Multi-channel delay compensation device and test equipment

Abstract

The utility model discloses a multi-channel delay compensation device and test equipment, and belongs to the technical field of semiconductor test.The multi-channel delay compensation device comprises a sampling module, a first delay unit and a control module, the sampling module and the first delay unit are connected with each other, the control module is connected with the sampling module and the first delay unit, and the sampling module comprises a plurality of sampling paths; the sampling path comprises a plurality of channels; the first delay unit is used for receiving and delaying a pulse signal sent by a signal source, obtaining a first pulse signal and sending the first pulse signal to the sampling module; the control module is used for controlling the sampling module to select at least one sampling path for transmitting a first pulse signal; the sampling module is used for transmitting and / or delaying the first pulse signal through a plurality of channels of a sampling path, so that the control module obtains an output pulse signal, calculates a delay deviation value of each channel based on sampling information of the output pulse signal, and controls the first delay unit and the sampling module to carry out delay compensation. The device is simple in design, economical, practical and wide in application range.

Description

Technical Field

[0001] The present application belongs to the field of semiconductor testing technology, and specifically relates to a multi-channel delay compensation device and testing equipment. Background Art

[0002] Semiconductor automated testing refers to the use of automatic test equipment (ATE) to test various parameters of the device under test (DUT) to eliminate defective products and control the factory quality of semiconductor devices.

[0003] The digital sampling channels of semiconductor automated test equipment usually have multiple sampling modes, which means that there are different data acquisition paths inside the digital channels, and these sampling paths often exist in a branching manner. When switching the sampling mode, it involves the compensation changes of the delay paths corresponding to each path.

[0004] The process switching efficiency during the digital tester test directly affects the time required to test the chip, and the test cost will be greatly affected, so the continuity of the chip test process is very important. In the prior art, for the calibration measurement method of the sampling path, an external signal source is usually connected or an internal signal loop is used to measure the time it takes for the waveform to enter the tester and arrive at the sampling. After using an input signal with adjustable delay to measure these sampling paths separately, the different sampling times are recorded, and the compensation value required for each path is calculated. When switching the sampling mode, additional time will be generated, and the time for the previous sampling data to be parsed needs to be considered, which ultimately results in a long waiting time for the sampling switching process, which seriously affects the test efficiency of the tester. Utility Model Content

[0005] The purpose of the present application is to provide a multi-channel delay compensation device and a test device so that when the sampling mode is switched while the test machine is working, there is no need to re-modify the compensation configuration. Only the corresponding sampling path can be enabled to achieve signal alignment within the path.

[0006] According to a first aspect of an embodiment of the present application, a multi-channel delay compensation device is provided, which may include: a sampling module and a first delay unit connected to each other, and a control module connected to the sampling module and the first delay unit respectively, the sampling module includes a plurality of sampling paths, and the sampling path includes a plurality of channels; the first delay unit is used to receive and delay a pulse signal sent by a signal source, obtain a first pulse signal and send it to the sampling module;

[0007] The control module is used to control the sampling module to select at least one sampling path for transmitting the first pulse signal;

[0008] The sampling module is used to transmit and / or delay the first pulse signal through multiple channels of the sampling path so that the control module obtains the output pulse signal, and calculates the delay deviation value of each channel based on the sampling information of the output pulse signal, and controls the first delay unit and the sampling module to perform delay compensation.

[0009] In some optional embodiments of the present application, the plurality of sampling paths include: a first sampling path and a second sampling path, the second sampling path is provided with a second delay unit, and the control module is connected to the second delay unit;

[0010] A plurality of channels in the first sampling path are connected to the first delay unit, and the control module is used to calculate the delay deviation value of each channel based on the sampling information of the output pulse signal of each channel, and control the delay compensation of the first delay unit;

[0011] The plurality of channels in the second sampling path are connected to the first delay unit through the second delay unit, and the control module is used to control the second delay unit to perform delay compensation based on the delay compensation of the first delay unit.

[0012] In some optional embodiments of the present application, the plurality of sampling paths further include: a third sampling path, the third sampling path being provided with a third delay unit;

[0013] The multiple channels in the third sampling path are connected to the second delay unit through the third delay unit, and the control module is used to control the third delay unit to perform delay compensation based on the delay compensation of the first delay unit and the second delay unit.

[0014] In some optional embodiments of the present application, the third delay unit is a delay chain;

[0015] The control module is used to control the sampling module to select the tap of the delay chain based on the delay compensation of the first delay unit and the second delay unit, so as to align the output pulse signals of the multi-channels of the third sampling path.

[0016] In some optional embodiments of the present application, the control module includes a calculation and compensation unit and a control unit connected to each other;

[0017] The calculation and compensation unit is connected to the output end of the sampling module, and is used to receive the output pulse signal, and calculate the delay deviation value of each channel based on the sampling information of the output pulse signal, so as to transmit it to the control unit;

[0018] The control unit is connected to the first delay unit and the sampling module, and is used to control the first delay unit and the sampling module to perform delay compensation based on the received delay deviation value.

[0019] In some optional embodiments of the present application, the sampling module includes: a switching module, the control end of the switching module is connected to the control module, and the connection end of the switching module is used to connect multiple sampling paths with the first delay unit, so that the control module controls the switching module to switch the paths among the multiple sampling paths.

[0020] In some optional embodiments of the present application, the first delay unit and the second delay unit are one of the Idelay, odelay, and carry delay chains.

[0021] According to a second aspect of the embodiments of the present application, a test device is provided, which may include: a multi-channel delay compensation device according to any one of the embodiments of the first aspect.

[0022] In some optional embodiments of the present application, a host computer is included, which is connected to the control module to receive and display the pulse signal.

[0023] The above technical solution of the present application has the following beneficial technical effects:

[0024] The device of the embodiment of the present application is provided with a sampling module and a first delay unit which are interconnected, and a control module which is respectively connected to the sampling module and the first delay unit. The sampling module includes a plurality of sampling paths, and the sampling path includes a plurality of channels. The first delay unit receives and delays the pulse signal sent by the signal source, obtains the first pulse signal and sends it to the sampling module; the control module is used to control the sampling module to select at least one sampling path for transmitting the first pulse signal; the first pulse signal is transmitted and / or delayed through the plurality of channels of the sampling path, so that the control module obtains the output pulse signal, and calculates the delay deviation value of each channel based on the sampling information of the output pulse signal, and controls the first delay unit and the sampling module to perform delay compensation. When the device is tested, the control module can control the sampling module to select one of the plurality of sampling paths, that is, the real-time switching of different sampling modes can be realized, and the waiting time caused by the additional process switching is not required, and the signal output alignment is realized through the delay compensation of each sampling path. The device is simple in design, economical and practical, and has a wide range of applications. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 is a schematic structural diagram of a multi-channel delay compensation device in an exemplary embodiment of the present application;

[0026] Figure 2 is a schematic diagram of the structure of a multi-channel delay compensation device for two sampling paths in an exemplary embodiment of the present application;

[0027] Figure 3 is a schematic structural diagram of a multi-channel delay compensation device with three sampling paths in an exemplary embodiment of the present application;

[0028] Figure 4 is a schematic structural diagram of a multi-channel delay compensation device in another exemplary embodiment of the present application;

[0029] Figure 5 is a structural schematic diagram of a multi-channel delay compensation device in another exemplary embodiment of the present application;

[0030] Figure 6 It is a structural schematic diagram of a multi-channel delay compensation device in a specific embodiment of the present application. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical solutions and advantages of the present application clearer, the present application is further described in detail below in conjunction with specific implementations and with reference to the accompanying drawings. It should be understood that these descriptions are only exemplary and are not intended to limit the scope of the present application. In addition, in the following description, the description of known structures and technologies is omitted to avoid unnecessary confusion of the concepts of the present application.

[0032] The accompanying drawings show schematic diagrams of layer structures according to embodiments of the present application. These figures are not drawn to scale, and some details are magnified and some details may be omitted for the purpose of clarity. The shapes of various regions and layers shown in the figures and the relative sizes and positional relationships therebetween are only exemplary, and may deviate in practice due to manufacturing tolerances or technical limitations, and those skilled in the art may additionally design regions / layers with different shapes, sizes, and relative positions according to actual needs.

[0033] Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0034] In the description of the present application, it should be noted that the terms "first", "second" and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0035] In addition, the technical features involved in the different embodiments of the present application described below can be combined with each other as long as they do not conflict with each other.

[0036] The multi-channel delay compensation device and test equipment provided in the embodiments of the present application are described in detail below with reference to the accompanying drawings through specific embodiments and their application scenarios.

[0037] like Figure 1As shown, in a first aspect of an embodiment of the present application, a multi-channel delay compensation device is provided, and the multi-channel delay compensation device may include: a sampling module and a first delay unit connected to each other, and a control module connected to the sampling module and the first delay unit respectively, the sampling module includes a plurality of sampling paths, and the sampling path includes a plurality of channels; the first delay unit is used to receive and delay a pulse signal sent by a signal source, obtain a first pulse signal and send it to the sampling module;

[0038] The control module is used to control the sampling module to select at least one sampling path for transmitting the first pulse signal;

[0039] The sampling module is used to transmit and / or delay the first pulse signal through multiple channels of the sampling path so that the control module obtains the output pulse signal, and calculates the delay deviation value of each channel based on the sampling information of the output pulse signal, and controls the first delay unit and the sampling module to perform delay compensation.

[0040] The device of this embodiment can realize real-time switching of different sampling modes when testing, without the need for waiting time caused by additional process switching, and the device is simple in design, economical and practical, and has a wide range of applications.

[0041] like Figure 2 As shown, in some embodiments, the plurality of sampling paths include: a first sampling path and a second sampling path, the second sampling path is provided with a second delay unit, and the control module is connected to the second delay unit;

[0042] A plurality of channels in the first sampling path are connected to the first delay unit, and the control module is used to calculate the delay deviation value of each channel based on the sampling information of the output pulse signal of each channel, and control the delay compensation of the first delay unit;

[0043] The plurality of channels in the second sampling path are connected to the first delay unit through the second delay unit, and the control module is used to control the second delay unit to perform delay compensation based on the delay compensation of the first delay unit.

[0044] For the first sampling path, the control module obtains the output pulse signal output by each channel of the first sampling path, calculates the delay deviation value of each channel based on the sampling information of the output pulse signal, and controls the first delay unit to perform delay compensation. After compensation, the pulse signal emitted by the signal source is transmitted along the first sampling path through the first delay unit to achieve signal alignment; for the second sampling path, the control module controls the second delay unit in the sampling module to perform delay compensation based on the delay compensation of the first delay unit. Specifically, the control module obtains the sampling information of the output pulse signal transmitted through the second sampling path, calculates the delay deviation value of each channel, and controls the second delay unit to perform delay compensation to achieve signal alignment.

[0045] In this embodiment, the control module first performs delay compensation on the first delay unit based on the first sampling path. On the basis of the delay compensation on the first delay unit, the control module controls the second delay unit to perform delay compensation. After the two-stage delay compensation, the pulse signal emitted by the signal source passes through the first delay unit, the second delay unit, and the pulse signal output after passing through multiple channels in the second sampling path to achieve signal alignment. In this embodiment, the first sampling path and the second sampling path are compensated separately to meet the compensation requirements of the two paths at the same time. There is no need to reconfigure the compensation of the two sampling paths, and real-time switching between the two sampling modes of the first sampling path and the second sampling path can be achieved.

[0046] like Figure 3 As shown, in some embodiments, the plurality of sampling paths further include: a third sampling path, the third sampling path being provided with a third delay unit;

[0047] The multiple channels in the third sampling path are connected to the second delay unit through the third delay unit, and the control module is used to control the third delay unit to perform delay compensation based on the delay compensation of the first delay unit and the second delay unit.

[0048] In this embodiment, the pulse signal sent by the signal source is output through the first delay unit, the second delay unit, the third delay unit and multiple channels in the third sampling path. The control module obtains the output pulse signal, obtains sampling information of the output pulse signal, calculates the delay deviation value of each channel in the third sampling path, performs delay compensation on the first delay unit based on the first sampling path, and controls the sampling module to perform delay compensation on the second delay unit based on the second sampling path. On the basis of the delay compensation of the first delay unit and the second delay unit, the control module performs delay compensation on the third delay unit. After three levels of delay compensation, the pulse signals sent by the signal source are aligned through the first delay unit, the second delay unit, the third delay unit and multiple channels in the third sampling path.

[0049] In this embodiment, the first sampling path, the second sampling path and the third sampling path are compensated separately to meet the compensation requirements of all paths at the same time. There is no need to reconfigure the compensation of the sampling paths, and real-time switching of the three sampling modes of the first sampling path, the second sampling path and the third sampling path can be achieved.

[0050] In some embodiments, the third delay unit is a delay chain;

[0051] The control module selects the tap of the delay chain based on the delay compensation of the first delay unit and the second delay unit to align the output pulse signals of the multi-channels of the third sampling path.

[0052] In this embodiment, the pulse signal sent by the signal source is transmitted through the first delay unit, the first delay unit, the delay chain and the multiple channels in the third sampling path to the control module. The control module first performs delay compensation on the first delay unit based on the first sampling path, and controls the sampling module to perform delay compensation on the second delay unit based on the second sampling path. On the basis of the delay compensation of the first delay unit and the second delay unit, the delay deviation value of each channel in the third sampling path selects the tap of the delay chain based on the delay deviation value of each channel in the third sampling path, so that the pulse signal sent by the signal source is aligned after three-level delay compensation.

[0053] In this embodiment, the delay compensation data of the third sampling path is converted into the compensation configuration of the delay chain tap, so that the control module selects the delay chain tap during the sampling process, and the signal alignment of the third sampling path can be achieved. This structure can save the use of delay modules and increase the diversity of delay compensation.

[0054] like Figure 4 As shown, in some embodiments, the control module includes a calculation and compensation unit and a control unit connected to each other;

[0055] The calculation and compensation unit is connected to the output end of the sampling module, and is used to receive the output pulse signal output by each sampling path in the sampling module, and calculate the delay deviation value of each channel in each sampling path based on the sampling information of the output pulse signal, so as to transmit it to the control unit;

[0056] The control unit is connected to the first delay unit and the sampling module, and is used to control the first delay unit and the sampling module to perform delay compensation based on the received delay deviation value. In the specific sampling process, the calculation and compensation unit receives the output pulse signal output by the sampling module, and calculates the delay deviation value of each channel according to the pulse signal, and then sends the delay deviation value of each channel to the control unit, and the control unit controls the first delay unit and the sampling module to perform delay compensation to achieve signal alignment.

[0057] like Figure 5 As shown, in some embodiments, the sampling module includes: a switching module, a control end of the switching module is connected to the control module, and the connection end of the switching module is used to connect multiple sampling paths with the first delay unit, so that the control module controls the switching module to switch the paths among the multiple sampling paths.

[0058] The switching module in this embodiment is based on the alignment of multiple sampling paths. Since each sampling path is aligned, there is no need to switch the compensation value of the corresponding sampling path when switching the sampling mode. Therefore, real-time switching of the sampling path can be achieved without additional waiting time, which greatly improves the test efficiency of the automated test equipment.

[0059] In some embodiments, the first delay unit and the second delay unit are one of Idelay, odelay, and carry delay chains.

[0060] like Figure 6 As shown, the signal source is connected to the first delay unit, the first delay unit is connected to the sampling module, the sampling module is connected to the calculation and compensation unit, and the calculation and compensation unit is connected to the control unit. The sampling module includes a first sampling path, a second sampling path and a third sampling path, the first sampling path is connected to the first delay unit, the second sampling path is provided with a second delay unit, the second delay unit is connected to the first delay unit, the third sampling path is provided with a third delay unit, the third delay unit is connected to the second delay unit and the first delay unit, and the control unit is connected to the first delay unit, the second delay unit and the third delay unit.

[0061] The signal source transmits a pulse signal to the first delay unit, and after being delayed by the first delay unit, the pulse signal is output to the calculation and compensation unit through the first sampling path. The calculation and compensation unit calculates the delay deviation value of each channel based on the sampling information of the output pulse signal, and outputs it to the control unit. The control unit controls the first delay unit to change the delay value, so that the pulse signal sent by the signal source is output after passing through the first delay unit and the first sampling path to achieve signal alignment;

[0062] After adjusting the delay value based on the first delay unit, the signal source transmits a pulse signal through the first delay unit and the second delay unit in the second sampling path and then outputs it to the calculation and compensation unit. The calculation and compensation unit calculates the delay deviation value of each channel based on the sampling information of the output pulse signal and outputs it to the control unit. The control unit controls the second delay unit to change the delay value based on the unchanged delay value of the first delay unit, so that the pulse signal sent by the signal source and the pulse signal output after passing through the first delay unit and the second sampling path can achieve signal alignment;

[0063] After adjusting the delay value based on the first delay unit and the second delay unit, the signal source transmits a pulse signal through the first delay unit, the second delay unit and the third delay unit in the third sampling path and then outputs it to the calculation and compensation unit. The calculation and compensation unit calculates the delay deviation value of each channel based on the sampling information of the output pulse signal and outputs it to the control unit. The control unit controls the third delay unit to change the delay value based on the unchanged delay value of the first delay unit and the second delay unit, so that the pulse signal sent by the signal source and the pulse signal output after passing through the first delay unit, the second delay unit and the second sampling path can achieve signal alignment.

[0064] After various levels of delay compensation, the pulse signals output by the first sampling path, the second sampling path, and the third sampling path are all aligned, and the control unit can be used to control the sampling unit to select any sampling path to achieve real-time switching of different sampling modes.

[0065] In a second aspect of the embodiments of the present application, a test device is provided, which may include: a multi-channel delay compensation device according to any one of the embodiments of the first aspect.

[0066] For the convenience and simplicity of description, the specific system structure of the test equipment described above can refer to the corresponding introduction in the aforementioned multi-channel delay compensation device embodiment. The technical problems solved and the technical effects achieved by the multi-channel delay compensation device can also be achieved by this test equipment, and will not be repeated here.

[0067] In some embodiments, a host computer is included, which is connected to the control module and receives and displays the pulse signal.

[0068] For the convenience and simplicity of description, the specific system structure of the test equipment described above can refer to the corresponding introduction in the aforementioned multi-channel delay compensation device embodiment. The technical problems solved and the technical effects achieved by the multi-channel delay compensation device can also be achieved by this test equipment, and will not be repeated here.

[0069] The embodiments of the present application are described above in conjunction with the accompanying drawings, but the present application is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of the present application, ordinary technicians in this field can also make many forms without departing from the purpose of the present application and the scope of protection of the claims, all of which are within the protection of the present application.

Claims

1. A multi-channel delay compensation device, characterized in that: include: A sampling module and a first delay unit connected to each other, and a control module connected to the sampling module and the first delay unit respectively, the sampling module includes a plurality of sampling paths, and the sampling path includes a plurality of channels; the first delay unit is used to receive and delay a pulse signal sent by a signal source, obtain a first pulse signal and send it to the sampling module; The control module is used to control the sampling module to select at least one sampling path for transmitting the first pulse signal; The sampling module is used to transmit and / or delay the first pulse signal through multiple channels of the sampling path so that the control module obtains an output pulse signal, and calculates the delay deviation value of each channel based on the sampling information of the output pulse signal, and controls the first delay unit and the sampling module to perform delay compensation.

2. The multi-channel delay compensation device according to claim 1, characterized in that: The multiple sampling paths include: a first sampling path and a second sampling path, the second sampling path is provided with a second delay unit, and the control module is connected to the second delay unit; The plurality of channels in the first sampling path are connected to the first delay unit, and the control module is used to calculate the delay deviation value of each channel based on the sampling information of the output pulse signal of each channel, and control the delay compensation of the first delay unit; The plurality of channels in the second sampling path are connected to the first delay unit through the second delay unit, and the control module is used to control the second delay unit to perform delay compensation based on the delay compensation of the first delay unit.

3. The multi-channel delay compensation device according to claim 2, characterized in that: The plurality of sampling paths further include: a third sampling path, wherein the third sampling path is provided with a third delay unit; The plurality of channels in the third sampling path are connected to the second delay unit through the third delay unit, and the control module is used to control the third delay unit to perform delay compensation based on the delay compensation of the first delay unit and the second delay unit.

4. The multi-channel delay compensation device according to claim 3, characterized in that: The third delay unit is a delay chain; The control module is used to control the sampling module to select the tap of the delay chain based on the delay compensation of the first delay unit and the second delay unit, so as to align the output pulse signals of the multi-channels of the third sampling path.

5. The multi-channel delay compensation device according to any one of claims 1 to 4, characterized in that: The control module includes a calculation and compensation unit and a control unit connected to each other; The calculation and compensation unit is connected to the output end of the sampling module, and is used to receive the output pulse signal, and calculate the delay deviation value of each channel based on the sampling information of the output pulse signal, so as to transmit it to the control unit; The control unit is connected to the first delay unit and the sampling module, and is used to control the first delay unit and the sampling module to perform delay compensation based on the received delay deviation value.

6. The multi-channel delay compensation device according to claim 1, characterized in that: The sampling module includes: a switching module, a control end of the switching module is connected to the control module, and a connection end of the switching module is used to connect multiple sampling paths with the first delay unit, so that the control module controls the switching module to switch the paths among the multiple sampling paths.

7. The multi-channel delay compensation device according to any one of claims 1 to 4, characterized in that: The first delay unit and the second delay unit are one of the Idelay, odelay, and carry delay chains.

8. A testing device, characterized in that: include: The multi-channel delay compensation device according to any one of claims 1 to 7.

9. The testing device according to claim 8, characterized in that It includes a host computer, which is connected to the control module and receives and displays the pulse signal.

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