Reaction cavity

Abstract

The utility model discloses a reaction cavity, which belongs to the field of waste gas treatment, can effectively ensure the thermal insulation capacity of the reaction cavity, is convenient to disassemble and debug in the later period, improves the convenience, and comprises a stainless steel ceramic lining and an external cooling water layer, the stainless steel ceramic lining comprises a stainless steel inner layer and a ceramic outer layer, a connecting ring is arranged at one end of the stainless steel inner layer, one end of the external cooling water layer is fixedly connected with the connecting ring through a bolt, and the ceramic outer layer is fixed between the stainless steel inner layer and the external cooling water layer.

Description

Technical Field

[0001] The utility model belongs to the field of waste gas treatment, and in particular relates to a reaction chamber. Background Art

[0002] In the process of manufacturing semiconductors and photovoltaic materials, various waste gases and special gases are generated, such as methane (CH4), monosilane (SIH4), ammonia (NH3), trimethylamine (TMA), laughing gas (N2O), etc. According to relevant national regulations, these industrial waste gases must be treated and the content must be lower than the national standards before they can be discharged into the atmosphere.

[0003] Currently, waste gas treatment equipment mainly uses plasma ionized gas to treat waste gas, but the plasma flame temperature is relatively high, and the thermal insulation capacity of the reaction chamber is relatively high. The existing reaction chamber cannot meet the thermal insulation requirements, and the existing reaction chamber and thermal insulation layer are inconvenient to disassemble and debug, and the maintenance convenience is relatively poor. Summary of the invention

[0004] In order to solve the problems that the existing reaction chamber has poor thermal insulation capacity and is difficult to disassemble and debug, the utility model provides a reaction chamber, which can effectively ensure the thermal insulation capacity of the reaction chamber, is easy to disassemble and debug in the later stage, and improves convenience.

[0005] The technical solution is as follows: a reaction chamber, characterized in that it includes a stainless steel ceramic lining and an external cooling water layer;

[0006] The stainless steel ceramic lining includes a stainless steel inner layer and a ceramic outer layer. A connecting ring is provided at one end of the stainless steel inner layer. One end of the external cooling water layer is fixedly connected to the connecting ring by bolts and the ceramic outer layer is fixed between the stainless steel inner layer and the external cooling water layer.

[0007] It is further characterized in that the external cooling water layer includes an inner wall of the cooling water layer, an outer wall of the cooling water layer and flanges at both ends to form a cooling water cavity, and the connecting ring is connected to the flange at one end by bolts;

[0008] The flange at the other end is provided with an inner support ring, the inner support ring is provided with an annular groove, and the ends of the stainless steel inner layer and the ceramic outer layer are embedded in the annular groove;

[0009] A water inlet and a water outlet are provided on the outer wall of the cooling water layer;

[0010] A handle is fixed on the outer wall of the cooling water layer;

[0011] A flip hinge is installed on the flange at the lower part or end of the outer wall of the cooling water layer;

[0012] An air inlet is provided on the flange at the lower part, and the air inlet is connected to the reaction cavity inside the stainless steel inner layer through an air inlet channel on the flange.

[0013] After adopting the utility model, a ceramic layer is added, which can effectively play a role of heat insulation. The stainless steel ceramic lining and the external cooling water layer are connected by bolts, which can be easily disassembled and assembled. The ceramic layer is clamped between the stainless steel inner layer and the cooling water layer without bonding, etc., and can be easily maintained and replaced, greatly improving convenience. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is the front view of the utility model;

[0015] Figure 2 It is a top view of the utility model;

[0016] Figure 3 It is a cross-sectional view of the utility model.

[0017] The reference numerals in the figure are: 1. water outlet; 2. handle; 3. water inlet; 4. flange; 5. air inlet; 6. flip hinge; 7. connecting ring; 8. ceramic outer layer; 9. inner wall of cooling water layer; 10. cooling water cavity; 11. outer wall of cooling water layer; 12. stainless steel inner layer. DETAILED DESCRIPTION

[0018] See Figure 1 , Figure 2 , Figure 3 As shown, a reaction chamber includes a stainless steel ceramic lining and an external cooling water layer;

[0019] The stainless steel ceramic lining includes a stainless steel inner layer 12 and a ceramic outer layer 8. A connecting ring 7 is provided at the top of the stainless steel inner layer 12. One end of the external cooling water layer is fixedly connected to the connecting ring 7 by bolts and the ceramic outer layer 8 is fixed between the stainless steel inner layer 12 and the external cooling water layer.

[0020] The external cooling water layer includes the inner wall 9 of the cooling water layer, the outer wall 11 of the cooling water layer and the flanges 4 at both ends to form a cooling water cavity 10. The connecting ring 7 is connected to the flange at the top by bolts. The outer wall 11 of the cooling water layer is provided with a water inlet 3 and a water outlet 1. The cooling water circulates in the cooling water cavity 10 to reduce the outer wall temperature of the reaction chamber. The inner wall 9 of the cooling water layer, the outer wall 11 of the cooling water layer and the inner stainless steel layer 12 are all made of 316L stainless steel.

[0021] The flange 4 at the other end is provided with an inner support ring, which has an annular groove. The ends of the stainless steel inner layer 12 and the ceramic outer layer 8 are embedded in the annular groove, so that the stainless steel ceramic lining can be better fixed.

[0022] A handle 2 is fixed on the outer wall 12 of the cooling water layer, so that the entire reaction chamber can be clamped and fixed by a clamp. A flip hinge 6 is installed on the flange 4 at the lower end of the outer wall 12 of the cooling water layer. The flip hinge 6 is connected to a fixed part, so that the reaction chamber can be flipped by the pin on the hinge, which is convenient for installing and debugging the reaction chamber and replacing the ceramic outer layer 8.

[0023] An air inlet is provided on the lower flange, and the air inlet is connected to the reaction chamber inside the stainless steel inner layer through an air inlet channel on the flange, and is used to connect compressed air to react with the waste gas by-products and increase the gas flow rate.

Claims

1. A reaction chamber, characterized in that: It includes a stainless steel ceramic lining and an external cooling water layer; The stainless steel ceramic lining includes a stainless steel inner layer and a ceramic outer layer. A connecting ring is provided at one end of the stainless steel inner layer. One end of the external cooling water layer is fixedly connected to the connecting ring by bolts and the ceramic outer layer is fixed between the stainless steel inner layer and the external cooling water layer.

2. A reaction chamber according to claim 1, characterized in that: The external cooling water layer comprises an inner wall of the cooling water layer, an outer wall of the cooling water layer and flanges at both ends to form a cooling water cavity, and the connecting ring is connected to the flange at one end by bolts.

3. A reaction chamber according to claim 2, characterized in that: The flange at the other end is provided with an inner support ring, the inner support ring is provided with an annular groove, and the ends of the stainless steel inner layer and the ceramic outer layer are embedded in the annular groove.

4. A reaction chamber according to claim 2, characterized in that: A water inlet and a water outlet are provided on the outer wall of the cooling water layer.

5. A reaction chamber according to claim 2, characterized in that: A handle is fixed on the outer wall of the cooling water layer.

6. A reaction chamber according to claim 2, characterized in that: A flip hinge is installed on the flange at the lower part or end of the outer wall of the cooling water layer.

7. A reaction chamber according to claim 2, characterized in that: An air inlet is provided on the flange at the lower part, and the air inlet is connected to the reaction cavity inside the stainless steel inner layer through an air inlet channel on the flange.

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