Separation device for detecting impurity ions in chlorosilane solution

Abstract

The utility model relates to the technical field of polycrystalline silicon production, in particular to a separation device for detecting impurity ions in a chlorosilane solution, which is characterized in that a separation main body is arranged on a base; a fluid channel is arranged on the separation main body; the fluid channel extends in the horizontal direction. A sample inlet is formed in the top of the separation main body; the sample inlet is communicated with the fluid channel; the valve body I is arranged on the separation main body; the separation main body is provided with a liquid outlet channel I which is communicated with one end of the fluid channel; the separation main body is provided with a liquid outlet channel II which is communicated with the other end of the fluid channel; the valve body II is used for controlling the on-off of the liquid outlet channel I; the valve body III is used for controlling the on-off of the liquid outlet channel II; the electrode assembly is located in the extending direction of the two ends of the fluid channel. The electrode assembly separates ions in the liquid in the fluid channel through an electric field. According to the utility model, the separation and separation of positive and negative ions in the ion solution can be realized, the required ion solution can be quickly obtained, and the operation is simple and quick.

Description

Technical Field

[0001] The utility model relates to the technical field of polysilicon production, in particular to a separation device for detecting impurity ions in a chlorosilane solution. Background Art

[0002] At present, in the detection of impurities in trichlorosilane, a fixed amount of trichlorosilane is first added to a clean crucible, and then an appropriate amount of complexing agent and water are added in sequence to generate silicon dioxide; then hydrofluoric acid is added to dissolve the silicon dioxide, and then it is placed in a graphite furnace and evaporated with an electric heating plate. After evaporation, the residue is dissolved with nitric acid, and the volume is fixed with ultrapure water. Finally, the impurity elements are quantitatively analyzed by inductively coupled plasma optical emission spectroscopy (ICP-OES). This treatment method is easy to introduce impurities; the ion solution obtained after the trichlorosilane is dissolved by adding hydrofluoric acid is treated by evaporation, which is easy to lose impurities and takes a long time; and during the experimental operation, there are large errors in the detection of impurities, the experimental operation is cumbersome, the data accuracy and reproducibility are poor, and multiple impurities in the sample detection affect each other, affecting the test results. At present, there is no separation equipment suitable for the detection of impurity ions in chlorosilane solutions. Utility Model Content

[0003] In view of this, the utility model provides a separation device for detecting impurity ions in chlorosilane solutions, the main purpose of which is to separate and isolate positive and negative ions in the ion solution, and to quickly obtain the required ion solution for detection, with simple and quick operation.

[0004] In order to achieve the above purpose, the utility model mainly provides the following technical solutions:

[0005] The embodiment of the utility model provides a separation device for detecting impurity ions in a chlorosilane solution, comprising: a base, a separation body, a valve body 1, a valve body 2, a valve body 3 and an electrode assembly;

[0006] The separation body is arranged on the base;

[0007] The separation body is provided with a fluid channel; the fluid channel extends in a horizontal direction;

[0008] The top of the separation body is provided with an injection port; the injection port is communicated with the fluid channel; a sealing cover is provided on the injection port for sealing the injection port;

[0009] The valve body 1 is arranged on the separation body, located in the middle of the fluid channel, and is used to select the on and off of the fluid channel;

[0010] The separation body is provided with a liquid outlet channel 1; the liquid outlet channel 1 is connected to one end of the fluid channel;

[0011] The separation body is provided with a second liquid outlet channel; the second liquid outlet channel is connected to the other end of the fluid channel;

[0012] The valve body 2 is arranged below the separation body and is used to control the opening and closing of the liquid outlet channel 1;

[0013] The valve body 3 is arranged below the separation body and is used to control the opening and closing of the liquid outlet channel 2;

[0014] The electrode assembly is fixedly arranged on the separation body and is located in the extension direction of both ends of the fluid channel;

[0015] The electrode assembly is connected to a power source to separate ions in the liquid in the fluid channel through an electric field.

[0016] Furthermore, the separation body is made of polytetrafluoroethylene material.

[0017] Furthermore, the valve body is made of polytetrafluoroethylene material;

[0018] The valve body 2 is made of polytetrafluoroethylene material;

[0019] The valve body is made of polytetrafluoroethylene material.

[0020] Furthermore, the power supply is a constant voltage power supply.

[0021] By means of the above technical solution, the separation device for detecting impurity ions in chlorosilane solution of the utility model has at least the following advantages:

[0022] It can separate and isolate positive and negative ions in the ion solution, and can quickly obtain the required ion solution for detection, with simple and fast operation.

[0023] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the utility model in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 A schematic diagram of a separation device for detecting impurity ions in a chlorosilane solution provided in an embodiment of the utility model.

[0025] As shown in the figure:

[0026] 1 is a base, 2 is a separation body, 2-1 is an injection port, 2-2 is a fluid channel, 2-3 is a liquid outlet channel 1, 2-4 is a liquid outlet channel 2, 3 is a valve body 1, 4 is an electrode assembly, 5 is a valve body 2, and 6 is a valve body 3. DETAILED DESCRIPTION

[0027] In order to further explain the technical means and effects adopted by the utility model to achieve the predetermined utility model purpose, the specific implementation methods, structures, features and effects of the utility model application are described in detail below in conjunction with the accompanying drawings and preferred embodiments. In the following description, different "one embodiment" or "embodiment" does not necessarily refer to the same embodiment. In addition, specific features, structures, or characteristics in one or more embodiments may be combined in any suitable form.

[0028] like Figure 1 As shown, an embodiment of the utility model proposes a separation device for detecting impurity ions in chlorosilane solutions, comprising: a base 1, a separation body 2, a valve body 1 3, a valve body 2 5, a valve body 3 6 and an electrode assembly 4; the separation body 2 is arranged on the base 1; in this embodiment, the separation body 2 is preferably made of polytetrafluoroethylene material to avoid being corroded by hydrofluoric acid, thereby affecting the detection result. The separation body 2 is supported by the base 1. A fluid channel 2-2 is arranged on the separation body 2; the fluid channel 2-2 extends in a horizontal direction; the fluid channel 2-2 has a set length. The top of the separation body 2 is provided with an injection port 2-1; the injection port 2-1 is connected to the fluid channel 2-2 for adding the liquid to be separated. A sealing cover is arranged on the injection port 2-1 for sealing the injection port 2-1.

[0029] Valve body 1 3 is arranged on the separation body 2, located in the middle of the fluid channel 2-2, and is used to select the on-off of the fluid channel 2-2; preferably, in this embodiment, valve body 1 3 is made of polytetrafluoroethylene material to avoid being corroded by hydrofluoric acid, thereby affecting the detection result. The separation body 2 has a liquid outlet channel 1 2-3; the liquid outlet channel 1 2-3 is connected to one end of the fluid channel 2-2; the separation body 2 has a liquid outlet channel 2 2-4; the liquid outlet channel 2 2-4 is connected to the other end of the fluid channel 2-2; valve body 2 5 is arranged below the separation body 2, and is used to control the on-off of the liquid outlet channel 1 2-3; valve body 2 5 is made of polytetrafluoroethylene material to avoid being corroded by hydrofluoric acid, thereby affecting the detection result. Valve body 3 6 is arranged below the separation body 2, and is used to control the on-off of the liquid outlet channel 2 2-4; valve body 3 6 is made of polytetrafluoroethylene material to avoid being corroded by hydrofluoric acid, thereby affecting the detection result.

[0030] The electrode assembly 4 is fixedly arranged on the separation body 2, and is located in the extension direction of the two ends of the fluid channel 2-2; the electrode assembly 4 is connected to a power source to separate ions in the liquid in the fluid channel 2-2 through an electric field; in this embodiment, the power source is preferably a constant voltage power source. The electrode assembly 4 includes two electrode plates; the two electrode plates are respectively arranged in the extension direction of the two ends of the fluid channel 2-2; the two electrode plates are respectively connected to the power source.

[0031] An embodiment of the utility model provides a separation device for detecting impurity ions in a chlorosilane solution. When in use, a predetermined amount of trichlorosilane is added through an injection port to obtain an ion solution, and a voltage of 1.2V is applied for 2 hours through a constant voltage power supply to make the ions move in a directional manner; after the reaction is completed, valve body 1 3 is closed to separate positive and negative ions, valve body 2 5 and valve body 3 6 are opened, and liquid is discharged through liquid outlet channel 1 2-3 and liquid outlet channel 2 2-4, the ion solution of the positive electrode is collected, and the volume is constant, and then an ICP test is performed.

[0032] The trichlorosilane solution is hydrolyzed, and after the reaction is complete, ultrapure water is added to submerge the solid precipitate; then hydrofluoric acid is slowly added dropwise and stirred until the precipitate completely disappears, forming an ion solution obtained after the trichlorosilane treatment.

[0033] An embodiment of the utility model provides a separation device for detecting impurity ions in a chlorosilane solution, which can separate and isolate positive and negative ions in the ion solution, can quickly obtain the required ion solution for detection, is simple and quick to operate, and avoids sample contamination and impurity loss during sample pretreatment, so that the detection of impurity ions can reach the detection limit of ppt or ppb level while ensuring the accuracy and reproducibility of detection data.

[0034] An embodiment of the utility model provides a separation device for detecting impurity ions in a chlorosilane solution, which separates an ion solution prepared from chlorosilane by an electric field and isolates it by a valve body 3. The separation is efficient and energy-saving, easy to operate, and easy to integrate with other technologies.

[0035] Further explanation, although the terms first, second, etc. can be used to describe various elements in this article, these terms should not limit these elements. These terms are only used to distinguish one element from another element. For example, the first element can be called the second element, and, similarly, the second element can be called the first element, and these terms are only used to distinguish one element from another element. This does not depart from the scope of exemplary embodiments. Similarly, element one and element two do not represent the order of elements, and these terms are only used to distinguish one element from another element. As used herein, the term "and / or" includes any combination and all combinations of one or more associated listed items.

[0036] In the description of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0037] The standard parts used in the utility model can all be purchased from the market, and special-shaped parts can be customized according to the instructions and the drawings. The specific connection methods of each part adopt the conventional means such as mature bolts, rivets, welding, etc. in the existing technology. The machinery, parts and equipment all adopt the conventional models in the existing technology, and the circuit connection adopts the conventional connection method in the existing technology, which will not be described in detail here.

[0038] The above is only a preferred embodiment of the present invention and does not constitute any form of limitation to the present invention. Any simple modification, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. A separation device for detecting impurity ions in a chlorosilane solution, characterized in that: It includes: a base, a separation body, a valve body 1, a valve body 2, a valve body 3 and an electrode assembly; The separation body is arranged on the base; The separation body is provided with a fluid channel; the fluid channel extends in a horizontal direction; The top of the separation body is provided with an injection port; the injection port is communicated with the fluid channel; a sealing cover is provided on the injection port for sealing the injection port; The valve body 1 is arranged on the separation body, located in the middle of the fluid channel, and is used to select the on and off of the fluid channel; The separation body is provided with a liquid outlet channel 1; the liquid outlet channel 1 is connected to one end of the fluid channel; The separation body is provided with a second liquid outlet channel; the second liquid outlet channel is connected to the other end of the fluid channel; The valve body 2 is arranged below the separation body and is used to control the opening and closing of the liquid outlet channel 1; The valve body 3 is arranged below the separation body and is used to control the opening and closing of the liquid outlet channel 2; The electrode assembly is fixedly arranged on the separation body and is located in the extension direction of both ends of the fluid channel; The electrode assembly is connected to a power source to separate ions in the liquid in the fluid channel through an electric field.

2. The separation device for detecting impurity ions in chlorosilane solution according to claim 1, characterized in that: The separation body is made of polytetrafluoroethylene material.

3. The separation device for detecting impurity ions in chlorosilane solution according to claim 1, characterized in that: The valve body is made of polytetrafluoroethylene material; The valve body 2 is made of polytetrafluoroethylene material; The valve body is made of polytetrafluoroethylene material.

4. The separation device for detecting impurity ions in chlorosilane solution according to claim 1, characterized in that: The power supply is a constant voltage power supply.

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