Raised floor height detection device

Abstract

The utility model provides a raised floor height detection device, which comprises a plate-shaped mold provided with at least one through hole along the thickness direction; the at least one distance sensor is arranged in or above the through holes in a one-to-one correspondence manner so as to measure the height of the raised floor; and the data processing and display module is arranged on the upper surface of the plate-shaped mold and is electrically connected with the distance sensor so as to realize signal transmission between the distance sensor and the data processing and display module. The distance sensor and the data processing and display module which are electrically connected are arranged on the plate-shaped mold, automatic measurement of the height of the suspended space of the raised floor can be achieved, limitation of manual measurement and measurement point selection is avoided, the measurement speed is high, the measurement precision is higher, and time and cost are effectively saved.

Description

Technical Field

[0001] The utility model relates to an elevated floor, in particular to a device for detecting the height of the elevated floor. Background Art

[0002] In clean rooms, people carry and move equipment and instruments on foot, which is easy to cause wear and static electricity to generate fine dust. In order to prevent dust and fine dust from being retained in clean rooms, high-tech industries use elevated floors most widely. For example: semiconductor wafer factories, IC testing areas, optoelectronic mask laboratories, biotechnology industries, etc. The elevated floor device mainly includes a flat frame, a plurality of support legs fixedly set below the flat frame to make the flat frame a certain distance above the ground, and a horizontal floor fixedly set above the flat frame and formed by splicing multiple loading plates. The machine equipment is placed on the horizontal floor, and there is a certain range of suspended space between the horizontal floor and the ground below.

[0003] The semiconductor industry has very high requirements for the stability of the machine, so it is generally necessary to customize the anti-vibration table to prevent vibration from affecting the machine. In the process of setting up the anti-vibration table, it is necessary to measure the height of the suspended space between the horizontal floor of the elevated floor and the ground below, so as to adjust the height of the anti-vibration table based on the measured data. Figure 1 As shown, the current method for measuring the height H of the suspended space is to open the elevated floor 20 to form an empty slot 22, manually use a measuring rod to extend from top to bottom into the empty slot 22 to detect the depth and mark it, and then use a ruler to measure the distance from the marked position to the tail end of the measuring rod to obtain data. This measurement method is time-consuming and labor-intensive, and has low accuracy; in addition, in order to ensure the alignment of the measuring rod during measurement, it is necessary to use the alignment of the support legs of the bracket 21 to place the measuring rod against the support legs for measurement, which greatly limits the flexibility of selecting the measurement point, and the measurement accuracy depends on the alignment of the support legs. Utility Model Content

[0004] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide an elevated floor height detection device to solve the problem that when measuring the height of the elevated floor in the prior art, manual measurement is used, which is time-consuming and labor-intensive, has low accuracy, and the location selection of the measurement point is limited.

[0005] In order to achieve the above-mentioned purpose and other related purposes, the utility model provides a device for detecting the height of an elevated floor. When in use, the detection device is placed at the location of the elevated floor. The detection device comprises:

[0006] A plate-shaped mold, wherein the plate-shaped mold is provided with at least one through hole along the thickness direction;

[0007] At least one distance sensor, all of which are disposed in a one-to-one correspondence inside or above the through hole to measure the height of the elevated floor;

[0008] The data processing and display module is arranged on the upper surface of the plate-shaped mold and is electrically connected to the distance sensor to realize signal transmission between the distance sensor and the data processing and display module.

[0009] Optionally, the detection device further comprises a handle, and the handle is fixed on the upper surface of the plate-shaped mold.

[0010] Optionally, the distance sensor includes a laser distance sensor or an infrared distance sensor.

[0011] Optionally, the data processing and display module and the distance sensor are connected via a data line.

[0012] Optionally, the detection device is provided with two or more distance sensors, and the distance sensors are evenly arranged on the plate-shaped mold.

[0013] Optionally, the detection device further comprises a distance compensation structure fixed on the upper surface of the plate-shaped mold, wherein the distance compensation structure comprises: two movable rods arranged side by side and spaced apart and two stoppers;

[0014] Two stoppers are respectively fixed to opposite ends of the two moving rods;

[0015] The moving rod can move back and forth along a preset direction on the upper surface of the plate-shaped mold to drive the stopper at its end to move back and forth so that the stopper exceeds the edge of the plate-shaped mold.

[0016] Furthermore, the distance compensation structure further comprises: a shifting rotating member and two slide rails fixed on the upper surface of the plate-shaped mold;

[0017] The shifting rotating member is disposed between the two moving rods and connected by means of gear meshing, driving the two moving rods to mesh and transmit;

[0018] The two slide rails are arranged on both sides of the shifting rotating member, and the two slide rails are respectively straddled on the two moving rods.

[0019] Furthermore, the longitudinal sections of the two slide rails are in an inverted U-shape, and the moving rods are respectively accommodated at opposite sides of the grooves in the slide rails.

[0020] Furthermore, the longitudinal sections of the two slide rails are inverted U-shaped, and horizontal through holes are provided in the two support arms of the slide rails, and the two moving rods pass through the horizontal through holes.

[0021] Optionally, the detection device further comprises a switch, and the switch controls the start and stop of the distance sensor, or the switch controls the start and stop of the data processing and display module.

[0022] As described above, the elevated floor height detection device of the utility model can realize automatic measurement of the height of the suspended space of the elevated floor by arranging an electrically connected distance sensor and a data processing and display module on a plate-shaped mold, avoiding the limitations of manual measurement and measurement point selection, and has a fast measurement speed and higher measurement accuracy, effectively saving time and cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A simplified structural diagram of an example raised floor is shown.

[0024] Figure 2 Shown is a structural schematic diagram of an example of a plate-shaped mold in the elevated floor height detection device of the present invention.

[0025] Figure 3 Shown is a schematic structural diagram of an example of a plate-shaped mold in the elevated floor height detection device of the present invention, wherein a handle is fixed on the upper surface of the plate-shaped mold.

[0026] Figure 4 Shown is a structural schematic diagram of an example of an elevated floor height detection device of the present invention.

[0027] Figure 5 and Figure 6 The diagram is a top view of another example of the elevated floor height detection device of the utility model, wherein Figure 5 The stop piece shrinks on the upper surface of the plate-shaped mold. Figure 6 The stop piece extends out of the plate-shaped mold.

[0028] Figure 7 Shown is a top view schematic diagram of yet another example of the elevated floor height detection device of the present invention.

[0029] Figure 8 Display as Figure 7 A schematic diagram of the cross-sectional structure of an example of a slide rail in a side view of a cross section along the AA direction.

[0030] Fig. 9 Display as Figure 7 A schematic diagram of the cross-sectional structure of an example of a distance compensation structure in a side view of a cross section taken along the AA direction.

[0031] Fig.10 Display as Figure 7 A schematic diagram of the cross-sectional structure of another example of a slide rail in a side view of the cross section along the AA direction.

[0032] Fig.11 Display as Figure 7 A schematic diagram of the cross-sectional structure of another example of the distance compensation structure in a side view of the cross section along the AA direction.

[0033] Component number description

[0034] 10 Plate mold

[0035] 100 Through hole

[0036] 11 Distance Sensor

[0037] 12 Data processing and display module

[0038] 120 Data processing system

[0039] 121 Display

[0040] 13 Handle

[0041] 14 Distance compensation structure

[0042] 140 Moving Rod

[0043] 141 Stopper

[0044] 142 Shifting rotating parts

[0045] 143 Slide Rail

[0046] 144 Slide rail inner groove

[0047] 145 Horizontal through hole

[0048] 15 Switch

[0049] 20 Raised Floor

[0050] 21 Bracket

[0051] 22 empty slots DETAILED DESCRIPTION

[0052] The following is a description of the implementation of the present invention by means of specific embodiments. People familiar with the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.

[0053] See also Figures 1 to 11It should be noted that the structures, proportions, sizes, etc. illustrated in the drawings in this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the limiting conditions for the implementation of the utility model, so they have no substantial technical significance. Any modification of the structure, change in the proportion relationship, or adjustment of the size should still fall within the scope of the technical content disclosed by the utility model without affecting the effects and purposes that can be achieved by the utility model. At the same time, the terms such as "upper", "lower", "left", "right", "middle" and "one" quoted in this specification are only for the convenience of description, and are not used to limit the scope of the implementation of the utility model. The change or adjustment of their relative relationship should also be regarded as the scope of the implementation of the utility model without substantially changing the technical content.

[0054] like Figures 1 to 4 As shown, the utility model provides a device for detecting the height of an elevated floor. When used, Figure 1 As shown, the corresponding elevated floor 20 is opened, and then the detection device is placed at the location of the elevated floor 20 for height detection. The detection device includes:

[0055] like Figure 2 As shown, a plate-shaped mold 10 is provided with at least one through hole 100 along the thickness direction;

[0056] like Figure 4 As shown, at least one distance sensor 11, all of the distance sensors 11 are disposed one by one inside or above the through hole 100 to measure the height of the elevated floor 20;

[0057] The data processing and display module 12 is disposed on the upper surface of the plate-shaped mold 10 and is electrically connected to the distance sensor 11 to achieve signal transmission between the distance sensor 11 and the data processing and display module 12 .

[0058] The upper surface of the plate-shaped mold here is defined by the installation position of the detection device when in use, and is also the main assembly surface of the detection device components on the plate-shaped mold.

[0059] The detection process of the elevated floor height detection device is as follows: when in use, Figure 1 As shown, the corresponding elevated floor 20 is opened, and the detection device is placed at the location of the elevated floor 20; then the distance sensor 11 is turned on to measure the height H of the suspended space; the distance sensor 11 transmits the measurement result to the data processing and display module 12 for data processing and display, thereby obtaining the measurement result.

[0060] The elevated floor height detection device of the utility model can realize automatic measurement of the height of the suspended space of the elevated floor by arranging an electrically connected distance sensor and a data processing and display module on a plate-shaped mold, avoiding the limitations of manual measurement and measurement point selection, and has a fast measurement speed and higher measurement accuracy, effectively saving time and cost.

[0061] like Figure 4 As shown, as a preferred example, the detection device further includes a handle 13, and the handle 13 is fixed on the upper surface of the plate-shaped mold 10. The handle 13 is provided to facilitate the taking and placing of the detection device. The shape, size, and fixed position of the handle 13 on the upper surface of the plate-shaped mold 10 are not excessively limited here, and are selected according to actual conditions.

[0062] The distance sensor 11 can be any suitable sensor for measuring distance, such as a laser distance sensor, an infrared distance sensor, an acoustic wave sensor, etc. It should be noted that the specific location of the distance sensor 11 is selected according to the type of the specific distance sensor selected. In principle, when the detection device is installed, the distance measured by the distance sensor 11 is the distance between the upper surface of the elevated floor 20 and the ground.

[0063] The electrical connection between the data processing and display module 12 and the distance sensor 11 can be a wired connection, such as a data cable connection, or a wireless connection, such as a wifi connection, which is selected according to actual needs.

[0064] The number of the distance sensors 11 on the detection device is set according to actual needs, and can be 1, 2, 3, 4 or more, and is selected according to actual conditions. In principle, the more the number, the more accurate the height distribution of the elevated floor can be. For example, when it is necessary to customize an anti-vibration table under a semiconductor machine, it is necessary to measure the height of all elevated floors under the semiconductor machine. For example, if there are 6 elevated floors under the semiconductor machine, the height of the 6 elevated floors needs to be measured. When 1 distance sensor is set on the detection device, only the height of 6 points can be measured. When 2 distance sensors are set on the detection device, only the height of 12 points can be measured. By analogy, the more distance sensors are set on the detection device, the more points are measured, and the more accurately the distribution of the height of all elevated floors can be reflected. Of course, as long as the distribution of the height of all elevated floors can be fully reflected, based on cost considerations, the number of distance sensors on the detection device does not need to be excessively large, and it is sufficient to meet the requirements. As a preferred example, all the distance sensors 11 on the detection device are evenly arranged on the plate-shaped mold 10. The even arrangement can make all measuring points uniform and more accurately reflect the distribution of the heights of all elevated floors.

[0065] As an example, the shape and size of the plate-shaped mold 10 are not excessively limited, as long as it is placed at the location of the elevated floor and can detect the height of the elevated floor. As a preferred example, the size of the plate-shaped mold 10 is adapted to the size of the elevated floor, that is, the plate-shaped mold 10 can be adapted to be accommodated in the empty slot of the elevated floor. This arrangement facilitates the installation of the detection device in the empty slot of the elevated floor, and also facilitates the installation of the distance sensor in the through hole 100 of the plate-shaped mold 10. In addition, when multiple evenly distributed distance sensors are provided, all measurement points can be evenly distributed.

[0066] In addition, in order to improve the application range of the detection device, for example, to adapt to the scenarios of elevated floors of different sizes, when the size of the detection device is smaller than the size of the elevated floor so that the detection device cannot be effectively set in the empty slot of the elevated floor, a distance compensation structure can be set in the detection device, such as Figure 5 As shown, the distance compensation structure 14 is fixed on the upper surface of the plate-shaped mold 10, and the distance compensation structure 14 includes: two moving rods 140 and two stoppers 141 arranged side by side and spaced apart; the two stoppers 141 are respectively fixed to the two opposite ends of the two moving rods 140; the moving rod 140 can move back and forth along a preset direction on the upper surface of the plate-shaped mold 10 to drive the stoppers 141 at its ends to move back and forth so that the stoppers 141 exceed the edge of the plate-shaped mold 10, as shown in FIG. Figure 5 The figure shows that the stopper 141 does not move beyond the edge of the plate-shaped mold 10. When the size of the detection device is small, such as Figure 6 As shown, the two movable rods 140 can drive the two stop members 141 to move beyond the edge of the plate-like mold 10, so that the two stop members 141 overlap on the adjacent elevated floor surface to achieve the installation of the detection device. The moving distance of the two stop members 141 can expand the use scenario of the detection device, and within the movable distance range of the stop members 141, it can be suitable for elevated floors of multiple different specifications.

[0067] The existing conventional technology can be used to realize the moving rod 140 to move back and forth along the preset direction on the upper surface of the plate-shaped mold 10. For example, the moving rod 140 can be set as a retractable rod, or a plurality of slots or buckles can be set under the moving rod 140, and the moving rod 140 can be snapped into the required slots or buckles according to different scene requirements. This embodiment proposes a better solution for moving the moving rod 140, such as Figure 7As shown, a shifting rotating member 142 and two slide rails 143 fixed on the upper surface of the plate-shaped mold 10 are added to the distance compensation structure 14; the shifting rotating member 142 is arranged between the two moving rods 140 and connected by gear meshing, for example, the shifting rotating member 142 can be set as a gear to drive the two moving rods 140 to mesh and transmit; the two slide rails 143 are arranged on both sides of the shifting rotating member 142, and the two slide rails 143 are straddled on the two moving rods 140. When the shifting rotating member 142 rotates, the moving rods 140 on both sides of the shifting rotating member 142 will mesh and transmit in opposite directions, and the slide rails 143 are used to limit the position, thereby driving the two stop members 141 to stably move in opposite directions.

[0068] As an example, Figure 8 and Fig.10 As shown, the longitudinal cross-section of the two slide rails 143 can be set to be an inverted U-shape, and the space of the groove 144 in the slide rail of the inverted U-shaped slide rail 143 can be convenient for hand holding, so the slide rail 143 can also be used as a handle. Fig. 9 As shown in FIG. 1 , when the longitudinal cross-section of the slide rail 143 is configured to be an inverted U-shape, the moving rod 140 can be configured to be respectively accommodated at opposite sides of the groove 144 in the slide rail; in addition, as shown in FIG. Fig.10 As shown, horizontal through holes 145 may also be provided in the two support arms of the slide rail 143, such as Fig.11 As shown, the two moving rods 140 are passed through the horizontal through holes 145 .

[0069] As an example, the data processing and display module 12 may be integrated or separately arranged. Figures 5 to 7 As shown, the data processing and display module 12 is set to a separation mode, including a data processing system 120 and a display screen 121.

[0070] As another example, Figure 7 As shown, the detection device further includes a switch 15 , and the switch 15 can control the start and stop of the distance sensor 11 , and can also control the start and stop of the data processing and display module 12 .

[0071] In summary, the utility model provides a device for detecting the height of an elevated floor. By setting an electrically connected distance sensor and a data processing and display module on a plate-shaped mold, the automatic measurement of the height of the suspended space of the elevated floor can be realized, avoiding the limitation of manual measurement and selection of measurement points, and the measurement speed is fast and the measurement accuracy is higher, which effectively saves time and costs. Therefore, the utility model effectively overcomes various shortcomings in the prior art and has a high industrial utilization value.

[0072] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed in the present invention shall still be covered by the claims of the present invention.

Claims

1. A device for detecting the height of an elevated floor, characterized in that: When in use, the detection device is placed at the location of the elevated floor, and the detection device comprises: A plate-shaped mold, wherein the plate-shaped mold is provided with at least one through hole along the thickness direction; At least one distance sensor, all of which are disposed in a one-to-one correspondence inside or above the through holes to measure the height of the elevated floor; The data processing and display module is arranged on the upper surface of the plate-shaped mold and is electrically connected to the distance sensor to realize signal transmission between the distance sensor and the data processing and display module.

2. The elevated floor height detection device according to claim 1, characterized in that: The detection device also includes a handle, which is fixed on the upper surface of the plate-shaped mold.

3. The elevated floor height detection device according to claim 1, characterized in that: The distance sensor includes a laser distance sensor or an infrared distance sensor.

4. The elevated floor height detection device according to claim 1, characterized in that: The data processing and display module is connected to the distance sensor via a data line.

5. The elevated floor height detection device according to claim 1, characterized in that: The detection device is provided with two or more distance sensors, and the distance sensors are evenly arranged on the plate-shaped mold.

6. The elevated floor height detection device according to claim 1, characterized in that: The detection device further comprises a distance compensation structure fixed on the upper surface of the plate-shaped mold, wherein the distance compensation structure comprises: two movable rods arranged side by side and spaced apart and two stoppers; Two stoppers are respectively fixed to opposite ends of the two moving rods; The moving rod can move back and forth along a preset direction on the upper surface of the plate-shaped mold to drive the stopper at its end to move back and forth so that the stopper exceeds the edge of the plate-shaped mold.

7. The elevated floor height detection device according to claim 6, characterized in that: The distance compensation structure further includes: a shifting rotating member and two slide rails fixed to the upper surface of the plate-shaped mold; The shifting rotating member is disposed between the two moving rods and connected by means of gear meshing, driving the two moving rods to mesh and transmit; The two slide rails are arranged on both sides of the shifting rotating member, and the two slide rails are respectively straddled on the two moving rods.

8. The elevated floor height detection device according to claim 7, characterized in that: The longitudinal sections of the two slide rails are in an inverted U shape, and the moving rods are respectively accommodated at opposite sides of the grooves in the slide rails.

9. The elevated floor height detection device according to claim 7, characterized in that: The longitudinal sections of the two slide rails are in an inverted U shape, and horizontal through holes are arranged in the two support arms of the slide rails, and the two moving rods pass through the horizontal through holes.

10. The elevated floor height detection device according to claim 1, characterized in that: The detection device further comprises a switch, and the switch controls the start and stop of the distance sensor, or the switch controls the start and stop of the data processing and display module.

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