Novel gas circuit structure applied to reaction type plasma coating equipment

Abstract

The utility model discloses a novel gas circuit structure applied to reaction type plasma coating equipment, which comprises a box body, an electronic gun is arranged on the back of the box body, a process cavity is arranged in the box body, and a jet assembly comprises a plurality of process gas pipes arranged on the inner wall of the process cavity of the box body and a buffer detachably arranged on the inner wall of the process cavity of the box body. The dismounting assembly is arranged between the buffer and the box body and used for mounting and dismounting the buffer and the box body, the process pipe comprises a first air pipe and a second air pipe arranged on the buffer, and a quick insertion piece is arranged between the first air pipe and the second air pipe and used for quickly inserting the first air pipe and the second air pipe; according to the utility model, the process gas uniformly reacts with the target material in the reaction area through the arranged spraying assembly, and the buffer and the process pipe are convenient to disassemble, clean or replace.

Description

Technical Field

[0001] The utility model relates to the technical field of reactive plasma coating, in particular to a novel gas path structure applied to reactive plasma coating equipment. Background Art

[0002] Reactive plasma deposition coating is a low-voltage, high-current arc discharge ion plating method: the plasma generator dissociates argon gas into argon ions to generate a large number of electrons, and then uses the deflection magnetic field to turn the electron beam and focus it on the target ingot to heat the material to be coated and directly sublimate it into the gas phase. The gas phase particles are highly dissociated into ions through the plasma zone, and the reaction gas introduced from the gas distribution holes in the reaction chamber also forms ions in this area. The highly freed ions combine and deposit on the substrate to form a film layer.

[0003] At present, due to the high speed of the coating method, in order to ensure the uniformity of the film properties, there are high requirements for the uniformity of the reaction gas distribution in the reaction zone, especially the plasma zone. The existing gas path only has a single gas passage, which is not conducive to achieving uniform distribution of the reaction gas in the plasma zone and is not convenient for installing and disassembling the buffer. Therefore, those skilled in the art provide a new gas path structure applied to reactive plasma coating equipment to solve the problems raised in the above background technology. Utility Model Content

[0004] The utility model aims to solve the problems in the prior art that it is not conducive to achieving uniform distribution of reaction gas in the plasma zone and it is not convenient to disassemble the buffer, and proposes a new gas path structure applied to reactive plasma coating equipment.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A novel gas path structure applied to reactive plasma coating equipment comprises a box body, an electron gun is arranged on the back of the box body, a process chamber is arranged inside the box body, and further comprises:

[0007] An injection assembly, the injection assembly comprising a plurality of process gas pipes arranged on the inner wall of the process chamber of the box body and a buffer detachably arranged on the inner wall of the process chamber of the box body;

[0008] A disassembly assembly, which is disposed between the buffer and the box body and is used for installing and disassembling the buffer and the box body; and

[0009] The process pipe comprises a first air pipe and a second air pipe arranged on a buffer, a quick plug-in unit is arranged between the first air pipe and the second air pipe, and the quick plug-in unit is used for quickly plugging the first air pipe and the second air pipe.

[0010] As a preferred technical solution of the present application, a plurality of pores are provided on the front end surface of the buffer, and the diameter of the pores is much larger than the diameter of the target ash.

[0011] As a preferred technical solution of the present application, the disassembly assembly includes a first threaded hole opened on the side walls at both ends of the buffer, a second threaded hole opened on the side walls at both ends of the box body, and a bolt threadedly connected between the first threaded hole and the second threaded hole.

[0012] As a preferred technical solution of the present application, the quick plug-in unit includes a first fixed plate arranged on the outer wall of the first trachea, a limiting groove opened at the lower end of the first fixed plate, a first sliding groove opened on the side wall of the first fixed plate, a clamping groove opened at the bottom of the first fixed plate, a limiting block arranged on the side wall of the first fixed plate, a movable rod arranged between the limiting block and the first fixed plate, a connecting rod arranged on the rod wall of the movable rod, a pushing block arranged on the end of the connecting rod away from the movable rod, a movable block arranged on the end face of the movable rod, a second fixed plate arranged on the outer wall of the second trachea, a first fixed block arranged on the top of the second fixed plate, a clamping block slidably arranged inside the first fixed block, and a second spring arranged between the clamping block and the inner wall of the first fixed block, wherein a limiting groove is opened at the bottom of the first fixed plate, a first sliding groove matched with the connecting rod and the pushing block is opened on the side wall of the first fixed plate, and a clamping groove matched with the first fixed block is opened at the bottom of the first fixed plate.

[0013] As a preferred technical solution of the present application, a first spring is provided on the top of the second fixing plate, and an extrusion ring matching the limiting groove is provided on the top of the first spring.

[0014] As a preferred technical solution of the present application, a door is hingedly provided at the front end of the box body, and a transparent window is fixedly provided at the lower end of the door.

[0015] Compared with the prior art, the utility model provides a new gas path structure applied to reactive plasma coating equipment, which has the following beneficial effects:

[0016] 1. The gas can be uniformly sprayed into the process chamber inside the box body through the injection assembly, so that the process gas can react evenly with the target material in the reaction area, avoiding uneven film thickness, improving the uniformity of the deposited film, improving the stability of the coating process, reducing film defects, improving the quality and reliability of the film, making the utilization rate of the coating material higher, reducing waste generation, and solving the problem in the prior art that it is not conducive to achieving uniform distribution of the reaction gas in the plasma zone.

[0017] 2. The buffer and the box can be disassembled by disassembling the components, and the quick plug-in can quickly install and disassemble the process air pipe and the buffer, thereby improving the stability of the buffer fixation. At the same time, it is convenient to clean, replace or repair the disassembled buffer and process air pipe, so that they can operate normally and extend their service life, which solves the problem of inconvenience in disassembling the buffer and the process air pipe in the prior art. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the structure of the utility model;

[0019] Figure 2 It is a schematic diagram of the cross-sectional structure of the utility model;

[0020] Figure 3 It is a schematic diagram of the buffer connection structure of the utility model;

[0021] Figure 4 It is a schematic diagram of the connection structure of the first fixing plate and the second fixing plate of the utility model.

[0022] In the figure:

[0023] 1. Box body; 2. Electron gun; 3. Buffer; 301. First threaded hole; 302. Second threaded hole; 303. Bolt; 4. Air hole; 5. First air pipe; 501. Second air pipe; 6. First fixed plate; 601. Limiting groove; 602. First slide groove; 603. Clamping groove; 604. Limiting block; 605. Movable rod; 606. Connecting rod; 607. Pushing block; 608. Movable block; 7. Second fixed plate; 701. First spring; 702. Extrusion ring; 703. First fixed block; 704. Second spring; 705. Clamping block; 8. Support column; 9. Support plate; 901. Cooling plate; 902. Sliding block; 903. Second slide groove; 904. Second fixed block; 905. Power supply; 906. Copper rod electrode; 907. Target base; 908. Heating wire; 10. Box door; 1001. Transparent window. DETAILED DESCRIPTION

[0024] The technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model; it is obvious that the described embodiments are only part of the embodiments of the utility model, rather than all of the embodiments, and all other embodiments obtained by ordinary technicians in this field based on the embodiments of the utility model without making creative work are within the scope of protection of the utility model.

[0025] Example:

[0026] like Figure 1-4As shown, this embodiment proposes a new gas path structure applied to reactive plasma coating equipment, including a box body 1, an electron gun 2 is arranged on the back of the box body 1, a process chamber is arranged inside the box body 1, and also includes an injection assembly, a disassembly assembly and a process pipe, the injection assembly includes a plurality of process gas pipes arranged on the inner wall of the process chamber of the box body 1 and a buffer 3 detachably arranged on the inner wall of the process chamber of the box body 1, the disassembly assembly is arranged between the buffer 3 and the box body 1, and is used to install and disassemble the buffer 3 and the box body 1, the process pipe includes a first gas pipe 5 and a second gas pipe 501 arranged on the buffer 3, a quick plug is arranged between the first gas pipe 5 and the second gas pipe 501, and the quick plug is used to quickly plug the first gas pipe 5 and the second gas pipe 501;

[0027] The electron gun 2 is operated to inject the target ash into the buffer 3 through the first air pipe 5 and the second air pipe 501, and then the target ash is evenly discharged from the multiple air outlet holes 4 on the surface of the buffer 3 into the process chamber inside the box 1, so that the process gas reacts evenly with the target material in the reaction area, avoids uneven film thickness, improves the uniformity of the deposited film, improves the stability of the coating process, reduces film defects, improves the quality and reliability of the film, makes the coating material utilization rate higher, reduces waste generation, and solves the problem in the prior art that it is not conducive to achieving uniform distribution of reaction gas in the plasma zone. The buffer 3 and the box 1 are disassembled by disassembling the components, and the quick plug-in can realize the rapid installation and disassembly of the first air pipe 5, the second air pipe 501 and the buffer 3, thereby improving the stability of the buffer 3 fixation, and at the same time facilitates the cleaning, replacement or repair of the disassembled buffer 3 and the first air pipe 5 and the second air pipe 501, so that they can operate normally and extend their service life, solving the problem in the prior art that it is inconvenient to disassemble the buffer 3 and the process air pipe.

[0028] A plurality of air holes 4 are formed on the front end surface of the buffer 3 , and the diameter of the air holes 4 is much larger than the diameter of the target ash, thereby preventing the target ash from clogging the air holes 4 .

[0029] like Figure 3 As shown, the disassembly assembly includes a first threaded hole 301 opened on the side walls at both ends of the buffer 3, a second threaded hole 302 opened on the side walls at both ends of the box body 1, and a bolt 303 threadedly connected between the first threaded hole 301 and the second threaded hole 302;

[0030] The bolt 303 extends through the corresponding second threaded hole 302 and the first threaded hole 301 and is threadedly connected so that the air hole 4 of the buffer 3 faces the reaction zone, and the process gas is evenly distributed toward the reaction zone. At the same time, it is easy to clean, replace or repair it, so that it can operate normally and extend its service life.

[0031] like Figure 4As shown, the quick plug-in unit includes a first fixing plate 6 arranged on the outer wall of the first air pipe 5, a limiting groove 601 opened at the lower end of the first fixing plate 6, a first sliding groove 602 opened on the side wall of the first fixing plate 6, a clamping groove 603 opened at the bottom of the first fixing plate 6, a limiting block 604 arranged on the side wall of the first fixing plate 6, a movable rod 605 arranged between the limiting block 604 and the first fixing plate 6, a connecting rod 606 arranged on the rod wall of the movable rod 605, a pushing block 607 arranged at one end of the connecting rod 606 away from the movable rod 605, and a movable Block 608, a second fixing plate 7 arranged on the outer wall of the second air pipe 501, a first fixing block 703 arranged on the top of the second fixing plate 7, a clamping block 705 slidably arranged inside the first fixing block 703, and a second spring 704 arranged between the clamping block 705 and the inner wall of the first fixing block 703, wherein the bottom of the first fixing plate 6 is provided with a limiting groove 601, the side wall of the first fixing plate 6 is provided with a first sliding groove 602 matched with the connecting rod 606 and the pushing block 607, and the bottom of the first fixing plate 6 is provided with a clamping groove 603 matched with the first fixing block 703;

[0032] A first spring 701 is provided on the top of the second fixing plate 7, and an extrusion ring 702 matching with the limiting groove 601 is provided on the top of the first spring 701;

[0033] By respectively engaging the plurality of clamping blocks 705 with the corresponding first slide grooves 602, the plurality of second springs 704 drive the clamping blocks 705 to slide inside the corresponding first slide grooves 602, limit the second fixed plate 7, connect the first air pipe 5 with the second air pipe 501, and enable the normal operation of the buffer 3. By pushing the movable block 608, the corresponding connecting rod 606 drives the pushing block 607 to squeeze the clamping block 705, compress the second spring 704, and make the clamping blocks 705 slide inside the corresponding first fixed blocks 703, respectively, so that the second fixed plate 7 is disengaged from the clamping groove 603. At the same time, the first spring 701 drives the squeezing ring 702, so that it drives the second fixed plate 7 to move downward, so that the first air pipe 5 and the second air pipe 501 are disconnected, which can prevent problems such as blockage, corrosion or accumulation of impurities, improve the stability and reliability of the equipment, and facilitate the inspection and replacement of the first air pipe 5 and the second air pipe 501, thereby improving the reliability and maintenance efficiency of the equipment.

[0034] Among them, the front end of the box body 1 is hingedly provided with a box door 10, and the lower end of the box door 10 is fixedly provided with a transparent window 1001; the box door 10 is convenient for operators to put samples into and take out the equipment, thereby improving operating efficiency and effectively isolating the coating room from the external environment, preventing external gas and impurities from entering, and improving the accuracy and stability of the coating process. The transparent window 1001 is convenient for operators to observe the coating process.

[0035] Specifically, the novel air path structure applied to the reactive plasma coating equipment, when working: a plurality of clamping blocks 705 are respectively engaged with the corresponding first slide grooves 602, so that a plurality of second springs 704 drive the clamping blocks 705 to slide inside the corresponding first slide grooves 602, limit the second fixed plate 7, connect the first air pipe 5 and the second air pipe 501, and make the air holes 4 of the buffer 3 face the reaction area inside the box body 1.

[0036] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A novel gas path structure for reactive plasma coating equipment, comprising a box (1), characterized in that: An electron gun (2) is arranged on the back of the box (1), a process chamber is arranged inside the box (1), and further comprises: An injection assembly, the injection assembly comprising a plurality of process gas pipes arranged on the inner wall of a process chamber of a box body (1) and a buffer (3) detachably arranged on the inner wall of the process chamber of the box body (1); A disassembly assembly, the disassembly assembly being arranged between the buffer (3) and the box (1) and being used for installing and disassembling the buffer (3) and the box (1); and A process pipe, the process pipe comprising a first air pipe (5) and a second air pipe (501) arranged on a buffer (3), a quick plug-in connector being arranged between the first air pipe (5) and the second air pipe (501), the quick plug-in connector being used for quickly plugging the first air pipe (5) and the second air pipe (501).

2. According to claim 1, a novel gas path structure applied to reactive plasma coating equipment is characterized in that: The front end surface of the buffer (3) is provided with a plurality of air holes (4), and the diameter of the air holes (4) is much larger than the diameter of the target ash.

3. According to claim 1, a novel gas path structure applied to reactive plasma coating equipment is characterized in that: The disassembly assembly comprises a first threaded hole (301) formed on the side walls at both ends of the buffer (3), a second threaded hole (302) formed on the side walls at both ends of the box body (1), and a bolt (303) threadedly connected between the first threaded hole (301) and the second threaded hole (302).

4. According to claim 2, a novel gas path structure applied to reactive plasma coating equipment is characterized in that: The quick-plug assembly comprises a first fixing plate (6) arranged on the outer wall of the first air pipe (5), a limiting groove (601) provided at the lower end of the first fixing plate (6), a first sliding groove (602) provided on the side wall of the first fixing plate (6), a clamping groove (603) provided at the bottom of the first fixing plate (6), a limiting block (604) provided on the side wall of the first fixing plate (6), a movable rod (605) provided between the limiting block (604) and the first fixing plate (6), a connecting rod (606) provided on the rod wall of the movable rod (605), a pushing block (607) provided at the end of the connecting rod (606) away from the movable rod (605), and a movable block (608) provided on the end surface of the movable rod (605). 08), a second fixed plate (7) arranged on the outer wall of the second air pipe (501), a first fixed block (703) arranged on the top of the second fixed plate (7), a clamping block (705) slidably arranged inside the first fixed block (703), and a second spring (704) arranged between the clamping block (705) and the inner wall of the first fixed block (703), wherein a limiting groove (601) is provided at the bottom of the first fixed plate (6), a first sliding groove (602) matched with the connecting rod (606) and the pushing block (607) is provided on the side wall of the first fixed plate (6), and a clamping groove (603) matched with the first fixed block (703) is provided at the bottom of the first fixed plate (6).

5. The novel gas path structure applied to reactive plasma coating equipment according to claim 4 is characterized in that: A first spring (701) is provided on the top of the second fixing plate (7), and an extrusion ring (702) matching with the limiting groove (601) is provided on the top of the first spring (701).

6. The novel gas path structure applied to reactive plasma coating equipment according to claim 1 is characterized in that: The front end of the box body (1) is hingedly provided with a box door (10), the lower end of the box door (10) is fixedly provided with a transparent window (1001), and one side of the upper end of the box door (10) is fixedly provided with a controller (1002).

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