air inlet 21, the second air inlet 22 or the third air inlet 23. In the embodiments of the present application, the type of the air inlet device is not specifically limited. For example, the air inlet device can be, but is not limited to, an air pump.

[0048] It can be understood that the first jet port 11, the second jet port 12, the third jet port 13, the first jet slot 14, the second jet slot 15 and the third jet slot 16 can all be strip slots extending along the first horizontal direction. Each first jet port 11, each second jet port 12 and each third jet port 13 are arranged at intervals in the second horizontal direction, and each first jet slot 14, each second jet slot 15 and each third jet slot 16 are arranged at intervals in the second horizontal direction.

[0049] It can be understood that in the second horizontal direction, the arrangement of the first jet slot 14, the second jet slot 15 and the third jet slot 16 can be: the first jet slot 14A, the third jet slot 16A, the second jet slot 15A, the first jet slot 14B, the third jet slot 16B, the second jet slot 15B, the third jet slot 16C, the first jet slot 14C... and so on, that is, on both sides of each third jet slot 16, a first jet slot 14 is opened on one side, and a second jet slot 15 is opened on the other side.

[0050] It is understood that the first precursor and the second precursor may produce a chemical reaction when they contact the environment outside the surface of the sheet material 105, thereby affecting the processing of the sheet material 105. For example, when the first precursor is water and the second precursor is TMA, the first precursor and the second precursor may burn when they contact at a position far from the sheet material 105 in the reaction space 1011.

[0051] In this way, a third jet slot 16 is arranged between each first jet slot 14 and the adjacent second jet slot 15, and the third jet slot 16 sprays an inert gas, so that the inert gas can block the first precursor and the second precursor, reduce the probability of the first precursor and the second precursor directly contacting at a position away from the sheet material 105 in the reaction space 1011, and improve the safety and stability of the process treatment of the sheet material 105.

[0052] In the embodiments of the present application, the type of the inert gas is not specifically limited. For example, the inert gas may be, but is not limited to, nitrogen.

[0053] It can be understood that the number of the first air inlet 21 is less than the number of the first diverter slots 321, and the number of the first diverter slots 321 can be less than or equal to the number of the first gas injection slots 14. The number of the second air inlet 22 is less than the number of the second diverter slots 322, and the number of the second diverter slots 322 can be less than or equal to the number of the second gas injection slots 15. The number of the third air inlet 23 is less than the number of the third diverter slots 323, and the number of the third diverter slots 323 can be less than or equal to the number of the third gas injection slots 16. In this way, the gas introduced from the first air inlet 21, the second air inlet 22 and the third air inlet 23 can be diverted through the first channel, the second channel and the third channel respectively, and the side of the gas injection seat 10 away from the gas inlet assembly can simultaneously eject multiple streams of the first precursor, the second precursor and the inert gas. In this way, the sheet material 105 moves once in the second horizontal direction, and the side of the sheet material 105 facing the gas injection mechanism 103 can sequentially adsorb the first precursor and the second precursor multiple times, thereby forming a multi-layer atomic film on the sheet material 105. The reciprocating movement of the sheet material 105 in the second horizontal direction can increase the number of layers of the atomic film formed on the sheet material 105 .

[0054] By isolating the first precursor and the second precursor with an inert gas, the first precursor and the second precursor can be ejected simultaneously. In this way, the jet mechanism 103 provided in the present application can reduce the contact between the first precursor and the second precursor at a position away from the sheet material 105, while achieving the ejection of multiple strands of the first precursor and the second precursor. When the reaction device 100 processes the sheet material 105, it is not necessary to repeatedly inject the first precursor, the inert gas, the second precursor, and the inert gas into the reaction space 1011 in sequence. In this way, the jet mechanism 103 provided in the embodiment of the present application can improve the processing efficiency of the sheet material 105 while improving the processing safety.

[0055] In the embodiments of the present application, there is no specific limitation on the fixing method during the fixed connection and fixed installation. For example, the fixing method may include, but is not limited to, screw fixing, bolt fixing, welding fixing, buckle fixing, etc.

[0056] Please also read Figure 8 In some embodiments, the number of the first air-jet slots 14 is M, where M is an integer greater than 1. The M first air-jet slots 14 are arranged in sequence along the second horizontal direction, and the plurality of second air-jet slots 15 and the plurality of third air-jet slots 16 are all located between the first first air-jet slot 14 and the Mth first air-jet slot 14. In this way, among the plurality of first air-jet slots 14, the plurality of second air-jet slots 15, and the plurality of third air-jet slots 16 arranged in the second horizontal direction, the air-jet slots located on both sides are all first air-jet slots 14.

[0057] It can be understood that the first jet slot 14 can be used to spray out the first precursor (such as water) that is not harmful to the environment or human body, and the second jet slot 15 can be used to spray out the second precursor (such as TMA) that is harmful to the environment or human body. Setting the jet slots on both sides as the first jet slot 14 can reduce the probability of the second precursor leaking from both sides of the multiple first jet slots 14, the multiple second jet slots 15, and the multiple third jet slots 16 arranged in the second horizontal direction, thereby reducing the pollution to the environment and the damage to the health of the workers during the reaction process.

[0058] For example, the number of the second air-jet slots 15 may be M-1, and the number of the third air-jet slots 16 may be 2 (M-1). The M-1 second air-jet slots 15 are arranged in sequence in the second horizontal direction, and the 2 (M-1) third air-jet slots 16 are arranged in sequence in the third horizontal direction. Each second air-jet slot 15 has a third air-jet slot 16 on both sides of the second horizontal direction.

[0059] In some embodiments, Figure 6 and Figure 7 As shown, a plurality of first air extraction grooves 17 and a plurality of second air extraction grooves 18 may be provided on a side of the air injection seat 10 away from the air inlet assembly. The number of the first air extraction grooves 17 may be greater than or equal to the number of the first air injection grooves 14, and the number of the second air extraction grooves 18 may be greater than or equal to the number of the second air injection grooves 15. Each first air extraction groove 17 corresponds to one of the first air injection grooves 14, and each first air extraction groove 17 is located on one side of the corresponding first air injection groove 14 in the second horizontal direction, and is spaced apart from the corresponding first air injection groove 14. Each second air extraction groove 18 corresponds to one of the second air injection grooves 15, and each second air extraction groove 18 is located on one side of the corresponding second air injection groove 15 in the second horizontal direction, and is spaced apart from the corresponding second air injection groove 15. The first air extraction groove 17 is used to extract the inert gas and the first precursor that is not adsorbed by the sheet material 105, and the second air extraction groove 18 is used to extract the inert gas and the second precursor that is not adsorbed by the sheet material 105. Each of the first air extraction slots 17 and each of the second air extraction slots 18 are spaced apart from the third air injection slot 16 in the second horizontal direction.

[0060] like Figure 5 As shown, the side of the air injection seat 10 facing the air intake assembly is further provided with a plurality of first air suction ports 19 and a plurality of second air suction ports 110. Each first air suction port 19 is communicated with a first air suction groove 17. Each second air suction port 110 is communicated with a second air suction groove 18.

[0061] like Figure 3 and Figure 4As shown, a first exhaust port 24 and a second exhaust port 25 may be provided on the side of the air intake assembly facing away from the jet seat 10. A plurality of first recovery slots 324 and a plurality of second recovery slots 325 may be provided on the side of the air intake assembly facing the jet seat 10. The first exhaust port 24 may be connected to each first recovery slot 324 through the fourth channel in the air intake assembly. The second exhaust port 25 may be connected to each second recovery slot 325 through the fifth channel in the air intake assembly. Each first recovery slot 324 corresponds to at least one first air extraction port 19, and each first recovery slot 324 is connected to and communicated with the corresponding first air extraction port 19. Each second recovery slot 325 corresponds to at least one second air extraction port 110, and each second recovery slot 325 is connected to and communicated with the corresponding second air extraction port 110.

[0062] In the embodiment of the present application, there is no specific limitation on the quantitative relationship between the first air extraction port 19 and the first recovery slot 324, and the quantitative relationship between the second air extraction port 110 and the second recovery slot 325. For example, the number of the first recovery slots 324 may be N times the number of the first air extraction ports 19, and the N first recovery slots 324 spaced apart in the first horizontal direction are connected to the same first air extraction port 19; the number of the second recovery slots 325 may be N times the number of the second air extraction ports 110, and the N second recovery slots 325 spaced apart in the first horizontal direction are connected to the same second air extraction port 110; wherein N is an integer greater than 1.

[0063] In the embodiment of the present application, there is no specific limitation on the quantitative relationship between the first air extraction slots 17 and the first air injection slots 14 and the quantitative relationship between the second air extraction slots 18 and the second air injection slots 15. For example, each first air injection slot 14 is provided with a first air extraction slot 17 on both sides in the second horizontal direction, that is, the number of the first air extraction slots 17 is twice the number of the first air injection slots 14; each second air injection slot 15 is provided with a second air extraction slot 18 on both sides in the second horizontal direction, that is, the number of the second air extraction slots 18 is twice the number of the second air injection slots 15.

[0064] It can be understood that the first gas extraction slot 17 can absorb the first precursor that does not participate in the formation of the atomic film, and at the same time absorb the inert gas ejected from the adjacent third gas injection slot 16. The second gas extraction slot 18 can absorb the second precursor that does not participate in the formation of the atomic film, and at the same time absorb the inert gas ejected from the third gas injection slot 16. In this way, a part of the absorbed gas can flow to the first exhaust port 24 through the first gas extraction port 19 and the fourth channel, and the remaining part can flow to the second exhaust port 25 through the second gas extraction port 110 and the fifth channel. The first exhaust port 24 and the second exhaust port 25 can be connected to a gas extraction device (not shown) respectively, so as to realize the extraction of the first precursor, the second precursor and the inert gas. The extracted first precursor and the second precursor can be collected in a designated space for processing, so as to reduce the leakage of the precursors and cause atmospheric pollution and production accidents. In the embodiments of the present application, the type of the gas extraction device is not specifically limited. For example, the gas extraction device can be, but is not limited to, an air pump.

[0065] It is understandable that some precursors (such as TMA) are toxic and therefore need to be extracted and processed to reduce the harm of precursor toxicity to the health of workers.

[0066] In some embodiments, the jet seat 10 may include a plurality of vertical plates, each of which has one or more strip grooves spaced along the first horizontal direction on one side of the vertical plate facing the air intake assembly, and one strip groove on the other side, and each of which has a through groove on at least one side of the second horizontal direction. The strip grooves on both sides of each vertical plate in the vertical direction may form a first air extraction port 19 and a first air extraction groove 17, or a second air extraction port 110 and a second air extraction groove 18, respectively. The through grooves of each vertical plate in the second horizontal direction may cooperate to form a first jet groove 14, a second jet groove 15, or a third jet groove 16. In this way, after a plurality of vertical plates are arranged in the second horizontal direction and fixedly connected, the assembly of a jet seat 10 can be realized.

[0067] In some embodiments, Figure 2 As shown, the air intake assembly may include an air intake seat 20 and a diverter seat 30. The diverter seat 30 is located between the air intake seat 20 and the jet seat 10 in the vertical direction, and is fixedly connected to the air intake seat 20 and the jet seat 10. Part of the structure of the diverter seat 30 protrudes from the side of the jet seat 10 in the first horizontal direction and the second horizontal direction, and is fixedly connected to the side wall of the reaction chamber 101, thereby realizing the fixed connection between the jet mechanism 103 and the reaction chamber 101.

[0068] Please also read Fig. 9The first air inlet 21, the second air inlet 22 and the third air inlet 23 are all provided on the air inlet seat 20. The air inlet seat 20 is provided with a first air inlet groove 26, a second air inlet groove 27 and a third air inlet groove 28 on one side thereof facing the diverter seat 30. The first air inlet groove 26 is connected to the first air inlet 21. The second air inlet 22 is connected to the second air inlet groove 27, and the third air inlet 23 is connected to the third air inlet groove 28.

[0069] like Figure 2 As shown, the diverter seat 30 may include a first sub-seat 31 and a second sub-seat 32. The first sub-seat 31 and the second sub-seat 32 are arranged in the vertical direction, the first sub-seat 31 is located between the second sub-seat 32 and the inlet seat 20, and the second sub-seat 32 is located between the first sub-seat 31 and the exhaust seat. The second sub-seat 32 can be fixedly connected to the inner wall of the reaction chamber 101. The first sub-seat 31 is fixedly connected to the second sub-seat 32 and the inlet seat 20, and the second sub-seat 32 is fixedly connected to the exhaust seat 10.

[0070] Please also read Fig.10 and Fig.11 The first sub-seat 31 has a first communication port 311, a second communication port 312 and a third communication port 313 on the side facing the air inlet seat 20, and has a first communication groove 314, a second communication groove 315 and a third communication groove 316 on the side facing the second sub-seat 32. The first communication port 311 is connected to and communicated with the first air inlet groove 26, and is connected to the first communication groove 314. The second communication port 312 is connected to and communicated with the second air inlet groove 27, and is connected to the second communication groove 315. The third communication port 313 is connected to and communicated with the third air inlet groove 28, and is connected to the third communication groove 316. The first communication groove 314, the second communication groove 315 and the third communication groove 316 are all arranged at intervals in the first horizontal direction, and the first communication groove 314, the second communication groove 315 and the third communication groove 316 extend along the second horizontal direction.

[0071] Please also read Figure 4 and Fig.12, the second sub-seat 32 is provided with a first diverter port 326, a second diverter port 327 and a third diverter port 328 on the side facing the air inlet seat 20. The first diverter port 326, the second diverter port 327 and the third diverter port 328 are all arranged at intervals in the first horizontal direction, and the first diverter port 326, the second diverter port 327 and the third diverter port 328 are all extended along the second horizontal direction. A plurality of first diverter slots 321, a plurality of second diverter slots 322 and a plurality of third diverter slots 323 are provided on the side of the second sub-seat 32 facing the air injection seat 10. The first diverter port 326 is connected to and communicated with the first connecting slot 314, and the first diverter port 326 is connected to each of the first diverter slots 321. The second diverter port 327 is connected to and communicated with the second connecting slot 315, and the second diverter port 327 is connected to each of the second diverter slots 322. The third diversion port 328 is connected to and communicates with the third communication groove 316 , and the third diversion port 328 is communicated with each of the third diversion grooves 323 .

[0072] In the embodiments of the present application, there is no specific limitation on the number of the first air inlet groove 26, the second air inlet groove 27, the third air inlet groove 28, the first connecting port 311, the second connecting port 312, the third connecting port 313, the first connecting groove 314, the second connecting groove 315, the third connecting groove 316, the first jet port 11, the second jet port 12 and the third jet port 13.

[0073] For example, the first air inlet groove 26, the second air inlet groove 27, the third air inlet groove 28, the first connecting port 311, the second connecting port 312, the third connecting port 313, the first connecting groove 314, the second connecting groove 315, the third connecting groove 316, the first jet port 11, the second jet port 12 and the third jet port 13 may be one or two; wherein the number of the first air inlet groove 26, the second air inlet groove 27 and the third air inlet groove 28 is respectively the same as the number of the first connecting port 311, the second connecting port 312 and the third connecting port 313, and the number of the first connecting groove 314, the second connecting groove 315 and the third connecting groove 316 is respectively the same as the number of the first jet port 11, the second jet port 12 and the third jet port 13. The number of the first air inlet groove 26 is greater than or equal to the number of the first air inlet ports 21, and less than or equal to the number of the first connecting groove 314. The number of the second air inlet grooves 27 is greater than or equal to the number of the second air inlet ports 22, and less than or equal to the number of the second connecting grooves 315, and the number of the third air inlet grooves 28 is greater than or equal to the number of the third air inlet ports 23, and less than or equal to the number of the second connecting grooves 315. The number of the first diverter grooves 321 is greater than the number of the first diverter ports 326 (i.e., the number of the first connecting grooves 314), the number of the second diverter grooves 322 is greater than the number of the second diverter ports 327 (i.e., the number of the second connecting grooves 315), and the number of the third diverter grooves 323 is greater than the number of the third diverter ports 328 (i.e., the number of the third connecting grooves 316).

[0074] It can be understood that the position of each first air inlet groove 26 corresponds to the position of a first communication port 311, so that the first air inlet groove 26 is connected to the first sub-seat 31 after the air inlet seat 20 is connected to the first sub-seat 31. Similarly, the positional relationship between the second air inlet groove 27 and the second communication port 312, the positional relationship between the third air inlet groove 28 and the third communication port 313, the positional relationship between the first communication groove 314 and the first diversion port 326, the positional relationship between the second communication groove 315 and the second diversion port 327, and the positional relationship between the third communication groove 316 and the third diversion port 328 can be the same or similar to the positional relationship between the first air inlet groove 26 and the first communication port 311, and will not be repeated here.

[0075] It can be understood that each first air inlet groove 26, each first connecting port 311, each first connecting groove 314 and each first diversion port 326 cooperate to form a first channel, which can realize the connection between the first air inlet 21 and each first diversion groove 321, so that the first precursor can achieve a single-port entry and multiple-stream output diversion effect. Similarly, each second air inlet groove 27, each second connecting port 312, each second connecting groove 315 and each second diversion port 327 cooperate to form a second channel. Each third air inlet groove 28, each third connecting port 313, each third connecting groove 316 and each third diversion port 328 cooperate to form a third channel.

[0076] It can be understood that each first diversion port 326 extending along the second horizontal direction is connected to each first diversion slot 321 extending along the first horizontal direction, which can improve the uniformity of the first precursor distribution in each first diversion slot 321, thereby improving the uniformity of the first precursor ejected from the first jetting slot 14, and improving the processing effect of the sheet material 105. Similarly, the connection between the second diversion port 327 and the second diversion slot 322, and the connection between the third diversion port 328 and the third diversion slot 323 can achieve the same or similar effects, which will not be repeated here.

[0077] In some embodiments, the first exhaust port 24 and the second exhaust port 25 are provided on the air intake seat 20, and the air intake seat 20 is provided with a first exhaust groove 29 and a second exhaust groove 210 on one side facing the first sub-seat 31. The first exhaust groove 29 is connected to the first exhaust port 24, and the second exhaust groove 210 is connected to the second exhaust port 25.

[0078] The first sub-seat 31 has a first collecting port 317 and a second collecting port 318 on one side facing the air inlet seat 20, and has a plurality of first collecting slots 319 and a plurality of second collecting slots 3110 on one side facing the second sub-seat 32. The plurality of first collecting slots 319 and the plurality of second collecting slots 3110 are spaced apart in the first horizontal direction and extend along the second horizontal direction.

[0079] A plurality of first recovery ports 329 and a plurality of second recovery ports 3210 are provided on the side of the second sub-seat 32 facing the first sub-seat 31. The plurality of first recovery ports 329 and the plurality of second recovery ports 3210 are arranged at intervals in the first horizontal direction and extend along the second horizontal direction. A plurality of first recovery slots 324 and a plurality of second recovery slots 325 are provided on the side of the second sub-seat 32 facing the jet seat 10. Each first recovery port 329 is docked and connected with the corresponding first collecting slot 319, and is connected with the plurality of first recovery slots 324. Each second recovery port 3210 is docked and connected with the corresponding second collecting slot 3110, and is connected with the plurality of second recovery slots 325.

[0080] In the embodiments of the present application, there is no specific limitation on the number of the first exhaust groove 29, the second exhaust groove 210, the first collecting port 317, the second collecting port 318, the first exhaust port 19, the second exhaust port 110, the first recovery groove 324, the second recovery groove 325, the first collecting groove 319, the second collecting groove 3110, the first recovery port 329 and the second recovery port 3210.

[0081] For example, the number of the first exhaust slot 29 and the second exhaust slot 210 can be one, and the number of the first collecting slot 319, the second collecting slot 3110, the first recovery port 329, the second recovery port 3210, the first recovery slot 324, and the second recovery slot 325 can all be multiple. The number of the first collecting port 317 and the second collecting port 318 are respectively the same as the number of the first exhaust slot 29 and the second exhaust slot 210, and the number of the first collecting slot 319 and the second collecting slot 3110 are respectively the same as the number of the first recovery port 329 and the second recovery port 3210.

[0082] It can be understood that the first exhaust slot 29, the first collection port 317, each first collection slot 319 and each first recovery port 329 cooperate to form a fourth channel, which can realize the communication between the first exhaust port 24 and each first recovery slot 324, so that the gas extracted from the multiple first gas extraction slots 17 can be collected to the first exhaust port 24 through the fourth channel. The second exhaust slot 210, the second collection port 318, each second collection slot 3110 and each second recovery port 3210 cooperate to form a fifth channel, which can realize the communication between the second exhaust port 25 and each second recovery slot 325, so that the gas extracted from the multiple second gas extraction slots 18 can be collected to the second exhaust port 25 through the fifth channel.

[0083] It can be understood that each first recovery port 329 extending along the second horizontal direction is connected to each first recovery slot 324 extending along the first horizontal direction, which can improve the uniformity of the distribution of the first precursor in each first diverter slot 321, thereby improving the uniformity of the first precursor ejected from the first jetting slot 14, and improving the processing effect of the sheet material 105. Similarly, the connection between the second diverter port 327 and the second diverter slot 322, and the connection between the third diverter port 328 and the third diverter slot 323 can achieve the same or similar effects, which will not be repeated here.

[0084] In some embodiments, the jet mechanism 103 may further include a heating assembly. The heating assembly may include a first heating element 41 and a second heating element 42. A heating chamber 211 is provided on the air inlet seat 20, and the heating chamber 211 is connected to the third air inlet port 23 and the third air inlet groove 28. The first heating element 41 may be accommodated in the heating chamber 211 and fixedly connected to the air inlet seat 20. The second heating element 42 may be disposed in the air inlet seat 20 and located close to the first channel and the second channel. The second heating element 42 may be fixedly connected to the air inlet seat 20. Among them, the first heating element 41 may heat the inert gas entering the heating chamber 211. The second heating element 42 may heat the first precursor flowing in the first channel and the second precursor flowing in the second channel.

[0085] It is understood that when the ALD process is performed on the sheet material 105, the temperature in the reaction space 1011 needs to rise to a specified temperature (for example, greater than or equal to 200 degrees Celsius). The heating component heats the first precursor, the second precursor, and the inert gas, which can reduce the temperature drop of the reaction space 1011 after the first precursor, the second precursor, and the inert gas enter the reaction space 1011, and can reduce the impact of temperature changes on the processing of the sheet material 105.

[0086] In the embodiment of the present application, there is no specific limitation on the types of the first heating element 41 and the second heating element 42. For example, the first heating element 41 can be, but is not limited to, an electric heating rod, an electric heating fin, etc. The second heating element 42 can be, but is not limited to, an electric heating rod, an electric heating fin, etc.

[0087] In some embodiments, the second sub-seat 32 is provided with an annular groove 3211 on one side facing the jet seat 10. The annular groove 3211 is connected end to end and is located outside each of the first diverter groove 321, the second diverter groove 322, the third diverter groove 323, the first recovery groove 324 and the second recovery groove 325, that is, each of the first diverter groove 321, the second diverter groove 322, the third diverter groove 323, the first recovery groove 324 and the second recovery groove 325 is located in the area surrounded by the annular groove 3211. The jet mechanism 103 may further include a sealing ring 50. The sealing ring 50 may be accommodated in the annular groove 3211 and adapted to the annular groove 3211. The sealing ring 50 may abut against the outer side of the side wall of the reaction chamber 101 having the opening 1012, and the jet seat 10 may enter the reaction space 1011 through the opening 1012.

[0088] It can be understood that the sealing ring 50 can block the gap between the side wall of the reaction chamber 101 and the second sub-base 32 , thereby limiting the gas in the reaction chamber 101 from leaking through the opening 1012 .

[0089] In some embodiments, a cooling channel (not shown) may also be provided in the second sub-seat 32, and the cooling channel is arranged near the annular groove 3211 and spaced apart from the annular groove 3211. The cooling channel may be annular. A liquid inlet 3212 and a liquid outlet 3213 are spaced apart on the side of the second sub-seat 32. The liquid inlet 3212 and the liquid outlet 3213 are connected to the cooling channel. A cooling circulation device (not shown) may be connected to the liquid inlet 3212 and the liquid outlet 3213 through a pipeline, and the cooling circulation device may drive the coolant to flow into the cooling channel through the liquid inlet 3212, and the cooling channel may absorb the heat of the sealing ring 50, and then flow out of the cooling channel from the liquid outlet 3213, thereby achieving heat dissipation of the sealing ring 50.

[0090] In some cases, the cooling channel can be arranged around the annular groove 3211, that is, the cooling channel can be located outside the annular groove 3211. In other cases, the annular groove 3211 can be arranged around the cooling channel, that is, the annular groove 3211 can be located outside the cooling channel. The embodiments of the present application are not limited to this.

[0091] It can be understood that the sealing ring 50 is in contact with the side wall of the reaction chamber 101, and the heat in the reaction space 1011 is transferred to the sealing ring 50 through the side wall of the reaction chamber 101, so that the sealing ring 50 is heated up, and the structural strength and service life of the sealing ring 50 are reduced. The coolant in the cooling channel can dissipate heat from the sealing ring 50, reduce the temperature of the sealing ring 50, and thus increase the service life of the sealing ring 50.

[0092] In the embodiments of the present application, there is no specific limitation on the type of the cooling liquid. For example, the cooling liquid may be, but is not limited to, water.

[0093] Through the jet mechanism 103 and the reaction device 100 provided by the embodiment of the present application, the jet mechanism 103 introduces a first precursor, a second precursor and an inert gas on the air inlet seat 20, and the jet mechanism 103 can simultaneously jet multiple first precursors, multiple second precursors and multiple inert gases on the side facing the sheet material 105, so that the sheet material 105 moving through the side facing the first jet slot 14, the second jet slot 15 and the third jet slot 16 on the jet seat 10 can be coated with a multi-layer atomic film in one movement, which can improve the efficiency of coating the sheet material 105; the jet mechanism 103 can replace the scheme of injecting the first precursor, the inert gas, the second precursor and the inert gas into the reaction space 1011 in sequence by jetting multiple first precursors, multiple second precursors and multiple inert gases at the same time, thereby reducing the waste of the first precursor and the second precursor.

[0094] At the same time, the jet mechanism 103 can achieve the extraction of multiple gases (for example, the first precursor, the second precursor and / or the inert gas) through multiple first exhaust grooves 17 and multiple second exhaust grooves 18, and the gases extracted from the multiple first exhaust grooves 17 are gathered into a first exhaust port 24 to be discharged from the jet mechanism 103, and the gases extracted from the multiple second exhaust grooves 18 are gathered into a second exhaust port 25 to be discharged from the jet mechanism 103, thereby reducing the probability of the first precursor and the second precursor contacting and reacting at a position far away from the sheet material 105 in the reaction space 1011, thereby improving the safety of processing the sheet material 105.

[0095] It is obvious to those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, and that the present application can be implemented in other specific forms without departing from the spirit or basic features of the present application. Therefore, no matter from which point of view, the above embodiments of the present application should be regarded as exemplary and non-restrictive, and the scope of the present application is defined by the attached claims rather than the above description, and therefore it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims are included in the present application.

Claims

1. A jet mechanism, characterized in that: The jet mechanism is used to spray the first precursor and the second precursor to the sheet material in the reaction chamber so as to form an atomic film on the plurality of sheet materials. The jet mechanism comprises: An air inlet assembly, wherein the air inlet assembly is provided with a first air inlet, a second air inlet and a third air inlet, wherein the first air inlet is used to introduce the first precursor, the second air inlet is used to introduce the second precursor, and the third air inlet is used to introduce an inert gas; An air jet seat, the air jet seat is connected to the air intake assembly, and the air jet seat is provided with a plurality of first air jet slots, a plurality of second air jet slots, and a plurality of third air jet slots; Among them, each of the third jet slots is located between one of the first jet slots and one of the second jet slots; multiple of the first jet slots are connected to the first air inlet, multiple of the second jet slots are connected to the second air inlet, and multiple of the third jet slots are connected to the third air inlet. The first jet slot is used to spray the first precursor to the sheet material, the second jet slot is used to spray the second precursor to the sheet material, and the third jet slot is used to spray the inert gas to block the first precursor and the second precursor.

2. The jet mechanism according to claim 1, characterized in that: The gas injection seat is further provided with a plurality of first gas extraction grooves and a plurality of second gas extraction grooves, wherein the first gas extraction grooves are used to extract the first precursor and the inert gas, and the second gas extraction grooves are used to extract the second precursor and the inert gas; The air intake assembly is provided with a first exhaust port and a second exhaust port. The first exhaust port is communicated with a plurality of the first air extraction grooves, and the second exhaust port is communicated with a plurality of the second air extraction grooves.

3. The jet mechanism according to claim 1, characterized in that: The number of the first air-jet slots is M, and the M first air-jet slots are arranged in sequence along the width direction of the air-jet seat, and the plurality of the second air-jet slots and the plurality of the third air-jet slots are all located between the first first air-jet slot and the Mth first air-jet slot; Wherein, M is an integer greater than 1.

4. The jet mechanism according to claim 2, characterized in that: The air jet seat is provided with a plurality of first air jet ports, a plurality of second air jet ports, a plurality of third air jet ports, a plurality of first air extraction ports and a plurality of second air extraction ports; The plurality of first jet ports are in communication with the first air inlet and the first jet slot, the plurality of second jet ports are in communication with the second air inlet and the second jet slot, and the plurality of third jet ports are in communication with the third air inlet and the third jet slot; Each of the first air suction ports is connected to the corresponding first air suction groove, and multiple first air suction ports are connected to the first exhaust port, each of the second air suction ports is connected to the corresponding second air suction groove, and multiple second air suction ports are connected to the second exhaust port.

5. The jet mechanism according to claim 1, characterized in that: The air intake assembly comprises an air intake seat and a diverter seat, wherein the diverter seat is located between the air intake seat and the jet seat in the vertical direction; the first air intake port, the second air intake port and the third air intake port are opened on a side of the air intake seat away from the diverter seat in the vertical direction; The diverter seat is provided with a plurality of first diverter grooves, a plurality of second diverter grooves and a plurality of third diverter grooves on one side close to the jetting seat in the vertical direction, the plurality of first diverter grooves are connected with the first air inlet through a first channel, and each of the first diverter grooves is connected with the corresponding first jetting groove; A plurality of the second flow diverter grooves are connected to the second air inlet through a second channel, and each of the second flow diverter grooves is connected to a corresponding second air injection groove; The plurality of third flow-dividing grooves are communicated with the third air inlet through a third channel, and each of the third flow-dividing grooves is communicated with the corresponding third air-injecting groove.

6. The jet mechanism according to claim 5, characterized in that: The air inlet seat is provided with a first air inlet groove, a second air inlet groove and a third air inlet groove on one side close to the diverter seat, the first air inlet groove is connected to the first air inlet port, the second air inlet groove is connected to the second air inlet port, and the third air inlet groove is connected to the third air inlet port; The shunt seat comprises a first sub-seat and a second sub-seat, the first sub-seat is connected to the air inlet seat, and a first connecting groove, a second connecting groove and a third connecting groove are formed on a side of the first sub-seat away from the air inlet seat; The second sub-base is disposed between the first sub-base and the air-injection base, and a plurality of the first flow-dividing grooves, a plurality of the second flow-dividing grooves, and a plurality of the third flow-dividing grooves are disposed on a side of the second sub-base facing the air-injection base; Among them, the first air inlet groove, the first connecting groove and the first diverter groove are connected; the second air inlet groove, the second connecting groove and the second diverter groove are connected; the third air inlet groove, the third connecting groove and the third diverter groove are connected.

7. The jet mechanism according to claim 6, characterized in that: The plurality of first diverter slots, the plurality of second diverter slots and the plurality of third diverter slots all extend along a first horizontal direction; The second sub-base is provided with a first diversion port, a second diversion port and a third diversion port on one side facing the first sub-base, the first diversion port, the second diversion port and the third diversion port all extend along the second horizontal direction, the first diversion port is communicated with each of the first diversion slots, the second diversion port is communicated with each of the second diversion slots, and the third diversion port is communicated with each of the third diversion slots; The first horizontal direction, the second horizontal direction and the vertical direction are perpendicular to each other.

8. The jet mechanism according to claim 1, characterized in that: The jet mechanism also includes: A heating component is arranged on the air inlet component, and the heating component is used to heat the first precursor introduced from the first air inlet, the second precursor introduced from the second air inlet, and the inert gas introduced from the third air inlet.

9. The jet mechanism according to claim 5, characterized in that: The diverter seat is also provided with an annular groove, a cooling channel, a liquid inlet and a liquid outlet, the annular groove is located outside the first diverter groove, the second diverter groove and the third diverter groove, the cooling channel is arranged around the annular groove or the annular groove is arranged around the cooling channel, and the cooling channel is used for the coolant to flow through; The jet mechanism further comprises a sealing ring, which is received in the annular groove and is used for abutting against the side wall of the reaction chamber when the diverter seat is connected to the side wall of the reaction chamber to seal the reaction chamber.

10. A reaction device, characterized in that: include: A reaction chamber, the reaction chamber being used to accommodate a plurality of sheet materials; A moving mechanism, the moving mechanism is used to receive and move the sheet material; The jet mechanism according to any one of claims 1 to 9, wherein the jet mechanism is used to spray a first precursor and a second precursor onto the sheet material in the reaction chamber, so that an atomic film is formed on a plurality of the sheet materials.

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