Ring piece for dry etching equipment

Abstract

The utility model discloses a ring piece for dry etching equipment, which comprises an upper ring part and a lower ring part, the lower ring part is detachably arranged at the bottom of the upper ring part, and the lower ring part is conductively connected with the upper ring part. According to the ring piece for the dry etching equipment provided by the utility model, after the lower ring part is seriously corroded, the lower ring part is detached and replaced by a new lower ring part, so that the replacement frequency of the upper ring part can be effectively reduced, the material cost is saved to a great extent, in addition, the non-corroded part of a scrapped integrated ring piece in the prior art can be effectively utilized, and the production cost is reduced. And the overall manufacturing cost is reduced.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor equipment, in particular to a ring part for dry etching equipment. Background Art

[0002] Etching is one of the core steps in semiconductor wafer manufacturing. Its main principle is to use chemical or physical methods to remove unnecessary materials attached to the wafer surface. It is divided into dry etching and wet etching, among which dry etching is dominant. Dry etching is to use plasma to etch the wafer. The plasma is sprayed from the top nozzle of the equipment to the wafer surface, and then pumped away by the pump at the bottom of the equipment. In order to ensure the uniformity of etching on the wafer surface and better etching effect, rings are usually added around the wafer. The rings interfere with the flow direction of the plasma, thereby producing a better etching effect. The structure of the ring is as follows: Figure 1 As shown, Figure 2 Its cross-sectional shape is shown, with the wafer located in the middle of the ring, and the plasma flowing downward from the grid (a plurality of through holes arranged along the circumference) on the bottom surface of the ring and eventually discharged from the chamber.

[0003] After the ring is in contact with plasma for a long time, the grid part is corroded more seriously, and the ring needs to be replaced regularly (the ring is a consumable material). However, the ring is generally an integrated structure made of polysilicon material, and the raw material cost is high, resulting in a high unit price of the ring. After replacement, it is directly scrapped, resulting in a certain degree of waste and high overall cost of the etching process. Observation of the scrapped ring found that the lower half is usually severely corroded, but the upper half is almost intact, which also causes a certain degree of material waste. Utility Model Content

[0004] The technical problem to be solved by the utility model is to provide a ring for dry etching equipment, which can realize replacement of only the lower ring part and utilization of scrapped rings, thereby saving overall costs.

[0005] In order to solve the above technical problems, the utility model provides a ring for dry etching equipment, comprising:

[0006] Upper ring part;

[0007] The lower ring portion is detachably mounted on the bottom of the upper ring portion, and the lower ring portion and the upper ring portion are conductively connected.

[0008] In the utility model, after the upper ring portion is connected to the lower ring portion, its entire specifications are at least the same as those of the one-piece molded ring in the prior art, including size specifications and electrical specifications, so as to meet the needs of the application scenario; it should also be noted that the scrapped ring in the prior art can also be cut. After cutting, the severely corroded lower half (equivalent to the lower ring portion in the utility model) is discarded, and the upper half (equivalent to the upper ring portion of the utility model) that is still intact and not corroded is retained. After being connected to the lower ring portion of the utility model, it can still be used, thereby realizing the utilization of scrapped rings and saving costs.

[0009] Specifically, the upper ring portion is connected to the lower ring portion by a fastener. It should be noted that since the upper ring portion, the lower ring portion and the one-piece ring used in the prior art are preferably made of polysilicon, the fastener is preferably not made of metal material, and preferably uses Peek material (polyetheretherketone material), PAI material (polyamideimide material) or PTFE material (polytetrafluoroethylene material), etc. The basis for selecting the fastener material is generally that it does not cause damage to the upper ring portion and the lower ring portion, nor does it affect the conductive properties of the two parts.

[0010] Specifically, the upper ring portion and the lower ring portion are in lateral contact with each other in the radial direction; and the fastener connects the upper ring portion and the lower ring portion in the axial direction or the radial direction.

[0011] Specifically, the upper ring portion and the lower ring portion are in step surface contact; and the fastener connects the upper ring portion and the lower ring portion in a radial direction or an axial direction.

[0012] In the above-mentioned specific method, since the ring part in the application scenario needs to have a certain conductivity, in order to meet the conductivity requirements of the upper ring part and the lower ring part after being connected, it is preferred that the two are connected in the form of surface contact (including a straight surface or a stepped surface or other forms of surface contact). The surface contact can increase the conductive area, so as not to affect the conductivity between the two, and meet the conductivity requirements of the application scenario after connection. It is not desired to be constrained by this. On the premise of meeting the conductivity requirements of the application scenario, the upper ring part and the lower ring part can also be in a point contact (such as multi-point contact) mode, as long as the environmental size specifications formed after the connection meet the needs of the application scenario. It should be noted that the straight surface contact in the utility model refers to the contact surface in the same plane, and after sectioning along any direction perpendicular to the plane, the contact surface is a straight line; the stepped surface contact in the utility model refers to the contact surface in different planes, for example, in two intersecting planes. At this time, after sectioning along the direction perpendicular to the intersection line of the two planes, the contact surface forms a stepped surface. Similarly, it can be a stepped surface or multiple stepped surfaces.

[0013] Specifically, the upper ring portion is connected to the lower ring portion by threads.

[0014] Specifically, an outer side wall of the upper ring portion is formed with an external thread, and an inner side wall of the lower ring portion is formed with an internal thread matching the external thread; or

[0015] An inner wall of the upper ring portion is formed with an internal thread, and an outer wall of the lower ring portion is formed with an external thread matching the internal thread.

[0016] In the above specific manner, the upper ring part and the lower ring part can be connected by threads without fasteners. It can be understood that the threaded connection is equivalent to achieving surface contact between the upper ring part and the lower ring part, and the conductivity between the two can be effectively guaranteed while ensuring the tight connection between the two. It is not desired to be constrained by this. After the upper ring part and the lower ring part are threadedly connected, fasteners can be added to further ensure the connection strength between the two.

[0017] Specifically, the upper ring portion is formed with a hanging groove, and the lower ring portion is formed with a hanging ear matching the hanging groove; the hanging ear cooperates with the hanging groove to realize the detachable connection between the upper ring portion and the lower ring portion. It can be understood that the cooperation between the hanging ear and the hanging groove can also realize surface contact, which can not only realize the connection between the two, but also ensure the conductivity between the two; if it is not desired to be constrained by this, after the upper ring portion and the lower ring portion are connected by the hanging ear and the hanging groove, fasteners can be added to further ensure the connection strength between the two.

[0018] Specifically, the upper ring portion and the lower ring portion are connected by conductive adhesive. Understandably, the conductive adhesive can also achieve surface contact between the two, effectively ensuring the conductivity between the two; if it is not desired to be constrained by this, after the upper ring portion and the lower ring portion are connected by conductive adhesive, fasteners can be added to further ensure the connection strength between the two.

[0019] Specifically, the upper ring portion and the lower ring portion are made of the same material.

[0020] Specifically, the upper ring portion and the lower ring portion are both made of polysilicon.

[0021] The utility model provides a ring for dry etching equipment. When the lower ring portion is severely corroded, the lower ring portion can be disassembled and replaced with a new one, which can effectively reduce the replacement frequency of the upper ring portion and save material costs to a great extent. In addition, the uncorroded portion of the one-piece ring that has been scrapped in the prior art can be effectively utilized, thereby reducing the overall manufacturing cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solution of the utility model, the following briefly introduces the drawings required for use in the utility model. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1 It is a schematic diagram of a ring member in the prior art;

[0024] Figure 2 is an axial cross-sectional view of a ring in the prior art;

[0025] Figure 3 It is a schematic diagram of an embodiment of a ring member of the utility model;

[0026] Figure 4 , Figure 6 , Figure 7 , Figure 8 It is a cross-sectional view of a fastener connection form of an embodiment of a ring member of the utility model, wherein the upper ring portion and the lower ring portion are in literal contact;

[0027] Figure 5 , Fig. 9 It is a cross-sectional view of a fastener connection form of a ring member embodiment of the utility model, wherein the upper ring portion and the lower ring portion are in step surface contact;

[0028] Fig.10 , Fig.11 It is a cross-sectional view of a threaded connection form of an embodiment of a ring of the utility model;

[0029] Fig.12 It is a cross-sectional view of the connection form of the hanging ear and the hanging groove of an embodiment of the ring of the utility model.

[0030] In the figure, 1-upper ring portion; 2-lower ring portion; 3-fastener; 4-straight surface contact; 5-step surface contact; 6-thread; 7-hanging groove; 8-hanging ear; 100-ring; 101-grid. DETAILED DESCRIPTION

[0031] The following will be combined with the accompanying drawings to clearly and completely describe the technical solutions in the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0032] Embodiment 1

[0033] refer to Figure 3 and Figure 4, shows a ring for dry etching equipment of the utility model, including an upper ring part and a lower ring part, which can be detachably installed on the bottom of the upper ring part; the upper ring part and the lower ring part are connected by fasteners; the upper ring part and the lower ring part form a radial surface contact; the fasteners connect the upper ring part and the lower ring part along the axial direction.

[0034] In this embodiment, after the upper ring portion and the lower ring portion are connected, the contact surface is a plane along the radial direction. In the interface along the axis, the contact surface forms a straight line, so in this embodiment, it is called a straight line contact; it is not desired to be constrained by this, and a straight line can also be as follows Figure 6-Figure 8 The fasteners are adapted to fix the upper ring and the lower ring in the axial or radial direction according to the specific shape of the surface. After fixation, the upper ring and the lower ring form a surface contact, and the conductive properties between the two are almost unaffected; it is understandable that the number of fasteners can be considered comprehensively according to the weight of the ring, and generally not less than 3.

[0035] During use of the ring of this embodiment, the corrosion rate of the lower ring part is higher than that of the upper ring part. Therefore, when the lower ring part can no longer be used, it only needs to be disassembled and scrapped, and then a new lower ring part is assembled to the upper ring part and continued to be used. After replacing the lower ring part several times, when the upper ring part can no longer be used due to corrosion, the entire ring can be scrapped. This can greatly reduce manufacturing costs and reduce the waste of consumables.

[0036] Embodiment 2

[0037] refer to Figure 5 and Fig. 9 The contact surface of the upper ring portion and the lower ring portion can be formed into a stepped surface contact, and the fasteners fasten the upper ring portion and the lower ring portion radially or axially according to the setting of the stepped surface. Similarly, the number of fasteners is generally not less than three, and the beneficial effects are the same as those of the first embodiment.

[0038] Embodiment 3

[0039] refer to Fig.10 and Fig.11 , the upper ring part and the lower ring part can also be connected by threads. Specifically, the outer wall of the upper ring part is formed with an outer thread, and the inner wall of the lower ring part is formed with an inner thread matching the outer thread; or the inner wall of the upper ring part is formed with an inner thread, and the outer wall of the lower ring part is formed with an outer thread matching the inner thread. It can be understood that the threaded connection can reduce the number of openings in the upper ring part and the lower ring part, and the surface contact effect of the threaded connection is also very good, and the influence on the conductive performance between the upper ring part and the lower ring part is also very small, which is convenient for replacement. Therefore, its beneficial effect is no less than that of the above-mentioned embodiment.

[0040] Embodiment 4

[0041] refer to Fig.12 , the upper ring part and the lower ring part can also be detachably connected by means of a hanging ear. For example, the upper ring part is formed with a hanging groove, and the lower ring part is formed with a hanging ear matching the hanging groove; the hanging ear cooperates with the hanging groove to realize the detachable connection between the upper ring part and the lower ring part. It is understandable that the hanging ear and the hanging groove can be evenly arranged along the circumference, and preferably, their number is not less than three. This connection method requires that the arc length between adjacent hanging grooves is greater than the arc length of the hanging ear so that the hanging ear can pass through the hanging grooves and then rotate the lower ring part to hang the hanging ear in the hanging groove. If it is not desired to be constrained by this, the lower ring part can be provided with a hanging groove, and the upper ring part can be formed with a hanging ear. The two are detachably connected by the cooperation of the hanging ear and the hanging groove. This can be achieved by the existing technology and will not be repeated here.

[0042] Embodiment 5

[0043] The upper ring portion and the lower ring portion can also be connected by gluing together with conductive adhesive. The conductive performance of the conductive adhesive is the same as that of the upper ring portion and the lower ring portion, or the conductive performance of the conductive adhesive is better than that of the upper ring portion and the lower ring portion to avoid affecting the conductive performance between the upper ring portion and the lower ring portion. It should be noted that, when gluing, there are no special requirements for the contact surface of the upper ring portion and the lower ring portion, and the contact surfaces in the aforementioned embodiments are all applicable to this embodiment.

[0044] It should be noted that in the above embodiments or combinations of embodiments, the principle is to save materials, that is, the smaller the volume of the lower ring portion, the better, but the lower ring portion must at least include an area with a high corrosion rate; in addition, the upper ring portion and the lower ring portion are preferably both made of polysilicon.

[0045] The above description is only a preferred embodiment of the present invention and is not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A ring for dry etching equipment, characterized in that: include: Upper ring part; The lower ring portion is detachably mounted on the bottom of the upper ring portion, and the lower ring portion and the upper ring portion are conductively connected.

2. The ring for dry etching equipment according to claim 1, characterized in that: The upper ring portion is connected to the lower ring portion via a fastener.

3. The ring for dry etching equipment according to claim 2, characterized in that: The upper ring portion and the lower ring portion are in radial lateral contact; The fastener connects the upper ring portion and the lower ring portion in the axial direction or the radial direction.

4. The ring for dry etching equipment according to claim 2, characterized in that: The upper ring portion and the lower ring portion are formed in step surface contact; The fastener connects the upper ring portion and the lower ring portion in a radial direction or an axial direction.

5. The ring for dry etching equipment according to claim 1, characterized in that: The upper ring portion is connected to the lower ring portion via threads.

6. The ring for dry etching equipment according to claim 5, characterized in that: The outer side wall of the upper ring portion is formed with an external thread, and the inner side wall of the lower ring portion is formed with an internal thread matching the external thread; or An inner wall of the upper ring portion is formed with an internal thread, and an outer wall of the lower ring portion is formed with an external thread matching the internal thread.

7. The ring for dry etching equipment according to claim 1, characterized in that: The upper ring portion is formed with a hanging groove, and the lower ring portion is formed with a hanging ear matching the hanging groove; The hanging ear cooperates with the hanging groove to realize the detachable connection between the upper ring part and the lower ring part.

8. The ring for dry etching equipment according to claim 1, characterized in that: The upper ring portion is connected to the lower ring portion through conductive adhesive.

9. The ring for dry etching equipment according to claim 1, characterized in that: The upper ring portion and the lower ring portion are made of the same material.

10. The ring for dry etching equipment according to claim 8, characterized in that: The upper ring portion and the lower ring portion are both made of polysilicon.

Images