Process door driving mechanism and heat treatment equipment

Abstract

The utility model provides a process door driving mechanism and heat treatment equipment, the process door driving mechanism comprises a supporting arm, a rotating arm, a connecting piece and a rigid rotation stopping part, the connecting piece is connected with one end of the supporting arm through a first rotating pair, one end of the rotating arm is fixedly connected with a process door, and the other end of the rotating arm is connected with the connecting piece through a second rotating pair; one of the first revolute pair and the second revolute pair is a horizontal revolute pair, the other revolute pair is a vertical revolute pair, and the rotating axes of the first revolute pair and the second revolute pair are perpendicular to the central axis of the process pipe; the rigid rotation stopping part is detachably connected with the supporting arm and the rotating arm; in the dismounting state, the connecting piece can rotate around the rotating axis of the first rotating pair relative to the supporting arm, and the rotating arm can rotate around the rotating axis of the second rotating pair relative to the connecting piece. Therefore, after the rigid rotation stopping part is detached and separated from the supporting arm and the rotating arm, the rotating arm is operated to rotate around the rotating axis of the horizontal rotating pair, and the process door is changed into a horizontal state, so that the process door can be conveniently maintained.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor heat treatment equipment, in particular to a process door driving mechanism and heat treatment equipment. Background Art

[0002] The diffusion process is an important process link in the production line of semiconductors and crystalline silicon solar cells. The diffusion process is usually implemented using heat treatment equipment. Among them, the sealing of the reaction chamber of the heat treatment equipment affects the process quality, so this puts forward higher requirements on the process gate of the heat treatment equipment.

[0003] In the prior art, the heat treatment equipment is provided with a support arm and a driving device, one end of the support arm is connected to the process door, and the other end is connected to the driving device in a transmission manner. The support arm is used to carry the process door, and the driving device drives the support arm to move, thereby driving the process door to open or close. Moreover, under the drive of the driving device, the support arm can carry the process door to rotate around a rotation axis relative to the process tube of the heat treatment equipment, and the rotation axis is perpendicular to the length direction and horizontal plane of the process tube. However, when maintaining the process door of the heat treatment equipment, it is inconvenient to operate. Utility Model Content

[0004] The utility model aims to solve at least one of the technical problems existing in the prior art, and proposes a process door driving mechanism and heat treatment equipment.

[0005] In the first aspect, the utility model provides a process door driving mechanism applied to heat treatment equipment, the heat treatment equipment comprises a process tube and a process door, the process tube extends in a horizontal direction, the process door can move relative to the process tube to open and close the opening of the process tube, the process door driving mechanism comprises: a support arm, a rotating arm, a connecting piece and a rigid anti-rotation part, one end of the rotating arm is used to be fixedly connected to the process door; the connecting piece is connected to one end of the support arm through a first rotating pair, and is connected to the other end of the rotating arm through a second rotating pair; one of the first rotating pair and the second rotating pair is a horizontal rotating pair, and the other is a vertical rotating pair, and the extension direction of the rotation axis of the first rotating pair and the second rotating pair is perpendicular to the length direction of the process tube; the rigid anti-rotation part is detachably connected to the support arm and the rotating arm; the rigid anti-rotation part has a connected state and a disassembled state; in the connected state, the support arm is fixedly connected to the rotating arm; in the disassembled state, the connecting piece can rotate relative to the support arm around the rotation axis of the first rotating pair, and the rotating arm can rotate relative to the connecting piece around the rotation axis of the second rotating pair.

[0006] In an implementation mode of the first aspect of the utility model, the process door driving mechanism further includes a guide member and a matching member, the guide member is provided with an arc groove, and the center of the arc groove is located on the rotation axis of the horizontal rotation pair;

[0007] The first rotating pair is a horizontal rotating pair, the guide member is fixedly connected to the support arm, the matching member is connected to the connecting member and is inserted into the arc groove; or the second rotating pair is a horizontal rotating pair, the guide member is fixedly connected to the connecting member, the matching member is connected to the rotating arm and is inserted into the arc groove;

[0008] When the rigid anti-rotation part is in the disassembled state, the matching part can move along the arc groove.

[0009] In an implementation method of the first aspect of the utility model, the arc angle of the arc groove is 90 degrees; when the matching piece abuts against the first end of the arc groove, the process door is in an upright state; when the matching piece abuts against the second end of the arc groove, the process door is in a horizontal state.

[0010] In an implementation method of the first aspect of the utility model, the horizontal rotating pair includes an assembled pin shaft and an axial hole, the center axis of the pin shaft and the center line of the axial hole both extend in the horizontal direction and are perpendicular to the length direction of the process pipe; the connecting piece includes the pin shaft, or the axial hole is provided in the connecting piece.

[0011] In an implementation method of the first aspect of the utility model, the process door driving mechanism also includes a first sleeve, the central axis of the first sleeve extends in a horizontal direction and is perpendicular to the length direction of the process tube, the first sleeve is sleeved between the pin shaft and the hole wall of the shaft hole, and the first sleeve and the pin shaft can rotate relative to each other.

[0012] In an implementation method of the first aspect of the utility model, the connecting member is provided with a first connecting portion, the supporting arm or the rotating arm is provided with a second connecting portion, the first connecting portion and the second connecting portion are hingedly connected through a hinge axis to form a vertical rotation pair, and the hinge axis extends in a vertical direction.

[0013] In an implementable manner of the first aspect of the utility model, a first through hole is provided on the first connecting part, and a second through hole is provided on the second connecting part, and the center line of the first through hole coincides with the center line of the second through hole; the hinge shaft is passed through the first through hole and the second through hole, and a first limiting part is provided on the outer peripheral surface of the hinge shaft, and the process door driving mechanism also includes a second limiting part provided on the first connecting part, the second connecting part or the rigid stop part, and the first limiting part cooperates with the second limiting part to limit the movement of the hinge shaft in the vertical direction.

[0014] In an implementation of the first aspect of the utility model, the hinge shaft includes a connecting shaft section and a transfer shaft section that are coaxially arranged, the connecting shaft section is installed in the first through hole, the first limiting portion is a limiting groove formed on the outer peripheral surface of the connecting shaft section, and the transfer shaft section is installed in the second through hole;

[0015] The second limiting portion is arranged on the first connecting portion, and one end of the second limiting portion extends into the limiting groove.

[0016] In an implementation method of the first aspect of the utility model, the process door drive mechanism also includes a second sleeve, the center axis of the second sleeve extends in the vertical direction, the second sleeve is sleeved between the adapter shaft section and the hole wall of the second through hole, and the second sleeve and the hinge shaft can rotate relative to each other.

[0017] In an implementation method of the first aspect of the utility model, the rigid anti-rotation part includes a fixing plate and a fastener, and the fixing plate is detachably connected to the support arm, the rotating arm and the connecting piece through the fastener; in the connected state, the fixing plate is located on the same side of the support arm, the rotating arm and the connecting piece.

[0018] In a second aspect, the utility model provides a heat treatment equipment, including: a process tube, a process door and any process door driving mechanism provided in the first aspect of the utility model, the process tube extends in a horizontal direction; the process door is used to open and close the opening of the process tube.

[0019] The utility model has the following beneficial effects:

[0020] The utility model provides a process door driving mechanism and heat treatment equipment, wherein when the rigid anti-rotation part is in the connected state, the support arm and the rotating arm are fixedly connected to form a long arm structure, and when the rigid anti-rotation part is in the disassembled state, under the action of external force, the rotating arm can drive the process door to rotate relative to the support arm around the rotation axis of the horizontal rotating pair, so that the process door can be switched to a horizontal state. Therefore, the operator can conveniently maintain the process door by switching the process door to a horizontal state. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A schematic diagram of an application scenario of a heat treatment device provided in one embodiment of the present application;

[0022] Figure 2 A schematic diagram of the three-dimensional structure of a process door driving mechanism provided in one embodiment of the present application;

[0023] Figure 3 An exploded schematic diagram of a process door driving mechanism provided in one embodiment of the present application;

[0024] Figure 4 for Figure 2 The schematic diagram of the working process of the process door driving mechanism shown;

[0025] Figure 5 A partial three-dimensional schematic diagram of a process door driving mechanism provided in one embodiment of the present application;

[0026] Figure 6 A partial side view of a process door driving mechanism provided in one embodiment of the present application;

[0027] FIG. 7(A), FIG. 7(B) and FIG. 7(C) are respectively a front view, a left view and a top view of the connection between the rotating arm and the supporting arm in the process door driving mechanism provided in one embodiment of the present application;

[0028] Figure 8 for Figure 2 A partial cross-sectional schematic diagram of the process door driving mechanism is shown.

[0029] Description of reference numerals:

[0030] 100-Heat treatment equipment;

[0031] 10- Chassis;

[0032] 20-craft door; 21-inner door; 22-outer door;

[0033] 30-process door driving mechanism; 31-driving module; 311-first moving module; 312-second moving module; 32-support arm; 321-second connecting part; 322-second through hole; 323-hinge shaft; 324-limiting groove; 33-connecting piece; 331-first connecting part; 332-first through hole; 333-pin shaft; 334-base; 34-rotating arm; 341-shaft hole; 342-matching piece; 35-first sleeve;

[0034] 351-first annular edge; 36-second sleeve; 37-pressing plate; 38-fixing plate; 381-fastener;

[0035] 39-guide member; 391-arc groove; 392-fastening screw;

[0036] 40-Process pipe. DETAILED DESCRIPTION

[0037] In order to enable those skilled in the art to better understand the technical solution of the present invention, the process door driving mechanism and the heat treatment equipment provided by the present invention are described in detail below in conjunction with the accompanying drawings.

[0038] Figure 1 The following is an example of an application scenario of a heat treatment device provided by an embodiment of the present application. Figure 1As shown, an embodiment of the present application provides a heat treatment device 100, which includes a chassis 10, a process tube 40, a process door 20 and a process door driving mechanism. Among them, the process tube 40 is arranged in the chassis 10, and the process tube 40 extends in the horizontal direction, that is, the heat treatment device 100 is a horizontal heat treatment device. The process door 20 can be used to open and close the opening of the process tube 40. When the process door 20 closes the opening, the process tube 40 and the process door 20 are enclosed together to form a reaction chamber. The process types that can be implemented in the reaction chamber may be diffusion, annealing, Plasma Enhanced Chemical Vapor Deposition (PECVD), low pressure chemical vapor deposition (LPCVD), etc.

[0039] Exemplarily, the process door 20 includes an outer door 22 and an inner door 21 that are fixedly connected. When the process door 20 closes the opening, the inner door 21 extends into the process tube 40 and fits with the process tube 40, and the outer door 22 is outside the process tube 40 and fits with the open end surface of the process tube 40 to block the opening. A sealing ring may be mounted on the outer side of the inner door 21 to block the gap between the inner door 21 and the process tube 40. As in the heat treatment equipment 100 disclosed herein, the inner door 21 may be made of quartz material, and the outer door 22 may be made of aluminum or aluminum alloy material. For example, a groove may be provided on one side of the outer door 22 facing the inner door 21, and an internal thread is formed on the circumferential groove wall of the groove, and an external thread matching the internal thread is formed on the outer surface of the inner door 21, so that the inner door 21 is screwed and connected to the outer door 22. Of course, in other feasible embodiments, the connection between the outer door 22 and the inner door 21 may be achieved by clamping, welding, bonding or other connection methods.

[0040] The process door driving mechanism is used to drive the process door 20 to move. Figure 2 This is a schematic diagram of the three-dimensional structure of a process door driving mechanism provided in an embodiment of the present application. Figure 3 This is a schematic diagram of an exploded view of a process door drive mechanism provided in one embodiment of the present application. Figures 1 to 3 The process door driving mechanism provided in the embodiment of the present application specifically includes a driving module 31, a support arm 32, a rotating arm 34, a connecting member 33 and a rigid anti-rotation portion. One end of the support arm 32 is connected to the connecting member 33 through a first rotating pair, and the other end is transmission-connected to the driving module 31. The connecting member 33 is also connected to one end of the rotating arm 34 through a second rotating pair, and the other end of the rotating arm 34 is fixedly connected to the process door 20.

[0041] according to Figure 2 and Figure 3In the example shown, the rotation axis of the first rotation pair extends in the vertical direction, the rotation axis of the second rotation pair extends in the horizontal direction, and the rotation axis of the first rotation pair and the rotation axis of the second rotation pair are perpendicular to the central axis of the process tube 40. In other words, the first rotation pair is a vertical rotation pair, and the second rotation pair is a horizontal rotation pair. For the sake of clear understanding, in the various drawings of the embodiments of the present application, the X-axis, the Y-axis, and the Z-axis respectively represent the length direction of the process tube 40, the extension direction of the rotation axis of the horizontal rotation pair (also called the horizontal rotation axis), and the extension direction of the rotation axis of the vertical rotation pair (also called the vertical rotation axis).

[0042] In other embodiments not shown in the drawings of the present application, the rotation axis of the first rotation pair may extend in the horizontal direction, the rotation axis of the second rotation pair may extend in the vertical direction, and the rotation axis of the first rotation pair and the rotation axis of the second rotation pair are perpendicular to the central axis of the process tube 40. In other words, the first rotation pair may be a horizontal rotation pair, and the second rotation pair may be a vertical rotation pair.

[0043] In general, one of the first rotation pair and the second rotation pair is a horizontal rotation pair, and the other is a vertical rotation pair. The extension direction Y of the rotation axis of the horizontal rotation pair and the extension direction Z of the rotation axis of the vertical rotation pair are both perpendicular to the length direction X of the process tube 40 (which is also the extension direction of the central axis of the process tube 40).

[0044] The driving module 31 includes a first moving module 311 and a second moving module 312. The first moving module 311 is used to drive the support arm 32 to reciprocate along the length direction X of the process tube 40, and the second moving module 312 is used to drive the support arm 32 to reciprocate along the extension direction Y of the rotation axis of the horizontal rotation pair. The first moving module 311 and the second moving module 312 can be any one of linear actuators such as a cylinder, an electric push rod, and a hydraulic cylinder. In a specific example, the first moving module 311 and the second moving module 312 can both be rodless cylinders, and the second moving module 312 is connected to the other end of the support arm 32, and the first moving module 311 can drive the second moving module 312 to move.

[0045] It should be understood that in the embodiment of the present application, the extension direction of the support arm 32 and the rotating arm 34 is non-restrictive. Figure 2 As shown, the support arm 32 and the rotating arm 34 extend in the Y direction, and the extension direction of the support arm 32 and the rotating arm 34 is perpendicular to the length direction X of the process tube 40. In an example not shown in the figure, the extension direction of the support arm 32 and the rotating arm 34 can also extend in the X direction, that is, parallel to the length direction of the process tube 40.

[0046] The rigid anti-rotation part is detachably connected to the support arm 32 and the rotating arm 34. The rigid anti-rotation part has a connected state and a disassembled state. When the rigid anti-rotation part is in the connected state, the support arm 32 is fixedly connected to the rotating arm 34 through the rigid anti-rotation part. At this time, the rotational movement of the first rotating pair and the second rotating pair is restricted, and the rotating arm 34 cannot rotate. When the rigid anti-rotation part is in the disassembled state, the connecting member 33 can rotate around the rotation axis of the first rotating pair relative to the support arm 32 under the action of external force, and the rotating arm 34 can rotate around the rotation axis of the second rotating pair relative to the connecting member 33 under the action of external force.

[0047] Figure 4 for Figure 2 The working process diagram of the process gate drive mechanism is shown in FIG. Figure 2 and Figure 3 Taking the structure shown as an example, when the process door 20 needs maintenance (for example, the sealing ring of the process door 20 needs to be replaced, the process door 20 needs to be replaced or other situations), an exemplary working process of the process door driving mechanism of this embodiment specifically includes the following steps.

[0048] In step a, the driving module 31 drives the support arm 32 to move along the X direction, thereby driving the process door 20 to move along the X direction away from the process tube 40 until the inner door 21 moves out of the process tube 40 .

[0049] Step b, disassembling and separating the rigid anti-rotation part from the support arm 32 and the rotating arm 34, so that the rigid anti-rotation part reaches a disassembled state.

[0050] Step c, applying external force to the rotating arm 34, so that the rotating arm 34 rotates relative to the connecting member 33 around the rotating axis O1 of the horizontal rotating pair, thereby driving the process door 20 to flip horizontally around the rotating axis O1 of the horizontal rotating pair until the process door 20 is Figure 4 The vertical position shown in (A) is switched to Figure 4 The horizontal state shown in (B) is shown, and the inner door 21 is located above the outer door 22.

[0051] Step d, applying external force to the rotating arm 34, so that the connecting member 33 rotates relative to the support arm 32 around the rotation axis O2 of the vertical rotating pair, and the rotating arm 34 rotates around the rotation axis O2 of the vertical rotating pair, and one end of the rotating arm 34 drives the process door 20 in a horizontal state to gradually move away from the process pipe 40, until the rotating arm 34 rotates 90° to be perpendicular to the support arm 32, as shown in FIG. Figure 4 As shown in (C); then the process door 20 is maintained (eg, the process door 20 is replaced or the sealing ring is replaced).

[0052] In another exemplary working process of the process door driving mechanism of this embodiment, the order of step c and step d can be interchanged, that is, under the premise that the process door 20 will not interfere with the process tube 40, the rotating arm 34 is first rotated around the rotation axis O2 of the vertical rotating pair to make the process door 20 in the upright state away from the process tube 40, and then the rotating arm 34 is rotated around the rotation axis O1 of the horizontal rotating pair to switch the process door 20 from the upright state to the horizontal state.

[0053] It can be understood that, in the process door driving mechanism of this embodiment, when the rigid anti-rotation part is in the connected state, the support arm 32 and the rotating arm 34 are fixedly connected to form a long arm structure, and when the rigid anti-rotation part is in the disassembled state, under the action of external force, the rotating arm 34 can drive the process door 20 to rotate relative to the support arm 32 around the rotation axis of the horizontal rotation pair (i.e., the horizontal rotation axis O1), so that the process door 20 can be switched to a horizontal state. Therefore, the operator can conveniently maintain the process door 20 by switching the process door 20 to a horizontal state. It should also be pointed out that in addition to being able to rotate around the horizontal rotation axis, the rotating arm 34 can also rotate relative to the support arm 32 around the rotation axis of the vertical rotation pair (i.e., the vertical rotation axis O2). In this way, when the process door 20 needs to be maintained, before or after the process door 20 is flipped to a horizontal state, the rotating arm 34 can be operated to rotate around the vertical rotation axis, thereby driving the process door 20 away from the process tube 40. This not only avoids interference between the process door 20 and the process tube 40 during maintenance, but also because the process door 20 is away from the process tube 40, the operator has a large operating space during maintenance of the process door 20, thereby further improving the maintenance convenience of the process door 20.

[0054] Moreover, with such a design, on the one hand, the long arm structure formed by the fixed connection between the support arm 32 and the rotating arm 34 can provide sufficient support for the process door 20, and on the other hand, compared with the long arm structure directly driving the process door 20 to rotate around the vertical rotation axis, the rotating arm 34 in this embodiment drives the process door 20 to rotate around the vertical rotation axis relative to the support arm 32, and the rotation radius of the rotating arm 34 is smaller than the rotation radius of the long arm structure, so when the rotating arm 34 rotates around the vertical rotation axis, the rotating arm 34 and the process door 20 occupy a small space. In other words, the process door driving mechanism of this embodiment can meet the support requirements of the process door 20 while occupying a small space.

[0055] In addition, since the driving module 31 can drive the support arm 32 to move along the Y direction, the length of the support arm 32 can be further shortened, and the displacement of the support arm 32 in the Y direction can be used to compensate for the shortened length of the support arm 32, which can save the material of the support arm 32 and is conducive to reducing material costs.

[0056] In some embodiments, Figure 3As shown, the rigid anti-rotation part can also be detachably connected to the connecting member 33. In this way, firstly, the connection reliability of the rigid anti-rotation part in the connected state can be improved, and secondly, the anti-rotation effect on the first rotating pair and the second rotating pair can be strengthened, so that the long arm structure formed by the fixed connection between the support arm 32 and the rotating arm 34 can stably support the process door 20.

[0057] Figure 5 This is a partial three-dimensional schematic diagram of a process door driving mechanism provided in an embodiment of the present application. For example, please refer to Figure 5 The rigid anti-rotation part may include a fixing plate 38 and a fastener 381, and the fixing plate 38 is detachably connected to the support arm 32, the rotating arm 34 and the connecting member 33 through the fastener 381. When the rigid anti-rotation part is in a connected state, the fixing plate 38 is located on the same side of the support arm 32, the rotating arm 34 and the connecting member 33.

[0058] Figure 6 FIG7(A), FIG7(B), and FIG7(C) are respectively a front view, a left view, and a top view of the connection between the rotating arm and the support arm in the process door driving mechanism provided in one embodiment of the present application. As an optional embodiment, please refer to Figure 3 , Figure 5 , Figure 6 7(C), the process door driving mechanism 30 further includes a guide member 39 and a matching member 342. The guide member 39 is provided with an arc groove 391, and the center of the arc groove 391 is located on the horizontal rotation axis (ie, O1).

[0059] according to Figure 3 In the example shown, when the second rotation pair is a horizontal rotation pair, the guide member 39 is fixedly connected to the connecting member 33, and the matching member 342 is connected to the rotating arm 34 and is inserted into the arc groove 391. When the rigid anti-rotation part is in the disassembled state, the matching member 342 matches with the arc groove 391 and can move along the arc groove 391. In this embodiment, when the process door 20 needs maintenance, the operator disassembles and separates the rigid anti-rotation part from the support arm 32 and the rotating arm 34, and then applies external force to the rotating arm 34, so that the rotating arm 34 drives the process door 20 to flip horizontally around the rotation axis O1 of the horizontal rotation pair, and the matching member 342 moves along the arc groove 391 during this process.

[0060] It is easy to understand that when the first rotation pair is a horizontal rotation pair, the guide member 39 is fixedly connected to the support arm 32, and the matching member 342 is connected to the connecting member 33 and is inserted into the arc groove 391. When the rigid anti-rotation part is in the disassembled state, the matching member 342 matches with the arc groove 391 and can move along the arc groove 391. In this embodiment, when the process door 20 needs maintenance, the operator disassembles and separates the rigid anti-rotation part from the support arm 32 and the rotating arm 34, and then applies external force to the rotating arm 34, so that the connecting member 33 is horizontally flipped around the rotation axis of the horizontal rotation pair, and the matching member 342 moves along the arc groove 391 during this process.

[0061] It can be seen that the present embodiment adopts this design, and the matching relationship between the matching piece 342 and the arc groove 391 can play a guiding role to guide the rotating arm 34 to rotate around the horizontal rotation axis O1, thereby ensuring that the process door 20 can be flipped horizontally.

[0062] Taking the second rotation pair as a horizontal rotation pair as a representative example, the matching member 342 can be a protruding block protruding from the rotating arm 34, or can be a Figure 6 The screw shown is screwed to the rotating arm 34.

[0063] The guide member 39 mentioned herein may specifically be Figure 3 The arc plate shown can also be an annular structure or a block structure, and the guide member 39 has an arc surface. Taking the second rotation pair as a horizontal rotation pair as an example, the connecting member 33 also includes a base 334, the base 334 has at least an outer circumferential surface, the pin 333 is protrudingly arranged on the base 334, the guide member 39 is connected to the base 334, and the arc surface of the guide member 39 matches the outer circumferential surface of the base 334. The above-mentioned guide member 39 and the base 334 can be connected, for example, by a fastening screw 392, and can also be connected, for example, by a clamping technology, an adhesive technology or a welding technology. When the guide member 39 is an annular structure, the inner circumferential surface of the guide member 39 can be provided with an internal thread, and the outer circumferential surface of the base 334 can be provided with an external thread matching the internal thread, so that the guide member 39 is screwed and connected to the base 334.

[0064] Please continue reading Figure 3 , Figure 5, further, the arc groove 391 can be specifically a quarter circle, in other words, the arc angle of the arc groove 391 is 90 degrees. Moreover, when the matching piece 342 abuts against the first end of the arc groove 391, the process door 20 is in an upright state; when the matching piece 342 abuts against the second end of the arc groove 391, the process door 20 is in a horizontal state and the inner door 21 is located above the outer door 22. In this embodiment, when the process door 20 needs to be maintained, the operator can apply an external force to the rotating arm 34, so that the rotating arm 34 rotates around the horizontal rotation axis O1, and the matching piece 342 moves along the arc groove 391 from the first end to the second end, and the rotating arm 34 drives the process door 20 to flip horizontally at the same time, until the matching piece 342 abuts against the second end of the arc groove 391, and the process door 20 reaches a horizontal state. With this design, the matching relationship between the arc groove 391 and the matching piece 342 can not only play a guiding role, but also limit the rotation angle of the rotating arm 34 and the process door 20 around the horizontal rotation axis O1. When the arc groove 391 switches from the first end to the second end, the rotation angle of the rotating arm 34 around the horizontal rotation axis O1 is exactly 90°, so that the process door 20 reaches a horizontal state. It can be seen that the operator can simply and conveniently switch the process door 20 from the upright state to the horizontal state.

[0065] Horizontal rotation pair

[0066] In the process door driving mechanism 30 disclosed herein, the horizontal rotation pair may include a pin shaft 333 and a shaft hole 341 that are assembled and matched, and the center axis of the pin shaft 333 and the center line of the shaft hole 341 both extend in the horizontal direction and are perpendicular to the length direction X of the process tube 40. In other words, the center axis of the pin shaft 333 and the center line of the shaft hole 341 extend in the Y direction.

[0067] Figure 8 for Figure 2 FIG. 1 is a partial cross-sectional diagram of the process door driving mechanism 30 shown in FIG. 1 . In the embodiment where the second rotation pair is a horizontal rotation pair, please refer to FIG. Figure 2 , Figure 3 and Figure 8 , the connecting member 33 includes a pin 333, and the other end of the rotating arm 34 is provided with a shaft hole 341 that matches the pin 333. Alternatively, in other examples, the pin 333 can also be replaced by a protruding arrangement at the other end of the rotating arm 34, and the shaft hole 341 can be replaced by being formed on the connecting member 33. In short, when the second rotating pair is a horizontal rotating pair, one of the pin 333 and the shaft hole 341 constituting the horizontal rotating pair is provided on the rotating arm 34, and the other is provided on the connecting member 33.

[0068] Similarly, in the embodiment where the first rotation pair is a horizontal rotation pair, one of the pin shaft 333 and the shaft hole 341 constituting the horizontal rotation pair is provided on the support arm 32 , and the other is provided on the connecting member 33 .

[0069] In some alternative embodiments, please continue to refer to Figure 3 and Figure 8 The process door driving mechanism 30 further includes a first sleeve 35, the central axis of which extends in the horizontal direction and is perpendicular to the length direction X of the process tube 40, that is, the central axis of the first sleeve 35 extends in the Y direction. The first sleeve 35 is sleeved between the pin 333 and the hole wall of the shaft hole 341, and the first sleeve 35 and the pin 333 can rotate relative to each other. The first sleeve 35 is provided to reduce the friction force of the relative rotation between the first sleeve 35 and the pin 333, so as to ensure the rotation accuracy of the horizontal rotating pair.

[0070] As a further optional embodiment, one end of the first sleeve 35 along the extension direction of its own central axis can protrude outward along its radial direction to form a first annular edge 351. When the second revolving pair is a horizontal revolving pair, and the shaft hole 341 is formed on the rotating arm 34, the first sleeve 35 can be specifically inserted into the shaft hole 341, and the first annular edge 351 is outside the shaft hole 341 and fits with the rotating arm 34, and the first annular edge 351 is clamped between the rotating arm 34 and the connecting member 33. The first annular edge 351 is clamped by the rotating arm 34 and the connecting member 33 to prevent the first sleeve 35 from moving along the extension direction of its own central axis, and ensure that the first sleeve 35 can be reliably installed in the shaft hole 341 to reduce friction. Alternatively, the first annular edge 351 can also be fixedly connected to the rotating arm 34, and the connection relationship between the first annular edge 351 and the rotating arm 34 is utilized to ensure that the first sleeve 35 is reliably installed in the shaft hole 341.

[0071] Vertical rotation pair

[0072] In the process door driving mechanism 30 disclosed in this article, a hinge connection technology can be specifically used to realize the vertical rotation pair. In the embodiment where the first rotation pair is a vertical rotation pair, please continue to refer to Figure 2 and Figure 3 The connecting member 33 is provided with a first connecting portion 331, and a first through hole 332 is provided on the first connecting portion 331. The supporting arm 32 is provided with a second connecting portion 321, and a second through hole 322 is provided on the second connecting portion 321. The center line of the first through hole 332 and the center line of the second through hole 322 both extend along the vertical direction Z and the two coincide. The process door driving mechanism 30 also includes a hinge shaft 323 extending along the vertical direction Z, and the hinge shaft 323 is penetrated in the first through hole 332 and the second through hole 322. In this way, the first connecting portion 331 and the second connecting portion 321 are hingedly connected through the hinge shaft 323. When the process door 20 needs to be maintained, an external force is applied to the rotating arm 34, so that the hinge shaft 323 rotates relative to the supporting arm 32 around the vertical rotation axis O2, thereby driving the connecting member 33 and the rotating arm 34 connected to the connecting member 33 to rotate around the vertical rotation axis O2.

[0073] Among them, the hinge shaft 323 includes a connecting shaft section and a transfer shaft section which are coaxially arranged. The connecting shaft section cooperates with the first through hole 332 so that the connecting shaft section is fixedly connected to the first connecting part 331. The transfer shaft section is inserted into the second through hole 322 and can rotate relative to the second through hole 322.

[0074] In some optional embodiments, the process door driving mechanism 30 further includes a second sleeve 36, the central axis of the second sleeve 36 extends along the vertical direction Z, the second sleeve 36 is sleeved between the adapter shaft section and the second through hole 322, and the second sleeve 36 and the adapter shaft section can rotate relative to each other. The second sleeve 36 is provided to reduce the friction force of the relative rotation between the second sleeve 36 and the hinge shaft 323, so as to ensure the rotation accuracy of the vertical rotation pair.

[0075] One end of the second sleeve 36 along the extension direction of its own central axis can protrude outward along its radial direction to form a second annular edge. When the hinge shaft 323 is matched with the first through hole 332 and the second through hole 322, the second annular edge is outside the second through hole 322 and fits with the second connecting portion 321 of the support arm 32. In order to prevent the second sleeve 36 from falling out of the second through hole 322, in a possible implementation, as Figure 3 As shown, the process door driving mechanism 30 also includes a pressing plate 37, the pressing plate 37 is fixedly connected to the second connecting portion 321, and the second annular edge is clamped between the pressing plate 37 and the second connecting portion 321. The pressing plate 37 can be annular, and the central axis of the pressing plate 37 coincides with the central line of the second through hole 322. In another possible implementation, the second annular edge is fixedly connected to the second connecting portion 321, and the connection relationship between the second annular edge and the support arm 32 is utilized to enable the second sleeve 36 to be reliably installed in the second through hole 322.

[0076] In an optional example of the present application, a first limiting portion is provided on the outer peripheral surface of the hinge shaft 323, and the process door driving mechanism 30 also includes a second limiting portion. The first limiting portion cooperates with the second limiting portion to limit the movement of the hinge shaft 323 along the vertical direction Z, thereby improving the installation reliability of the hinge shaft 323.

[0077] It is understandable that, under the premise of no conflict, the first limiting portion can be a groove provided on the hinge shaft 323 , or can be a protrusion provided on the hinge shaft 323 .

[0078] For example, Figure 3As shown, the first limiting portion is a limiting groove 324 formed on the outer peripheral surface of the connecting shaft segment. In this example, a through hole is also provided on the first connecting portion 331, the center line of which extends in the horizontal direction, and the through hole is connected to the first through hole 332. The second limiting portion passes through the through hole, and one end of the second limiting portion extends into the limiting groove 324 to limit the movement of the hinge shaft 323 in the vertical direction Z, thereby improving the installation reliability of the hinge shaft 323. The second limiting portion can be, for example, a screw, a screw rod or a pin.

[0079] For another example, the first limiting portion may be replaced by a limiting groove formed on the outer circumferential surface of the adapter shaft segment, and correspondingly, the second limiting portion may pass through the through hole on the second connecting portion 321 to extend into the limiting groove.

[0080] For another example, a partial shaft section of the hinge shaft 323 may extend out of the first through hole 332 and the second through hole 322, the first limiting portion may be arranged on the shaft section extending out of the first through hole 332 and the second through hole 322, and the second limiting portion may be connected to the fixing plate 38 of the rigid stop portion and cooperate with the first limiting portion.

[0081] In some embodiments of this application, please continue to refer to Figure 3 The support arm 32 is provided with two second connection parts 321, and the two second connection parts 321 are arranged at intervals along the vertical direction Z. Correspondingly, the hinge shaft 323 is provided with two transfer shaft sections, and the connection shaft section is located between the two transfer shaft sections. On the basis of this embodiment, when the process door driving mechanism 30 is further provided with a second shaft sleeve 36 and a pressing plate 37, two second shaft sleeves 36 and two pressing plates 37 are provided accordingly.

[0082] According to the above description, those skilled in the art can easily understand the technical solution of disposing the second connection portion 321 on the rotating arm 34 when the second rotating pair is a vertical rotating pair, and this embodiment will not be repeated here.

[0083] It is understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A process door driving mechanism, applied to heat treatment equipment, the heat treatment equipment comprising a process tube and a process door, the process tube extending in a horizontal direction, the process door used to open and close the opening of the process tube, characterized in that: The process door driving mechanism comprises: Support arm; A rotating arm, one end of which is used for fixed connection with the process door; a connecting member, connected to one end of the support arm through a first rotating pair, and connected to the other end of the rotating arm through a second rotating pair; one of the first rotating pair and the second rotating pair is a horizontal rotating pair, and the other is a vertical rotating pair, and the extension direction of the rotating axes of the first rotating pair and the second rotating pair is perpendicular to the length direction of the process pipe; and A rigid anti-rotation portion is detachably connected to the support arm and the rotating arm; the rigid anti-rotation portion has a connected state and a disassembled state; in the connected state, the support arm is fixedly connected to the rotating arm; in the disassembled state, the connecting member can rotate relative to the support arm around the rotation axis of the first rotating pair, and the rotating arm can rotate relative to the connecting member around the rotation axis of the second rotating pair.

2. The process door driving mechanism according to claim 1, characterized in that: The process door driving mechanism further comprises a guide member and a matching member, wherein the guide member is provided with an arc groove, and the center of the arc groove is located on the rotation axis of the horizontal rotation pair; The first rotating pair is a horizontal rotating pair, the guide member is fixedly connected to the support arm, and the matching member is connected to the connecting member and is inserted into the arc groove; Alternatively, the second rotating pair is a horizontal rotating pair, the guide member is fixedly connected to the connecting member, and the matching member is connected to the rotating arm and is inserted into the arc groove; When the rigid anti-rotation portion is in a disassembled state, the matching piece can move along the arc-shaped groove.

3. The process door driving mechanism according to claim 2, characterized in that: The arc angle of the arc groove is 90 degrees; When the matching piece abuts against the first end of the arc-shaped groove, the process door is in an upright state; when the matching piece abuts against the second end of the arc-shaped groove, the process door is in a horizontal state.

4. The process door driving mechanism according to claim 1, characterized in that: The horizontal rotating pair comprises a pin shaft and an axial hole which are assembled and matched, and the center axis of the pin shaft and the center line of the axial hole both extend in the horizontal direction and are perpendicular to the length direction of the process pipe; The connecting member includes the pin shaft, or the shaft hole is arranged in the connecting member.

5. The process door driving mechanism according to claim 4, characterized in that: It also includes a first sleeve, the center axis of which extends in a horizontal direction and is perpendicular to the length direction of the process tube. The first sleeve is sleeved between the pin shaft and the hole wall of the shaft hole, and the first sleeve and the pin shaft can rotate relative to each other.

6. The process door driving mechanism according to claim 1, characterized in that: The connecting member is provided with a first connecting portion, the supporting arm or the rotating arm is provided with a second connecting portion, the first connecting portion and the second connecting portion are hingedly connected via a hinge shaft to form the vertical rotation pair, and the hinge shaft extends in a vertical direction.

7. The process door driving mechanism according to claim 6, characterized in that: A first through hole is provided on the first connecting portion, a second through hole is provided on the second connecting portion, and a center line of the first through hole coincides with a center line of the second through hole; The hinge shaft is passed through the first through hole and the second through hole, and a first limiting portion is provided on the outer peripheral surface of the hinge shaft. The process door driving mechanism also includes a second limiting portion provided on the first connecting portion, the second connecting portion or the rigid anti-rotation portion, and the first limiting portion cooperates with the second limiting portion to limit the movement of the hinge shaft in the vertical direction.

8. The process door driving mechanism according to claim 7, characterized in that: The hinge shaft comprises a connecting shaft section and a transfer shaft section which are coaxially arranged, the connecting shaft section is installed in the first through hole, the first limiting portion is a limiting groove formed on the outer peripheral surface of the connecting shaft section, and the transfer shaft section is installed in the second through hole; The second limiting portion is arranged on the first connecting portion, and one end of the second limiting portion extends into the limiting groove.

9. The process door driving mechanism according to claim 8, characterized in that: It also includes a second sleeve, the center axis of which extends in the vertical direction, the second sleeve is sleeved between the adapter shaft section and the hole wall of the second through hole, and the second sleeve and the hinge shaft are relatively rotatable.

10. The process door driving mechanism according to claim 1, characterized in that: The rigid anti-rotation part includes a fixing plate and a fastener, and the fixing plate is detachably connected to the support arm, the rotating arm and the connecting member through the fastener; in the connected state, the fixing plate is located on the same side of the support arm, the rotating arm and the connecting member.

11. A heat treatment device, characterized in that: include: The process pipe extends in the horizontal direction; A process door, used to open and close the opening of the process pipe; as well as The process door driving mechanism according to any one of claims 1 to 10.

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