Diffusion pump cooling device

Abstract

The utility model provides a diffusion pump cooling device, which relates to the technical field of diffusion pumps and comprises a fan and a transmission gear. An electric heating oil pan is installed at the bottom end of the air suction pipe, a fixed ring plate is welded to the outer side face of the electric heating oil pan, an air inlet frame is welded to the upper side face of the fixed ring plate, a rotating fan is rotationally connected to the inner side face of the air inlet frame, and a driving gear is engaged to the inner side face of the rotating fan; the transmission fluted disc is welded to the outer side face of the rotating shaft, and the bottom end of the rotating shaft is installed on a motor shaft of the motor. The fan is connected to the upper side face of the rotating shaft through a bolt. A heat dissipation shell is welded to the lower side face of the fixing ring plate, a bottom frame is welded to the lower side face of the heat dissipation shell, and a dust cover is bonded to the outer side face of the bottom frame. Through the arrangement of the motor, the fan, the driving gear and the rotating fan, air heat dissipation of the electric heating oil pan is achieved, the heat dissipation efficiency of the air suction pipe is improved, and the problems that a traditional diffusion pump oil pan is long in natural heat dissipation time and low in cooling efficiency are solved.

Description

Technical Field

[0001] The utility model belongs to the technical field of diffusion pumps, and more specifically, particularly relates to a diffusion pump cooling device. Background Art

[0002] A diffusion pump is a vacuum pump that uses a low-pressure, high-speed, and directional oil vapor jet. Its working process is to heat the liquid working medium in the oil pan at the bottom of the pump chamber through an electric heater to form steam, which is then ejected at high speed through the pump core nozzle in the pump chamber to form a low-density, high-speed steam jet. The pumped gas enters the steam jet through diffusion and is carried away by the next-level steam jet. At present, the diffusion pump needs to be cooled after the work is completed. The pump wall of the diffusion pump is usually cooled by a water-cooling pipe surrounding the outside. The heated oil pan at the bottom of the diffusion pump is installed in a position with good air permeability to dissipate heat through natural convection. Through the above method, the cooling time of the diffusion pump oil pan is generally 2-4 hours. It can be seen that the traditional diffusion pump oil pan has a long natural heat dissipation time and a slow cooling speed. Utility Model Content

[0003] In order to solve the above technical problems at least to a certain extent, the utility model provides a diffusion pump cooling device.

[0004] The utility model provides a diffusion pump cooling device, comprising a connecting plate; an air intake pipe is welded to the lower side of the connecting plate, and an air outlet pipe is welded to the outer side of the air intake pipe; a fan is also included; a cooling pipe is welded to the outer side of the air intake pipe, an electric heating oil pan is installed at the bottom end of the air intake pipe, a fixed ring plate is welded to the outer side of the electric heating oil pan, an air intake frame is welded to the upper side of the fixed ring plate, a rotating fan is rotatably connected to the inner side of the air intake frame, a driving gear is meshedly connected to the inner side of the rotating fan, a transmission rod is welded to the center position of the lower side of the driving gear, a driven gear is welded to the outer side of the transmission rod near the bottom end, and the driven gear is welded to the lower side of the driving gear. The outer side surface of the moving gear is meshedly connected with the driving gear, the outer side surface of the driving gear is meshedly connected with the transmission gear plate, the transmission gear plate is welded to the outer side surface of the rotating shaft, the bottom end of the rotating shaft is installed on the motor shaft of the motor, and the motor is connected to the lower side surface of the chassis by bolts; the bottom end of the transmission rod is rotatably connected to the through hole on the upper side surface of the chassis, the upper side surface of the chassis is provided with a cylindrical boss, and the outer side surface of the cylindrical boss of the chassis is rotatably connected with the driving gear; the fan is connected to the upper side surface of the rotating shaft by bolts; the lower side surface of the fixed ring plate is welded with a heat dissipation shell, the lower side surface of the heat dissipation shell is welded with the chassis, and the outer side surface of the chassis is bonded with a dust cover.

[0005] In at least some embodiments, the rotating fan has a through hole structure that passes through from top to bottom, the intake pipe is inserted into the through hole of the rotating fan, the inner side of the rotating fan is provided with an internal tooth structure, the driving gear is meshed and connected to the internal tooth structure of the rotating fan, and a large number of fan blades are arranged around the inner side of the rotating fan.

[0006] In at least some embodiments, a large number of heat sinks are provided on the outer side of the air intake duct, each group of heat sinks is arranged longitudinally, and the heat sinks on the outer side of the air intake duct are vertically opposite to the blade structure of the rotating fan.

[0007] In at least some embodiments, the air intake frame is a cylindrical structure that penetrates from top to bottom, and the outer side surface of the air intake frame is provided with four groups of long through grooves, and the long through grooves are located on the lower side surface of the rotating fan.

[0008] In at least some embodiments, the outer side surface of the heat dissipation shell is provided with through grooves, the number of the through grooves is fifteen groups, and the through grooves are arranged in a circular array around the central axis of the heat dissipation shell.

[0009] In at least some embodiments, the upper side of the base frame is provided with four groups of through grooves, the outer side of the base frame is densely covered with a large number of breathable holes, the outer side of the breathable holes is wrapped with a dust cover, the dust cover is bonded to the outer side of the base frame by Velcro, and the dust cover is made of polyurethane sponge.

[0010] Compared with the prior art, the utility model has the following beneficial effects:

[0011] 1. In the utility model, the fan on the upper side of the chassis is driven to rotate by an electric motor, so that the fan blows the outside air through the dust cover from the through holes and the through slot structure of the chassis to the bottom of the electric oil pan, thereby accelerating the flow of air contacting the outer surface of the electric oil pan, and blowing the heat to the outside through the through slot of the heat dissipation shell, thereby realizing the air heat dissipation of the electric oil pan. The dust cover is used to block the ground dust on the outer side of the chassis while ensuring air permeability, so as to prevent the dust from being sucked into the heat dissipation shell to form dust accumulation.

[0012] 2. In the utility model, a gear meshing transmission structure is formed at the inner tooth structure of the rotating fan by using a driving gear, so that the motor drives the rotating fan to rotate inside the air intake frame through the transmission gear plate, the driving gear, the driven gear and the transmission rod in sequence. The rotating fan blows the air sucked in at the through groove of the air intake frame to the interval of the heat sink on the outer side of the intake pipe, thereby accelerating the air convection between the heat sinks, so that the heat sink cooperates with the cooling pipe to accelerate the heat dissipation speed of the intake pipe and improve the heat dissipation efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a structural schematic diagram of the utility model.

[0014] Figure 2 It is a front view structural schematic diagram of the utility model.

[0015] Figure 3 It is a left-side structural schematic diagram of the utility model.

[0016] Figure 4 It is a schematic diagram of the structure of the utility model in an upward and side view.

[0017] Figure 5 It is a schematic diagram of the structure of the utility model when viewed from above.

[0018] Figure 6 It is a schematic diagram of the cutaway structure of the utility model.

[0019] Figure numerals: 1, connecting plate; 2, air intake pipe; 3, cooling pipe; 4, air outlet pipe; 5, air intake frame; 6, rotating fan; 7, heat dissipation shell; 8, dust cover; 9, base frame; 10, driving gear; 11, motor; 12, fan; 13, transmission gear plate; 14, transmission rod; 15, driving gear; 16, driven gear; 17, fixed ring plate; 18, electric oil pan; 19, rotating shaft. DETAILED DESCRIPTION

[0020] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0021] like Figure 1-Figure 6 As shown, the utility model provides a diffusion pump cooling device, including a connecting plate 1; an air intake pipe 2 is welded to the lower side of the connecting plate 1, and an air outlet pipe 4 is welded to the outer side of the air intake pipe 2; a fan 12 is also included; a cooling pipe 3 is welded to the outer side of the air intake pipe 2, an electric oil pan 18 is installed at the bottom end of the air intake pipe 2, a fixed ring plate 17 is welded to the outer side of the electric oil pan 18, an air intake frame 5 is welded to the upper side of the fixed ring plate 17, an inner side of the air intake frame 5 is rotatably connected to a rotating fan 6, an inner side of the rotating fan 6 is meshedly connected to a driving gear 10, a transmission rod 14 is welded to the center position of the lower side of the driving gear 10, and a driven gear 16 is welded to the outer side of the transmission rod 14 near the bottom end, The outer side surface of the movable gear 16 is meshedly connected with the driving gear 15, and the outer side surface of the driving gear 15 is meshedly connected with the transmission toothed disc 13, and the transmission toothed disc 13 is welded to the outer side surface of the rotating shaft 19. The bottom end of the rotating shaft 19 is mounted on the motor shaft of the motor 11, and the motor 11 is connected to the lower side surface of the chassis 9 by bolts; the bottom end of the transmission rod 14 is rotatably connected to the upper side through hole of the chassis 9, and the upper side surface of the chassis 9 is provided with a cylindrical boss, and the outer side surface of the cylindrical boss of the chassis 9 is rotatably connected with the driving gear 15; the fan 12 is connected to the upper side surface of the rotating shaft 19 by bolts; the lower side surface of the fixed ring plate 17 is welded with the heat dissipation shell 7, the lower side surface of the heat dissipation shell 7 is welded with the chassis 9, and the outer side surface of the chassis 9 is bonded with a dust cover 8.

[0022] When the utility model performs cooling work of the diffusion pump, the external water pipe is first screwed to the water inlet and outlet ends of the cooling pipe 3, and then cooling water is injected into the cooling pipe 3. The motor 11 drives the rotating shaft 19 to rotate, and the rotating shaft 19 drives the fan 12 to rotate. The fan 12 sucks in the outside air through the through holes of the dust cover 8 and the bottom frame 9, and then blows it to the surface of the electric heating oil pan 18 inside the heat dissipation shell 7, thereby accelerating the air flow on the surface of the electric heating oil pan 18, so that the heat emitted by the electric heating oil pan 18 is blown to the outer side of the heat dissipation shell 7 through the through holes of the heat dissipation shell 7, thereby realizing the wind-force air heat dissipation work of the electric heating oil pan 18. In the process of the rotating shaft 19 driving the fan 12 to rotate, the rotating shaft 19 drives the transmission gear plate 13 welded to the outer side surface to rotate synchronously. The outer teeth of the rotating fan 6 mesh with the driving gear 15, and the transmission gear plate 13 drives the driving gear 15 to rotate, and the driving gear 15 drives the transmission rod 14 welded to the driven gear 16 to rotate, and the transmission rod 14 drives the driving gear 10 to rotate synchronously. Since the driving gear 10 is meshed and connected to the inner tooth structure of the rotating fan 6, the driving gear 10 drives the rotating fan 6 to rotate inside the air intake frame 5, and the fan blades of the rotating fan 6 stir the air, so that the outside air is sucked in through the through grooves of the air intake frame 5, and blown to between the longitudinally arranged heat sinks on the outer side of the intake pipe 2, so as to accelerate the air convection on the outer side of the intake pipe 2, so that the air blown by the rotating fan 6 cooperates with the heat sink of the intake pipe 2 and the cooling pipe 3 to perform air cooling and water cooling on the intake pipe 2, thereby improving the heat dissipation efficiency of the intake pipe 2.

[0023] In the disclosed embodiment, the middle of the rotating fan 6 is provided with a through hole structure which passes through from top to bottom, the intake pipe 2 is inserted into the through hole of the rotating fan 6, the inner side surface of the rotating fan 6 is provided with an internal tooth structure, and the driving gear 10 is meshedly connected to the inner tooth structure of the rotating fan 6, so that the driving gear 10 drives the rotating fan 6 to rotate on the inner side of the air intake frame 5, and a large number of fan blades are arranged around the inner side surface of the rotating fan 6, and air flow is formed by the rotating fan blades.

[0024] In the disclosed embodiment, a large number of heat sinks are provided on the outer side of the intake duct 2, and each group of heat sinks are arranged longitudinally. The heat sinks on the outer side of the intake duct 2 are opposite to the fan blade structure of the rotating fan 6 up and down. The rotating fan 6 blows natural air to the intervals between the heat sinks of the intake duct 2 through the fan blades, thereby accelerating the air flow between the heat sinks and accelerating the temperature dissipation of the outer wall of the intake duct 2.

[0025] In the disclosed embodiment, the air intake frame 5 is a cylindrical structure that passes through from top to bottom. The outer side of the air intake frame 5 is provided with four groups of long through grooves, and the long through grooves are located on the lower side of the rotating fan 6, thereby forming an air flow channel. The rotating fan 6 draws the outside air into the inner side of the air intake frame 5 through the long through grooves of the air intake frame 5 and sends it to the heat sink of the intake pipe 2 for air heat dissipation.

[0026] In the disclosed embodiment, the outer side surface of the heat dissipation shell 7 is provided with through grooves, and the number of the through grooves is fifteen. The through grooves are arranged in a circular array around the central axis of the heat dissipation shell 7. Air flow channels are formed through the through grooves of the heat dissipation shell 7, which facilitates the heat of the electric oil pan 18 to be quickly dissipated to the outer side surface of the heat dissipation shell 7 along with the air blown by the fan 12, thereby accelerating the cooling speed of the electric oil pan 18.

[0027] In the disclosed embodiment, four groups of through grooves are provided on the upper side of the base frame 9, and a large number of air permeable holes are densely distributed on the outer side of the base frame 9. The outer side of the air permeable holes is wrapped with a dust cover 8. The dust cover 8 is bonded to the outer side of the base frame 9 by Velcro, which is convenient for removing, cleaning and replacing the dust cover 8. The dust cover 8 is made of polyurethane sponge, and the highly permeable pore structure of the polyurethane sponge is utilized to prevent dust on the ground from being sucked into the base frame 9 and the heat dissipation shell 7 through the air permeable holes of the base frame 9 to form dust accumulation while ensuring air circulation, thereby preventing the electric oil pan 18 from igniting dust at a high temperature of 200 degrees Celsius.

[0028] The installation, connection or setting methods of all the above components are common mechanical methods, such as welding, threaded connection, screw connection, etc., and the specific structures, models and coefficient indicators of all its components are its own technology, as long as it can achieve its beneficial effects, it can be implemented. The cooling pipe 3, electric oil pan 18 and rotating shaft 19 used above are all common components on the market. When you buy them back and use them, you only need to connect them according to the instruction manual purchased together, so I will not repeat them here.

[0029] The technical solution of the present invention is not limited to the scope of the embodiments of the present invention, and the technical contents not described in detail in the present invention are all well-known technologies.

Claims

1. A diffusion pump cooling device, comprising a connection plate (1); an air intake pipe (2) is welded to the lower side of the connection plate (1), and an air outlet pipe (4) is welded to the outer side of the air intake pipe (2); characterized in that: The invention also comprises a fan (12); the outer side surface of the air intake pipe (2) is welded to a cooling pipe (3); the bottom end of the air intake pipe (2) is provided with an electric heating oil pan (18); the outer side surface of the electric heating oil pan (18) is welded to a fixed ring plate (17); the upper side surface of the fixed ring plate (17) is welded to an air intake frame (5); the inner side surface of the air intake frame (5) is rotatably connected to a rotating fan (6); the inner side surface of the rotating fan (6) is meshedly connected to a driving gear (10); a transmission rod (14) is welded to the center position of the lower side surface of the driving gear (10); a driven gear (16) is welded to the outer side surface of the transmission rod (14) near the bottom end; the outer side surface of the driven gear (16) is meshedly connected to a driving gear (15); the outer side surface of the driving gear (15) is meshedly connected to the outer side surface of the driving gear (15). A transmission gear disc (13) is provided, the transmission gear disc (13) is welded to the outer side of a rotating shaft (19), the bottom end of the rotating shaft (19) is mounted on the motor shaft of an electric motor (11), and the electric motor (11) is connected to the lower side of a base frame (9) by bolts; the bottom end of the transmission rod (14) is rotatably connected to a through hole on the upper side of the base frame (9), the upper side of the base frame (9) is provided with a cylindrical boss, and the outer side of the cylindrical boss of the base frame (9) is rotatably connected to a driving gear (15); the fan (12) is connected to the upper side of the rotating shaft (19) by bolts; the lower side of the fixed ring plate (17) is welded to a heat dissipation shell (7), the lower side of the heat dissipation shell (7) is welded to the base frame (9), and the outer side of the base frame (9) is bonded with a dust cover (8).

2. The diffusion pump cooling device according to claim 1, characterized in that: The middle of the rotating fan (6) is provided with a through hole structure which passes through from top to bottom, the air intake pipe (2) is inserted into the through hole of the rotating fan (6), the inner side surface of the rotating fan (6) is provided with an internal tooth structure, the driving gear (10) is meshedly connected to the internal tooth structure of the rotating fan (6), and a large number of fan blades are arranged around the inner side surface of the rotating fan (6).

3. The diffusion pump cooling device according to claim 1, characterized in that: The outer side surface of the air intake pipe (2) is provided with a large number of heat sinks, and each group of heat sinks is arranged longitudinally. The heat sinks on the outer side surface of the air intake pipe (2) are vertically opposite to the fan blade structure of the rotating fan (6).

4. The diffusion pump cooling device according to claim 1, characterized in that: The air intake frame (5) is a cylindrical structure that penetrates from top to bottom. The outer side surface of the air intake frame (5) is provided with four groups of long through grooves, and the long through grooves are located on the lower side surface of the rotating fan (6).

5. The diffusion pump cooling device according to any one of claims 1 to 4, characterized in that: The outer side surface of the heat dissipation shell (7) is provided with through grooves, the number of which is fifteen groups, and the through grooves are arranged in a ring array around the central axis of the heat dissipation shell (7).

6. The diffusion pump cooling device according to claim 1, characterized in that: The upper side of the base frame (9) is provided with four groups of through grooves, the outer side of the base frame (9) is densely covered with a large number of ventilation holes, the outer side of the ventilation holes is wrapped with a dust cover (8), and the dust cover (8) is bonded to the outer side of the base frame (9) by Velcro.

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