Wafer box cross-layer transferring mechanism and production system

Abstract

The utility model provides a wafer box cross-layer transferring mechanism and a production system, the wafer box cross-layer transferring mechanism comprises a lifting frame and a carrying table connected with the lifting frame in an intercommunication mode, and the lifting frame is provided with a tray used for placing a wafer box; a conveying line and a gripper are arranged on the carrying table; the gripper can stretch across the connecting position of the lifting frame and the carrying table, and the wafer box on the tray is transferred to the conveying line. According to the wafer box cross-layer transferring mechanism, wafer boxes can be automatically transferred to conveying lines of different layer heights, the overall structure is simple, safe and stable, meanwhile, the occupied area is small, and accuracy and reliability are achieved; and all layers of carrying positions do not influence each other to work, the transfer efficiency is high, and the punctuality rate is high.

Description

Technical Field

[0001] The present application belongs to the technical field of wafer processing cassette transport equipment, and in particular, relates to a cassette cross-layer transport mechanism and a production system provided with the transport mechanism. Background Art

[0002] In a silicon wafer production and manufacturing workshop, the workshop building is generally a high-rise structure, at least three stories high. If you want to transport silicon wafers across floors, you need to push a cart and take the elevator to move them. This working method has low efficiency and poor safety, unstable punctuality, and will also cause secondary damage to the silicon wafers. Summary of the invention

[0003] The present application provides a wafer box cross-layer transfer mechanism and production system, which particularly solves the technical problems of low efficiency, poor safety, unstable punctuality, and easy damage to silicon wafers in transferring silicon wafers between high floors of existing silicon wafer production workshops.

[0004] In order to solve at least one of the above technical problems, the technical solution adopted in this application is:

[0005] A film box cross-layer transfer mechanism comprises a lifting frame and a carrier connected to the lifting frame, wherein:

[0006] The lifting frame is provided with a tray for placing the film box;

[0007] A conveying line and a gripper are arranged on the platform; the gripper can span the connection between the lifting frame and the platform to move the film box on the tray to the conveying line.

[0008] Furthermore, the carrier is arranged outside the lifting frame, and at least two layers of the carrier are provided along the height direction of the lifting frame.

[0009] Furthermore, each layer of the carrier is provided with at least two layers of the conveying lines, and each layer of the conveying lines is provided with a group of the grippers.

[0010] Furthermore, the carrier also includes a top frame placed above the conveying line and a bracket for fixing the conveying line; one end of the top frame and the bracket are connected to the outer wall surface of the lifting frame, and the other end is suspended.

[0011] Furthermore, the bracket placed on the upper layer is connected to the top frame via a suspension rope, and the bracket placed on the lower layer is connected to the bracket on the upper layer via a suspension rope;

[0012] Preferably, the conveying line is arranged along the length direction of the bracket, and a counterweight is provided beside the conveying line.

[0013] Furthermore, a three-axis robotic arm for controlling the gripper is also provided on the lifting frame, including an X-axis robotic arm parallel to the conveying line, a Y-axis robotic arm perpendicular to the conveying line, and a Z-axis robotic arm capable of driving the robotic arm to rise and fall vertically, and a driving motor is also provided on the Z-axis robotic arm.

[0014] Furthermore, the lifting frame includes a shell and a frame placed in the shell, and a passage communicating with the conveying line is provided on a side of the frame close to the carrier; the tray is arranged in the frame and is driven up and down by a lifting motor driving chain.

[0015] Furthermore, the lifting frames are at least two in number, and each lifting frame is provided with a plurality of layers of platforms;

[0016] On the adjacent lifting racks, the carriers on the same layer are arranged in parallel; and the conveying lines on the same layer located on different lifting racks share the same gripper.

[0017] Furthermore, all the lifting frames are arranged vertically side by side, and all the platforms are arranged on a single side of the lifting frames.

[0018] A production system is provided with the transfer mechanism as described above.

[0019] The film box cross-layer transfer mechanism designed by the present application can automatically transfer the film box to the conveyor lines of different layer heights. The overall structure is simple, safe and stable, and it occupies a small area and is accurate and reliable. The loading positions on each layer do not affect each other's work, and the transfer efficiency and punctuality rate are high. The present application also proposes a production line equipped with the film box cross-layer transfer mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 is a three-dimensional diagram of a cross-layer transfer mechanism according to an embodiment of the present application;

[0021] Figure 2 It is a structural schematic diagram of a framework of an embodiment of the present application;

[0022] Figure 3 It is a schematic diagram of a transmission mechanism in the middle of the bottom of a frame of an embodiment of the present application;

[0023] Figure 4 It is a schematic diagram of a transmission mechanism in the middle of the top of a frame of an embodiment of the present application;

[0024] Figure 5 is an enlarged view of a carrier according to an embodiment of the present application;

[0025] Figure 6 is a side view of a carrier according to an embodiment of the present application;

[0026] Figure 7It is a schematic diagram of another angle of the carrier of one embodiment of the present application.

[0027] In the figure:

[0028] 10. Lifting frame 11. Shell 12. Frame

[0029] 13. Tray support 14. Through hole 15. Lifting motor

[0030] 16, chain 20, platform 21, top frame

[0031] 22. Conveyor line 23. Bracket 24. Counterweight

[0032] 25. Gripper 26. X-axis robotic arm 27. Y-axis robotic arm

[0033] 28, Z-axis robot 30, film box 40, floor DETAILED DESCRIPTION

[0034] The present application is described in detail below with reference to the accompanying drawings and specific embodiments.

[0035] This embodiment provides a film box cross-layer transfer mechanism, such as Figure 1-7 As shown, it includes two lifting racks 10 arranged in parallel and several layers of carriers 20 for transferring film boxes 30 arranged on each lifting rack 10, wherein the two lifting racks 10 are arranged in parallel and at intervals, and their heights span the heights of each floor in the factory building, and on the bottom plate of each floor, there are carriers 20 interconnected with the lifting racks 10. The lifting racks 10 are provided with trays for placing film boxes 30, and tray brackets 13 for fixing and setting up the trays. A double-layer bracket 23 is arranged on the carrier 20, and a conveyor line 22 is arranged on the bracket 23, and a mechanical gripper 25 for clamping the film box 30 is arranged near the entrance of the conveyor line 22 in at least one of the lifting frames 10; the gripper 23 is controlled by a three-axis robot arm; when the production line in any layer needs the film box 30, the tray in the lifting frame 10 will be driven by the lifting motor, and the tray carrying the film box 30 will be lifted to the corresponding floor through the chain drive, and the three-axis robot arm will then drive the gripper 23 to cross the connection between the lifting frame 10 and the carrier 20, and move the film box 30 to the conveyor line 22, thereby completing the transfer and transportation of the film box 30 across layers.

[0036] like Figure 1 As shown, two lifting frames 10 are arranged side by side and spaced apart, and both vertically span at least two floor structures. The two lifting frames 10 have the same structure. The structure of one of the lifting frames 10 is taken as an example for detailed description.

[0037] like Figure 2As shown, the lifting frame 10 includes a shell 11 and a frame 12 placed in the shell 11. The frame 12 is made of a plurality of steel pipes welded together, and a through hole 14 communicating with the conveyor line 22 is provided on one side of the frame 12 close to the carrier 20; the tray (omitted in the figure) is a flat plate structure, mainly used to place the film box 30, which is arranged on the tray bracket 13 in the frame 12. Correspondingly, an input port for placing the film box 30 on the tray is provided on the opposite side of the frame 12 to the through hole 14, and the robot can automatically place the film basket 30 on the tray through the input port.

[0038] like Figure 3 As shown, at the bottom of the frame 12, a transmission mechanism is provided, including a lifting motor 15 fixed to the bottom of the frame 12, and a transmission shaft and a sprocket matched with the lifting motor 15 are also provided at the bottom of the frame 12, and then a chain 16 is connected with the lifting motor 15. Figure 4 The lifting motor 15 drives the chain 16 to move the tray up and down, thereby driving the film box 30 to transfer from bottom to top across layers.

[0039] like Figure 5 As shown, all the lifting racks 10 are arranged side by side vertically, and all the platforms 20 are arranged at the same height as the lifting racks 10 and are arranged on the same single side of the lifting racks 10. On adjacent lifting racks 10, the platforms 20 on the same layer are arranged side by side. The number of platforms 20 on the two lifting racks 10 is the same and the positions are all set at the same height. The platforms 20 are arranged on the outside of the lifting racks 10, and at least two layers of platforms 20 are arranged along the height direction of the lifting racks 10. The number of all platforms 20 is the same as the number of floor plates 40. At least two layers of platforms 20 are arranged on each lifting rack 10 to adapt to the transportation of film boxes 30 across layers.

[0040] like Figure 6 As shown, each carrier 20 is provided with at least two layers of conveying lines 22, and each layer of conveying lines 22 is provided with a group of grippers 25. The conveying lines 22 on the same layer located on different lifting frames 10 can share the same gripper 25, and of course, a gripper 25 can also be provided at the conveying line 22 on each lifting frame 10 (omitted in the figure).

[0041] Furthermore, the carrier 20 also includes a top frame 21 placed above the conveyor line 22 and a bracket 23 for fixing the conveyor line 22. The top frame 21 is a flat structure, and both the top frame 21 and the bracket 23 are made of steel, and are both arranged vertically to the height of the lifting frame 10. One end of the top frame 21 and the bracket 23 are connected to the outer wall surface of the shell 11 of the lifting frame 10, and the other end is suspended. The upper and lower brackets 23 are connected to each other by steel wire ropes, that is, the bracket 23 on the lower layer is connected to the bracket 23 on the upper layer by ropes. And the bracket 23 on the upper layer is connected to the top frame 21 by ropes.

[0042] The conveyor line 22 is arranged along the length direction of the bracket 23. Preferably, in order to prevent the conveyor line 22 from being tilted or unstable when placed in the bracket 23, a counterweight block 24 is provided in parallel with the conveyor line 23 on the side of the bracket 23.

[0043] like Figure 7 As shown, the gripper 25 is a commonly used mechanism for clamping the film box 30 in the art, and mainly clamps the upper section of the film box 30. This is a conventional structure, which cooperates with the corresponding film box 30. Its specific structure is not limited here, as long as it can clamp the film box 30. A three-axis mechanical arm for manipulating the gripper 25 is also provided on the lifting frame 10, including an X-axis mechanical arm 26 parallel to the conveying line 22, a Y-axis mechanical arm 27 perpendicular to the conveying line 22, and a Z-axis mechanical arm 28 that can drive the mechanical arm 26 to rise and fall vertically, and a driving motor is also provided on the Z-axis mechanical arm 28. The three-axis mechanical arm can drive the film box 30 to move in multiple directions, not only can it drive the gripper 25 to go deep into the tray in the frame 12 to clamp the film box 30, but also can place the film box 30 on two conveying lines 22 on the same layer on two lifting frames, and will not interfere with the conveying lines 22 on other layers, and all work independently of each other.

[0044] The cross-layer transfer mechanism proposed in the present application is not only highly efficient, but also safe and stable, occupies a small area and has a reasonable structural design; it can accurately control the tray vertically across the floors 40 of different floors through automatic control, and transfer the film boxes 30 to the alignment conveyor lines 22 at different floor heights, which is safe and reliable and will not be delayed or accumulate.

[0045] A production system is provided with the transfer mechanism as described above.

[0046] The film box cross-layer transfer mechanism designed by the present application can automatically transfer the film box to the conveyor lines of different layer heights. The overall structure is simple, safe and stable, and it occupies a small area and is accurate and reliable. The loading positions on each layer do not affect each other's work, and the transfer efficiency and punctuality rate are high. The present application also proposes a production line equipped with the film box cross-layer transfer mechanism.

[0047] The above detailed description of the embodiments of the present application is only a preferred embodiment of the present application and cannot be considered to limit the scope of implementation of the present application. All equivalent changes and improvements made within the scope of the present application should still fall within the scope of the patent coverage of the present application.

Claims

1. A film box cross-layer transfer mechanism, characterized in that: It comprises a lifting frame and a carrier platform interconnected with the lifting frame, wherein: The lifting frame is provided with a tray for placing the film box; A conveying line and a gripper are arranged on the platform; the gripper can span the connection between the lifting frame and the platform to move the film box on the tray to the conveying line.

2. A film box cross-layer transfer mechanism according to claim 1, characterized in that: The carrier is arranged outside the lifting frame, and at least two layers of the carrier are provided along the height direction of the lifting frame.

3. A film box cross-layer transfer mechanism according to claim 2, characterized in that: Each layer of the carrier is provided with at least two layers of the conveying lines, and each layer of the conveying lines is provided with a group of the grippers.

4. A film box cross-layer transfer mechanism according to any one of claims 1 to 3, characterized in that: The carrier also includes a top frame placed above the conveying line and a bracket for fixing the conveying line; one end of the top frame and the bracket are connected to the outer wall surface of the lifting frame, and the other end is suspended.

5. A film box cross-layer transfer mechanism according to claim 4, characterized in that: The bracket placed on the upper layer is connected to the top frame via a suspension rope, and the bracket placed on the lower layer is connected to the bracket on the upper layer via a suspension rope; Preferably, the conveying line is arranged along the length direction of the bracket, and a counterweight is provided beside the conveying line.

6. A film box cross-layer transfer mechanism according to claim 5, characterized in that: The lifting frame is also provided with a three-axis robotic arm for controlling the gripper, including an X-axis robotic arm parallel to the conveying line, a Y-axis robotic arm perpendicular to the conveying line, and a Z-axis robotic arm capable of driving the robotic arm to rise and fall vertically. A driving motor is also provided on the Z-axis robotic arm.

7. A film box cross-layer transfer mechanism according to any one of claims 1-3, 5-6, characterized in that: The lifting frame includes a shell and a frame placed in the shell, and a through opening communicating with the conveying line is provided on a side of the frame close to the carrier; the tray is arranged in the frame and driven up and down by a lifting motor driving chain.

8. A film box cross-layer transfer mechanism according to claim 7, characterized in that: There are at least two lifting frames, and each lifting frame is provided with a plurality of layers of platforms; On the adjacent lifting racks, the carriers on the same layer are arranged in parallel; and the conveying lines on the same layer located on different lifting racks share the same gripper.

9. A film box cross-layer transfer mechanism according to claim 8, characterized in that: All the lifting frames are arranged vertically side by side, and all the carriers are arranged on a single side of the lifting frames.

10. A production system, characterized in that: A transfer mechanism as described in any one of claims 1 to 9 is provided.

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