Protection device of precision linear motion platform

Abstract

The utility model discloses a protection device of a precision linear motion platform, which comprises a platform, a V-shaped groove and a working table are sequentially arranged on the platform, a motor is arranged on one side of the working table, the output end of the motor is connected with a ball screw, a nut fixedly connected with the working table is arranged on the ball screw, and two elastic film structures are arranged on the nut. Two coils are arranged between the elastic film structures, and magnets are arranged on the two sides of the coils. The positioning structure has the advantages that the movable coils are matched with the friction blocks, the workbench can be accurately positioned at an ideal position, slippage of the workbench is avoided, the positioning accuracy of the workbench is improved, the output force of the whole positioning structure is improved through the superposed force of the four magnets and the two coils, and the positioning precision of the workbench is improved. And the magnet is fixed in the metal box on the nut of the roller screw, so that the positioning of any position of the workbench can be realized, and the flexibility of the whole system is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of linear motion platforms, in particular to a protective device for a precision linear motion platform. Background Art

[0002] In the field of precision machining and semiconductors, in order to achieve multi-angle processing and transportation of workpieces, it is often necessary to translate the components, such as translating the workpiece or lens from one position to another. In order to achieve translational movement of the workpiece, the workpiece needs to be fixed or placed on a translation stage to achieve translational movement. In addition to achieving translational movement, the translation stage also needs to meet the requirements of precise positioning, that is, the translation stage cannot slip after transporting the workpiece to the final position.

[0003] When the translation stage moves horizontally, it is difficult for the workpiece to slip due to the gravity of the workpiece. However, in the field of precision machining, multi-axis linkage is usually used, so the workpiece is not always in a horizontal state, but may be in various states from horizontal to vertical. At this time, due to the weight of the workpiece and the mechanical transmission gap, the workpiece may slip and the workpiece will not be in the determined final position, thereby causing position errors, and ultimately leading to reduced machining quality and handling misalignment problems.

[0004] The main solutions to the problem of workpiece slippage are: 1. Install a brake device at the tail of the motor: When the motor runs to the specified position, the motor shaft is locked to prevent the workpiece from slipping. However, this method will increase the length of the motor, complicate the control system, and there is a long transmission chain between the motor shaft and the final position. Even after the motor is braked, the workpiece will still have a slight slip; 2. Enable the motor: After the translation table runs to the final position, continue to enable the motor and avoid workpiece slippage through feedback control. However, this method requires the motor drive system to be closed-loop controlled, or use open-loop control of stepper motors. Enabling the motor will cause the motor to heat up, and it cannot be used in some temperature-sensitive occasions; 3. Through the reverse torque of multi-stage gear transmission: That is, when stopping, the workpiece is positioned by the reverse torque brought by the multi-stage gear transmission, but this solution will cause slight slippage due to the gear gap, and this solution cannot be used when the torque caused by the workpiece is greater than the reverse torque of the gear transmission. Utility Model Content

[0005] The purpose of the utility model is to provide a protective device for a precision linear motion platform to solve the problem of slippage of the workpiece during the movement of the platform raised in the above-mentioned background technology, so that the workpiece is not in the determined final position, thereby causing position error, and ultimately leading to reduced processing quality and transportation misalignment.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] The utility model provides a protective device for a precision linear motion platform, comprising a platform, wherein a V-shaped groove and a workbench are sequentially arranged on the platform, a motor is arranged on one side of the workbench, a ball screw is connected to the output end of the motor, a nut fixedly connected to the workbench is arranged on the ball screw, two elastic membrane structures are arranged on the nut, two coils are arranged between the elastic membrane structures, and magnets are arranged on both sides of the coils.

[0008] Furthermore, the nut is arranged on the screw rod of the ball screw, and a metal box is provided on the nut.

[0009] Furthermore, the number of the magnets is four, and the magnets are fixedly arranged in pairs on the inner walls on both sides of the metal box.

[0010] Furthermore, the coil is connected to the elastic membrane structure via a coil fixing plate, and a flexible cable is connected to the coil.

[0011] Furthermore, friction blocks are installed at the lower ends of the two elastic membrane structures, and the two elastic membrane structures are arranged up and down and fixedly connected to the nut.

[0012] Furthermore, the workbench is slidably connected to the V-shaped groove, and the friction block is located between the workbench and the platform.

[0013] Beneficial effects:

[0014] 1. Through the cooperation of the movable coil and the friction block, the workbench can be accurately positioned at the ideal position, avoiding the slip of the workbench and improving the positioning accuracy of the workbench;

[0015] 2. The output force of the entire positioning structure is improved through the superposition force of four magnets and two coils;

[0016] 3. By fixing the magnet in a metal box on the nut of the roller screw, the workbench can be positioned at any position, improving the flexibility of the entire system. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0018] Figure 2 It is a partial structural schematic diagram of the utility model;

[0019] Figure 3 It is another partial structural schematic diagram of the utility model.

[0020] Reference numerals

[0021] 1-platform, 2-motor, 3-ball screw, 4-workbench, 5-V-groove, 6-nut, 7-elastic membrane structure, 8-coil, 9-coil fixing plate, 10-flexible cable, 11-friction block, 12-metal box, 13-magnet. DETAILED DESCRIPTION

[0022] The following are specific embodiments of the present invention and the accompanying drawings to further describe the technical solution of the present invention, but the present invention is not limited to these embodiments.

[0023] Example

[0024] like Figure 1-3 As shown, a protective device for a precision linear motion platform includes a platform 1, on which a V-shaped groove 5 and a workbench 4 are sequentially provided, a motor 2 is provided on one side of the workbench 4, a ball screw 3 is connected to the output end of the motor 2, a nut 6 fixedly connected to the workbench 4 is provided on the ball screw 3, two elastic membrane structures 7 are provided on the nut 6, two coils 8 are provided between the elastic membrane structures 7, and magnets 13 are provided on both sides of the coils 8.

[0025] The nut 6 is arranged on the screw of the ball screw 3. When the motor 2 rotates, it pushes the screw on the roller screw 3 structure to perform rotational motion. The roller screw 3 converts the rotational motion of the motor 2 into linear motion and pushes the workbench 4, so that the workbench 4 performs translational motion along the V-groove 5. The motor 2 can be a DC motor, a stepping motor or an AC motor.

[0026] There are four magnets 13, and the magnets 13 are fixedly arranged in pairs on the inner walls on both sides of the metal box 12. The magnets 13 are installed in the metal box 12 on the end face of the nut 6 on the roller screw 3. Four magnets 13 are installed on the inner walls on both sides of the metal box 12, wherein the two magnets 13 on the inner wall on the same side are in opposite directions, and the two magnets 13 located on both sides of the metal box 12 and facing each other are in the same direction, thereby forming a closed magnetic field loop.

[0027] The coil 8 is connected to the elastic membrane structure 7 through the coil fixing plate 9. A flexible cable 10 is connected to the coil 8. The coil 8 is energized through the flexible cable 10. When the coil 8 is not energized, the coil 8 is close to the workbench 4 under the action of the elastic membrane structure 7, driving the friction block 11 to leave the base of the platform 1. When the coil 8 is energized, the magnetic field generated by the coil 8 and the magnetic field generated by the magnet 13 interact with each other to generate an Ampere force. The Ampere force exceeds the force of the elastic membrane structure 7, thereby pushing the friction block 11 to contact the base of the platform 1.

[0028] A friction block 11 is installed at the lower end of the two elastic membrane structures 7. The two elastic membrane structures 7 are arranged up and down and fixedly connected to the nut 6. The elastic membrane structure 7 is used as a spring for resetting the protective device. One end of the elastic membrane structure 7 is fixed on the workbench 4, and the other end is fixed to the coil 8.

[0029] The workbench 4 is slidably connected to the V-groove 5, and the workbench 4 is mounted and fixed on the nut 6 of the roller screw 3. As the nut 6 realizes forward and backward translational motion on the roller screw 3, the V-groove 5 is used to support the workbench 4 so as to realize forward and backward movement of the workbench 4.

[0030] The operating principle of the utility model is as follows:

[0031] When the linear motion platform is running, the coil 8 is not energized. Under the action of the elastic membrane structure 7, the coil 8 is close to the workbench 4, driving the friction block 11 to leave the base of the platform 1. At this time, the workbench 4 has no resistance and can freely perform linear motion on the platform 1.

[0032] When the linear motion platform stops running, in order to prevent the workbench 4 from slipping, the coil 8 is energized, and the magnetic field generated by the coil 8 interacts with the magnetic field generated by the magnet 13 to generate an Ampere force. The Ampere force exceeds the force of the elastic membrane structure 7, thereby pushing the friction block 11 to contact the base of the platform 1. The friction force fixes the workbench 4 to the final position, thereby preventing the workbench 4 from slipping in the final position and achieving positioning protection for the workbench 4.

[0033] Finally, it should be noted that the above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. Although the utility model is described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions recorded in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the utility model content within the protection scope of the utility model.

Claims

1. A protective device for a precision linear motion platform, comprising a platform (1), characterized in that: The platform (1) is provided with a V-shaped groove (5) and a workbench (4) in sequence; a motor (2) is provided on one side of the workbench (4); a ball screw (3) is connected to the output end of the motor (2); a nut (6) fixedly connected to the workbench (4) is provided on the ball screw (3); two elastic membrane structures (7) are provided on the nut (6); two coils (8) are provided between the elastic membrane structures (7); magnets (13) are provided on both sides of the coils (8).

2. The protective device for a precision linear motion platform according to claim 1, characterized in that: The nut (6) is arranged on the screw rod of the ball screw (3), and a metal box (12) is provided on the nut (6).

3. The protective device for a precision linear motion platform according to claim 2, characterized in that: The number of the magnets (13) is four, and the magnets (13) are fixedly arranged in pairs on the inner walls of both sides of the metal box (12).

4. The protective device for a precision linear motion platform according to claim 1, characterized in that: The coil (8) is connected to the elastic membrane structure (7) via a coil fixing plate (9), and a flexible cable (10) is connected to the coil (8).

5. The protective device for a precision linear motion platform according to claim 1, characterized in that: A friction block (11) is installed at the lower ends of the two elastic membrane structures (7), and the two elastic membrane structures (7) are arranged up and down and fixedly connected to the nut (6).

6. The protective device for a precision linear motion platform according to claim 5, characterized in that: The workbench (4) is slidably connected to the V-shaped groove (5), and the friction block (11) is located between the workbench (4) and the platform (1).

Images