Substrate slice edge grinding device

Abstract

The utility model relates to the technical field of semiconductor substrate material manufacturing, and particularly discloses a substrate slice edge grinding device which comprises a rotating mechanism, an edge grinding mechanism and an induction mechanism. The rotating mechanism is used for connecting a substrate sheet and driving the substrate sheet to rotate; the number of the edge grinding mechanisms is at least two. The at least two edge grinding mechanisms are symmetrically arranged on the two sides of the rotating mechanism. The edge grinding mechanism comprises a grinding piece and a position adjusting assembly. The polishing piece is arranged on the position adjusting assembly; the position adjusting assembly is used for driving the grinding piece to move in the vertical direction and the horizontal direction and used for driving the grinding piece to rotate. The sensing mechanism faces the rotating mechanism and is used for sensing the boundary dimension and the positioning dimension of the substrate slice. According to the scheme, the at least two edge grinding mechanisms can conduct edge grinding operation on the substrate slice at the same time, and the position adjusting assembly can adjust the position of the grinding piece, so that the two edge grinding mechanisms can grind the upper end edge and the lower end edge of the substrate slice at the same time, and the grinding efficiency of the substrate slice is improved.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor substrate material manufacturing, and in particular to a substrate sheet edge grinding device. Background Art

[0002] Indium phosphide substrates are widely used in the manufacture of high-frequency and high-power devices, optical fiber communications, wireless transmission, radio astronomy and other radio frequency devices. In the process of making indium phosphide substrate sheets, the substrate sheets need to be edged.

[0003] The existing substrate sheet edge grinding device generally grinds the substrate sheet by a grinding wheel. During the grinding process, the upper edge and the lower edge of the substrate sheet need to be grinded in sequence. Therefore, the position of the grinding wheel needs to be adjusted during the grinding process, and the overall grinding process efficiency is low. Utility Model Content

[0004] In view of this, the purpose of the present application is to provide a substrate sheet edge grinding device to solve the problem of low efficiency in the existing substrate sheet grinding process.

[0005] In order to achieve the above technical objectives, the present application provides a substrate sheet edge grinding device, comprising: a rotating mechanism, an edge grinding mechanism and a sensing mechanism;

[0006] The rotating mechanism is used to connect the substrate sheet and to drive the substrate sheet to rotate;

[0007] The edging mechanism comprises at least two;

[0008] At least two of the edge grinding mechanisms are symmetrically arranged on both sides of the rotating mechanism;

[0009] The edge grinding mechanism comprises: a grinding piece and a position adjustment component;

[0010] The grinding piece is arranged on the position adjustment component;

[0011] The position adjustment assembly is used to drive the polishing piece to move in the vertical direction and in the horizontal direction, and to drive the polishing piece to rotate;

[0012] The sensing mechanism faces the rotating mechanism and is used for sensing the outer dimensions and positioning dimensions of the substrate sheet.

[0013] Further, the position adjustment assembly includes: a rotary driver, a first horizontal driver, a second horizontal driver, a vertical driver and a support platform;

[0014] The grinding piece can be rotatably arranged on the supporting platform;

[0015] The rotary driver is connected to the polishing piece and is used to drive the polishing piece to rotate;

[0016] The first horizontal driver is connected to the polishing member and is used to drive the polishing member to move along a first direction in the horizontal direction;

[0017] The second horizontal driver is connected to the polishing member and is used to drive the polishing member to move along a second direction in the horizontal direction;

[0018] The first direction is perpendicular to the second direction;

[0019] The vertical driver is connected to the grinding piece and is used for driving the grinding piece to move in a vertical direction.

[0020] Furthermore, the support platform includes: a base, a lifting block, a first moving block and a second moving block 9;

[0021] The lifting block can be lifted and lowered on the base;

[0022] The first moving block is movably disposed on the lifting block along the first direction;

[0023] The second moving block is movably disposed on the first moving block along the second direction;

[0024] The vertical driver is disposed on the base and connected to the lifting block, and is used to drive the lifting block to move up and down;

[0025] The first horizontal driver is disposed on the lifting block and connected to the first moving block, and is used to drive the first moving block to move along the first direction;

[0026] The second horizontal driver is disposed on the first moving block and connected to the second moving block, and is used for driving the second moving block to move along the second direction;

[0027] The grinding member can be rotatably disposed on the second moving block;

[0028] The rotation driver is disposed on the second moving block.

[0029] Furthermore, the normal direction of the grinding piece is perpendicular to the normal direction of the substrate sheet on the rotating mechanism.

[0030] Further, the sensing mechanism includes at least two;

[0031] At least two of the sensing mechanisms are symmetrically arranged on both sides of the rotating mechanism corresponding to the positions of the edge grinding mechanisms.

[0032] Furthermore, the sensing mechanism is a camera.

[0033] Furthermore, the rotating mechanism comprises: a rotating base and a fixing member;

[0034] The fixing member is rotatably disposed on the rotating base;

[0035] The fixing member is used to fix the substrate sheet.

[0036] Furthermore, the fixing part is a vacuum adsorption fixing part.

[0037] Furthermore, the grinding piece is a grinding wheel.

[0038] Furthermore, it also includes a controller;

[0039] The controller is electrically connected to the sensing mechanism and the position adjustment component, and is used to control the position adjustment component to adjust the position of the grinding piece after obtaining the outer dimension and the positioning dimension, until the two grinding pieces of the two edge grinding mechanisms respectively abut against the upper edge and the lower edge of the substrate sheet.

[0040] It can be seen from the above technical scheme that the present application provides a substrate sheet edge grinding device, comprising: a rotating mechanism, an edge grinding mechanism and a sensing mechanism; the rotating mechanism is used to connect the substrate sheet, and to drive the substrate sheet to rotate; the edge grinding mechanism includes at least two; at least two edge grinding mechanisms are symmetrically arranged on both sides of the rotating mechanism; the edge grinding mechanism includes: a grinding piece and a position adjustment component; the grinding piece is arranged on the position adjustment component; the position adjustment component is used to drive the grinding piece to move in the vertical direction and in the horizontal direction, and to drive the grinding piece to rotate; the sensing mechanism is facing the rotating mechanism, and is used to sense the outer dimensions and positioning dimensions of the substrate sheet.

[0041] In the present solution, at least two edge grinding mechanisms can simultaneously perform edge grinding operations on the substrate sheet, and the position adjustment component can adjust the position of the grinding piece, so that the two edge grinding mechanisms can grind the upper and lower edges of the substrate sheet at the same time, thereby improving the grinding efficiency of the substrate sheet and effectively solving the problem of low efficiency of the existing grinding process of the substrate sheet. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0043] Figure 1 A schematic diagram of the overall structure of a substrate edge grinding device provided in an embodiment of the present application;

[0044] Figure 2Schematic diagram of an edge grinding mechanism of a substrate sheet edge grinding device provided in an embodiment of the present application

[0045] In the figure:

[0046] 10. Rotating mechanism; 11. Rotating base; 12. Fixing member;

[0047] 20. grinding mechanism; 21. grinding piece; 22. position adjustment assembly; 221. rotation driver; 222. first horizontal driver; 223. second horizontal driver; 224. vertical driver; 225. support table; 226. base; 227. lifting block; 228. first moving block; 229. second moving block; 230. motor mounting seat;

[0048] 30. Induction mechanism;

[0049] 40. substrate sheet;

[0050] X-axis direction: first direction; y-axis direction: second direction; z-axis direction: vertical direction. DETAILED DESCRIPTION

[0051] The technical solutions of the embodiments of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the specification of the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection requested by the present application.

[0052] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0053] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a replaceable connection, or an integral connection, it can be a mechanical connection, it can be an electrical connection, it can be a direct connection, it can be indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0054] See also Figure 1 A substrate sheet edge grinding device provided in an embodiment of the present application includes: a rotating mechanism 10, an edge grinding mechanism 20 and a sensing mechanism 30.

[0055] The rotating mechanism 10 is used to connect the substrate sheet 40 and to drive the substrate sheet 40 to rotate. The rotating mechanism 10 can be used to install the substrate sheet 40, and after the substrate sheet 40 is fixed, it drives the substrate sheet 40 to rotate.

[0056] The edge grinding mechanisms 20 include at least two; at least two edge grinding mechanisms 20 are symmetrically arranged on both sides of the rotating mechanism 10, so that the two edge grinding mechanisms 20 can grind the substrate sheet 40 on the rotating mechanism 10 at the same time, thereby improving the working efficiency.

[0057] More specifically, the edge grinding mechanism 20 includes: a grinding piece 21 and a position adjustment assembly 22; the grinding piece 21 is disposed on the position adjustment assembly 22. The position adjustment assembly 22 can drive the grinding piece 21 to move in the vertical direction and in the horizontal direction, and is used to drive the grinding piece 21 to rotate.

[0058] Through the position adjustment component 22, the two grinding pieces 21 of the two edge grinding mechanisms 20 can be driven to abut the upper and lower edges of the substrate sheet 40 respectively, so that the upper and lower edges of the substrate sheet 20 can be polished simultaneously without moving the grinding pieces 21 during the operation, which can further improve the grinding efficiency of the substrate sheet 40.

[0059] In this embodiment, the sensing mechanism 30 faces the rotating mechanism 10 and is used to sense the outer dimensions and positioning dimensions of the substrate sheet 40. The sensing mechanism 30 can be an infrared sensor, a camera or other components. Taking the camera as an example, the sensing mechanism 30 can obtain the position of the substrate sheet 40 after installation through the camera to generate the positioning dimensions of the substrate sheet 40, and obtain the outer dimensions of the substrate sheet 40 by performing operations such as tracing after photographing the substrate sheet 40 with the camera. After sending the positioning dimensions and the outer dimensions to the controller, the controller can calculate the grinding distance of the substrate sheet 40, and control the position adjustment component 22 to move the grinding piece 21 to the position abutting the substrate sheet 40 according to the positioning dimensions.

[0060] For more specific examples, see Figure 2 The position adjustment component 22 includes: a rotation driver 221 , a first horizontal driver 222 , a second horizontal driver 223 , a vertical driver 224 and a support platform 225 .

[0061] The grinding piece 21 is rotatably disposed on the support platform 225 ; the rotary driver 221 is connected to the grinding piece 21 to drive the grinding piece 21 to rotate.

[0062] The first horizontal driver 222 is connected to the polishing member 21, and is used to drive the polishing member 21 to move in a first direction in the horizontal direction; wherein the first direction can be Figure 2 The positive and negative directions of the x-axis shown in .

[0063] The second horizontal driver 223 is connected to the polishing member 21, and is used to drive the polishing member 21 to move in a second direction in the horizontal direction; wherein the second direction can be Figure 2 The positive and negative directions of the y-axis shown in . The first direction is perpendicular to the second direction;

[0064] The vertical driver 224 is connected to the grinding member 21 and is used to drive the grinding member 21 to move in the vertical direction. Figure 2 The positive and negative directions of the z-axis are shown in .

[0065] The position adjustment component 22 can drive the grinding piece 21 to move and rotate in three axes in space, so as to adjust the size of the substrate sheet 40 and the grinding position.

[0066] In one embodiment, the support platform 225 may include: a base 226, a lifting block 227, a first moving block 228 and a second moving block 229; the lifting block 227 is liftably arranged on the base 226; the first moving block 228 is movably arranged on the lifting block 227 along a first direction; the second moving block 229 is movably arranged on the first moving block 228 along a second direction; the vertical driver 224 is arranged on the base 226 and connected to the lifting block 227, and is used to drive the lifting block 227 to move up and down; the first horizontal driver 222 is arranged on the lifting block 227 and is connected to the first moving block 228, and is used to drive the first moving block 228 to move along the first direction; the second horizontal driver 223 is arranged on the first moving block 228, and is connected to the second moving block 229, and is used to drive the second moving block 229 to move along the second direction; the grinding piece 21 is rotatably arranged on the second moving block 229; the rotation driver 221 is arranged on the second moving block 229.

[0067] That is, in this embodiment, the vertical driver 224 drives the grinding piece 21 to move vertically by driving the lifting block 227 to move up and down; the first horizontal driver 222 drives the grinding piece 21 to move along the first direction by driving the first moving block 228 to move; the second horizontal driver 223 drives the grinding piece 21 to move along the first direction by driving the second moving block 229 to move. Among them, the vertical driver 224, the first horizontal driver 222 and the second horizontal driver 223 can all be cylinders. The rotary driver 221 can be a rotary motor. In addition, a motor mounting seat 230 can be provided on the second moving block 229 for the rotary driver 221 to be installed.

[0068] In one embodiment, the normal direction of the grinding member 21 is perpendicular to the normal direction of the substrate sheet 40 on the rotating mechanism 10 .

[0069] Specifically, the substrate sheet 40 on the rotating mechanism 10 is placed horizontally, and the grinding piece 21 is placed vertically. The inventors have found that the grinding piece 21 and the substrate sheet 40 are perpendicular to each other, which can achieve better edge grinding effect and improve edge grinding efficiency.

[0070] In one embodiment, the sensing mechanisms 30 include at least two; the at least two sensing mechanisms 30 are symmetrically arranged on both sides of the rotating mechanism 10 corresponding to the positions of the edge grinding mechanisms 20 .

[0071] The positions of the two sensing mechanisms 30 corresponding to the edge grinding mechanism 20 means that, for example, if the edge grinding mechanism 20 is disposed on both sides of the rotating mechanism 10 along the first direction, then the two sensing mechanisms 30 are also disposed on both sides of the rotating mechanism 10 along the first direction.

[0072] The two sensing mechanisms 30 can improve the sensing accuracy.

[0073] Furthermore, the rotating mechanism 10 includes a rotating base 11 and a fixing member 12. The fixing member 12 is rotatably disposed on the rotating base 11. The fixing member 12 is used to fix the substrate sheet 40. The rotating base 11 may be provided with a driving member such as a rotating motor to drive the fixing member 12 to rotate.

[0074] The fixing member 12 may be a vacuum adsorption fixing member, which can reduce damage to the substrate sheet 40 during the process of fixing the substrate sheet 40. The grinding member 21 may be a grinding wheel.

[0075] In one embodiment, a controller is also included; the controller is electrically connected to the sensing mechanism 30 and the position adjustment component 22, and is used to control the position adjustment component 22 to adjust the position of the grinding piece 21 after obtaining the outer dimensions and positioning dimensions, until the two grinding pieces 21 of the two edge grinding mechanisms 20 respectively abut against the upper and lower edges of the substrate sheet 40.

[0076] The controller can realize automatic operation control of the edge grinding process of the grinding piece 21.

[0077] The above are only preferred embodiments of the present application and are not intended to limit the present utility model. Although the present application has been described in detail with reference to the examples, those skilled in the art can still modify the technical solutions recorded in the aforementioned examples or make equivalent substitutions for some of the technical features therein. However, any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A substrate sheet edge grinding device, characterized in that: include: A rotating mechanism (10), an edge grinding mechanism (20) and a sensing mechanism (30); The rotating mechanism (10) is used to connect the substrate sheet (40) and to drive the substrate sheet (40) to rotate; The edge grinding mechanism (20) comprises at least two; At least two of the edge grinding mechanisms (20) are symmetrically arranged on both sides of the rotating mechanism (10); The edge grinding mechanism (20) comprises: a grinding piece (21) and a position adjustment component (22); The grinding piece (21) is arranged on the position adjustment component (22); The position adjustment component (22) is used to drive the polishing piece (21) to move in a vertical direction and a horizontal direction, and to drive the polishing piece (21) to rotate; The sensing mechanism (30) faces the rotating mechanism (10) and is used to sense the outer dimensions and positioning dimensions of the substrate sheet (40).

2. The substrate sheet edge grinding device according to claim 1, characterized in that: The position adjustment component (22) comprises: a rotation driver (221), a first horizontal driver (222), a second horizontal driver (223), a vertical driver (224) and a support platform (225); The grinding piece (21) is rotatably arranged on the support platform (225); The rotary driver (221) is connected to the polishing piece (21) and is used to drive the polishing piece (21) to rotate; The first horizontal driver (222) is connected to the polishing piece (21) and is used to drive the polishing piece (21) to move along a first direction in the horizontal direction; The second horizontal driver (223) is connected to the polishing piece (21) and is used to drive the polishing piece (21) to move along a second direction in the horizontal direction; The first direction is perpendicular to the second direction; The vertical driver (224) is connected to the grinding piece (21) and is used to drive the grinding piece (21) to move in a vertical direction.

3. The substrate sheet edge grinding device according to claim 2, characterized in that: The support platform (225) comprises: a base (226), a lifting block (227), a first moving block (228) and a second moving block (229); The lifting block (227) is liftably disposed on the base (226); The first moving block (228) is movably arranged on the lifting block (227) along the first direction; The second moving block (229) is movably arranged on the first moving block (228) along the second direction; The vertical driver (224) is disposed on the base (226) and connected to the lifting block (227) to drive the lifting block (227) to move up and down; The first horizontal driver (222) is arranged on the lifting block (227) and is connected to the first moving block (228), and is used to drive the first moving block (228) to move along the first direction; The second horizontal driver (223) is arranged on the first moving block (228) and connected to the second moving block (229), and is used for driving the second moving block (229) to move along the second direction; The grinding member (21) is rotatably disposed on the second movable block (229); The rotary driver (221) is arranged on the second moving block (229).

4. The substrate sheet edge grinding device according to claim 1, characterized in that: The normal direction of the grinding piece (21) is perpendicular to the normal direction of the substrate sheet (40) on the rotating mechanism (10).

5. The substrate sheet edge grinding device according to claim 1, characterized in that: The sensing mechanism (30) comprises at least two; At least two of the sensing mechanisms (30) are symmetrically arranged on both sides of the rotating mechanism (10) corresponding to the positions of the edge grinding mechanism (20).

6. The substrate sheet edge grinding device according to claim 1, characterized in that: The sensing mechanism (30) is a camera.

7. The substrate sheet edge grinding device according to claim 1, characterized in that: The rotating mechanism (10) comprises: a rotating base (11) and a fixing member (12); The fixing member (12) is rotatably arranged on the rotating base (11); The fixing member (12) is used to fix the substrate sheet (40).

8. The substrate sheet edge grinding device according to claim 7, characterized in that: The fixing part (12) is a vacuum adsorption fixing part.

9. The substrate sheet edge grinding device according to claim 1, characterized in that: The grinding piece (21) is a grinding wheel.

10. The substrate sheet edge grinding device according to claim 1, characterized in that: Also includes a controller; The controller is electrically connected to the sensing mechanism (30) and the position adjustment component (22) and is used to control the position adjustment component (22) to adjust the position of the grinding piece (21) after acquiring the outer dimensions and the positioning dimensions, until the two grinding pieces (21) of the two edge grinding mechanisms (20) respectively abut against the upper edge and the lower edge of the substrate sheet (40).

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