Movable gas supply device and gas supply system

Abstract

The utility model provides a movable gas supply device and a gas supply system.The movable gas supply device comprises a frame body, and the frame body comprises a first supporting part and a second supporting part; the first supporting part and the second supporting part are both used for being in contact with a gas cylinder and are configured to support the gas cylinder on the frame body in an inclined state; the frame body further comprises a handle, and a walking mechanism is arranged below the frame body. According to the technical scheme, the gas supply device is provided with the handle and the walking mechanism, and the gas supply device can be transferred under the action of manpower so as to carry the gas cylinder to be transferred to the position where equipment needing gas supply is located. The gas supply device provided by the technical scheme can be independent of the special gas equipment, so that the volume of the special gas equipment is not increased. According to the technical scheme, due to the fact that the gas cylinder can be obliquely arranged on the frame body through the first supporting part and the second supporting part of the frame body, the possibility that the gas cylinder shakes in the movement process of the frame body can be reduced, and the safety of the gas supply device is improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor production technology, and in particular to a movable gas supply device and a gas supply system. Background Art

[0002] In the semiconductor field, special gas equipment is widely used in the production process of semiconductor materials and other products. The power supply in the special gas equipment is always connected to the PLC control module to drive the solenoid valve, and then the solenoid valve is used to drive the pneumatic electrical components to achieve the normal operation of the equipment. Therefore, when an emergency power outage occurs in the production workshop or the electrical components are damaged, the electrical components cannot operate normally due to lack of drive, which leads to equipment downtime and production line suspension, causing considerable property losses. Therefore, a one-button forced function is required to use an external gas source to transport specific gases into the special gas equipment to ensure the normal operation of the equipment.

[0003] Among the existing equipment in the industry, after technical improvements, a forced dial-code gas supply function has been added to many single control cabinets. However, in the actual production process, it is not uncommon for equipment to shut down due to power outages in the factory or damage to driving components, which leads to a low utilization rate of one-button forced gas supply on the equipment. At the same time, each device is equipped with a complete set of one-button forced gas supply functions, which not only takes up space for the equipment, but also increases the cost of the equipment. Utility Model Content

[0004] The purpose of the present application is to provide a movable gas supply device that can flexibly supply gas to equipment to be supplied with gas at different locations to drive electrical components to work without increasing the volume of the special gas equipment.

[0005] The embodiment of the present application is implemented as follows:

[0006] In a first aspect, an embodiment of the present application provides a movable gas supply device, comprising a frame, wherein the frame comprises a first support portion and a second support portion; the first support portion and the second support portion are both used to contact the gas cylinder, and are configured to support the gas cylinder in an inclined state on the frame; the frame also comprises a handle, and a walking mechanism is provided under the frame.

[0007] The gas supply device provided by the above technical solution is provided with a handle and a walking mechanism, which can be transferred under the action of manpower to carry the gas cylinder to the location of the equipment that needs gas supply. The gas supply device provided by the above technical solution can exist independently of the special gas equipment, and therefore will not increase the volume of the special gas equipment. In the above technical solution, since the first support part and the second support part of the frame can tilt the gas cylinder to the frame, the possibility of shaking of the gas cylinder during the movement of the frame can be reduced, thereby improving the safety of the gas supply device.

[0008] In some optional embodiments, the first supporting portion includes a supporting surface, the supporting surface is used to contact the bottom of the gas cylinder, and the second supporting portion is used to contact the cylindrical surface of the gas cylinder.

[0009] By adopting the arrangement in the above technical solution, the first support part can make contact with the gas cylinder over a larger area, and more positions in the gas cylinder can make contact with the second support part, so that the gas cylinder can be supported more stably.

[0010] In some optional embodiments, the frame includes two support rods arranged side by side, each of the support rods is provided with the second support portion, and the second support portion protrudes toward the direction of the opposite support rod.

[0011] In the above technical solution, the second supporting parts on the two supporting rods can support the cylindrical surface of the gas cylinder from both sides, so that the gas cylinder can be stably supported at the position between the two rods.

[0012] In some optional embodiments, the support rod is further provided with a fixing hole, and the fixing hole is used to set a strap to fix the gas cylinder.

[0013] In some optional embodiments, the frame is further detachably connected to an operating panel, and the operating panel is provided with a gas supply pipeline, the inlet of the gas supply pipeline is used to connect to a gas cylinder, and the outlet is used to connect to electrical components.

[0014] In the above technical solution, the operating panel and the frame are detachably connected, which is convenient for replacing the operating panel. The operating panel is provided with a gas supply pipeline, through which the gas in the gas cylinder can be passed into the electrical components, thereby driving the electrical components in the special gas equipment to work.

[0015] In some optional embodiments, the gas supply pipeline is sequentially provided with a first valve, a pressure regulating valve, a second valve and a machine-controlled valve, wherein the first valve is located at the inlet end of the gas supply pipeline and the machine-controlled valve is located at the outlet end of the gas supply pipeline.

[0016] In some optional embodiments, the outlet of the machine-controlled valve is connected to a pneumatic indicator light, and the outlet of the pneumatic indicator light is used to connect to an electrical component.

[0017] In the above technical solution, by observing the pneumatic indicator light, it can be determined whether there is airflow passing through the pneumatic indicator light, and the outlet of the pneumatic indicator light is used to connect the electrical components. Therefore, by observing the pneumatic indicator light, it can be determined whether there is airflow to the electrical components.

[0018] In some optional embodiments, the outlet end of the air supply pipeline includes a plurality of parallel branches, each of which is connected to an outlet of the second valve, and the machine-controlled valve and the pneumatic indicator light are connected in series to the branches.

[0019] In the above technical solution, the outlet end of the air supply pipeline includes multiple parallel branches, which can realize that each branch can independently supply power to an electrical component, and the pneumatic indicator light can be used to observe whether there is airflow passing through the branch.

[0020] In some optional embodiments, a third valve and a pressure relief valve are further included, and the second valve, the third valve and the pressure relief valve are connected in parallel to the outlet of the pressure regulating valve.

[0021] In the above technical solution, by connecting the third valve to the outlet of the pressure regulating valve, after replacing the gas cylinder, the gas can be released through the third valve, thereby achieving the purpose of purging the pipeline between the inlet of the gas supply pipeline and the third valve. The pressure upper limit of the pipeline connected to the outlet of the pressure regulating valve can be set by the pressure relief valve to avoid damage to the electrical components due to excessive gas pressure entering the electrical components caused by damage to the pressure regulating valve.

[0022] In a second aspect, an embodiment of the present application provides a gas supply system, comprising a gas cylinder and the movable gas supply device provided in the first aspect, wherein the bottom surface of the gas cylinder contacts the first support portion, and the side surface of the gas cylinder contacts the second support portion.

[0023] The gas supply system provided by the above technical solution can be used to supply gas to electrical components when the equipment is powered off, so that the equipment can continue to operate and reduce losses. The gas supply device provided by the above technical solution can exist independently of the special gas equipment, so it will not increase the volume and cost of the special gas equipment. The gas supply system provided by the above technical solution is equipped with a walking mechanism and a gas cylinder, and there is no need to find another gas source on site, which is convenient to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0025] Figure 1 A schematic diagram of a gas supply system provided in an embodiment of the present application at a first viewing angle;

[0026] Figure 2 A schematic diagram of the air supply system provided in an embodiment of the present application at a second viewing angle;

[0027] Figure 3 A schematic diagram of the gas supply system provided in an embodiment of the present application from a third perspective.

[0028] Icons: 100-gas cylinder; 200-movable gas supply device; 210-frame; 211-first support part; 2111-support surface; 212-second support part; 213-travel mechanism; 214-support rod; 215-fixing hole; 216-handle; 217-cross bar; 300-operation panel; 400-gas supply pipeline; 410-first valve; 420-pressure regulating valve; 421-second pressure gauge; 430-second valve; 440-machine-controlled valve; 450-pneumatic indicator light; 460-third valve; 470-pressure relief valve. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0030] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0031] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0032] In the description of this application, it should be noted that the terms "center", "upper", "lower", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the product of the application is usually placed when in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as a limitation on this application. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0033] In addition, the terms "horizontal", "vertical", "overhanging" and the like do not mean that the components are required to be absolutely horizontal or overhanging, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0034] In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0035] An embodiment of the present application provides a gas supply system, including a movable gas supply device 200 and a gas cylinder 100. It is not difficult to understand that the gas cylinder 100 contains gas, which can be used to supply gas to special gas equipment after power failure, so that the electrical components in the special gas equipment can work. The gas cylinder 100 can be installed on the movable gas supply device 200, and then transferred to the location of the special gas equipment that needs gas supply. The gas supply system provided by the embodiment of the present application exists independently of the special gas equipment and will not increase the volume and cost of the special gas equipment. Among them, existing independently of the special gas equipment means: it can be separated from the special gas equipment without affecting the normal function of the special gas equipment.

[0036] In some embodiments of the present application, the movable gas supply device 200 includes a frame 210 and a walking mechanism 213 disposed under the frame 210. The frame 210 includes a first support portion 211 and a second support portion 212, both of which are used to contact the gas cylinder 100, and the first support portion 211 and the second support portion 212 are configured to support the gas cylinder 100 in an inclined state on the frame 210. The frame 210 also includes a handle 216. It is not difficult to understand that due to the presence of the handle 216 and the walking mechanism 213, the frame 210 can be pushed by manpower, thereby transferring the gas cylinder 100 carried on the frame 210 to supply gas to the special gas equipment.

[0037] In the process of pushing the frame 210 to transfer the gas cylinder 100, since the gas cylinder 100 is supported on the frame 210 in an inclined state under the action of the first support part 211 and the second support part 212, the gas cylinder 100 will not easily tip over or shake as if it is set vertically, nor will it easily roll as if it is set horizontally, thereby improving safety of use.

[0038] In some embodiments of the present application, the walking mechanism 213 includes wheels disposed below the bracket, and the number of the wheels may be three or four.

[0039] Furthermore, the first support portion 211 includes a support surface 2111, and the support surface 2111 is used to contact the bottom of the gas cylinder 100; the second support portion 212 is used to contact the cylindrical surface of the gas cylinder 100. Figure 1As shown, the gas cylinder 100 is a nearly cylindrical structure, and the first support portion 211 can make surface contact with the gas cylinder 100, thereby making contact with the gas cylinder 100 over a larger area; the cylindrical surface of the gas cylinder 100 is larger in its axial direction, and more positions can be in contact with the second support portion 212. Figure 2 and Figure 3 In the illustrated embodiment, the plurality of second support portions 212 are in contact with the gas cylinder 100 along the circumferential defense line of the gas cylinder 100 , so that the gas cylinder 100 can be supported more stably.

[0040] exist Figure 2 In the illustrated embodiment, the first support portion 211 is a plate-like structural member on the frame body 210, and the support surface 2111 is a plane of the first support portion 211 tilted obliquely upward, so that when the bottom surface of the gas cylinder 100 contacts the support surface 2111, the gas cylinder 100 tilts toward the side where the second support portion 212 is located. The bracket also includes two support rods 214 arranged side by side, each support rod 214 is provided with a second support portion 212, and the second support portion 212 on one support rod 214 protrudes toward the direction where the other oppositely arranged support rod 214 is located. The gas cylinder 100 is supported between the second support portions 212 on both sides, and the second support portion 212 can not only play a supporting role, but also play a positioning role to a certain extent, reducing the shaking that may occur after the gas cylinder 100 contacts the second support portion 212.

[0041] Further, if Figure 2 As shown, a triangular plate-shaped structural member is also connected between the support rod 214 and the first support portion 211, and the triangular plate-shaped structural member can play the role of a reinforcing rib. When the frame 210 supports the gas cylinder 100, the force exerted by the gas cylinder 100 on the support rod 214 and the first support portion 211 is separated in opposite directions, which will cause the first support portion 211 and the support rod 214 to have a tendency to rotate in directions away from each other. By arranging a triangular plate-shaped structural member at the connection position of the support rod 214 and the first support portion 211 to connect the two, the structural strength of the frame 210 at this position can be improved.

[0042] like Figure 2 and Figure 3 As shown, a plurality of second support portions 212 are provided along the length direction of the support rod 214. The second support portions 212 may be distributed equidistantly, or the distribution density may be high at the bottom of the support rod 214 and low at the top of the support rod 214. Figure 3 As shown, the distribution density of the second support parts 212 at the bottom of the support rod 214 is relatively large, and the distribution density of the second support parts 212 at the top of the support rod 214 is relatively small, so that the positions of the frame 210 that are subjected to greater force have more second support parts 212.

[0043] In other embodiments, the second support portion 212 may also be arranged in a manner that the distribution density is higher at the top of the support rod 214 and lower at the bottom of the support rod 214, or may be arranged in other manners; the arrangement of the second support portions 212 on the two support rods 214 may be the same or different.

[0044] Furthermore, the second support portion 212 may be in line contact or surface contact with the gas cylinder 100. For example, in some embodiments, the second support portion 212 has a cylindrical surface that matches the cylindrical surface of the gas cylinder 100, and the second support portion 212 contacts the gas cylinder 100 through the cylindrical surface to better support the gas cylinder 100.

[0045] Furthermore, in some embodiments, the frame 210 also has a fixing hole 215 for setting a strap, through which the gas cylinder 100 is further fixed. The fixing hole 215 can be set on the support rod 214, or it can be set at other positions on the frame 210. In the embodiment where the fixing hole 215 is set on the support rod 214, the fixing hole 215 is closer to the gas cylinder 100, and the gas cylinder 100 can be fixed more conveniently and firmly. Figure 2 In the illustrated embodiment, the second support portion 212 supports the cylindrical surface of the gas cylinder 100 from one side, and the strap provided in the fixing hole 215 can fix the gas cylinder 100 from the other side of the cylindrical surface of the gas cylinder 100 so that the gas cylinder 100 is in closer contact with the second support portion 212.

[0046] In some embodiments of the present application, the gas cylinder 100 disposed on the frame 210 can be directly connected to the electrical components of the special gas equipment through a pipeline provided with structural components such as a pressure regulating valve 420. In other embodiments, the frame 210 is connected to an operating panel 300, and a gas supply line 400 is provided on the operating panel 300. The inlet of the gas supply line 400 is used to connect the gas cylinder 100, and the outlet is used to connect the electrical components. By arranging the gas supply line 400 on the operating panel 300, the gas supply line 400 can be better managed, making the gas supply system more concise. Figure 3 In the illustrated embodiment, the operating panel 300 may be a plate-shaped structural component, and the gas supply pipeline 400 and various valves and instrument panels in the gas supply pipeline 400 are all installed on the operating panel 300. When there are a large number of valves and the gas supply pipeline 400 is relatively complex, it is more convenient for the operator to operate through the operating panel 300.

[0047] Furthermore, the operation panel 300 is detachably connected to the frame 210 to facilitate replacement of the operation panel 300. In actual situations, the operation panel 300 matched with different special gas equipment will be different, that is, when supplying gas to electrical components in different special gas equipment, different operation panels 300 need to be replaced. In some embodiments, the operation panel 300 can be detachably connected to the frame 210 by means of threaded fasteners, such as Figure 2 As shown, a horizontally arranged cross bar 217 is connected between the handle 216 and the support rod 214; a first plate is provided above one side of the operation panel 300, and a second plate is provided on the side of the cross bar 217 away from the operation panel 300. The first plate and the second plate are connected by bolts and nuts, and the cross bar 217 is surrounded between the first plate and the second plate, thereby realizing a detachable connection between the operation panel 300 and the frame 210. Of course, in other embodiments, the operation panel 300 and the frame 210 may also be fixedly connected; or other structures may be used to realize a detachable connection.

[0048] In one embodiment, the gas supply pipeline 400 disposed on the operation panel 300 is provided with a first valve 410, a pressure regulating valve 420, a second valve 430 and a machine-controlled valve 440 in sequence; wherein the first valve 410 is located at the inlet end of the gas supply pipeline 400, and the machine-controlled valve 440 is located at the outlet end of the gas supply pipeline 400, that is, after the gas in the gas cylinder 100 enters the gas supply pipeline 400, it first passes through the first valve 410 and then passes through the pressure regulating valve 420. The end of the gas supply pipeline 400 where the inlet is located is the inlet end, and the end where the outlet is located is the outlet end. It is not difficult for those skilled in the art to understand that, without special instructions, the first valve 410, the second valve 430 and the machine-controlled valve 440 are all valves that can cut off the gas supply pipeline 400, that is, the first valve 410, the second valve 430 and the machine-controlled valve 440 all have an open state and a closed state; when any one of the first valve 410, the second valve 430 and the machine-controlled valve 440 is in a closed state, the gas cannot reach the outlet of the gas supply pipeline 400 from the inlet of the gas supply pipeline 400. Among them, the machine-controlled valve can be a VM series machine-controlled valve in the prior art, such as VM100, VM200 and other series machine-controlled valves.

[0049] Furthermore, a first pressure gauge may be provided at the inlet end of the gas supply pipeline 400 to detect the pressure of the gas entering the gas supply pipeline 400 from the gas cylinder 100; and a second pressure gauge 421 may be provided at the gas supply pipeline 400 to detect the pressure of the gas after passing through the pressure regulating valve 420. The first pressure gauge may be provided in front of the first valve 410, that is, the gas entering the gas supply pipeline 400 first passes through the first pressure gauge and then passes through the first valve 410, so that the pressure of the gas provided by the gas cylinder 100 can still be displayed through the first pressure gauge when the first valve 410 is closed.

[0050] Furthermore, in some embodiments, a pneumatic indicator light 450 may be connected to the outlet of the machine-controlled valve 440, and the outlet of the pneumatic indicator light 450 is used to connect an electrical component. It is not difficult for a person skilled in the art to understand that the pneumatic indicator light 450 is an existing product that can be used to observe whether there is airflow passing through it, such as the pneumatic indicator lights 450 of the PWC and PWL series sold on the market. It is not difficult to understand that the gas needs to pass through the pneumatic indicator light 450 before entering the electrical component. Therefore, it is possible to determine whether there is airflow to the electrical component by observing the pneumatic indicator light 450. And then determine whether there is a fault in the gas supply pipeline. That is, the outlet of the pneumatic indicator light 450 can be used as the outlet of the gas supply pipeline 400.

[0051] In some embodiments, Figure 3 As shown, the outlet end of the gas supply pipeline 400 includes a plurality of parallel branches, and the mechanical control valve 440 and the pneumatic indicator light 450 are connected in series to the branch. That is, each branch is provided with a mechanical control valve 440 and a pneumatic indicator light 450, and each branch can realize gas supply to an electrical component. And the mechanical control valve 440 has the function of cutting off the branch where it is located, so that the gas cannot be discharged from the outlet of the pneumatic indicator light 450 of the branch where it is located. Therefore, the movable gas supply device 200 and the corresponding gas supply system provided by this embodiment have the function of supplying gas to multiple electrical components, and each branch independently supplies gas to an electrical component. Further, the branch where the mechanical control valve 440 and the pneumatic indicator light 450 are provided is connected to the outlet of the second valve 430, and all branches can be controlled by the second valve 430. By closing the second valve 430, no gas can enter all branches.

[0052] In some embodiments, Figure 3As shown, the gas supply pipeline 400 is also connected to a third valve 460 and a pressure relief valve 470, and the third valve 460 and the pressure relief valve 470 are both connected to the outlet of the pressure regulating valve 420, that is, the third valve 460 and the pressure relief valve 470 are connected in parallel to the outlet of the pressure regulating valve 420. The pressure relief valve 470 is arranged at the outlet of the pressure regulating valve 420, and when the pressure relief valve 470 is damaged and cannot play a pressure regulating role, the gas pressure of the pipeline after the pressure regulating valve 420 can be limited to below the opening pressure of the pressure relief valve 470, so as to avoid excessive pressure entering the electrical components and causing damage to the electrical components. The outlet of the third valve 460 can be directly connected to the atmosphere without being connected to a pipeline, so that the gas in the gas supply pipeline 400 can be discharged when the third valve 460 is opened. For example, after replacing the gas cylinder 100, the first valve 410 and the third valve 460 can be opened, and the second valve 430 can be closed. The gas in the gas cylinder 100 can then purge the pipeline between the third valve 460 and the inlet of the gas supply pipeline 400 to discharge impurities that may exist in the pipeline.

[0053] Furthermore, the second valve 430 is also connected to the outlet of the pressure regulating valve 420, that is, the second valve 430, the third valve 460 and the pressure relief valve 470 are all connected in parallel to the outlet of the pressure regulating valve 420, and a branch of the mechanical control valve 440 and the pneumatic indicator light 450 is provided in series with the pipeline connected to the outlet of the second valve 430. When the second valve 430 is closed, whether the third valve 460 and the pressure relief valve 470 are opened or not has no effect on the branch where the mechanical control valve 440 is located.

[0054] exist Figure 3 In the illustrated embodiment, the second valve 430 may be connected to a branch circuit provided with a mechanically controlled valve 440 and a pneumatic indicator light 450 through a pipeline. When supplying gas, the second valve 430 is connected to the branch circuit required for use through a pipeline, and then the outlet of the pneumatic indicator light 450 in the connected branch circuit is connected to the electrical component requiring gas supply, thereby realizing gas supply to the electrical component; or the second valve 430 is connected to all branches. When supplying gas, the pneumatic indicator light 450 is first connected to the electrical component requiring gas supply, and then the corresponding mechanically controlled valve 440 is opened, thereby realizing gas supply to the electrical component.

[0055] by Figure 3 Taking the gas supply system shown in the figure as an example, the steps for using it after the power supply of the special gas equipment is cut off include:

[0056] First, push the gas supply system to the special gas equipment that needs gas supply, and connect the second valve 430 with the branch that needs to be used and is equipped with a mechanical control valve 440 and a pneumatic indicator light 450 through a pipeline; then connect the outlet of the pneumatic indicator light 450 in the branch with the corresponding air inlet interface in the electrical component that needs gas supply through a pipeline; then open the first valve 410, the pressure regulating valve 420, the second valve 430, and the mechanical control valve 440 to complete the gas supply to the electrical components.

[0057] It is not difficult to understand that the gas supply system provided by the present application can supply multiple devices at the same time according to actual demand, which greatly reduces the cost. In addition, the gas cylinder 100, the operating panel 300 and the frame 210 are integrated into one, which simplifies the equipment and improves the integration effect. When the production line is working normally, this gas supply system is in standby mode and only requires a very small space for storage, which improves the space utilization rate of the production workshop.

[0058] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A movable air supply device, characterized in that: It includes a frame, which includes a first support part and a second support part; the first support part and the second support part are both used to contact the gas cylinder and are configured to support the gas cylinder in an inclined state on the frame; the frame also includes a handle, and a walking mechanism is arranged under the frame.

2. The movable air supply device according to claim 1, characterized in that: The first supporting portion comprises a supporting surface, and the supporting surface is used to contact the bottom of the gas cylinder, and the second supporting portion is used to contact the cylindrical surface of the gas cylinder.

3. The movable air supply device according to claim 2, characterized in that: The frame body includes two support rods arranged side by side, each of the support rods is provided with the second support portion, and the second support portion protrudes toward the direction of the opposite support rod.

4. The movable air supply device according to claim 3, characterized in that: The support rod is also provided with a fixing hole, and the fixing hole is used to set a strap to fix the gas cylinder.

5. The movable air supply device according to any one of claims 1 to 4, characterized in that: The frame is also detachably connected to an operating panel, and the operating panel is provided with a gas supply pipeline, the inlet of the gas supply pipeline is used to connect to a gas cylinder, and the outlet is used to connect to an electrical component.

6. The movable air supply device according to claim 5, characterized in that: The gas supply pipeline is sequentially provided with a first valve, a pressure regulating valve, a second valve and a machine-controlled valve, wherein the first valve is located at the inlet end of the gas supply pipeline, and the machine-controlled valve is located at the outlet end of the gas supply pipeline.

7. The movable air supply device according to claim 6, characterized in that: The outlet of the machine-controlled valve is connected to a pneumatic indicator light, and the outlet of the pneumatic indicator light is used to connect an electrical component.

8. The movable air supply device according to claim 7, characterized in that: The outlet end of the air supply pipeline includes a plurality of parallel branches, the branches are connected to the outlet of the second valve, and the machine-controlled valve and the pneumatic indicator light are connected in series to the branches.

9. The movable air supply device according to claim 6, characterized in that: It also includes a third valve and a pressure relief valve, and the second valve, the third valve and the pressure relief valve are connected in parallel to the outlet of the pressure regulating valve.

10. A gas supply system, characterized in that: It comprises a gas cylinder and the movable gas supply device according to any one of claims 1 to 9, wherein the bottom surface of the gas cylinder contacts the first supporting portion, and the side surface of the gas cylinder contacts the second supporting portion.

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