Eutectic machine feeding balancing device

Abstract

The utility model discloses a feeding balancing device of a eutectic machine, which belongs to the technical field of semiconductor processing equipment and comprises a balancing structure and a moving guide rail, the moving guide rail is mounted on a base and provided with a heating guide rail, and the heating guide rail can move along with the moving guide rail. The balancing structure is installed on the base and comprises a first driving part, a balancing weight and a first lead screw, the first driving part is connected with the first lead screw, a cover plate is arranged on the first lead screw, the cover plate can move along the first lead screw under the driving of the first driving part, and the balancing weight is arranged on the first lead screw. The balancing weight is mounted below the cover plate; the first driving piece is controlled by a program to start to be matched with the first lead screw, so that the balancing weight and the moving guide rail move reversely, momentum can be mutually counteracted when the balancing weight and the moving guide rail move reversely according to the momentum theorem, and therefore impact of the base on equipment is greatly reduced, and vibration is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing equipment, in particular to a eutectic machine feed balancing device. Background Art

[0002] Semiconductor refers to a material whose conductivity at room temperature is between that of a conductor and an insulator. This material is widely used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power power conversion and other fields.

[0003] Semiconductor chip manufacturing is one of the key industries currently being developed in my country, and semiconductor chip production equipment is also a focus of research in the subject area. When packaging semiconductor chips, a eutectic machine is needed to connect the chip to the substrate or the substrate to the shell, which involves picking up the chip. When picking up and replacing the chip, the eutectic machine uses a rotating swing arm to turn the suction head to the top of the chip, and then lower it to suck the chip, and then the swing arm rotates again to transfer the chip, and cooperates with the moving guide to slowly move and pick up the chips at different positions on the heating guide. However, during the movement of the moving guide, the center of gravity of the moving guide is forward, which will cause vibration, and the vibration will affect the accuracy of chip picking and placement, affecting the normal operation. Utility Model Content

[0004] The main purpose of the utility model is to provide a eutectic machine feed balancing device, aiming to solve the problems raised in the above background.

[0005] To achieve the above-mentioned purpose, the utility model proposes a eutectic machine feed balancing device, including a balancing structure and a moving guide rail, the moving guide rail is installed on a base and is provided with a heating guide rail, the heating guide rail can move following the moving guide rail, the balancing structure is installed on the base and includes a first driving member, a counterweight and a first screw rod, the first driving member is connected to the first screw rod, a cover plate is provided on the first screw rod, the cover plate can move along the first screw rod under the drive of the first driving member, and the counterweight block is installed under the cover plate.

[0006] Optionally, a first support frame is provided on the base, a second support frame is provided on the first support frame, and the first driving member is installed in the second support frame.

[0007] Optionally, first tracks are respectively provided on both side walls of the second support frame, and first clamping blocks are respectively provided at both ends of the cover plate, and the first clamping blocks are clamped on the first tracks.

[0008] Optionally, a second driving member is provided on the base, and the second driving member is connected to a second screw rod, so that the motion guide rail is driven to move through the second screw rod.

[0009] Optionally, a second track is provided on the base, the second track is arranged along the length direction of the base, and a connecting base is provided on the second track.

[0010] Optionally, a second clamping block is provided at the bottom of the connecting base, and the second clamping block is clamped on the second track.

[0011] Optionally, the connecting base is connected to the second screw rod, and the moving guide rail is installed on the connecting base. When driven by the second driving member, the connecting base can move along the second track to drive the moving guide rail to move.

[0012] Optionally, a plurality of fixed brackets are provided on the moving guide rail, and the upper ends of the fixed brackets are connected to the heating guide rail.

[0013] Compared with the prior art, the utility model has the following beneficial effects:

[0014] The eutectic machine feed balancing device of the technical solution of the utility model is provided with a balancing structure and a moving guide rail. The moving guide rail is installed on a base and is provided with a heating guide rail. The heating guide rail can move following the moving guide rail. The balancing structure is installed on the base and includes a first driving member, a counterweight and a first screw rod. The first driving member is connected to the first screw rod. A cover plate is provided on the first screw rod. The cover plate can move along the first screw rod under the drive of the first driving member. The counterweight block is installed under the cover plate. The first driving member is started and coordinated with the first screw rod through program control, so that the counterweight block and the moving guide rail move in the opposite direction. According to the momentum theorem, the momentum will cancel each other when doing reverse movement, thereby greatly reducing the impact of the base on the equipment and reducing vibration. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0016] Figure 1 It is a structural schematic diagram of an embodiment of a eutectic machine feed balancing device of the utility model;

[0017] Figure 2 This is a structural schematic diagram of the eutectic machine feed balancing device of the utility model without the counterweight block removed;

[0018] Figure 3This is a schematic diagram of the eutectic machine feed balancing device of the utility model with the counterweight removed from another perspective.

[0019] Description of Figure Numbers:

[0020]

[0021] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] It should be noted that all directional indications in the embodiments of the present invention (such as up, down, left, right, front, back...) are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0024] In addition, the descriptions of "first", "second", etc. in the present utility model are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in this field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present utility model.

[0025] The utility model provides a eutectic machine feeding balancing device.

[0026] See also Figure 1-Figure 3In one embodiment of the utility model, the eutectic machine feed balancing device includes a balancing structure 20 and a moving guide rail 40, the moving guide rail 40 is installed on a base 10 and is provided with a heating guide rail 42, the heating guide rail 42 can move following the moving guide rail 40, the balancing structure 20 is installed on the base 10 and includes a first driving member 21, a counterweight 23 and a first screw rod 22, the first driving member 21 is connected to the first screw rod 22, the first screw rod 22 is provided with a cover plate 24, the cover plate 24 can move along the first screw rod 22 under the drive of the first driving member 21, and the counterweight 23 is installed under the cover plate 24.

[0027] In this embodiment, the first driving member 21 is a servo motor, and the first screw rod 22 is a ball screw, both of which are prior art and will not be elaborated on here. The ball screw is a special form of screw, in which the ball rolls between the spiral grooves of the screw and the nut, providing the only contact between the screw and the nut. Because the ball screw has higher transmission efficiency and more accurate positioning, it is widely used in occasions with high precision requirements, such as machine tools, IT, optoelectronics, semiconductors, medical and other precision equipment. It can be understood that starting the first driving member 21 drives the screw of the first screw rod 22 to rotate, so that the nut on the first screw rod 22 moves, and the cover plate 24 is connected to the nut of the first screw rod 22, and can move with the nut, thereby driving the counterweight block 23 to move to adjust the center of gravity.

[0028] In one embodiment of the utility model, a first support frame 11 is provided on the base 10, a second support frame 12 is provided on the first support frame 11, the first driving member 21 is installed in the second support frame 12, first tracks 13 are respectively provided on the two side walls of the second support frame 12, first clamping blocks 25 are respectively provided at both ends of the cover plate 24, the first clamping blocks 25 are clamped on the first track 13, a threaded hole is opened on the counterweight block 23, and it is connected to the bottom of the cover plate 24 by screws, and the two are detachably connected.

[0029] In this embodiment, the first support frame 11 and the second support frame 12 are both in a "concave" shape as a whole, the opening of the first support frame 11 faces downward, and the opening of the second support frame 12 faces upward. The second support frame 12 and the first support frame 11 are detachably connected and can be connected by screws. The first driving member 21 is located in the middle of the second support frame 12, and the first track 13 is located on the side walls of the first driving member 21. The direction of the first track 13 is consistent with the direction of the first screw rod 22. Under the limitation of the first track 13, the cover plate 24 can maintain stability when moving without left and right deviation.

[0030] It is understandable that when the first driving member 21 drives the first screw rod 22 to move, the cover plate 24 can move together with the nut on the first screw rod 22 away from the motion guide rail 40 , driving the counterweight block 23 away from the motion guide rail 40 .

[0031] In one embodiment of the utility model, a second driving member 30 is provided on the base 10, and the second driving member 30 is connected to a second screw rod 31, and the moving guide rail 40 is driven to move by the second screw rod 31. A second track 14 is provided on the base 10, and the second track 14 is arranged along the length direction of the base 10. A connecting base 50 is provided on the second track 14, and the connecting base 50 is connected to the second screw rod 31. The moving guide rail 40 is installed on the connecting base 50. When driven by the second driving member 30, the connecting base 50 can move along the second track 14 to drive the moving guide rail 40 to move; a plurality of fixed brackets 41 are provided on the moving guide rail 40, and the upper ends of the fixed brackets 41 are connected to the heating guide rail 42.

[0032] In this embodiment, the second driving member 30 is also a servo motor, and the second screw rod 31 is also a ball screw, both of which are prior arts and will not be elaborated on here. The orientation of the second track 14 is consistent with the orientation of the second screw rod 31, the connecting base 50 is connected to the nut on the second screw rod 31, and the two ends of the connecting base 50 are respectively provided with a second clamping block 51, and the second clamping block 51 is clamped on the second track 14. When the second driving member 30 drives the second screw rod 31 to move, the connecting base 50 moves along with the nut on the second screw rod 31, driving the moving guide rail 40 to move away from the first support frame 11. When the moving guide rail 40 moves forward, its center of gravity changes. The first driving member 21 is started by program control to move the counterweight block 23 backward, so that the moving guide rail 40 and the counterweight block 23 move in the opposite direction, so that the center of gravity between the two is as close as possible to avoid the phenomenon of the heating guide rail 42 being tilted.

[0033] Working principle: When picking up and replacing chips, the eutectic machine uses a rotating swing arm to turn the suction head to the top of the chip, and then descends to suck the chip, and then the swing arm rotates again to realize the transfer of the chip, and cooperates with the moving guide rail to slowly move to pick up chips at different positions on the heating guide rail 40. The second driving member 30 is controlled by the program to start the cooperation with the second screw rod 31, so that the moving guide rail 40 moves away from the first support frame 11, so as to pick up chips at different positions. When the moving guide rail 40 is farther away from the first support frame 11, the center of gravity is closer to the front, and the heating guide rail 42 will vibrate. Therefore, while the moving guide rail 40 moves, the first driving member 21 is controlled by the program to start and cooperate with the first screw rod 22, so that the counterweight block 23 and the moving guide rail 40 move in the opposite direction, so that the center of gravity between the two is as close as possible, and the impact of the heating guide rail mechanism on the equipment during movement is offset by the movement of the effective mass of the balancing mechanism, avoiding vibration, and ensuring that the suction head on the eutectic machine can suck the chip to realize the transfer of the chip.

[0034] The above description is only a preferred embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the inventive concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A eutectic machine feed balancing device, characterized in that: It includes a balancing structure and a moving guide rail, the moving guide rail is installed on a base and is provided with a heating guide rail, the heating guide rail can move following the moving guide rail, the balancing structure is installed on the base and includes a first driving member, a counterweight and a first screw rod, the first driving member is connected to the first screw rod, a cover plate is provided on the first screw rod, the cover plate can move along the first screw rod under the drive of the first driving member, and the counterweight block is installed under the cover plate.

2. The eutectic machine feed balancing device according to claim 1, characterized in that: A first supporting frame is arranged on the base, a second supporting frame is arranged on the first supporting frame, and the first driving member is installed in the second supporting frame.

3. The eutectic machine feed balancing device according to claim 2, characterized in that: First tracks are respectively arranged on both side walls of the second support frame, and first clamping blocks are respectively arranged on both ends of the cover plate, and the first clamping blocks are clamped on the first tracks.

4. The eutectic machine feed balancing device according to claim 1, characterized in that: The base is provided with a second driving member, and the second driving member is connected to a second screw rod, and the motion guide rail is driven to move by the second screw rod.

5. The eutectic machine feed balancing device according to claim 4, characterized in that: The base is provided with a second track, the second track is arranged along the length direction of the base, and the second track is provided with a connecting base.

6. The eutectic machine feed balancing device according to claim 5, characterized in that: A second clamping block is disposed at the bottom of the connecting base, and the second clamping block is clamped on the second track.

7. The eutectic machine feed balancing device according to claim 6, characterized in that: The connecting base is connected to the second screw rod, and the moving guide rail is installed on the connecting base. When driven by the second driving member, the connecting base can move along the second track to drive the moving guide rail to move.

8. The eutectic machine feed balancing device according to claim 1, characterized in that: A plurality of fixed brackets are arranged on the moving guide rail, and the upper ends of the fixed brackets are connected to the heating guide rail.

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