TFT AOI device

Abstract

The utility model discloses TFT AOI equipment which comprises an upper bedplate, a support frame arranged on one side of the bottom of the upper bedplate, an upper test platform arranged at the top of the support frame, a lower test platform arranged at the bottom of the upper test platform and fixed on the support frame, a main camera arranged at the top of the upper bedplate, a y-axis linear module arranged at the top of the y-axis linear module, and an auxiliary camera arranged at the bottom of the y-axis linear module. And the z-axis linear module is arranged at the bottom of the upper table plate and connected with the supporting frame. According to the TFT AOI equipment provided by the utility model, the bottom of the upper bedplate is provided with the support frame for installing the upper test platform and the lower test platform, and the y-axis linear module is arranged for driving the support frame to drive the upper test platform and the lower test platform on the support frame to move left and right to be aligned with the main camera; the main camera is used for detecting the TFT material placed on the upper test platform, and the z-axis linear module capable of vertically adjusting and focusing the main camera is arranged, so that the TFT material can be subjected to layered detection, the detection speed of the TFT material is increased, and the production and detection requirements of the TFT material can be met.

Description

Technical Field

[0001] The utility model relates to the technical field of TFT material detection, in particular to a TFT AOI device. Background Art

[0002] TFT is the abbreviation of Thin Film Transistor, which is a semiconductor switching device widely used in liquid crystal display (LCD) and organic light-emitting diode (OLED) display technology. The key to TFT technology is that it uses very thin layers of semiconductor materials, which are usually formed by vapor deposition. In LCD displays, TFT is used to control the display of each pixel, while in OLED displays, TFT can be used to adjust the brightness of each pixel.

[0003] For example, the Chinese utility model patent (CN215375126U) discloses a TFT-LCD inspection device. The sliding mechanism can realize the movement of the CCD camera in the front-to-back and left-to-right directions, which can effectively and accurately inspect defects while ensuring efficiency and meeting mass producibility. The CCD camera is fixed by a slider, and the moving slider can drive the CCD camera to move together to improve the inspection accuracy. Anti-static cloth is installed on the inspection table to prevent the panel from scratching the table base and causing poor appearance, thereby improving product quality.

[0004] However, when the inventors implemented this device, they found the following defects: during the TFT-LCD inspection process, the TFT-LCD substrate is placed on the inspection table and inspected by taking pictures with a CCD camera. Since this inspection method can only inspect one TFT-LCD substrate at a time, the inspection efficiency is low and cannot meet the TFT-LCD production inspection requirements. In addition, in the absence of light source auxiliary inspection, the quality of TFT-LCD inspection will be affected. Utility Model Content

[0005] Based on this, it is necessary to provide a TFT AOI device for the above-mentioned technical problems, wherein a support frame for installing an upper test platform and a lower test platform is provided at the bottom of the upper platen, and a y-axis linear module is provided to drive the support frame to drive the upper test platform and the lower test platform on the support frame to move left and right to align with the main camera, wherein the main camera is used to detect the TFT material placed on the upper test platform, and a z-axis linear module that can adjust the focus of the main camera up and down is provided. When using the device, the upper test platform and the lower test platform are respectively installed on the support frame, so that the upper test platform and the lower test platform are separated in layers, and TFT materials are installed on the upper test platform and the lower test platform. At this time, the y-axis linear module drives the support frame to move toward the main camera, so that the TFT material is located at the bottom of the main camera, and the TFT material installed on the upper test platform and the lower test platform can be photographed and detected, thereby performing layered detection of the TFT material, accelerating the detection speed of the TFT material, and meeting the production detection requirements of the TFT material. At the same time, during the detection process, a multi-angle light source is provided to assist in irradiating the TFT material, thereby improving the quality of TFT material detection.

[0006] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0007] A TFT AOI device, comprising:

[0008] An upper platform, a support frame is provided on one side of the bottom of the upper platform,

[0009] An upper test platform is arranged on the top of the support frame,

[0010] A lower test platform, which is arranged at the bottom of the upper test platform and fixed on the support frame,

[0011] The main camera is arranged on the top of the upper platform.

[0012] A y-axis linear module, which is arranged at the bottom of the upper platform and connected to the support frame,

[0013] A z-axis linear module is arranged on the top of the upper platform and connected to the main camera.

[0014] Furthermore, a light-transmitting hole is provided in the middle of the top of each of the upper test platform and the lower test platform, and a screw hole for installing TFT materials is provided outside the light-transmitting hole.

[0015] Furthermore, a surface light source is installed on one side of the top of the upper platform, a fixing frame a is installed on the top of the surface light source, and a through groove is opened on the top of the fixing frame a.

[0016] Furthermore, a lens is installed at the bottom of the main camera, and the lens, the through slot and the surface light source are arranged in alignment, a mounting rod is installed on the outside of the main camera, and a mounting plate is installed on the outside of the mounting rod.

[0017] Furthermore, a lower platen is provided at the bottom of the upper platen, and the y-axis linear module includes a pushing cylinder, a piston push rod and a connecting block a. The pushing cylinder is installed on one side of the top of the lower platen, and one end of the pushing cylinder is drivingly connected to the piston push rod. A connecting block a fixedly connected to the support frame is installed on the top of the piston push rod, and movable grooves for placing the support frame are opened on both sides of the top of the upper platen.

[0018] Furthermore, the z-axis linear module includes a bracket, a lifting cylinder, a lifting rod and a connecting block b. A bracket is installed on one side of the top of the fixed frame a, a lifting cylinder is installed on the top of the bracket, a lifting rod is driven and connected to the bottom of the lifting cylinder, and a connecting block b fixedly connected to the mounting plate is installed on the outer end of the lifting rod.

[0019] Furthermore, side cameras are respectively provided on the four sides of the bottom of the fixing frame a, a side light source is provided on one side of the bottom of the side camera, a fixing frame b is installed on the outer end of the side light source, and adjustment scales are respectively installed on the four sides of the bottom, and a mounting head installed with the side camera is slidably connected on the adjustment scale.

[0020] Furthermore, a bellows is installed at the bottom of the lens, and the bellows is a retractable bellows made of light-absorbing material.

[0021] Furthermore, a drag chain is installed between the lower platform and the support frame, a slide rail is installed on the top of the lower platform close to the y-axis linear module, a slider slidably connected to the slide rail is installed on the other side of the bottom of the support frame, and a limit block is installed on the top side of the slide rail.

[0022] Furthermore, telescopic cylinders are installed on both sides of the support frame, and the tops of the telescopic cylinders are drivingly connected to telescopic rods, and the tops of the telescopic rods are fixedly connected to the bottom end of the upper test platform.

[0023] Compared with the prior art, the utility model has the following beneficial effects:

[0024] The TFT AOI equipment provided by the utility model is provided with a support frame for installing an upper test platform and a lower test platform at the bottom of an upper platen, and a y-axis linear module is provided for driving the support frame to drive the upper test platform and the lower test platform on the support frame to move left and right to align with a main camera, wherein the main camera is used to detect TFT materials placed on the upper test platform, and a z-axis linear module is provided for adjusting the focus of the main camera up and down. When using the device, the upper test platform and the lower test platform are respectively installed on the support frame, so that the upper test platform and the lower test platform are separated in layers, and TFT materials are installed on the upper test platform and the lower test platform. At this time, the y-axis linear module drives the support frame to move toward the main camera, so that the TFT material is located at the bottom of the main camera, and the TFT materials installed on the upper test platform and the lower test platform can be photographed and detected, thereby performing layered detection of the TFT material, accelerating the detection speed of the TFT material, and meeting the production detection requirements of the TFT material. At the same time, during the detection process, a multi-angle light source is provided to assist in irradiating the TFT material, thereby improving the quality of TFT material detection. The utility model simultaneously sets the upper test platform, the lower test platform, the main camera, the y-axis linear module and the z-axis linear module for integrated use, which can improve the detection efficiency, and the structure of the entire device is coordinated for use, occupying a small space. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 A schematic diagram of the structure of the TFT AOI device provided by the utility model;

[0026] Figure 2 A side cross-sectional schematic diagram of a TFT AOI device provided by the utility model;

[0027] Figure 3 for Figure 1 A schematic diagram of the front view structure of

[0028] Figure 4 for Figure 1 A schematic diagram of a back cross-section of ;

[0029] Figure 5 Schematic diagram of the side light source structure.

[0030] The markings in the figure are as follows:

[0031] Upper platform 1;

[0032] Support frame 2, upper test platform 201, lower test platform 202, surface light source 203, fixing frame a204, through slot 205;

[0033] Main camera 3, lens 301, mounting rod 302, mounting plate 303;

[0034] y-axis linear module 4;

[0035] z-axis linear module 5;

[0036] Side camera 6;

[0037] Side light source 7, fixing bracket b701;

[0038] Adjustment scale 8;

[0039] Bellows 9;

[0040] The lower platform 10, the drag chain 11, the slide rail 12, the slide block 13, the limit block 14, the telescopic cylinder 15, and the telescopic rod 16. DETAILED DESCRIPTION

[0041] In order to enable those skilled in the art to better understand the solution of the utility model, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is only a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the utility model.

[0042] As described in the background technology, during the TFT-LCD inspection process, the TFT-LCD substrate is placed on a testing table and inspected by taking photos with a CCD camera. Since this inspection method can only inspect one TFT-LCD substrate at a time, the inspection efficiency is low and cannot meet the TFT-LCD production inspection requirements. In addition, the quality of TFT-LCD inspection will be affected if there is no light source to assist the inspection.

[0043] In order to solve this technical problem, the utility model provides a TFT AOI device, which is applied to the dispensing of narrow borders of LED display screens.

[0044] Specifically, please refer to Figure 1-3 , the TFT AOI equipment specifically includes:

[0045] The upper platform 1 is provided with a support frame 2 at one side of the bottom of the upper platform 1.

[0046] The upper test platform 201 is arranged on the top of the support frame 2.

[0047] The lower test platform 202 is arranged at the bottom of the upper test platform 201 and fixed on the support frame 2.

[0048] The main camera 3 is arranged on the top of the upper platform 1.

[0049] The y-axis linear module 4 is arranged at the bottom of the upper platform 1 and connected to the support frame 2.

[0050] The z-axis linear module 5 is disposed on the top of the upper platform 1 and connected to the main camera 3 .

[0051] The TFT AOI device provided by the utility model is provided with a support frame 2 for installing an upper test platform 201 and a lower test platform 202 at the bottom of an upper platen 1, and a y-axis linear module 4 is provided for driving the support frame 2 to drive the upper test platform 201 and the lower test platform 202 on the support frame 2 to move left and right to align with a main camera 3, wherein the main camera 3 is used to detect the TFT material placed on the upper test platform 201, and a z-axis linear module 5 is provided for adjusting the focus of the main camera 3 up and down. When using the device, the upper test platform 201 and the lower test platform 202 are respectively installed on the support frame 2, so that the upper test platform 201 and the lower test platform 202 can move left and right to align with the main camera 3. The platforms 202 are separated by layers, and TFT materials are installed on the upper test platform 201 and the lower test platform 202. At this time, the y-axis linear module 4 drives the support frame 2 to move toward the main camera 3, so that the TFT material is located at the bottom of the main camera 3, and the TFT materials installed on the upper test platform 201 and the lower test platform 202 can be photographed and tested, thereby performing layered testing on the TFT materials, speeding up the testing speed of the TFT materials, and meeting the production testing requirements of the TFT materials. At the same time, during the testing process, a multi-angle light source is provided to assist in irradiating the TFT materials, thereby improving the quality of the TFT material testing. The utility model simultaneously sets the upper test platform 201, the lower test platform 202, the main camera 3, the y-axis linear module 4 and the z-axis linear module 5 for integrated use, which can improve the testing efficiency, and the structure of the entire device is used in coordination, and occupies little space.

[0052] In order to enable those skilled in the art to better understand the solution of the utility model, the technical solution in the embodiments of the utility model will be clearly and completely described below in conjunction with the accompanying drawings.

[0053] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features and technical solutions in the embodiments may be combined with each other.

[0054] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0055] Please refer to Figure 1-3A TFT AOI device includes an upper platen 1, a support frame 2, an upper test platform 201, a lower test platform 202, a main camera 3, a y-axis linear module 4 and a z-axis linear module 5; wherein, a support frame 2 is provided on one side of the bottom of the upper platen 1, the upper test platform 201 is provided on the top of the support frame 2, the lower test platform 202 is provided on the bottom of the upper test platform 201 and fixed on the support frame 2, and the main camera 3 is provided on the top of the upper platen 1. Specifically, the y-axis linear module 4 is provided at the bottom of the upper platen 1 and connected to the support frame 2, and the upper test platform 201 and the lower test platform 202 on the support frame 2 can be driven to move left and right through the y-axis linear module 4, and the z-axis linear module 5 is provided at the top of the upper platen 1 and connected to the main camera 3, and the main camera 3 can be driven to move up and down through the z-axis linear module 5.

[0056] Please refer to Figure 1 A light-transmitting hole is provided in the middle of the top of the upper test platform 201 and the lower test platform 202, and a screw hole for installing TFT materials is provided on the outside of the light-transmitting hole. A surface light source 203 is installed on one side of the top of the upper platform 1, and a fixing frame a204 is installed on the top of the surface light source 203. A through groove 205 is provided on the top of the fixing frame a204. A lens 301 is installed on the bottom of the main camera 3, and the lens 301, the through groove 205 and the surface light source 203 are arranged in alignment. A mounting support rod 302 is installed on the outside of the main camera 3, and a mounting plate 303 is installed on the outside of the mounting support rod 302. Side cameras 6 are respectively provided on the four sides of the bottom of the fixing frame a204, a side light source 7 is provided on one side of the bottom of the side camera 6, and a fixing frame b701 is installed on the outer end of the side light source 7. Adjustment scales 8 are respectively installed on the four sides of the bottom, and a mounting head installed with the side camera 6 is slidably connected to the adjustment scale 8. During specific use, the upper test platform 201 and the lower test platform 202 are respectively installed on the support frame 2, so that the upper test platform 201 and the lower test platform 202 are separated by layers, and TFT materials are installed on the upper test platform 201 and the lower test platform 202. At this time, the y-axis linear module 4 drives the support frame 2 to move toward the main camera 3, so that the TFT material is located at the bottom of the main camera 3, and the top of the lower test platform 202 is facing the side camera 6, and the bottom side of the upper test platform 201 is facing the side light source 7, and the lower test platform 202 is facing the surface light source 203, and the surface light source 203 and the side light source 7 emit The light can illuminate the TFT material through the light-transmitting hole, making it easier to take pictures and see clearly. Then, the TFT materials installed on the upper test platform 201 and the lower test platform 202 can be photographed and tested. The photographed information can be sent to a computer display screen, and the quality of the TFT material after being illuminated can be viewed on the computer display screen to determine whether the TFT material is qualified. Since the TFT material can be tested in layers, the testing speed of the TFT material is accelerated, which can meet the production testing needs of the TFT material. At the same time, during the testing process, multi-angle light sources are used to assist in irradiating the TFT material, thereby improving the quality of TFT material testing.

[0057] When the main camera 3 and the side camera 6 are in use, they can be connected to an external computer display screen through electrical wires, so that the main camera 3 and the side camera 6 are connected to the computer display screen by electrical signals, and the photographed information can be converted into video through electrical signals for viewing and inspection.

[0058] When the side camera 6 is in use, the side camera 6 is installed on the adjustment scale 8 through the mounting head. Since the mounting head and the adjustment scale 8 can be slidably connected, and the adjustment scale 8 is arranged in an arc shape, the side camera 6 can be movably adjusted on the adjustment scale 8 by the mounting head. After adjustment, it is placed at a certain arc angle, which is helpful to take pictures of the TFT material at the lower test platform 202. After the mounting head is movably adjusted on the adjustment scale 8, a screw hole and an adjusting bolt are opened on the top of the mounting head. The adjusting bolt is tightened in the screw hole and supported against the top of the adjustment scale 8, so that the mounting head is fixed on the adjustment scale 8, and then the mounting head is fixed on the adjustment scale 8.

[0059] The TFT AOI equipment provided in this embodiment can meet the production inspection requirements of TFT materials by taking photos of TFT materials in layers, thereby accelerating the inspection speed of TFT materials. At the same time, during the inspection process, multi-angle light sources are used to assist in irradiating the TFT materials, thereby improving the quality of TFT material inspection.

[0060] The TFT AOI equipment provided in Example 1 is further optimized, specifically, as follows: Figure 1 and 3 As shown, a lower platen 10 is provided at the bottom of the upper platen 1, and the y-axis linear module 4 includes a pushing cylinder, a piston push rod and a connecting block a. The pushing cylinder is installed on one side of the top of the lower platen 10, and one end of the pushing cylinder is drivingly connected to the piston push rod. A connecting block a fixedly connected to the support frame 2 is installed on the top of the piston push rod, and movable grooves for placing the support frame 2 are opened on both sides of the top of the upper platen 1.

[0061] When the support frame 2 is in use, the support frame 2 is installed on the connecting block a through the movable groove, and after the upper test platform 201 and the lower test platform 202 are installed on the support frame 2, the TFT materials can be placed in layers between them, and the interval space is large, which does not affect the upper and lower layers to take pictures and detect the TFT materials. After the TFT materials are installed, the push cylinder can be started to work, and the push cylinder drives the piston push rod to drive the support frame 2 to move to the right, so that the support frame 2 can easily move the upper test platform 201 and the lower test platform 202 to the detection area, so that the bottom of the lower test platform 202 is just Facing the surface light source 203, the top of the lower test platform 202 is opposite to the side camera 6, and one side of the bottom of the upper test platform 201 is opposite to the side light source 7, which is convenient for taking pictures and testing the TFT materials installed on the upper test platform 201 and the lower test platform 202. After the inspection, the cylinder drives the piston push rod to drive the support frame 2 to move to the left to its original position, so that the inspected TFT materials can be removed from the upper test platform 201 and the lower test platform 202 respectively, and qualified TFT materials are placed in the qualified area, otherwise, unqualified TFT materials are placed in the unqualified area.

[0062] like Figure 1 , 2 As shown in , 3 and 4, the z-axis linear module 5 includes a bracket, a lifting cylinder, a lifting rod and a connecting block b. A bracket is installed on one side of the top of the fixed frame a204, a lifting cylinder is installed on the top of the bracket, a lifting rod is driven and connected to the bottom of the lifting cylinder, and a connecting block b fixedly connected to the mounting plate 303 is installed on the outer end of the lifting rod.

[0063] After the TFT material on the upper test platform 201 moves to face the main camera 3, the lifting cylinder can be started to drive the lifting rod to move downward, and the lifting rod drives the mounting plate 303, the mounting support rod 302, the main camera 3 and the lens 301 to move downward, so that the lens 301 is close to the TFT material, which is convenient for adjusting the focal length of the lens 301 for taking pictures of the TFT material, making the picture clear after taking the picture, which is helpful to identify the quality of the TFT material and improve the quality of TFT material detection.

[0064] Through the above structural design, when inspecting TFT materials, the focal length of the lens 301 and the positioning of the TFT materials can be adjusted, and the upper and lower layers can be inspected at the same time, which can meet the needs of fast and accurate inspection of TFT materials.

[0065] The TFT AOI equipment provided in Example 2 is further optimized, such as Figure 3 As shown, a drag chain 11 is installed between the lower platform 10 and the support frame 2, a slide rail 12 is installed on the top of the lower platform 10 close to the y-axis linear module 4, a slider 13 slidably connected to the slide rail 12 is installed on the other side of the bottom of the support frame 2, and a limit block 14 is installed on one side of the top of the slide rail 12.

[0066] In order to ensure the stable movement of the support frame 2, a slide rail 12 is installed on the other side of the bottom of the support frame 2. Specifically, the other side of the bottom of the support frame 2 is installed on the slide rail 12 through a slider 13 and is slidably connected thereto. When the piston push rod drives one side of the bottom of the support frame 2 to move left and right, the slider 13 drives the other side of the bottom of the support frame 2 to slide synchronously on the slide rail 12, ensuring the stability of the overall movement of the support frame 2, so that the upper test platform 201 and the lower test platform 202 will not shake during the TFT material detection operation, ensuring that the picture taken is clear and visible.

[0067] The TFT AOI equipment provided in Example 1 is further optimized, as Figure 4 As shown, telescopic cylinders 15 are installed on both sides of the support frame 2, and the tops of the telescopic cylinders 15 are driven and connected with telescopic rods 16, and the tops of the telescopic rods 16 are fixedly connected to the bottoms of the upper test platforms 201.

[0068] The upper test platform 201 and the lower test platform 202 are installed on the support frame 2 and during use, the lower test platform 202 is installed between the support frames 2, and the bottom of the upper test platform 201 is connected to the telescopic cylinder 15 and the telescopic rod 16 on both sides of the inside of the support frame 2. The telescopic cylinder 15 drives the telescopic rod 16 to move up and down, and the telescopic rod 16 drives the upper test platform 201 to move up and down. The interval distance between the upper test platform 201 and the lower test platform 202 can be adjusted so that the upper test platform 201 and the lower test platform 202 will not affect or block each other during use.

[0069] like Figure 1 and 2 As shown, a bellows 9 is installed at the bottom of the lens 301, and the bellows 9 is a retractable light-absorbing material bellows 9. When the lens 301 is in use, the outside of the lens 301 is covered by the bellows 9. When the lens 301 takes a picture of the TFT material, since the bellows 9 is a retractable light-absorbing material bellows 9, the bellows 9 can absorb the light source irradiated by the side light source 7, increase the brightness around the lens 301, and improve the clarity of the pictures taken by the lens 301.

[0070] When the surface light source 203, the main camera 3, the y-axis linear module 4, the z-axis linear module 5, the side camera 6, the side light source 7 and the telescopic cylinder 15 are used, the TFT The AOI equipment uses a control console at the outer end, and there is a controller on the control console. The surface light source 203, the main camera 3, the y-axis linear module 4, the z-axis linear module 5, the side camera 6, the side light source 7 and the telescopic cylinder 15 are respectively connected to the controller through wires, and a power cord and a plug connected to the controller are installed at the bottom of the control console. The power is turned on by inserting the plug into the socket in the working area, so that the controller, the surface light source 203, the main camera 3, the y-axis linear module 4, the z-axis linear module 5, the side camera 6, the side light source 7 and the telescopic cylinder 15 can be powered on and used normally, and the surface light source 203, the main camera 3, the y-axis linear module 4, the z-axis linear module 5, the side camera 6, the side light source 7 and the telescopic cylinder 15 can be controlled to start and shut down by the controller, and the control program involved in the utility model can be implemented by those skilled in the art according to the same or similar principles in the prior art, and this part is not the innovation of the utility model.

[0071] The use process of the TFT AOI equipment provided by the utility model is as follows:

[0072] The upper test platform 201 and the lower test platform 202 are respectively installed on the support frame 2, so that the upper test platform 201 and the lower test platform 202 are separated by layers, and TFT materials are installed on the upper test platform 201 and the lower test platform 202. At this time, the y-axis linear module 4 drives the support frame 2 to move toward the main camera 3, so that the TFT material is located at the bottom of the main camera 3, and the top of the lower test platform 202 is opposite to the side camera 6, and one side of the bottom of the upper test platform 201 is opposite to the side light source 7, and the lower test platform 202 is opposite to the surface light source 203. The light emitted by the surface light source 203 and the side light source 7 illuminates the TFT material through the light-transmitting hole, which is convenient for taking pictures. Then, the TFT materials installed on the upper test platform 201 and the lower test platform 202 can be photographed and tested, and the photographed information can be sent to the computer display screen. The quality of the TFT material after illumination can be viewed through the computer display screen to determine whether the TFT material is qualified. Since the TFT material can be tested in layers, the detection speed of the TFT material is accelerated.

[0073] After the TFT material on the upper test platform 201 moves to face the main camera 3, the lifting cylinder can be started to drive the lifting rod to move downward, and the lifting rod drives the mounting plate 303, the mounting support rod 302, the main camera 3 and the lens 301 to move downward, so that the lens 301 is close to the TFT material, which is convenient for adjusting the focal length of the lens 301 for taking pictures of the TFT material, so that the picture after taking pictures is clear, which is helpful to identify the quality of the TFT material and improve the quality of TFT material detection. After the detection, the cylinder is pushed to drive the piston push rod to drive the support frame 2 to move to the left to its original position, so that the detected TFT material can be removed from the upper test platform 201 and the lower test platform 202 respectively, and the qualified TFT material is placed in the qualified area, and vice versa, the unqualified TFT material is placed in the unqualified area.

[0074] In the present invention, unless otherwise clearly defined and specified, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, a direct connection, or an indirect connection through an intermediate medium, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0075] Obviously, the embodiments described above are only some embodiments of the utility model, rather than all embodiments. The preferred embodiments of the utility model are given in the accompanying drawings, but they do not limit the patent scope of the utility model. The utility model can be implemented in many different forms. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosure of the utility model more thorough and comprehensive. Although the utility model is described in detail with reference to the aforementioned embodiments, for those skilled in the art, it is still possible to modify the technical solutions recorded in the aforementioned specific implementation methods, or to replace some of the technical features therein with equivalents. Any equivalent structure made using the contents of the utility model specification and the accompanying drawings, directly or indirectly used in other related technical fields, is also within the scope of patent protection of the utility model.

Claims

1. A TFT AOI device, characterized in that: It includes: An upper platform (1), wherein a support frame (2) is arranged on one side of the bottom of the upper platform (1); An upper testing platform (201) arranged on the top of the supporting frame (2); A lower test platform (202), which is arranged at the bottom of the upper test platform (201) and fixed on the support frame (2); A main camera (3) arranged on the top of the upper platform (1); A y-axis linear module (4), which is arranged at the bottom of the upper platform (1) and connected to the support frame (2); A z-axis linear module (5) is arranged on the top of the upper platform (1) and is connected to the main camera (3).

2. The TFT AOI equipment according to claim 1, characterized in that: A light-transmitting hole is provided in the middle of the top of each of the upper test platform (201) and the lower test platform (202), and screw holes for mounting TFT materials are provided outside the light-transmitting holes.

3. The TFT AOI equipment according to claim 1, characterized in that: A surface light source (203) is installed on one side of the top of the upper platform (1), a fixing frame a (204) is installed on the top of the surface light source (203), and a through groove (205) is provided on the top of the fixing frame a (204).

4. The TFT AOI equipment according to claim 3, characterized in that: A lens (301) is installed at the bottom of the main camera (3), and the lens (301), the through slot (205) and the surface light source (203) are arranged in alignment; a mounting support rod (302) is installed on the outside of the main camera (3), and a mounting plate (303) is installed on the outside of the mounting support rod (302).

5. The TFT AOI equipment according to claim 1, characterized in that: A lower platform (10) is provided at the bottom of the upper platform (1), and the Y-axis linear module (4) comprises a pushing cylinder, a piston push rod and a connecting block a. The pushing cylinder is installed on one side of the top of the lower platform (10), one end of the pushing cylinder is drivingly connected to the piston push rod, and the top of the piston push rod is installed with a connecting block a fixedly connected to the support frame (2), and movable grooves for placing the support frame (2) are provided on both sides of the top of the upper platform (1).

6. The TFT AOI equipment according to claim 4, characterized in that: The z-axis linear module (5) comprises a bracket, a lifting cylinder, a lifting rod and a connecting block b, wherein a bracket is installed on one side of the top of the fixed frame a (204), a lifting cylinder is installed on the top of the bracket, a lifting rod is connected to the bottom of the lifting cylinder, and a connecting block b fixedly connected to the mounting plate (303) is installed on the outer end of the lifting rod.

7. The TFT AOI equipment according to claim 3, characterized in that: The four sides of the bottom of the fixing frame a (204) are respectively provided with side cameras (6), one side of the bottom of the side camera (6) is provided with a side light source (7), the outer end of the side light source (7) is mounted with a fixing frame b (701), the four sides of the bottom are respectively mounted with adjustment scales (8), and the adjustment scales (8) are slidably connected with a mounting head mounted on the side camera (6).

8. The TFT AOI equipment according to claim 4, characterized in that: A bellows (9) is installed at the bottom of the lens (301), and the bellows (9) is a retractable bellows (9) made of light-absorbing material.

9. The TFT AOI equipment according to claim 5, characterized in that: A drag chain (11) is installed between the lower platform (10) and the support frame (2); a slide rail (12) is installed on the top of the lower platform (10) close to the Y-axis linear module (4); a slider (13) slidably connected to the slide rail (12) is installed on the other side of the bottom of the support frame (2); and a limit block (14) is installed on one side of the top of the slide rail (12).

10. The TFT AOI equipment according to claim 1, characterized in that: Telescopic cylinders (15) are respectively installed on both sides of the interior of the support frame (2), and the tops of the telescopic cylinders (15) are drivingly connected to telescopic rods (16), and the tops of the telescopic rods (16) are fixedly connected to the bottoms of the upper test platforms (201).

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