Grinding device of crystal block grinding machine

Abstract

The utility model discloses a grinding device of a crystal block grinding machine, and relates to the technical field of semiconductor grinding, the grinding device comprises a displacement module and a grinding module; the displacement module is connected with the grinding module and used for driving the grinding module to move. The grinding module comprises a grinding driver and a grinding head; an output shaft of the grinding driver is connected with the grinding head and is used for driving the grinding head to rotate so as to grind the crystal block; the grinding driver is arranged in the axial direction of the output shaft of the grinding driver in an elastic floating mode, or the grinding head is arranged in the axial direction of the output shaft of the grinding driver in an elastic floating mode. The grinding driver or the grinding head of the grinding module is designed in an elastic floating mode, stable and reliable pressure can be provided for the crystal block through the elastic floating design, and therefore the grinding effect is improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor grinding technology, and in particular to a grinding device of a crystal block grinder. Background Art

[0002] Grinding is a thinning process in the semiconductor processing process. The purpose of grinding is to remove the damaged layer on the surface of the crystal block (wafer / crystal) after cutting to improve the surface quality. In the existing device for grinding semiconductor crystal blocks, the grinding mechanism is fixed relative to the displacement mechanism. During grinding, the displacement mechanism is used to control the pressure of the grinding mechanism on the crystal block, which is prone to excessive or insufficient pressure, thereby affecting the grinding effect. Utility Model Content

[0003] In view of this, the purpose of the present application is to provide a grinding device for a crystal block grinder to solve the technical problem that the existing grinding design scheme cannot stably and reliably apply crystal block pressure, thereby affecting the grinding effect.

[0004] In order to achieve the above technical purpose, the present application provides a grinding device of a crystal block grinder, comprising a displacement module and a grinding module;

[0005] The displacement module is connected to the grinding module and is used to drive the grinding module to move;

[0006] The grinding module comprises a grinding driver and a grinding head;

[0007] The output shaft of the grinding driver is connected to the grinding head and is used to drive the grinding head to rotate so as to grind the crystal block;

[0008] The grinding driver is elastically floated along the axial direction of its output shaft, or the grinding head is elastically floated along the axial direction of the output shaft of the grinding driver.

[0009] Furthermore, the grinding driver is connected to the driving end of the displacement module via a floating joint, and an elastic member is also connected between the grinding driver and the displacement module, so that the grinding driver can float elastically.

[0010] Further, the displacement module includes a first displacement mechanism, a second displacement mechanism and a third displacement mechanism;

[0011] The first displacement mechanism is connected to the second displacement mechanism and is used to drive the second displacement mechanism to move in a first straight line direction;

[0012] The second displacement mechanism is connected to the third displacement mechanism and is used to drive the third displacement mechanism to move in a second straight line direction perpendicular to the first straight line direction;

[0013] The third displacement mechanism is connected to the grinding module, and is used to drive the grinding module to move in a third linear direction perpendicular to the first linear direction and the second linear direction.

[0014] Further, the first displacement mechanism is a micrometer displacement mechanism, comprising a displacement base, a first fixed plate, a first guide rail, a first movable plate, a first micrometer seat, a first micrometer member and a first locking member;

[0015] The first fixing plate is fixedly connected to the displacement base;

[0016] The first guide rail is fixedly connected to a side surface of the first fixing plate along the first straight line direction;

[0017] The first movable plate is fixedly connected to the slider on the first guide rail;

[0018] The first micrometer seat is fixedly connected to the first fixing plate;

[0019] The first micrometer component is detachably mounted on the first micrometer seat and is capable of contacting the first movable plate to drive the first movable plate to move;

[0020] The first locking member is used to lock the connection between the first movable plate and the first fixed plate after the first movable plate is moved and adjusted.

[0021] Further, the second displacement mechanism is a micrometer displacement mechanism, comprising a second fixed plate, a second guide rail, a second movable plate, a second micrometer seat, a second micrometer member and a second locking member;

[0022] The second fixed plate is fixedly connected to a side of the first movable plate away from the first fixed plate;

[0023] The second guide rail is fixedly connected to a side surface of the second fixing plate along the second straight line direction;

[0024] The second movable plate is fixedly connected to the slider on the second guide rail;

[0025] The second micrometer seat is fixedly connected to the second fixing plate;

[0026] The second micrometer member is detachably mounted on the second micrometer seat and is capable of contacting the second movable plate to drive the second movable plate to move;

[0027] The second locking member is used to lock the connection between the second movable plate and the second fixed plate after the second movable plate is moved and adjusted.

[0028] Further, the third displacement mechanism includes a third fixed plate, a telescopic driver, a third movable plate and a third guide rail;

[0029] The third fixed plate is fixedly connected to a side of the second movable plate away from the second fixed plate;

[0030] The third guide rail is fixedly connected to a side surface of the second movable plate away from the second fixed plate along the third straight line direction;

[0031] The third movable plate is fixedly connected to the slider on the third guide rail;

[0032] The telescopic driver is fixedly connected to the third fixed plate, and the driving end is connected to the third movable plate, so as to drive the third movable plate to move;

[0033] The grinding driver is fixedly connected to the third movable plate, and the output shaft of the grinding driver is parallel to the third straight line direction;

[0034] The driving end of the telescopic driver is connected to the third movable plate through the floating joint, and the elastic member is connected between the third movable plate and the third fixed plate.

[0035] Furthermore, the third displacement mechanism also includes a limiting component;

[0036] The limiting assembly includes a limiting block and a limiting screw;

[0037] The limiting block is fixedly connected to the second movable plate;

[0038] The limiting screw is threadably inserted into the limiting block and can contact and abut against the third movable plate to limit the moving range of the third movable plate.

[0039] Furthermore, the grinding module also includes an intermediate plate and a grinding fixed plate;

[0040] The middle plate is fixed to a side surface of the third movable plate away from the third fixed plate;

[0041] The middle plate is provided with a positioning groove;

[0042] A boss matching the positioning groove is provided on one side surface of the grinding fixing plate;

[0043] The grinding fixing plate is fixedly connected to the middle plate.

[0044] Furthermore, a grinding mounting base is fixedly connected to a side surface of the grinding fixing plate away from the middle plate;

[0045] The grinding installation base is provided with an installation slot for the grinding driver to be inserted into;

[0046] A grinding pressing plate is fixedly connected to the grinding mounting base, and is used to press the grinding driver onto the grinding mounting base;

[0047] A supporting plate for supporting the grinding driver is fixed at the bottom of the grinding fixing plate.

[0048] Further, a dust hood is included;

[0049] The dust removal cover is fixedly mounted outside the grinding head, and the suction pipe opening thereon is connected to a dust collector.

[0050] It can be seen from the above technical solutions that the grinding device of the crystal block grinder of the present application includes a displacement module and a grinding module, and the displacement module is used to drive the grinding module to move to adjust the appropriate grinding position and control the grinding feed amount. The grinding drive or grinding head of the grinding module is designed to be elastically floating, and the elastic floating design can be used to provide stable and reliable pressure on the crystal block, thereby improving the grinding effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0051] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0052] Figure 1 A first stereoscopic view of a grinding device of a crystal block grinding machine provided in the present application;

[0053] Figure 2 A second stereoscopic view of a grinding device of a crystal block grinding machine provided in the present application;

[0054] Figure 3 A third stereoscopic view of a grinding device of a crystal block grinding machine provided in the present application;

[0055] Figure 4 An exploded schematic diagram of a grinding device of a crystal block grinder provided in the present application;

[0056] In the figure: 1, grinding module; 2, displacement module; 201, displacement base; 202, first fixed plate; 203, first reinforcing plate; 204, first guide rail; 205, first movable plate; 206, second reinforcing plate; 207, first micrometer seat; 208, first micrometer member; 209, first locking member; 210, second fixed plate; 211, second guide rail; 212, second movable plate; 213, second micrometer seat; 214, second micrometer member; 215, second locking member; 216, second guide rod seat; 217, second guide rod Component; 218, first guide rod seat; 219, first guide rod component; 220, telescopic driver; 221, third fixed plate; 222, linear bearing; 223, third guide rod component; 224, elastic component; 225, floating joint; 226, third guide rail; 227, third movable plate; 228, intermediate plate; 229, grinding fixed plate; 230, grinding driver; 231, grinding mounting base; 232, grinding clamping plate; 233, support plate; 234, grinding head; 235, dust cover; 236, limit block; 237, limit screw. DETAILED DESCRIPTION

[0057] The technical solutions of the embodiments of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, not all of them. All other embodiments obtained by ordinary technicians in this field without creative work based on the embodiments in the embodiments of the present application are within the scope of protection of the embodiments of the present application.

[0058] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0059] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a replaceable connection, or an integral connection, it can be a mechanical connection, it can be an electrical connection, it can be a direct connection, it can be indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0060] The embodiment of the present application discloses a grinding device of a crystal block grinder.

[0061] See also Figure 1 An embodiment of a grinding device of a crystal block grinding machine provided in an embodiment of the present application includes:

[0062] It includes a displacement module 2 and a grinding module 1.

[0063] The displacement module 2 is connected to the grinding module 1 and is used to drive the grinding module 1 to move.

[0064] The grinding module 1 includes a grinding driver 230 and a grinding head 234 . The output shaft of the grinding driver 230 is connected to the grinding head 234 to drive the grinding head 234 to rotate so as to grind the crystal block 313 .

[0065] The grinding driver 230 is elastically floated along the axial direction of its output shaft, or the grinding head 234 is elastically floated along the axial direction of the output shaft of the grinding driver 230 .

[0066] The grinding device of the crystal block grinding machine of the present application includes a displacement module 2 and a grinding module 1. The displacement module 2 is used to drive the grinding module 1 to move so as to adjust the appropriate grinding position and control the grinding feed amount. The grinding driver 230 or the grinding head 234 of the grinding module 1 is designed to be elastically floating, and the elastic floating design can be used to provide a stable and reliable pressure on the crystal block, thereby improving the grinding effect.

[0067] The above is the first embodiment of a grinding device of a crystal block grinder provided in the embodiment of the present application. The following is the second embodiment of a grinding device of a crystal block grinder provided in the embodiment of the present application. For details, please refer to Figures 1 to 4 .

[0068] Based on the solution of the above embodiment 1:

[0069] Furthermore, the grinding driver 230 is connected to the driving end of the displacement module 2 via a floating joint 225 , and an elastic member 224 is also connected between the grinding driver 230 and the displacement module 2 , so that the grinding driver 230 can float elastically.

[0070] Furthermore, the design of the displacement module 2 includes a first displacement mechanism, a second displacement mechanism and a third displacement mechanism, forming a three-axis displacement mechanism, wherein the first displacement mechanism can be regarded as an X-axis displacement mechanism, the second displacement mechanism can be regarded as a Y-axis displacement mechanism, and the third displacement mechanism can be regarded as a Z-axis displacement mechanism.

[0071] The first displacement mechanism is connected to the second displacement mechanism, and is used to drive the second displacement mechanism to move in the first straight line direction. The second displacement mechanism is connected to the third displacement mechanism, and is used to drive the third displacement mechanism to move in the second straight line direction perpendicular to the first straight line direction. The third displacement mechanism is connected to the grinding module 1, and is used to drive the grinding module 1 to move in the third straight line direction perpendicular to the first straight line direction and the second straight line direction.

[0072] The displacement module 2 with three-axis drive design can be matched with the grinding driver 230 to realize four-axis drive of the grinding head 234 to construct a four-axis grinding device.

[0073] Furthermore, the first displacement mechanism is designed as a micrometer displacement mechanism, which specifically includes a displacement base 201 , a first fixed plate 202 , a first guide rail 204 , a first movable plate 205 , a first micrometer seat 207 , a first micrometer member 208 and a first locking member 209 .

[0074] The displacement base 201 is in a tic-tac-toe shape.

[0075] The first fixing plate 202 is vertically fixedly connected to the upper surface of the displacement base 201. In order to improve the strength of the connection structure, several first reinforcing plates 203 can be connected and fixed between the first fixing plate 202 and the base. The first reinforcing plate 203 is L-shaped. Two adjacent right-angle surfaces on one side of the first reinforcing plate 203 are respectively fixedly connected to the base and the first fixing plate 202, and one side of the first reinforcing plate 203 can be used to carry corresponding device components.

[0076] The first guide rail 204 is fixedly connected to one side surface of the first fixed plate 202 along the first straight line direction. Specifically, a guide installation groove can be provided on the side of the first fixed plate 202 away from the first reinforcing plate 203. The number of the guide installation grooves can be two and they are parallel to each other. Both ends of the guide installation grooves pass through the first fixed plate 202. Correspondingly, there are two first guide rails 204, which are fixedly connected to the guide grooves of the first fixed plate 202 one by one. The number of sliders on each first guide rail 204 can be multiple to improve the connection reliability. Correspondingly, the first movable plate 205 is fixedly connected to the slider on the first guide rail 204, thereby realizing a movable setting.

[0077] The first micrometer seat 207 is fixedly connected to the first fixing plate 202 .

[0078] The first micrometer component 208 is detachably mounted on the first micrometer seat 207 and can contact the first movable plate 205 to drive the first movable plate 205 to move. Specifically, a through hole is provided on the side of the first micrometer seat 207, and the center line of the through hole is located at half the thickness of the first movable plate 205. The first micrometer component 208 penetrates and is slidably connected to the through hole of the first micrometer seat 207. A notch is provided in the through hole of the first micrometer seat 207, and a countersunk hole penetrating the first fixed plate 202 is provided on the side of the notch away from the first fixed plate 202, and a first threaded hole is provided on the side of the notch close to the first fixed plate 202. The countersunk hole is coaxial with the threaded hole. A screw / bolt is passed through the countersunk hole and screwed into the first threaded hole to narrow the notch, so that the first micrometer component 208 can be fixed on the through hole, thereby achieving the fastening of the first micrometer component 208. At the same time, a second threaded hole connected to the through hole can be opened on the side of the first micrometer seat 207 away from the first fixed plate 202, and the center line of the second threaded hole is coplanar with the center line of the through hole. The corresponding screw / bolt is then screwed into the second threaded hole and abutted against the part of the first micrometer component 208 located in the through hole, thereby strengthening the fixation of the first micrometer component 208 and improving the reliability of the fixation.

[0079] The first locking member 209 is used to lock the connection between the first movable plate 205 and the first fixed plate 202 after the first movable plate 205 is moved and adjusted. Specifically, the first locking member 209 can be a plate structure, on which two waist-shaped holes parallel to each other are provided, and the first fixed plate 202 and the first movable plate 205 are respectively provided with threaded holes matched with the waist-shaped holes, that is, the two waist-shaped holes and the first fixed plate 202 and the first movable plate 205 can be fixed together by screws / bolts, thereby realizing the locking cooperation between the first fixed plate 202 and the first movable plate 205, and preventing the first movable plate 205 from shifting after adjustment.

[0080] In addition to the micrometer displacement mechanism design provided above, those skilled in the art may also refer to or use existing micrometer displacement mechanism designs without specific limitation.

[0081] Furthermore, the first displacement mechanism also includes a first guide rod seat 218 and a first guide rod member 219 .

[0082] The first guide rod seat 218 is fixedly connected to the first fixed plate 202, the first guide rod member 219 is fixedly connected to the first fixed plate 202, and the first movable plate 205 is provided with a first guide hole for the first guide rod member 219 to be movably inserted. Specifically, the first guide rod seat 218 is L-shaped, a blind hole is provided on the side of the first movable plate 205 near the first guide rod seat 218, and a blind hole is provided on the side of the first movable plate 205 near the first guide rod seat 218, and the two blind holes are designed to be coaxial. A flat position is provided at one end of the first guide rod member 219, and the flat position end of the first guide rod member 219 is fixedly connected to the first guide rod seat 218. The upper and lower surfaces of the first guide rod seat 218 away from the first fixed plate 202 have threaded holes vertically provided thereon, and the axis of the threaded hole is coplanar / intersecting with the axis of the first guide rod member 219. The flat position of the first guide rod member 219 can be pressed and fixed by rotating the screw / bolt to the threaded hole of the first guide rod seat 218, thereby realizing a detachable connection between the first guide rod member 219 and the first guide rod seat 218, and then utilizing the cooperation between the first guide rod member 219 and the first guide hole to improve the movement stability and accuracy of the first movable plate 205. The number of first guide rod members 219 can be several, without limitation.

[0083] Furthermore, the second displacement mechanism is designed as a micrometer displacement mechanism, which specifically includes a second fixed plate 210 , a second guide rail 211 , a second movable plate 212 , a second micrometer seat 213 , a second micrometer member 214 and a second locking member 215 .

[0084] The second fixed plate 210 is fixedly connected to a side of the first movable plate 205 away from the first fixed plate 202. In order to improve the strength of the connection structure, several second reinforcing plates 206 can be connected between the second fixed plate 210 and the first movable plate 205. The second reinforcing plates 206 are in a right-angled plate shape, and the two right-angled sides are respectively connected to the first movable plate 205 and the second fixed plate 210.

[0085] The second guide rail 211 is fixedly connected to a side surface of the second fixed plate 210 along the second straight line direction. Specifically, a guide installation groove is provided on a surface of the second fixed plate 210 away from the second reinforcing plate 206. The number of the guide installation grooves can be two and they are parallel to each other. Both ends of the guide installation grooves pass through the second fixed plate 210. Correspondingly, there are two second guide rails 211, which are fixedly connected to the guide grooves of the first fixed plate 202 one by one. The number of sliders on each second guide rail 211 can be multiple to improve the connection reliability. Correspondingly, the second movable plate 212 is fixedly connected to the slider on the second guide rail 211.

[0086] The second micrometer seat 213 is fixedly connected to the second fixing plate 210 .

[0087] The second micrometer component 214 is detachably mounted on the second micrometer seat 213 and can contact the second movable plate 212 to drive the second movable plate 212 to move. Specifically, a through hole is provided on the side of the second micrometer seat 213, and the center line of the through hole is located at half the thickness of the second movable plate 212. The second micrometer component 214 penetrates and is slidably connected to the through hole of the second micrometer seat 213. A notch is provided in the through hole of the second micrometer seat 213, and a countersunk hole penetrating the second fixed plate 210 is provided on the side of the notch away from the second fixed plate 210, and a second threaded hole is provided on the side of the notch close to the second fixed plate 210. The countersunk hole is coaxial with the threaded hole. A screw / bolt is passed through the countersunk hole and screwed into the second threaded hole to narrow the notch, so that the second micrometer component 214 can be fixed on the through hole to achieve the fastening of the second micrometer component 214. At the same time, a second threaded hole connected to the through hole can be opened on the side of the second micrometer seat 213 away from the second fixing plate 210, and the center line of the second threaded hole is coplanar with the center line of the through hole. The corresponding screw / bolt is then screwed into the second threaded hole and abutted against the part of the second micrometer component 214 located in the through hole, thereby strengthening the fixation of the second micrometer component 214 and improving the reliability of the fixation.

[0088] The second locking member 215 is used to lock the connection between the second movable plate 212 and the second fixed plate 210 after the second movable plate 212 is moved and adjusted. Specifically, the second locking member 215 can be a plate structure, on which two waist-shaped holes parallel to each other are provided, and the second fixed plate 210 and the second movable plate 212 are respectively provided with threaded holes matched with the waist-shaped holes, that is, the two waist-shaped holes and the second fixed plate 210 and the second movable plate 212 can be fixed together by screws / bolts, thereby realizing the locking cooperation between the second fixed plate 210 and the second movable plate 212, and preventing the second movable plate 212 from shifting after adjustment.

[0089] In addition to the micrometer displacement mechanism design provided above, those skilled in the art may also refer to or use existing micrometer displacement mechanism designs without specific limitation.

[0090] Furthermore, the second displacement mechanism also includes a second guide rod seat 216 and a second guide rod member 217 .

[0091] The second guide rod seat 216 is fixedly connected to the second fixed plate 210, the second guide rod member 217 is fixedly connected to the second fixed plate 210, and the second movable plate 212 is provided with a second guide hole for the second guide rod member 217 to be movably inserted. Specifically, the second guide rod seat 216 is provided with a blind hole near the side of the second movable plate 212, and the second movable plate 212 is provided with a blind hole near the side of the second guide rod seat 216, and the two blind holes are designed to be coaxial. A flat position is provided at one end of the second guide rod member 217, and the flat position end of the second guide rod member 217 is fixedly connected to the second guide rod seat 216. The second guide rod seat 216 has threaded holes vertically provided on the upper and lower surfaces of one side away from the second fixed plate 210. The axis of the threaded hole is coplanar / intersecting with the axis of the second guide rod member 217. The flat position of the second guide rod member 217 can be pressed and fixed by rotating the screw / bolt to the threaded hole of the second guide rod seat 216, thereby realizing a detachable connection between the second guide rod member 217 and the second guide rod seat 216. The cooperation between the second guide rod member 217 and the second guide hole can improve the movement stability and accuracy of the second movable plate 212. The number of second guide rod members 217 can be several, without limitation.

[0092] Furthermore, the third displacement mechanism is designed as a telescopic displacement mechanism, which specifically includes a third fixed plate 221 , a telescopic driver 220 , a third movable plate 227 and a third guide rail 226 .

[0093] The third fixing plate 221 is fixedly connected to a side of the second movable plate 212 away from the second fixing plate 210 .

[0094] The third guide rail 226 is fixedly connected to a side surface of the second movable plate 212 away from the second fixed plate 210 along a third straight line direction. Specifically, a guide installation groove is provided on a side of the second movable plate 212 close to the third fixed plate 221, and both ends of the guide installation groove pass through the second movable plate 212. Correspondingly, there is one third guide rail 226, which is fixedly connected to the guide installation groove on the second movable plate 212. The number of sliders on each third guide rail 226 can be multiple to improve the connection reliability. Correspondingly, the third movable plate 227 is fixedly connected to the slider on the third guide rail 226.

[0095] The telescopic driver 220 is fixedly connected to the third fixed plate 221 , and the driving end is connected to the third movable plate 227 , and is used to drive the third movable plate 227 to move. Specifically, the driver is a telescopic cylinder, which is fixed to the upper surface of the third fixed plate 221 , and the third fixed plate 221 is located above the third movable plate 227 .

[0096] The grinding driver 230 is fixedly connected to the third movable plate 227 , and the output axis of the grinding driver 230 is parallel to the third straight line direction, that is, the driving direction of the telescopic driver 220 is ensured to be in the same direction as the output axis direction of the grinding driver 230 .

[0097] The driving end of the telescopic driver 220 is connected to the third movable plate 227 through a floating joint 225, and an elastic member 224 is connected between the third movable plate 227 and the third fixed plate 221. Specifically, the floating joint 225 is threadedly connected to the shaft end of the telescopic driver 220 and the upper surface of the third movable plate 227.

[0098] Furthermore, in order to improve the running stability of the third movable plate 227 , the third displacement mechanism further includes a third guide rod 223 .

[0099] The third guide rod member 223 is fixedly connected to the third movable plate 227, and the third fixed plate 221 is provided with a third guide hole for the third guide rod member 223 to movably pass through. Specifically, there are two third guide holes, which are symmetrically arranged relative to the telescopic driver 220. Correspondingly, there are two third guide rod members 223, which pass through the third guide holes one by one. In order to reduce the contact wear between the third guide rod member 223 and the third guide hole, a linear bearing 222 is embedded in the third guide hole for the third guide rod member 223 to pass through. The outer surface of the linear bearing 222 is fixedly connected to the inner surface of the third guide hole. One end of the third guide rod passes through the linear bearing 222 and is slidably connected to the inner surface of the linear bearing 222, and the other end can be fixedly connected to the third movable plate 227 by a threaded connection.

[0100] Taking the design with a third guide rod 223 as an example, the elastic member 224 is designed as a compression spring, which is mounted on the third guide rod, and one end is in contact with and abuts against the third movable plate 227, and the other end is in contact with and abuts against the third fixed plate 221. Specifically, one end of the elastic member 224 is connected to the lower end surface of the linear bearing 222, and the other end is connected to the upper surface of the third movable plate 227.

[0101] The present application uses a micrometer knob in conjunction with a guide rail to adjust the first displacement mechanism and the second displacement mechanism in the XY direction, and a cylinder in conjunction with a floating assembly in the Z direction, so that the overall adjustment is economical, convenient and accurate while ensuring reliable pressure.

[0102] Furthermore, the third displacement mechanism also includes a limiting component.

[0103] The limiting assembly includes a limiting block 236 and a limiting screw 237, and the limiting block 236 is fixedly connected to the second movable plate 212. The limiting screw 237 is threadedly inserted into the limiting block 236, and can contact and abut against the third movable plate 227 to limit the movement range of the third movable plate 227. Specifically, the limiting block 236 is fixedly connected to the second movable plate 212, and a threaded hole is provided on the limiting block 236. The limiting screw 237 is threadedly connected to the threaded hole of the limiting block 236 to play a blocking role. By rotating the limiting screw 237, the blocking height can be adjusted to prevent the third movable plate 227 from moving downward excessively, thereby crushing the crystal block 313.

[0104] Furthermore, the design of the grinding module 1 also includes an intermediate plate 228 and a grinding fixing plate 229 .

[0105] The middle plate 228 is fixed on a side surface of the third movable plate 227 away from the third fixed plate 221. A positioning groove is provided on the middle plate 228. A boss matching the positioning groove is provided on one side surface of the grinding fixed plate 229. The grinding fixed plate 229 is fixedly connected to the middle plate 228 by a threaded connector.

[0106] A grinding mounting base 231 is fixedly connected to the side surface of the grinding fixing plate 229 away from the middle plate 228. The grinding mounting base 231 is provided with a mounting slot for the grinding driver 230 to be inserted into. A grinding clamping plate 232 is fixedly connected to the grinding mounting base 231 for clamping the grinding driver 230 onto the grinding mounting base 231. Specifically, the installation slot is an arc-shaped slot, and the grinding pressure plate 232 is also provided with a matching slot that matches the installation slot, and the matching slot is also an arc-shaped slot. Two threaded holes are provided on the surface of the grinding installation base 231 away from the grinding fixing plate 229, and two through holes are provided on the grinding pressure plate 232. The distance between the two threaded holes of the grinding installation base 231 is equal to the distance between the two through holes of the grinding pressure plate 232; the number of grinding installation bases 231 and grinding pressure plates 232 are both several, and they correspond one to one. The grinding driver 230 is inserted into the installation slot, and then the grinding pressure plate 232 is covered, and then fastened with screws to complete the fixation of the grinding driver 230.

[0107] A supporting plate 233 for supporting the grinding driver 230 is fixed at the bottom of the grinding fixing plate 229. Specifically, the supporting plate 233 is L-shaped, one side of which is fixedly connected to the grinding fixing plate 229, and the other side of the supporting plate 233 is provided with a semicircular through hole.

[0108] Furthermore, the present application also designs a dust cover 235, which is fixedly mounted on the outside of the grinding head 234, and the suction pipe opening on it is connected to the dust collector. Specifically, the grinding head 234 is a grinding wheel, and the dust cover 235 is circular, specifically fixedly connected to the support plate 233, with a through hole on its upper surface and a suction pipe opening on the side, which is connected to a dust removal system such as a dust collector, and the axis of the grinding head 234 passes through the through hole of the dust cover 235 and the support plate 233 and is connected to the grinding driver 230. With the dust cover configured, the grinding particles can be collected at any time, which is neat and environmentally friendly.

[0109] Working principle:

[0110] When in use, the first micrometer member 208 and the second micrometer member 214 are rotated respectively, so that the first movable plate 205 and the second movable plate 212 can be moved along the XY direction under the action of the first guide rail 204 and the second guide rail 211 respectively; and thus the initial position of the grinding head 234 can be adjusted. When grinding the crystal block 313, the telescopic driver 220 is extended and the elastic member 224 is compressed, so that the grinding force is stable and reliable.

[0111] In general, the grinding device of the crystal block grinder designed in this application is economical and practical, has high grinding efficiency, is clean and environmentally friendly, etc.

[0112] The above is a detailed introduction to the grinding device of a crystal block grinder provided in the present application. For a person skilled in the art, according to the idea of ​​the embodiments of the present application, there may be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the present application.

Claims

1. A grinding device for a crystal block grinder, characterized in that: It comprises a displacement module (2) and a grinding module (1); The displacement module (2) is connected to the grinding module (1) and is used to drive the grinding module (1) to move; The grinding module (1) comprises a grinding driver (230) and a grinding head (234); The output shaft of the grinding driver (230) is connected to the grinding head (234) and is used to drive the grinding head (234) to rotate so as to grind the crystal block (313); The grinding driver (230) is elastically floated along the axial direction of its output shaft, or the grinding head (234) is elastically floated along the axial direction of the output shaft of the grinding driver (230).

2. The grinding device of a crystal block grinding machine according to claim 1, characterized in that: The grinding driver (230) is connected to the driving end of the displacement module (2) via a floating joint (225), and an elastic member (224) is also connected between the grinding driver (230) and the displacement module (2) so that the grinding driver (230) can float elastically.

3. The grinding device of a crystal block grinding machine according to claim 2, characterized in that: The displacement module (2) comprises a first displacement mechanism, a second displacement mechanism and a third displacement mechanism; The first displacement mechanism is connected to the second displacement mechanism and is used to drive the second displacement mechanism to move in a first straight line direction; The second displacement mechanism is connected to the third displacement mechanism and is used to drive the third displacement mechanism to move in a second straight line direction perpendicular to the first straight line direction; The third displacement mechanism is connected to the grinding module (1) and is used to drive the grinding module (1) to move in a third linear direction perpendicular to the first linear direction and the second linear direction.

4. The grinding device of a crystal block grinding machine according to claim 3, characterized in that: The first displacement mechanism is a micrometer displacement mechanism, comprising a displacement base (201), a first fixed plate (202), a first guide rail (204), a first movable plate (205), a first micrometer seat (207), a first micrometer member (208) and a first locking member (209); The first fixing plate (202) is fixedly connected to the displacement base (201); The first guide rail (204) is fixedly connected to a side surface of the first fixing plate (202) along the first straight line direction; The first movable plate (205) is fixedly connected to the slider on the first guide rail (204); The first micrometer seat (207) is fixedly connected to the first fixing plate (202); The first micrometer component (208) is detachably mounted on the first micrometer seat (207) and is capable of contacting the first movable plate (205) to drive the first movable plate (205) to move; The first locking member (209) is used to lock the connection between the first movable plate (205) and the first fixed plate (202) after the first movable plate (205) is moved and adjusted.

5. The grinding device of a crystal block grinding machine according to claim 4, characterized in that: The second displacement mechanism is a micrometer displacement mechanism, comprising a second fixed plate (210), a second guide rail (211), a second movable plate (212), a second micrometer seat (213), a second micrometer member (214) and a second locking member (215); The second fixed plate (210) is fixedly connected to a side of the first movable plate (205) away from the first fixed plate (202); The second guide rail (211) is fixedly connected to a side surface of the second fixing plate (210) along the second straight line direction; The second movable plate (212) is fixedly connected to the slider on the second guide rail (211); The second micrometer seat (213) is fixedly connected to the second fixing plate (210); The second micrometer component (214) is detachably mounted on the second micrometer seat (213) and is capable of contacting the second movable plate (212) to drive the second movable plate (212) to move; The second locking member (215) is used to lock the connection between the second movable plate (212) and the second fixed plate (210) after the second movable plate (212) is moved and adjusted.

6. The grinding device of a crystal block grinding machine according to claim 5, characterized in that: The third displacement mechanism comprises a third fixed plate (221), a telescopic driver (220), a third movable plate (227) and a third guide rail (226); The third fixed plate (221) is fixedly connected to a side of the second movable plate (212) away from the second fixed plate (210); The third guide rail (226) is fixedly connected to a side surface of the second movable plate (212) away from the second fixed plate (210) along the third straight line direction; The third movable plate (227) is fixedly connected to the slider on the third guide rail (226); The telescopic driver (220) is fixedly connected to the third fixed plate (221), and a driving end is connected to the third movable plate (227) for driving the third movable plate (227) to move; The grinding driver (230) is fixedly connected to the third movable plate (227), and the output shaft of the grinding driver (230) is parallel to the third straight line direction; The driving end of the telescopic driver (220) is connected to the third movable plate (227) via the floating joint (225), and the elastic member (224) is connected between the third movable plate (227) and the third fixed plate (221).

7. The grinding device of a crystal block grinding machine according to claim 6, characterized in that: The third displacement mechanism further includes a limiting component; The limiting assembly comprises a limiting block (236) and a limiting screw (237); The limiting block (236) is fixedly connected to the second movable plate (212); The limiting screw (237) is threadedly inserted on the limiting block (236) and can contact and abut against the third movable plate (227) to limit the movement range of the third movable plate (227).

8. The grinding device of a crystal block grinding machine according to claim 7, characterized in that: The grinding module (1) also includes an intermediate plate (228) and a grinding fixing plate (229); The intermediate plate (228) is fixed to a side surface of the third movable plate (227) away from the third fixed plate (221); The middle plate (228) is provided with a positioning groove; A boss matching the positioning groove is provided on one side surface of the grinding fixing plate (229); The grinding fixed plate (229) is fixedly connected to the intermediate plate (228).

9. The grinding device of a crystal block grinding machine according to claim 8, characterized in that: A grinding mounting base (231) is fixedly connected to a side surface of the grinding fixing plate (229) away from the middle plate (228); The grinding installation base (231) is provided with an installation slot for the grinding driver (230) to be inserted into; A grinding pressing plate (232) is fixedly connected to the grinding mounting base (231) and is used to press the grinding driver (230) onto the grinding mounting base (231); A supporting plate (233) for supporting the grinding driver (230) is fixed to the bottom of the grinding fixing plate (229).

10. The grinding device of a crystal block grinding machine according to claim 1, characterized in that: Also includes a dust cover (235); The dust removal cover (235) is fixedly mounted outside the grinding head (234), and the suction pipe opening thereon is connected to a dust collector.

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