System for efficiently separating and removing boron and phosphorus impurities in polycrystalline silicon system

Abstract

The utility model discloses a system for efficiently separating and removing boron and phosphorus impurities in a polycrystalline silicon system, which comprises a flash evaporator, a premixer and a boron and phosphorus remover, the flash evaporator is connected with a high boron and phosphorus material box, a second steam box, a second condensate box, a second boron and phosphorus-free material box and a second circulating water inlet system, the second circulating water inlet system is connected with the premixer, and the premixer is connected with the boron and phosphorus remover. The premixer is connected with the boron and phosphorus remover, the premixer is connected with a phosphorus and boron removal agent feeding skid, the phosphorus and boron removal agent feeding skid is connected with a skid controller, and the boron and phosphorus remover is connected with a first steam box, a first condensate box, a boron and phosphorus impurity hydrolysis box and a heat exchanger. According to the system for efficiently separating and removing the boron and phosphorus impurities in the polycrystalline silicon system, disclosed by the utility model, the boron and phosphorus impurities in materials are efficiently separated and removed, so that the waste of components such as trichlorosilane and silicon tetrachloride is reduced, and meanwhile, the quality of polycrystalline silicon products is improved.

Description

Technical Field

[0001] The utility model relates to the field of efficient separation of boron and phosphorus impurities, in particular to a system for efficiently separating and removing boron and phosphorus impurities in a polysilicon system. Background Art

[0002] The efficient separation and removal system for boron and phosphorus impurities in the polysilicon system is a supporting equipment for the efficient separation and processing of boron and phosphorus impurities. Polysilicon is a form of elemental silicon. When molten elemental silicon solidifies under supercooling conditions, silicon atoms are arranged into many crystal nuclei in the form of diamond lattices. If these crystal nuclei grow into grains with different crystal plane orientations, these grains will combine and crystallize into polysilicon. With the continuous development of science and technology, people have higher and higher requirements for the manufacturing process of the efficient separation and removal system for boron and phosphorus impurities in the polysilicon system.

[0003] In the production of polysilicon, since cold hydrogenation uses industrial silicon powder as raw material, its products inevitably contain a large amount of impurities, among which boron and phosphorus impurities are particularly difficult to remove, and the level of impurities has a great impact on polysilicon products. Therefore, the removal of boron and phosphorus impurities is a technology that all polysilicon production companies must overcome. For this reason, we propose a system for efficiently separating and removing boron and phosphorus impurities in polysilicon systems. Utility Model Content

[0004] Technical problem solved: In view of the deficiencies in the prior art, the utility model provides a system for efficiently separating and removing boron and phosphorus impurities in a polysilicon system. By efficiently separating and removing boron and phosphorus impurities in the material, the waste of components such as trichlorosilane and silicon tetrachloride can be reduced, while the quality of polysilicon products can be improved, which can effectively solve the problems in the background technology.

[0005] Technical solution: To achieve the above-mentioned purpose, the technical solution adopted by the utility model is: a system for efficiently separating and removing boron and phosphorus impurities in a polysilicon system, comprising a flash evaporator, a premixer and a boron and phosphorus remover, the flash evaporator is connected to a high-boron and phosphorus material box, a second steam box, a second condensate box, a second boron-free phosphorus material box and a second circulating water inlet system, the second circulating water inlet system is connected to the premixer, the premixer is connected to the boron and phosphorus remover, the premixer is connected to a phosphorus-boron remover feeding skid, the phosphorus-boron remover feeding skid is connected to a skid controller, the boron and phosphorus remover is connected to a first steam box, a first condensate box, a boron and phosphorus impurity hydrolysis box and a heat exchanger, the heat exchanger is connected to a first circulating water inlet system and a first boron-free phosphorus material box, and the first circulating water inlet system is connected to a first circulating water tank, a second circulating water tank and a venting tank.

[0006] Preferably, the high boron phosphorus material box is provided with an agitator, the high boron phosphorus material box is connected to a monitoring controller and a purge, and the monitoring controller is connected to the purge.

[0007] Preferably, the output ends of the second steam box and the high-boron-phosphorus material box are connected to the input end of the flash evaporator, and the output end of the flash evaporator is connected to the second condensate tank and the input end of the second boron-free phosphorus material box.

[0008] Preferably, the output end of the skid controller and the boron-phosphorus remover feeding skid is connected to the input end of the premixer, and the output end of the premixer is connected to the input end of the boron-phosphorus remover.

[0009] Preferably, the boron-phosphorus remover is connected to the first steam box, the first condensate box, the heat exchanger and the boron-phosphorus impurity hydrolysis box.

[0010] Preferably, the stirrer stirs the interior of the high-boron-phosphorus material box, and the monitoring controller controls the purger to purge the interior of the high-boron-phosphorus material box.

[0011] Beneficial effects: Compared with the prior art, the utility model provides a system for efficiently separating and removing boron and phosphorus impurities in a polysilicon system, which has the following beneficial effects: the system for efficiently separating and removing boron and phosphorus impurities in a polysilicon system can reduce the waste of components such as trichlorosilane and silicon tetrachloride by efficiently separating and removing boron and phosphorus impurities in the material, while improving the quality of polysilicon products. The system for efficiently separating and removing boron and phosphorus impurities in the entire polysilicon system has a simple structure, is easy to operate, and has better effects than traditional methods. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 The utility model is a schematic diagram of the overall structure of a system for efficiently separating and removing boron and phosphorus impurities in a polysilicon system.

[0013] Figure 2 The utility model is a schematic diagram of the structure of a flash evaporator in a system for efficiently separating and removing boron and phosphorus impurities in a polysilicon system.

[0014] Figure 3 The utility model is a structural schematic diagram of a boron-phosphorus remover in a system for efficiently separating and removing boron-phosphorus impurities in a polysilicon system.

[0015] Figure 4 The utility model is a schematic diagram of the structure of a circulating water inlet system in a system for efficiently separating and removing boron and phosphorus impurities in a polysilicon system.

[0016] In the figure: 1. flash evaporator; 2. skid controller; 3. first steam box; 4. first condensate box; 5. boron-phosphorus impurity hydrolysis box; 6. boron-phosphorus remover; 7. first boron-phosphorus-free material box; 8. first circulating water tank; 9. second circulating water tank; 10. vent box; 11. first circulating water inlet system; 12. heat exchanger; 13. premixer; 14. phosphorus-boron remover feeding skid; 15. second circulating water inlet system; 16. high-boron-phosphorus material box; 17. agitator; 18. monitoring controller; 19. purge; 20. second steam box; 21. second condensate box; 22. second boron-phosphorus-free material box. DETAILED DESCRIPTION

[0017] The technical solution of the utility model will be clearly and completely described below in conjunction with the accompanying drawings and specific embodiments, but those skilled in the art will understand that the embodiments described below are part of the embodiments of the utility model, rather than all of the embodiments, and are only used to illustrate the utility model, and should not be considered as limiting the scope of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the utility model. If the specific conditions are not specified in the embodiments, they are carried out according to conventional conditions or conditions recommended by the manufacturer. If the manufacturer is not specified for the reagents or instruments used, they are all conventional products that can be purchased commercially.

[0018] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0019] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0020] like Figure 1-4As shown, a system for efficiently separating and removing boron and phosphorus impurities in a polysilicon system comprises a flash evaporator 1, a premixer 13 and a boron and phosphorus remover 6, wherein the flash evaporator 1 is connected to a high-boron and phosphorus material box 16, a second steam box 20, a second condensate box 21, a second boron-free and phosphorus material box 22 and a second circulating water inlet system 15, wherein the second circulating water inlet system 15 is connected to the premixer 13, the premixer 13 is connected to the boron and phosphorus remover 6, the premixer 13 is connected to a phosphorus and boron remover feeding skid 14, and the phosphorus and boron remover feeding skid 15 is connected to the boron and phosphorus remover feeding skid 16. 4 is connected to a skid controller 2, a boron-phosphorus remover 6 is connected to a first steam box 3, a first condensate box 4, a boron-phosphorus impurity hydrolysis box 5 and a heat exchanger 12, the heat exchanger 12 is connected to a first circulating water inlet system 11 and a first boron-phosphorus-free material box 7, the first circulating water inlet system 11 is connected to a first circulating water tank 8, a second circulating water tank 9 and a venting box 10, and the boron-phosphorus impurities in the material are efficiently separated and removed to reduce the waste of components such as trichlorosilane and silicon tetrachloride, while improving the quality of polysilicon products.

[0021] Furthermore, a stirrer 17 is provided on the high boron phosphorus material box 16 , and a monitoring controller 18 and a purge device 19 are connected to the high boron phosphorus material box 16 , and the monitoring controller 18 is connected to the purge device 19 .

[0022] Furthermore, the output ends of the second steam box 20 and the high boron phosphorus material box 16 are connected to the input end of the flash evaporator 1 , and the output end of the flash evaporator 1 is connected to the second condensate box 21 and the input end of the second boron-free phosphorus material box 22 .

[0023] Furthermore, the output ends of the skid controller 2 and the boron-phosphorus remover feeding skid 14 are connected to the input end of the premixer 13 , and the output end of the premixer 13 is connected to the input end of the boron-phosphorus remover 6 .

[0024] Furthermore, the boron-phosphorus remover 6 is connected to the first steam box 3 , the first condensate box 4 , the heat exchanger 12 and the boron-phosphorus impurity hydrolysis box 5 .

[0025] Furthermore, the stirrer 17 stirs the interior of the high-boron-phosphorus material box 16 , and the monitoring controller 18 controls the purger 19 to purge the interior of the high-boron-phosphorus material box 16 .

[0026] It can realize the efficient separation and removal of boron and phosphorus impurities in the polysilicon system materials, avoid the waste of raw materials, and reduce the impurity content to improve the quality of polysilicon products.

[0027] To achieve the above object, the present invention adopts the following technical solutions:

[0028] A boron-phosphorus impurity separation and removal system comprises a flash evaporator, a premixer, a boron-phosphorus remover feeding skid, a condenser, a boron-phosphorus remover, a tower, a product tank, an instrument system and a control system.

[0029] Among them, the control system calculates the optimal reflux ratio through an algorithm based on the parameters obtained by the instrument system, and controls the tower top temperature and tower bottom temperature.

[0030] An automatic slag discharge system is set up inside, including a temperature module, a liquid level module, a pressure module, an execution module, and a backwash module. The temperature module is used to monitor the temperature of the boron-phosphorus remover in real time; the temperature module, the liquid level module, and the pressure module jointly determine the amount of material in the boron-phosphorus remover, the execution module calculates the slag discharge amount of the boron-phosphorus remover according to the algorithm, and the backwash module flushes the pipeline after the slag discharge is completed to prevent pipeline blockage.

[0031] The utility model comprises a flash evaporator 1, a skid controller 2, a first steam box 3, a first condensate box 4, a boron-phosphorus impurity hydrolysis box 5, a boron-phosphorus remover 6, a first boron-phosphorus-free material box 7, a first circulating water box 8, a second circulating water box 9, a vent box 10, a first circulating water inlet system 11, a heat exchanger 12, a premixer 13, a phosphorus-boron remover feeding skid 14, a second circulating water inlet system 15, a high-boron-phosphorus material box 16, an agitator 17, a monitoring controller 18, a purge 19, a second steam box 20, a second condensate box 21, and a second boron-phosphorus-free material box 22. The boron-phosphorus impurities in the material are efficiently separated and removed to reduce the waste of components such as trichlorosilane and silicon tetrachloride, and at the same time improve the quality of polysilicon products.

[0032] It should be noted that, in this article, relational terms such as first and second (number one, number two), etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "including one..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0033] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. The technicians in this industry should understand that the utility model is not limited by the above embodiments, and the above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model will have various changes and improvements, and these changes and improvements fall within the scope of the utility model to be protected.

Claims

1. A system for efficiently separating and removing boron and phosphorus impurities in a polysilicon system, comprising a flash evaporator (1), a premixer (13) and a boron and phosphorus remover (6), characterized in that: The flash evaporator (1) is connected to a high-boron-phosphorus material tank (16), a second steam tank (20), a second condensate tank (21), a second boron-phosphorus-free material tank (22) and a second circulating water inlet system (15); the second circulating water inlet system (15) is connected to a premixer (13); the premixer (13) is connected to a boron-phosphorus remover (6); the premixer (13) is connected to a boron-phosphorus remover feeding skid (14); the boron-phosphorus remover feeding skid (14) is connected to a skid controller (2); the boron-phosphorus remover (6) is connected to a first steam tank (3), a first condensate tank (4), a boron-phosphorus impurity hydrolysis tank (5) and a heat exchanger (12); the heat exchanger (12) is connected to a first circulating water inlet system (11) and a first boron-phosphorus-free material tank (7); the first circulating water inlet system (11) is connected to a first circulating water tank (8), a second circulating water tank (9) and a venting tank (10).

2. The system for efficiently separating and removing boron and phosphorus impurities in a polysilicon system according to claim 1, characterized in that: The high-boron-phosphorus material box (16) is provided with a stirrer (17), and the high-boron-phosphorus material box (16) is connected to a monitoring controller (18) and a purge (19), and the monitoring controller (18) is connected to the purge (19).

3. The system for efficiently separating and removing boron and phosphorus impurities in a polysilicon system according to claim 1, characterized in that: The output ends of the second steam box (20) and the high-boron-phosphorus material box (16) are connected to the input end of the flash evaporator (1), and the output end of the flash evaporator (1) is connected to the second condensate box (21) and the input end of the second boron-free-phosphorus material box (22).

4. The system for efficiently separating and removing boron and phosphorus impurities in a polysilicon system according to claim 1, characterized in that: The output ends of the skid controller (2) and the boron-phosphorus remover feeding skid (14) are connected to the input end of the premixer (13), and the output end of the premixer (13) is connected to the input end of the boron-phosphorus remover (6).

5. The system for efficiently separating and removing boron and phosphorus impurities in a polysilicon system according to claim 1, characterized in that: The boron-phosphorus remover (6) is connected to the first steam box (3), the first condensate box (4), the heat exchanger (12) and the boron-phosphorus impurity hydrolysis box (5).

6. The system for efficiently separating and removing boron and phosphorus impurities in a polysilicon system according to claim 2, characterized in that: The stirrer (17) stirs the interior of the high-boron-phosphorus material box (16), and the monitoring controller (18) controls the purge device (19) to purge the interior of the high-boron-phosphorus material box (16).

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