Silicon wafer feeding device
By designing a silicon wafer loading device including cameras and fixtures, it automatically identifies and removes damaged wafers during the silicon wafer production process, and solves the problem of high manual selection error rate in the prior art, thus achieving more efficient and accurate automated processing.
Patent Information
- Application Number
- CN202421583975.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-05
- Publication Date
- 2025-04-15
- Estimated Expiration
- 2034-07-05
AI Technical Summary
During the existing silicon wafer production process, silicon wafers are prone to breakage in multiple processes, resulting in manual selection, high error rate and low efficiency.
A silicon wafer loading device is designed, including a first conveying device, a frame, a longitudinal cylinder, a lifting cylinder, a transverse cylinder, a camera and a fixture. The damaged sheet is identified by the camera and the damaged sheet is automatically removed by the fixture to realize automatic processing.
By automatically identifying and removing damaged pieces, errors in manual identification are avoided, processing efficiency is improved, error rate is reduced, and automation is improved.
Smart Images
Figure CN222762936U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of silicon wafer production, and in particular to a silicon wafer loading device. Background Art
[0002] In the existing silicon wafer production process, the silicon wafers packed in the baskets will go through multiple processes. During the production process, some silicon wafers will be damaged. Currently, they can only be selected manually, with a high error rate and low efficiency. Utility Model Content
[0003] The utility model aims to provide a silicon wafer loading device to overcome the deficiencies in the prior art.
[0004] In order to achieve the above purpose, the utility model provides the following technical solutions:
[0005] An embodiment of the present application discloses a silicon wafer loading device, which is characterized by: comprising a first conveying device and a frame arranged above the first conveying device, a first longitudinal electric cylinder and a second longitudinal electric cylinder are respectively fixed to the end faces of both sides of the frame, the first longitudinal electric cylinder and the second longitudinal electric cylinder are respectively slidably connected with a lifting electric cylinder and a transverse electric cylinder, the transverse electric cylinder is slidably connected with a camera, the lifting electric cylinder is slidably connected with a clamp for clamping a flower basket, and a second conveying device is provided on the side of the first conveying device facing the side of the second longitudinal electric cylinder of the frame.
[0006] Preferably, in the above-mentioned silicon wafer loading device, the second conveying device includes a first double-column conveyor and a pair of second double-column conveyors, the pair of second double-column conveyors are symmetrically arranged on both sides of the first double-column conveyor, and the facing ends of the pair of second double-column conveyors extend into the first double-column conveyor.
[0007] Preferably, in the above-mentioned silicon wafer loading device, the first double-row conveyor and the second double-row conveyor are parallel to the first conveying device.
[0008] Preferably, in the above-mentioned silicon wafer loading device, the first double-row conveyor and the second double-row conveyor have the same height.
[0009] Preferably, in the above-mentioned silicon wafer loading device, the first longitudinal electric cylinder can at least cover the first conveying device and the second conveying device, and the second longitudinal electric cylinder can at least cover the first conveying device.
[0010] Preferably, in the above-mentioned silicon wafer loading device, the first conveying device is a stepping conveyor.
[0011] Compared with the prior art, the advantages of the utility model are:
[0012] Through structural coordination, the functions of identifying and removing damaged pieces are realized, avoiding manual identification, being more accurate and efficient, with a high degree of automation, and improving efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0013] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present application. For ordinary technicians in this field, it is easy to obtain other drawings based on these drawings without creative work.
[0014] Figure 1 The figure is a schematic diagram of the main structure of the silicon wafer loading device in a specific embodiment of the utility model;
[0015] Figure 2 Shown is a three-dimensional diagram of a silicon wafer loading device in a specific embodiment of the utility model. DETAILED DESCRIPTION
[0016] The following will be combined with the drawings in the embodiments of the utility model to describe the technical solutions in the embodiments of the utility model in detail. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0017] Ginseng Figure 1~2 As shown, the silicon wafer loading device in this embodiment includes a first conveying device 1 and a frame 2 arranged above the first conveying device 1, and a first longitudinal electric cylinder 3 and a second longitudinal electric cylinder 4 are respectively fixed on the end faces of both sides of the frame 2, and a lifting electric cylinder 5 and a transverse electric cylinder 6 are respectively slidably connected to the first longitudinal electric cylinder 3 and the second longitudinal electric cylinder 4, a camera 7 is slidably connected to the transverse electric cylinder 6, and a clamp 8 for clamping a flower basket is slidably connected to the lifting electric cylinder 5, and a second conveying device 9 is provided on the side of the first conveying device 1 of the frame 2 facing the second longitudinal electric cylinder 4.
[0018] Furthermore, the second conveying device 9 includes a first double-column conveyor 901 and a pair of second double-column conveyors 902. The pair of second double-column conveyors 902 are symmetrically arranged on both sides of the first double-column conveyor 901, and the opposite ends of the pair of second double-column conveyors 902 extend into the first double-column conveyor 901. The flower baskets with broken pieces on the second conveying device need to be taken and processed manually. When the manual labor is busy, the flower baskets are conveyed to the first double-column conveyor via one of the second double-column conveyors, so that multiple flower baskets can be queued on the first double-column conveyor to be processed manually, and then enter the subsequent process via another second double-column conveyor after processing, which is more reasonable and efficient.
[0019] Furthermore, the first double-row conveyor 901 and the second double-row conveyor 902 are parallel to the first conveying device 1 .
[0020] Furthermore, the first double-column conveyor 901 and the second double-column conveyor 902 have the same height.
[0021] Furthermore, the first longitudinal electric cylinder 3 can at least cover the first conveying device 1 and the second conveying device 9 , and the second longitudinal electric cylinder 4 can at least cover the first conveying device 1 .
[0022] Furthermore, the first conveying device 1 is a stepping conveyor.
[0023] In this technical solution, flower baskets with silicon wafers are placed in rows and columns on a first conveying device for conveyance by an existing robotic arm, and the second longitudinal electric cylinder and the transverse electric cylinder cooperate to drive the camera to move to identify the silicon wafers in the flower basket. When broken wafers are detected, after the flower basket with the broken wafers passes through the rack, the first longitudinal cylinder and the lifting electric cylinder cooperate to drive the clamp to move the flower basket with the broken wafers to the second conveying device for subsequent processing, thereby avoiding manual identification, being more accurate and efficient, and having a high degree of automation, thereby improving efficiency.
[0024] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.
[0025] The above is only a specific implementation method of the present application. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present application. These improvements and modifications should also be regarded as the scope of protection of the present application.
Claims
1. A silicon wafer feeding device, characterized in that: It includes a first conveying device and a frame arranged above the first conveying device, wherein a first longitudinal electric cylinder and a second longitudinal electric cylinder are respectively fixed on the end surfaces of both sides of the frame, and a lifting electric cylinder and a transverse electric cylinder are respectively slidably connected to the first longitudinal electric cylinder and the second longitudinal electric cylinder, a camera is slidably connected to the transverse electric cylinder, and a clamp for clamping a flower basket is slidably connected to the lifting electric cylinder, and a second conveying device is provided on the side of the first conveying device facing the second longitudinal electric cylinder.
2. A silicon wafer loading device according to claim 1, characterized in that: The second conveying device includes a first double-column conveyor and a pair of second double-column conveyors, wherein the pair of second double-column conveyors are symmetrically arranged on both sides of the first double-column conveyor, and the opposite ends of the pair of second double-column conveyors extend into the first double-column conveyor.
3. A silicon wafer loading device according to claim 2, characterized in that: The first double-row conveyor and the second double-row conveyor are parallel to the first conveying device.
4. A silicon wafer loading device according to claim 2, characterized in that: The first double-row conveyor and the second double-row conveyor have the same height.
5. The silicon wafer loading device according to claim 2, characterized in that: The first longitudinal electric cylinder can at least cover the first conveying device and the second conveying device, and the second longitudinal electric cylinder can at least cover the first conveying device.
6. The silicon wafer loading device according to claim 1, characterized in that: The first conveying device is a stepping conveyor.