Double-material cleaning machine

Abstract

The utility model relates to the field of cleaning machines, in particular to a double-material cleaning machine. Comprising a frame, a space for containing a cleaning assembly is formed in the frame, and the frame is provided with a first feeding port and a second feeding port corresponding to the cleaning assembly; the cleaning assembly comprises a cleaning pool, the cleaning pool can contain first material pieces and second material pieces of different specifications at the same time, a feeding station is arranged at the end close to the cleaning pool, and a discharging station is arranged at the other end of the cleaning pool. The first feeding port and the second feeding port correspond to the feeding station and the cleaning pool respectively. And the transfer assembly is provided with an adsorber which carries the first material sheet and / or the second material sheet to be transferred to the cleaning pool from the feeding station and then is fed into the discharging station. The first feeding port and the second feeding port are formed in the frame, so that two kinds of material sheets with different specifications can be fed into the cleaning pool to be cleaned, and the production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the field of cleaning machines, in particular to a double-material cleaning machine. Background Art

[0002] During the continuous processing and polishing of wafers, they come into contact with various organic matter, particles, metal impurities and other contaminants, causing the contaminants to adhere to the wafers, so the wafers need to be cleaned. Wafer cleaning is an important process step in the wafer manufacturing process. It is necessary to effectively use chemical solutions or gases to remove impurities remaining on the wafer surface without destroying the surface characteristics and electrical characteristics of the wafer.

[0003] However, the automatic cleaning machines in the prior art can usually only carry and clean materials of the same specifications. Utility Model Content

[0004] The utility model aims to provide a double-material cleaning machine to solve the problem that the cleaning machine in the prior art can only clean materials of the same specification.

[0005] The technical solution of the utility model is: a double-material cleaning machine, comprising a frame, a space for accommodating a cleaning component is formed inside the frame, and a first feeding port and a second feeding port are opened corresponding to the cleaning component;

[0006] The cleaning assembly comprises a cleaning pool, which can simultaneously accommodate a first sheet and a second sheet of different specifications, a loading station is arranged adjacent to one end of the cleaning pool, and an unloading station is arranged adjacent to the other end of the cleaning pool;

[0007] The first feeding port and the second feeding port correspond to the loading station and the cleaning tank respectively;

[0008] A transfer assembly is also provided, which has an adsorber that carries the first material sheet and / or the second material sheet from the loading station to the cleaning tank and then to the unloading station.

[0009] Preferably, an upper frame and a lower frame are formed in the frame by a horizontally arranged base, and the loading station and the cleaning pool are both arranged on the base; the upper frame is provided with an openable door mechanism, and the door mechanism includes a first door and a second door respectively arranged corresponding to the loading station and the cleaning pool, the first material sheet enters the loading station from the first door, and the second material sheet enters the cleaning pool from the second door.

[0010] Preferably, the cleaning pool is filled with cleaning liquid, and the lower frame has a circulating water path arranged to match the cleaning pool; and the cleaning pool has a length dimension capable of accommodating the first sheet and the second sheet at the same time.

[0011] Preferably, the transfer assembly comprises a gantry fixed to a base along a first direction, a transfer bracket is arranged horizontally on the gantry and perpendicular to the first direction, and the adsorber is movably arranged in a vertical direction at one end of the transfer bracket away from the gantry.

[0012] Preferably, the adsorber includes an adsorption base, which is arranged at one end of the transfer bracket away from the gantry along the vertical direction through a slide rail, and the adsorption base is provided with a rotary driver, an adsorption head 33, a positioning camera and a height sensor;

[0013] The adsorption head 33 has a plurality of adsorption ends evenly arranged around its own axis, and the plurality of adsorption ends rotate around the axis of the adsorption head 33 driven by a rotary driver.

[0014] Preferably, safety gratings are provided at the first door and the second door.

[0015] Compared with the prior art, the advantages of the utility model are:

[0016] (1) By providing a first feeding port and a second feeding port on the frame, two types of sheets of different specifications can be fed into the cleaning tank for cleaning, thereby improving production efficiency.

[0017] (2) The height sensor automatically detects the height and compares the material information to prevent the wrong incoming materials. The positioning camera is used to guide the adsorption head 33 to adsorb the second sheet in the cleaning tank, thereby improving the degree of automation. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The utility model is further described below in conjunction with the accompanying drawings and embodiments:

[0019] Figure 1 This is a structural diagram of a double-material cleaning machine (with some profiles and cover plates hidden) described in the utility model;

[0020] Figure 2 This is a top view of a double-material cleaning machine (with some profiles and cover plates hidden) described in the utility model;

[0021] Figure 3 This is a structural diagram of the transfer assembly of the utility model;

[0022] Figure 4 for Figure 3 Enlarged view of point A in the middle;

[0023] Wherein: 1. frame, 11. upper frame, 12. lower frame, 13. base, 14. first door, 15. second door, 2. cleaning component, 21. cleaning tank, 22. circulating water circuit, 3. transfer component, 31. gantry, 32. transfer bracket, 33. adsorption head, 34. positioning camera, 35. height sensor, 36. first drive motor, 37. second drive motor, 38. rotary drive, 4. loading station, 5. unloading station. DETAILED DESCRIPTION

[0024] The following is a further detailed description of the present invention in conjunction with specific embodiments:

[0025] like Figure 1 and Figure 2 As shown, a double-material cleaning machine is used to clean two materials of different specifications at the same time. It includes a frame 1, in which a base 13 is arranged in a horizontal direction, so that the frame 1 is divided into an upper frame body 11 and a lower frame body 12.

[0026] A cleaning assembly 2 is provided on the base 13. The cleaning assembly 2 includes a cleaning pool 21, which has a length dimension that can accommodate the first sheet and the second sheet at the same time. The cleaning pool 21 stores cleaning liquid and is connected to the circulating water circuit provided in the lower frame 12. A loading station 4 is provided on one side adjacent to the cleaning pool 21, and a unloading station 5 is provided on the other side adjacent to the cleaning pool 21. The loading station 4, the cleaning pool 21 and the unloading station 5 are arranged along the first direction.

[0027] like Figure 3 and Figure 4 As shown, a transfer assembly 3 is also fixed on the base 13, which is used for transporting the first material sheet and the second material sheet. The transfer assembly 3 includes a gantry 31 fixed to the base 13, and the gantry 31 is adjacent to the cleaning assembly 2 and arranged along the first direction. A transfer bracket 32 ​​is connected to the gantry 31 through a guide rail slider mechanism, and the transfer bracket 32 ​​can slide on the gantry 31 along the first direction under the drive of the first drive motor 36. An adsorbent, a positioning camera 34 and a height sensor 35 are arranged in the vertical direction at one end of the transfer bracket 32 ​​away from the gantry 31, wherein the adsorbent, the positioning camera 34 and the height sensor 35 are synchronously lifted and lowered under the drive of the second drive motor 37, and the adsorption head 33 is used to adsorb and transport the first material sheet and the second material sheet under the guidance of the positioning camera 34.

[0028] The adsorber includes an adsorption base connected to the transfer bracket 32 ​​by a guide rail slider mechanism, and the adsorption base is connected to the adsorption head 33 by a rotary driver 38. The adsorption head 33 has a plurality of adsorption ends uniformly arranged around the axis of the adsorption base, and the adsorption ends can generate negative pressure to adsorb the first sheet or the second sheet, and the plurality of adsorption ends rotate around the axis of the adsorption head 33 driven by the rotary driver 38, so that the first sheet or the second sheet is cleaned in the cleaning tank 21.

[0029] like Figure 1 As shown, the upper frame 11 is provided with an openable door mechanism, which includes a first door 14 provided corresponding to the loading station 4, and a second door 15 provided corresponding to the cleaning tank 21. The first sheet enters the loading station 4 from the first door 14 and is carried in the loading station 4, and the second sheet directly enters the cleaning tank 21 from the second door 15. In this embodiment, in order to protect the safety of the operator, safety gratings are provided at the first door 14 and the second door 15.

[0030] When using:

[0031] 1. Open the first door 14 and the operator places the first sheet into the loading station 4.

[0032] 2. The first drive motor 36 moves, driving the transfer bracket 32 ​​to move above the loading station 4. The height sensor 35 determines whether the incoming material is correct by detecting the height of the first material sheet in the loading station 4. If it is correct, the second drive motor 37 is activated to drive the adsorption head 33 to descend, so that the adsorption end adsorbs the first material sheet through negative pressure, and the adsorption head 33 rises and moves to the cleaning tank 21.

[0033] 3. After running to the top of the cleaning pool 21, the adsorption head 33 descends to immerse the first sheet in the cleaning liquid. Then the rotary driver 38 drives the adsorption head 33 to rotate around its own axis to drive the first sheet to perform cleaning.

[0034] 4. The adsorption head 33 puts the cleaned first sheet into the unloading station 5 under the cooperation of the first drive motor 36 and the second drive motor 37 .

[0035] 5. The operator places the second sheet directly into the cleaning tank 21 from the second door 15. The adsorption head 33 positions the second sheet in the cleaning liquid under the guidance of the positioning camera 34, adsorbs and rotates the second sheet until the cleaning operation of the second sheet is completed, and then the second sheet is sent to the unloading station 5.

[0036] The above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with this technology to understand the content of the utility model and implement it accordingly, and they cannot be used to limit the protection scope of the utility model. For those skilled in the art, it is obvious that the utility model is not limited to the details of the above exemplary embodiments, and the utility model can be implemented in other specific forms without departing from the spirit or basic features of the utility model. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the utility model is limited by the attached claims rather than the above description, so it is intended to include all changes within the meaning and scope of the equivalent elements of the claims in the utility model.

Claims

1. A double material cleaning machine, characterized in that: It comprises a frame (1), wherein a space for accommodating a cleaning component (2) is formed inside the frame (1), and the frame (1) has a first feeding port and a second feeding port corresponding to the cleaning component (2); The cleaning component (2) comprises a cleaning pool (21), wherein the cleaning pool (21) can simultaneously accommodate a first material sheet and a second material sheet of different specifications, and one end adjacent to the cleaning pool (21) is provided as a loading station (4), and the other end is provided as an unloading station (5); The first feeding port and the second feeding port correspond to the loading station (4) and the cleaning tank (21) respectively; A transfer assembly (3) is also provided, wherein the transfer assembly (3) comprises an adsorber that carries the first material sheet and / or the second material sheet from the loading station (4) to the cleaning tank (21) and then sends the first material sheet to the unloading station (5).

2. A double material cleaning machine according to claim 1, characterized in that: An upper frame (11) and a lower frame (12) are formed in the frame (1) by a horizontally arranged base (13); the loading station (4) and the cleaning tank (21) are both arranged on the base (13); the upper frame (11) is provided with an openable door mechanism, the door mechanism comprising a first door (14) and a second door (15) respectively arranged corresponding to the loading station (4) and the cleaning tank (21); the first material sheet enters the loading station (4) from the first door (14), and the second material sheet enters the cleaning tank (21) from the second door (15).

3. A double material cleaning machine according to claim 2, characterized in that: The cleaning pool (21) contains cleaning liquid, and the lower frame (12) has a circulating water path (22) arranged to cooperate with the cleaning pool (21); and the cleaning pool (21) has a length dimension capable of accommodating the first sheet and the second sheet at the same time.

4. A double material cleaning machine according to claim 1, characterized in that: The transfer assembly (3) comprises a gantry (31) fixed to a base (13) along a first direction, a transfer bracket (32) being arranged horizontally and perpendicularly to the first direction on the gantry (31), and the adsorber being movably arranged in a vertical direction at one end of the transfer bracket (32) away from the gantry (31).

5. A double material cleaning machine according to claim 4, characterized in that: The adsorber comprises an adsorption base, which is arranged at one end of the transfer bracket (32) away from the gantry (31) along the vertical direction through a slide rail, and the adsorption base is provided with a rotation driver (38), an adsorption head (33), a positioning camera (34) and a height sensor (35); The adsorption head (33) has a plurality of adsorption ends evenly arranged around its own axis, and the plurality of adsorption ends rotate around the axis of the adsorption head (33) driven by a rotary driver (38).

6. A double material cleaning machine according to claim 2, characterized in that: Safety gratings are provided at the first door (14) and the second door (15).

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