Diffusion pump heating device

Abstract

The utility model discloses a diffusion pump heating device which comprises a diffusion pump body and a heating assembly. The diffusion pump body comprises a diffusion pump bottom plate and a barrel plate arranged on the periphery of the diffusion pump bottom plate, and an oil cavity used for containing pump oil is formed in the diffusion pump bottom plate and the barrel plate. The multiple sets of heating assemblies are arranged and comprise arc-shaped stainless steel heating pipes, heating wires are arranged in the stainless steel heating pipes, the stainless steel heating pipes are further filled with heating powder used for fixing the heating wires, the diffusion pump bottom plate is provided with installation holes matched with the two ends of the stainless steel heating pipes, and the installation holes are provided with sealing rings. The two ends of the stainless steel heating pipe extend out of the mounting holes, and the heating wire is connected with a power source through a wire. The stainless steel heating pipe is arranged on the diffusion pump bottom plate, so that the stainless steel heating pipe can be in direct contact with diffusion pump oil in the diffusion pump. Therefore, the heating efficiency can be improved, the electric energy is saved, the production cost is reduced, and the vacuum degree of the product is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of diffusion pumps, in particular to a diffusion pump heating device. Background Art

[0002] Vacuum diffusion pump is one of the most widely used and most important tools for obtaining high vacuum. Diffusion pump is mainly composed of pump body, pump oil, pump core, evaporation system, cooling system, injection system and control system. Under the low vacuum condition formed by the front vacuum pump, the evaporation system makes the pump oil boil and evaporate, and the generated vapor is ejected through the injection system at a very high speed, so that the gas molecules in the upper part of the pump are diffused into the vapor. The oil vapor is condensed at the lower part of the pump through the cooling system, and the released gas molecules are pumped away by the front pump, and the condensed pump oil returns to the evaporation system to be reheated, so that the purpose of pumping is achieved through such a cycle. The evaporation system is one of the most important components of the diffusion pump. Most of the existing evaporation systems use electric heating plates made of electric heating wires for heating. This method has high power and low electric heat conversion efficiency, which not only causes energy waste and increases production costs, but also causes thermal pollution to the operation site. Utility Model Content

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a diffusion pump heating device, which can improve heating efficiency, save electric energy, reduce production costs, and improve the vacuum degree of the product.

[0004] The technical solution adopted by the utility model to solve its technical problems is:

[0005] A diffusion pump heating device, comprising

[0006] A diffusion pump body, comprising a diffusion pump bottom plate and a barrel plate arranged at the periphery of the diffusion pump bottom plate, wherein an oil cavity for accommodating pump oil is formed in the diffusion pump bottom plate and the barrel plate;

[0007] The heating assembly is provided with multiple groups, including arc-shaped stainless steel heating tubes, wherein the stainless steel heating tubes are provided with heating wires, and the stainless steel heating tubes are also filled with heating powder for fixing the heating wires. The diffusion pump bottom plate is provided with mounting holes for matching with the two ends of the stainless steel heating tubes, and the mounting holes are provided with sealing rings. The two ends of the stainless steel heating tubes extend out of the mounting holes, and the heating wires are connected to a power source through a wire.

[0008] A diffusion pump heating device according to an embodiment of the utility model has at least the following beneficial effects: an oil cavity for accommodating pump oil is formed in the bottom plate and barrel plate of the diffusion pump, and a stainless steel heating tube is arranged on the bottom plate of the diffusion pump, so that the stainless steel heating tube can directly contact the diffusion pump oil inside the diffusion pump, thereby improving the heating efficiency. The heating powder plays a vital role in the stainless steel heating tube. It not only acts as an insulation between the electric heating wire and the stainless steel heating tube, preventing the heating wire from being damaged when it contacts the metal tube shell, and ensuring the safety of the use of the stainless steel heating tube, but also can conduct the heat emitted by the electric heating wire to the stainless steel heating tube shell, and is used to fix the spatial position of the electric heating wire. The mounting hole is provided with a sealing ring to play a sealing role to prevent pump oil leakage. The heating assembly is provided with multiple groups, and one or more groups can be opened according to actual conditions, and can also be switched for use or standby, so that the failure of one group of heating assemblies will not affect the operation of the overall diffusion pump. Therefore, the heating efficiency can be improved, electric energy can be saved, production costs can be reduced, and the vacuum degree of the product can be improved.

[0009] According to some embodiments of the present invention, the diffusion pump bottom plate is circular.

[0010] Advantageously, the bottom plate of the diffusion pump is circular, which facilitates the installation of the barrel plate and the arc-shaped stainless steel heating tube.

[0011] According to some embodiments of the utility model, the barrel plate is provided with a heat-insulating layer.

[0012] The barrel staves are provided with an insulation layer to insulate and prevent heat loss.

[0013] According to some embodiments of the present invention, multiple groups of the heating components include stainless steel heating tubes with different radii.

[0014] What is beneficial is that the stainless steel heating tubes of different radii are evenly distributed, which is conducive to uniform heating.

[0015] According to some embodiments of the present utility model, the heating assembly is further provided with a fixing bar, and the fixing bar is used to fix the plurality of the stainless steel heating tubes.

[0016] Advantageously, the fixing strip is provided to fix the stainless steel heating tube and prevent the stainless steel heating tube from being separated from the bottom plate of the diffusion pump.

[0017] According to some embodiments of the utility model, a plurality of fixing strips are provided, and the plurality of fixing strips are radially distributed.

[0018] It is beneficial that the fixing strip is arranged in such a way that the stainless steel heating tube is subjected to uniform force.

[0019] According to some embodiments of the present utility model, the fixing strip is provided with an arc-shaped notch that matches with the stainless steel heating tube.

[0020] Advantageously, the arc-shaped notch provided on the fixing strip is conducive to fixing the stainless steel heating tube.

[0021] According to some embodiments of the present invention, the heating powder is magnesium oxide powder.

[0022] The good thing is: magnesium oxide powder is a special insulating powder with good thermal conductivity and insulation properties.

[0023] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0025] Figure 1 A schematic diagram of an embodiment of the utility model;

[0026] Figure 2 for Figure 1 Internal schematic diagram of the stainless steel heating tube;

[0027] Figure 3 for Figure 1 Schematic diagram of the fixing bar.

[0028] Reference numerals: bottom plate 100 , barrel plate 110 , stainless steel heating tube 120 , heating wire 130 , heating powder 140 , mounting hole 150 , sealing ring 160 , fixing strip 170 , arc-shaped recess 180 . DETAILED DESCRIPTION

[0029] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0030] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0031] In the description of the present utility model, "several" means one or more, "more" means more than two, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0032] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0033] Reference below Figure 1-Figure 3 A diffusion pump heating device is described in detail with a specific embodiment. It is worth noting that the following description is only an exemplary description and not a specific limitation of the utility model.

[0034] like Figure 1-Figure 3 As shown, a diffusion pump heating device includes a diffusion pump body and a heating component.

[0035] The main body of the diffusion pump includes a diffusion pump bottom plate 100 and a barrel plate 110 arranged on the periphery of the diffusion pump bottom plate 100. The diffusion pump bottom plate 100 and the barrel plate 110 form an oil cavity for accommodating pump oil. The heating assembly is provided with multiple groups, including arc-shaped stainless steel heating tubes 120, the stainless steel heating tubes 120 are provided with heating wires 130, and the stainless steel heating tubes 120 are also filled with heating powder 140 for fixing the heating wires 130. The diffusion pump bottom plate 100 is provided with mounting holes 150 for mounting with both ends of the stainless steel heating tubes 120. The mounting holes 150 are provided with sealing rings 160. Both ends of the stainless steel heating tubes 120 extend out of the mounting holes 150. The heating wires 130 are connected to the power supply through wires. The diffusion pump bottom plate 100 and the barrel plate 110 form an oil cavity for accommodating pump oil. The stainless steel heating tubes 120 are arranged on the diffusion pump bottom plate 100, so that the stainless steel heating tubes 120 can directly contact the diffusion pump oil inside the diffusion pump, thereby improving the heating efficiency. The heating powder 140 plays a vital role in the stainless steel heating tube 120. It not only acts as an insulator between the electric heating wire and the stainless steel heating tube 120, preventing the heating wire 130 from being damaged when in contact with the metal tube shell, ensuring the safety of the stainless steel heating tube 120, but also conducts the heat emitted by the electric heating wire to the outer shell of the stainless steel heating tube 120, and is used to fix the spatial position of the electric heating wire. The mounting hole 150 is provided with a sealing ring 160 to seal and prevent pump oil leakage. The heating assembly is provided with multiple groups, one or more of which can be opened according to actual conditions, and can also be switched for use or standby, so that a failure of one of the heating assemblies will not affect the operation of the overall diffusion pump. Therefore, the heating efficiency can be improved, electric energy can be saved, production costs can be reduced, and the vacuum degree of the product can be improved.

[0036] like Figure 1 As shown, the diffusion pump bottom plate 100 is circular. The diffusion pump bottom plate 100 is circular, which is convenient for setting the barrel plate 110 and the arc-shaped stainless steel heating pipe 120. Specifically, the barrel plate 110 is provided with an insulation layer (the insulation layer is not shown in the figure). The barrel plate 110 is provided with an insulation layer to play a role of heat insulation and prevent heat loss.

[0037] It should be noted that the multiple groups of heating components include stainless steel heating tubes 120 of different radii. The stainless steel heating tubes 120 of different radii are evenly distributed, which is conducive to uniform heating. In addition, the heating component is also provided with a fixing bar 170, which is used to fix the multiple stainless steel heating tubes 120. The setting of the fixing bar 170 is conducive to fixing the stainless steel heating tube 120 and preventing the stainless steel heating tube 120 from being separated from the diffusion pump bottom plate 100. In addition, there are multiple fixing bars 170, and the multiple fixing bars 170 are radially distributed. The fixing bar 170 is arranged in this way so that the stainless steel heating tube 120 is evenly stressed.

[0038] like Figure 3As shown, the fixing strip 170 is provided with an arc-shaped notch 180 that matches the stainless steel heating tube 120. The fixing strip 170 is provided with the arc-shaped notch 180 to facilitate fixing the stainless steel heating tube 120.

[0039] It is worth mentioning that the heating powder 140 is magnesium oxide powder, which is a special insulating powder with good thermal conductivity and insulation.

[0040] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments. Various changes can be made within the knowledge scope of ordinary technicians in the technical field without departing from the purpose of the present invention.

Claims

1. A diffusion pump heating device, characterized in that: include: A diffusion pump body comprises a diffusion pump bottom plate (100) and a barrel plate (110) arranged on the periphery of the diffusion pump bottom plate (100), wherein an oil cavity for accommodating pump oil is formed in the diffusion pump bottom plate (100) and the barrel plate (110); The heating assembly is provided with a plurality of groups, including arc-shaped stainless steel heating tubes (120), wherein a heating wire (130) is provided in the stainless steel heating tubes (120), and the stainless steel heating tubes (120) are also filled with heating powder (140) for fixing the heating wire (130), wherein the diffusion pump bottom plate (100) is provided with mounting holes (150) for matching with the two ends of the stainless steel heating tubes (120), wherein the mounting holes (150) are provided with sealing rings (160), and the two ends of the stainless steel heating tubes (120) extend out of the mounting holes (150), and the heating wire (130) is connected to a power source via a wire.

2. A diffusion pump heating device according to claim 1, characterized in that: The diffusion pump bottom plate (100) is circular.

3. A diffusion pump heating device according to claim 1, characterized in that: The barrel plate (110) is provided with a heat-insulating layer.

4. A diffusion pump heating device according to claim 1, characterized in that: A plurality of groups of the heating components include the stainless steel heating tubes (120) with different radii.

5. A diffusion pump heating device according to claim 4, characterized in that: The heating component is also provided with a fixing bar (170), and the fixing bar (170) is used to fix the plurality of stainless steel heating tubes (120).

6. A diffusion pump heating device according to claim 5, characterized in that: A plurality of fixing strips (170) are provided, and the plurality of fixing strips (170) are radially distributed.

7. A diffusion pump heating device according to claim 6, characterized in that: The fixing strip (170) is provided with an arc-shaped notch (180) that matches the stainless steel heating tube (120).

8. A diffusion pump heating device according to claim 1, characterized in that: The heating powder (140) is magnesium oxide powder.

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