Push boat lifting device and coating equipment

Abstract

The utility model belongs to the technical field of semiconductor processing, and discloses a boat pushing lifting device and coating equipment, a boat loading assembly of the boat pushing lifting device comprises a mounting seat mechanism and a paddle seat mechanism connected to one end of a paddle, the mounting seat mechanism is provided with a first inserting groove with a downward opening and a second inserting groove with an upward opening, and the first inserting groove and the second inserting groove are arranged along the vertical direction. The first inserting grooves and the second inserting grooves are arranged in a staggered mode. The paddle seat mechanism is installed on the installation seat mechanism, a first movable inserting shaft and a second movable inserting shaft are arranged at the two ends of the paddle seat mechanism correspondingly and arranged on the upper side and the lower side of the paddle seat mechanism correspondingly, and the first inserting shaft can move in a reciprocating mode in the vertical direction so as to be inserted into the first inserting groove or be separated from the first inserting groove. The second inserting shaft can move in a reciprocating mode in the vertical direction so as to be inserted into the second inserting groove or separated from the second inserting groove. According to the boat pushing lifting device and the coating equipment disclosed by the utility model, the paddle can be quickly disassembled and assembled, the mounting structure of the paddle is simplified, and the position stability is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to a push boat lifting device and a coating device. Background Art

[0002] Coating is a key process in the wafer processing process. The coating process includes plasma enhanced chemical vapor deposition (PECVD), low pressure chemical vapor deposition (LPCVD), diffusion, etc. The above coating processes need to be carried out in a high vacuum reaction chamber. The coating equipment uses the paddle on the push boat assembly to safely and smoothly deliver the graphite boat into the reaction chamber, and then the paddle descends and exits. The reaction chamber is closed before the subsequent process links are carried out. In order to ensure the stability of the paddle pushing the graphite boat, the paddle needs to be frequently disassembled, repaired and replaced. The paddle is a cantilever structure. In order to ensure the reliability of the cantilever installation of the paddle, the existing push boat assembly often uses two upper and lower clamps to clamp one end of the paddle, and locks the upper and lower clamps with multiple screws. This installation structure is relatively complicated and cannot achieve rapid disassembly and assembly of the paddle. If the number of screws used is reduced, it will be difficult to maintain the balance and stability of the paddle. Utility Model Content

[0003] The first purpose of the utility model is to provide a push boat lifting device, which is used to solve the problem that the paddle installation structure of the existing coating equipment is complicated and cannot be quickly disassembled and assembled.

[0004] The second purpose of the utility model is to provide a coating device, which can solve the problem that the paddle installation structure of the existing coating equipment is complicated and cannot be quickly disassembled and assembled through the above-mentioned push boat lifting device.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] In a first aspect, a boat pusher lifting device is provided, comprising a moving assembly and a boat carrying assembly connected to the moving assembly, the boat carrying assembly is used to carry a boat, the moving assembly can drive the boat carrying assembly to move back and forth in a vertical direction and a horizontal direction, the boat carrying assembly comprises a mounting seat mechanism, a paddle seat mechanism and a paddle, the paddle seat mechanism is connected to one end of the paddle, the mounting seat mechanism is provided with a first insertion slot with an opening facing downward and a second insertion slot with an opening facing upward, and along the vertical direction, the first insertion slot and the second insertion slot are alternately arranged;

[0007] The paddle seat mechanism is installed on the mounting seat mechanism, and a movable first plug-in shaft and a second plug-in shaft are respectively provided at both ends of the paddle seat mechanism, and the first plug-in shaft and the second plug-in shaft are respectively arranged on the upper and lower sides of the paddle seat mechanism, and the first plug-in shaft can be reciprocated in the vertical direction to be inserted into the first plug-in slot or detached from the first plug-in slot, and the second plug-in shaft can be reciprocated in the vertical direction to be inserted into the second plug-in slot or detached from the second plug-in slot.

[0008] In one embodiment, the paddle seat mechanism is divided into a first clamping seat and a second clamping seat which are spaced apart in the horizontal direction and arranged parallel to each other, the first plug-in shaft is connected to the first clamping seat, and the second plug-in shaft is connected to the second clamping seat; and / or,

[0009] The paddle seat mechanism is provided with a first mounting hole and a second mounting hole extending vertically therethrough. The first mounting hole and the second mounting hole are at least partially threaded holes. The first plug-in shaft is threadedly connected to the first mounting hole, and the second plug-in shaft is threadedly connected to the second mounting hole.

[0010] In one embodiment, the mounting seat mechanism includes a connected horizontal mounting plate and a vertically mounted L-shaped bracket, the horizontal mounting plate having a first end and a second end arranged in a horizontal direction, the first insertion slot being arranged at the first end, the L-shaped bracket being connected to the second end, and the second insertion slot being arranged at the L-shaped bracket.

[0011] In one embodiment, the moving assembly includes a lifting mechanism, and the lifting mechanism includes:

[0012] Two lifting brackets are arranged at intervals in the horizontal direction, and each lifting bracket has an input end and an output end;

[0013] A lifting motor, the lifting motor being arranged on one of the lifting brackets;

[0014] A transmission mechanism, wherein the transmission mechanism comprises two reducers and a transmission shaft, the lifting motor drives the transmission shaft to rotate, the reducer is connected to the input end, and the two ends of the transmission shaft are respectively connected to the two reducers to drive the two input ends simultaneously;

[0015] A lifting plate, the length of which extends in the horizontal direction and the two ends of which are respectively connected to the two output ends by transmission, and the lifting plate is used to drive the boat carrying assembly to lift and reciprocate in the vertical direction.

[0016] In one embodiment, the lifting bracket has a lifting screw extending in a vertical direction to form the input end, and the lifting bracket also has a lifting seat connected to the lifting screw to form the output end, the lifting plate is connected to the lifting seat, and the lifting screw can rotate to drive the lifting seat to lift and reciprocate in the vertical direction.

[0017] In one embodiment, the moving assembly further includes a first adjustment mechanism, which includes a plurality of first adjustment screws and an adjustment plate disposed on the lifting seat, the first adjustment screws pass through a first adjustment threaded hole on the adjustment plate to abut against the lifting plate, at least three of the plurality of first adjustment screws are disposed non-collinearly, and the first adjustment screws are screwed to adjust the verticality of the lifting plate.

[0018] In one embodiment, the moving assembly further comprises a boat pushing mechanism, and the boat pushing mechanism comprises:

[0019] A pushing motor, wherein the pushing motor is arranged at one end of the lifting plate;

[0020] A driving wheel and a transmission wheel are arranged at intervals at both ends of the lifting plate in the horizontal direction, and the driving wheel is connected to the pushing motor;

[0021] A conveyor belt is sleeved on the driving wheel and the transmission wheel, the boat carrier assembly is connected to the conveyor belt, and the conveyor belt rotates to drive the boat carrier assembly to reciprocate in the horizontal direction.

[0022] In one of the embodiments, the paddle seat mechanism includes a support seat and a mounting cover plate, wherein the support seat and the mounting cover plate are mutually surrounded to form a clamping space, and one end of the paddle is accommodated in the clamping space.

[0023] In one embodiment, the boat carrier assembly also includes a second adjustment mechanism, which includes a plurality of second adjustment screws and a plurality of buffer blocks arranged in the clamping space, the plurality of buffer blocks are fitly connected to the circumference of the paddle, the second adjustment screws pass through the second adjustment threaded holes on the support seat or the mounting cover to abut the buffer blocks, at least three of the plurality of second adjustment screws are not arranged in a colinear manner, and the second adjustment screws are screwed to adjust the verticality and / or horizontality of the buffer blocks.

[0024] In a second aspect, a coating device is provided, including a reaction chamber and a push boat lifting device as described above, wherein a boat carrying assembly of the push boat lifting device can reciprocate in vertical and horizontal directions to push a push boat into or out of the reaction chamber.

[0025] Beneficial effects of the utility model:

[0026] The push boat lifting device provided by the utility model has a mounting seat mechanism with a first insertion slot with an opening facing downward and a second insertion slot with an opening facing upward, and the first insertion slot and the second insertion slot are arranged alternately in the vertical direction. The paddle seat mechanism is installed on the mounting seat mechanism, and the two ends of the paddle seat mechanism are respectively provided with a movable first insertion shaft and a second insertion shaft, and the first insertion shaft and the second insertion shaft are respectively arranged on the upper and lower sides of the paddle seat mechanism, and the first insertion shaft can be reciprocated in the vertical direction to be inserted in the first insertion slot or detached from the first insertion slot, and the second insertion shaft can be reciprocated in the vertical direction to be inserted in the second insertion slot or detached from the second insertion slot. When the first insert shaft is inserted into the first insert slot, and the second insert shaft is inserted into the second insert slot, the first insert shaft and the second insert shaft form a stable support on the upper and lower sides of the paddle, ensuring the position accuracy and installation reliability of the paddle; moreover, the cantilever end of the paddle has a tendency to sag under the action of gravity, thereby forming a seesaw structure with the first insert shaft and the second insert shaft. The seesaw structure always maintains balance under the constraint of the mounting seat mechanism, and forms an interlock to prevent the first insert shaft from detaching from the first insert slot and the second insert shaft from detaching from the second insert slot, thereby ensuring the stability of the paddle seat mechanism and the paddle. When the paddle needs to be disassembled, the first insert shaft is moved to detach from the first insert slot or the second insert shaft is moved to detach from the second insert slot, so that the interlock of the seesaw structure can be released, so that the paddle seat mechanism drives the paddle to detach from the mounting seat mechanism, and the paddle can be quickly disassembled and assembled. The above-mentioned boat carrier assembly does not require the use of multiple screws, simplifies the installation structure of the paddle, and can maintain good stability and reliability.

[0027] The coating equipment provided by the utility model has the above-mentioned push boat lifting device, which can realize the rapid disassembly and assembly of the paddle, simplify the installation structure of the paddle, and can maintain good stability and reliability, thereby improving the process quality of the coating equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a structural schematic diagram of the push boat lifting device provided by an embodiment of the utility model at a certain viewing angle;

[0029] Figure 2 yes Figure 1 A partial enlarged schematic diagram of part A;

[0030] Figure 3 It is a partial structural schematic diagram of a boat carrier assembly provided by an embodiment of the utility model;

[0031] Figure 4 It is a partial structural schematic diagram of a mobile assembly provided by an embodiment of the utility model;

[0032] Figure 5 It is a structural schematic diagram of the push boat lifting device provided by the embodiment of the utility model from another perspective;

[0033] Figure 6 yes Figure 5 A partial enlarged schematic diagram of part B.

[0034] In the figure:

[0035] 1. Moving assembly; 11. Lifting mechanism; 111. Lifting bracket; 1111. Lifting screw rod; 1112. Lifting seat; 112. Lifting motor; 113. Transmission mechanism; 1131. Speed ​​reducer; 1132. Transmission shaft; 114. Lifting plate; 12. First adjustment mechanism; 121. First adjustment screw; 122. Adjustment plate; 123. First locking screw; 13. Pushing boat mechanism; 131. Pushing motor; 132. Driving wheel; 133. Conveyor belt;

[0036] 2. Boat carrier assembly; 21. Mounting seat mechanism; 211. Horizontal mounting plate; 2111. First insertion slot; 212. L-shaped bracket; 2121. Second insertion slot; 213. Conveyor belt clamp; 22. Paddle seat mechanism; 221. First insertion shaft; 222. Second insertion shaft; 223. First clamping seat; 224. Second clamping seat; 225. Support seat; 226. Mounting cover; 23. Paddle; 24. Second adjustment mechanism; 241. Second adjustment screw; 242. Buffer block. DETAILED DESCRIPTION

[0037] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0038] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0039] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0040] In the description of this embodiment, the terms "upper", "lower", "left", "right" and other directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0041] like Figures 1 to 3 As shown, this embodiment first provides a boat-pushing lifting device, which includes a moving assembly 1 and a boat-carrying assembly 2 connected to the moving assembly 1. The boat-carrying assembly 2 is used to carry the boat. The moving assembly 1 can drive the boat-carrying assembly 2 to move back and forth in the vertical and horizontal directions to send the boat into the reaction chamber. The boat-carrying assembly 2 includes a mounting seat mechanism 21, a paddle seat mechanism 22 and a paddle 23. The paddle seat mechanism 22 is connected to one end of the paddle 23. The paddle 23 forms a cantilever structure to meet the spatial size requirements of the reaction chamber.

[0042] The mounting seat mechanism 21 is provided with a first insertion slot 2111 with an opening facing downward and a second insertion slot 2121 with an opening facing upward, and the first insertion slot 2111 and the second insertion slot 2121 are arranged alternately in the vertical direction. The paddle seat mechanism 22 is mounted on the mounting seat mechanism 21, and the two ends of the paddle seat mechanism 22 are respectively provided with a movable first insertion shaft 221 and a second insertion shaft 222, and the first insertion shaft 221 and the second insertion shaft 222 are respectively arranged at the upper and lower sides of the paddle seat mechanism 22. The first insertion shaft 221 can reciprocate in the vertical direction to be inserted into the first insertion slot 2111 or to be separated from the first insertion slot 2111, and the second insertion shaft 222 can reciprocate in the vertical direction to be inserted into the second insertion slot 2121 or to be separated from the second insertion slot 2121. When the first insertion shaft 221 is inserted into the first insertion slot 2111, and the second insertion shaft 222 is inserted into the second insertion slot 2121, the first insertion shaft 221 and the second insertion shaft 222 form a stable support on the upper and lower sides of the paddle 23, ensuring the position accuracy and installation reliability of the paddle 23; moreover, the cantilever end of the paddle 23 has a drooping tendency under the action of gravity, thereby forming a seesaw structure with the first insertion shaft 221 and the second insertion shaft 222. The seesaw structure always maintains balance under the constraint of the mounting seat mechanism 21, and forms an interlocking, preventing the first insertion shaft 221 from detaching from the first insertion slot 2111 and the second insertion shaft 222 from detaching from the second insertion slot 2121, thereby ensuring the stability of the paddle seat mechanism 22 and the paddle 23. When the paddle 23 needs to be disassembled, the first insertion shaft 221 is moved to disengage it from the first insertion slot 2111 or the second insertion shaft 222 is moved to disengage it from the second insertion slot 2121, so that the interlocking of the seesaw structure can be released, and the paddle seat mechanism 22 drives the paddle 23 to disengage from the mounting seat mechanism 21, thereby realizing the rapid disassembly and assembly of the paddle 23. The boat carrier assembly 2 does not need to use multiple screws, simplifies the installation structure of the paddle 23, and can maintain good stability and reliability.

[0043] It should be noted that, as a seesaw structure, the connection between the second insertion shaft 222 and the second insertion slot 2121 can be used as a fulcrum, so that the connection between the first insertion shaft 221 and the first insertion slot 2111 and the cantilever end of the paddle 23 are used as two ends. Figure 1 As shown; in other embodiments, the connection between the first insertion shaft 221 and the first insertion slot 2111 can also be used as a fulcrum, so that the connection between the second insertion shaft 222 and the second insertion slot 2121 and the cantilever end of the paddle 23 can be used as two ends to form a seesaw structure.

[0044] In order to further simplify the structure and reduce the deadweight, the paddle seat mechanism 22 is divided into a first clamping seat 223 and a second clamping seat 224 which are spaced apart in the horizontal direction and arranged parallel to each other, the first insertion shaft 221 is connected to the first clamping seat 223, and the second insertion shaft 222 is connected to the second clamping seat 224. The distance between the first clamping seat 223 and the second clamping seat 224 is variable, which can also reduce the requirements for the relative position accuracy of the first insertion shaft 221, the second insertion shaft 222 and the corresponding first insertion slot 2111, the second insertion slot 2121 during insertion.

[0045] The first clamping seat 223 is provided with a first mounting hole extending through the first clamping seat 223, and the second clamping seat 224 is provided with a second mounting hole extending through the first clamping seat 224. Both the first mounting hole and the second mounting hole are at least partially threaded holes. The first plug-in shaft 221 is threadedly connected to the first mounting hole, and the second plug-in shaft 222 is threadedly connected to the second mounting hole, so as to maintain the stability of the first plug-in shaft 221 on the first clamping seat 223 and the stability of the second plug-in shaft 222 on the second clamping seat 224 to avoid falling off. Moreover, when it is necessary to move the first plug-in shaft 221 or the second plug-in shaft 222 in the vertical direction, the first plug-in shaft 221 or the second plug-in shaft 222 can be moved by a screwing action, and the moving distance is controllable, which is convenient to operate.

[0046] In one embodiment, the mounting seat mechanism 21 has a horizontal mounting plate 211 and a vertically mounted L-shaped bracket 212, the horizontal mounting plate 211 has a first end and a second end arranged in the horizontal direction, the first insertion slot 2111 is arranged at the first end of the horizontal mounting plate 211, the L-shaped bracket 212 is connected to the second end of the horizontal mounting plate 211, and the horizontal end of the L-shaped bracket 212 extends toward the outside of the horizontal mounting plate 211, so that the second insertion slot 2121 is arranged on the L-shaped bracket 212. In this way, the first end of the horizontal mounting plate 211 and the L-shaped bracket 212 avoid each other, so that the first insertion shaft 221 and the second insertion shaft 222 are conveniently screwed, and the first insertion shaft 221, the second insertion shaft 222 and the mounting seat mechanism 21 will not interfere with each other.

[0047] In one embodiment, the moving assembly 1 includes a lifting mechanism 11, such as Figure 5 and Figure 6As shown. The lifting mechanism 11 includes two lifting brackets 111 spaced apart in the horizontal direction, a lifting motor 112, a transmission mechanism 113 and a lifting plate 114. The lifting bracket 111 has an input end and an output end; the lifting motor 112 is arranged at the top of one of the lifting brackets 111 and does not occupy the space size in the horizontal direction. The transmission mechanism 113 includes two reducers 1131 and a transmission shaft 1132. The lifting motor 112 drives the transmission shaft 1132 to rotate. The reducer 1131 is connected to the input end of the lifting bracket 111, and the two ends of the transmission shaft 1132 are respectively connected to the two reducers 1131 to simultaneously drive the input ends of the two lifting brackets 111 to maintain the synchronization of the action. The length of the lifting plate 114 extends in the horizontal direction and the two ends are respectively connected to the output ends of the two lifting brackets 111. The two lifting brackets 111 ensure that the movement of the lifting plate 114 in the entire length direction is synchronous to avoid tilting. The lifting plate 114 is used to drive the boat carrier assembly 2 to lift and reciprocate in the vertical direction. At the same time, the lifting plate 114 forms a reference surface for the boat carrier assembly 2 to reciprocate in the horizontal direction. Therefore, the extension of the lifting plate 114 in the length direction is used to meet the travel requirements of the boat carrier assembly 2 in the horizontal direction.

[0048] Specifically, the lifting bracket 111 has a lifting screw rod 1111 extending in the vertical direction to form an input end, and the lifting bracket 111 also has a lifting seat 1112 connected to the lifting screw rod 1111 to form an output end, and the lifting seat 1112 has a built-in threaded hole to be screwed to the lifting screw rod 1111. The lifting plate 114 is connected to the lifting seat 1112 and moves synchronously with the lifting seat 1112. The lifting motor 112 drives the lifting screw rod 1111 to rotate through the reducer 1131, and when the lifting screw rod 1111 rotates, it drives the lifting seat 1112 to lift and lower back and forth in the vertical direction, so that the lifting seat 1112 drives the boat carrier assembly 2 to achieve a lifting action in the vertical direction.

[0049] In order to adjust the position accuracy of the boat carrier assembly 2, the moving assembly 1 further includes a first adjusting mechanism 12, such as Figure 6 The first adjustment mechanism 12 includes a plurality of first adjustment screws 121 and an adjustment plate 122 disposed on the lifting seat 1112. The first adjustment screws 121 pass through the first adjustment threaded holes on the adjustment plate 122 to abut against the lifting plate 114. At least three of the plurality of first adjustment screws 121 are not disposed in a colinear manner. By screwing one or more first adjustment screws 121, the lifting plate 114 is pushed against at different positions to adjust the verticality of the lifting plate 114, thereby indirectly adjusting the position accuracy of the boat carrier assembly 2.

[0050] The first adjustment mechanism 12 also includes a first locking screw 123, which is used to connect the locking adjustment plate 122 and the lifting plate 114. When the verticality of the lifting plate 114 needs to be adjusted, the first locking screw 123 needs to be loosened first, and then the first locking screw 123 is tightened after the adjustment is completed.

[0051] In order to realize the horizontal movement of the boat-carrying assembly 2, the mobile assembly 1 also includes a boat-pushing mechanism 13. The boat-pushing mechanism 13 includes a pushing motor 131, a driving wheel 132 arranged at both ends of the lifting plate 114 at intervals in the horizontal direction, a transmission wheel and a conveyor belt 133. The pushing motor 131 is arranged at one end of the lifting plate 114 and is located on the back of the lifting plate 114, and does not occupy the length space in the horizontal direction. The driving wheel 132 is connected to the pushing motor 131; the conveyor belt 133 is sleeved on the driving wheel 132 and the transmission wheel, and driven by the driving wheel 132, the conveyor belt 133 and the transmission wheel can rotate. The boat-carrying assembly 2 is connected to the conveyor belt 133, and the conveyor belt 133 rotates to drive the boat-carrying assembly 2 to move back and forth in the horizontal direction to realize the horizontal boat-pushing action. The conveyor belt 133 is suitable for working conditions with a longer working stroke.

[0052] Specifically, the mounting seat mechanism 21 includes a conveyor belt clamping member 213, and the conveyor belt clamping member 213 is clamped on the conveyor belt 133. Figure 4 As shown, the connection between the boat assembly 2 and the conveyor belt 133 is achieved.

[0053] The paddle seat mechanism 22 includes a support seat 225 and a mounting cover plate 226, which are mutually surrounded to form a clamping space, and one end of the paddle 23 is accommodated in the clamping space. When the paddle seat mechanism 22 is divided into a first clamping seat 223 and a second clamping seat 224, the first clamping seat 223 is formed by a group of support seats 225 and mounting cover plates 226, and the second clamping seat 224 is formed by another group of support seats 225 and mounting cover plates 226.

[0054] In one embodiment, the boat carrier assembly 2 further includes a second adjustment mechanism 24, which includes a plurality of second adjustment screws 241 and a plurality of buffer blocks 242 disposed in the clamping space, wherein the plurality of buffer blocks 242 are closely connected to the peripheral side of the paddle 23, and the second adjustment screws 241 pass through the second adjustment threaded holes on the support seat 225 or the mounting cover plate 226 to abut against the buffer blocks 242. At least three of the plurality of second adjustment screws 241 are disposed non-collinearly, and the second adjustment screws 241 are screwed to adjust the verticality and / or horizontality of the buffer blocks 242, thereby driving the adjustment of the verticality and / or horizontality of the paddle 23. By disposing the buffer blocks 242, the paddle 23 is prevented from being damaged by the force of the second adjustment screws 241 during the adjustment process, and the clamping force of the support seat 225 and the mounting cover plate 226 can be buffered.

[0055] Specifically, multiple second adjustment screws 241 can be arranged on the surrounding side of the paddle 23. When the second adjustment screws 241 are set horizontally, they can push against the buffer blocks 242 on the left and right sides of the paddle 23 in the horizontal direction to adjust the verticality of the paddle 23; when the second adjustment screws 241 are set vertically, they can push against the buffer blocks 242 on the upper and lower sides of the paddle 23 in the vertical direction to directly adjust the horizontality of the paddle 23.

[0056] Finally, this embodiment also provides a coating device, which includes the above-mentioned boat-pushing lifting device, and the coating device also includes a reaction chamber, and the boat-carrying assembly 2 of the boat-pushing lifting device can reciprocate in the vertical direction and the horizontal direction to push the boat into or out of the reaction chamber. The paddle seat mechanism 22 of the boat-pushing lifting device is installed on the mounting seat mechanism 21, and the first plug-in shaft 221 at one end of the paddle seat mechanism 22 is plugged into the first plug-in slot 2111 with an opening facing downward, and the second plug-in shaft 222 at the other end is plugged into the second plug-in slot 2121 with an opening facing upward, so as to form a seesaw structure with the other end cantilever of the paddle 23, so that the paddle 23 always maintains balance, and prevents the first plug-in shaft 221 from being disengaged from the first plug-in slot 2111, and the second plug-in shaft 222 from being disengaged from the second plug-in slot 2121. When the paddle 23 needs to be disassembled, the first insertion shaft 221 is moved to disengage it from the first insertion slot 2111 or the second insertion shaft 222 is moved to disengage it from the second insertion slot 2121, so that the interlocking of the seesaw structure can be released, and the paddle 23 can be quickly disassembled and assembled. The boat carrier assembly 2 does not need to use multiple screws, simplifies the installation structure of the paddle 23, and can maintain good stability and reliability.

[0057] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.

Claims

1. A boat-pushing lifting device, comprising a moving assembly (1) and a boat-carrying assembly (2) connected to the moving assembly (1), wherein the boat-carrying assembly (2) is used to carry a boat, and the moving assembly (1) can drive the boat-carrying assembly (2) to reciprocate in a vertical direction and a horizontal direction, characterized in that: The boat carrier assembly (2) comprises a mounting seat mechanism (21), a paddle seat mechanism (22) and a paddle (23); the paddle seat mechanism (22) is connected to one end of the paddle (23); the mounting seat mechanism (21) is provided with a first insertion groove (2111) with an opening facing downward and a second insertion groove (2121) with an opening facing upward; along the vertical direction, the first insertion groove (2111) and the second insertion groove (2121) are arranged alternately; the paddle seat mechanism (22) is mounted on the mounting seat mechanism (21); and two ends of the paddle seat mechanism (22) are respectively provided with A first plug-in shaft (221) and a second plug-in shaft (222) are movable, and the first plug-in shaft (221) and the second plug-in shaft (222) are respectively arranged at the upper and lower sides of the paddle seat mechanism (22), the first plug-in shaft (221) can reciprocate along the vertical direction to be inserted into the first plug-in slot (2111) or detach from the first plug-in slot (2111), and the second plug-in shaft (222) can reciprocate along the vertical direction to be inserted into the second plug-in slot (2121) or detach from the second plug-in slot (2121).

2. The push boat lifting device according to claim 1, characterized in that: The paddle seat mechanism (22) is divided into a first clamping seat (223) and a second clamping seat (224) which are spaced apart in a horizontal direction and arranged parallel to each other, the first insertion shaft (221) is connected to the first clamping seat (223), and the second insertion shaft (222) is connected to the second clamping seat (224); and / or, The paddle seat mechanism (22) is provided with a first mounting hole and a second mounting hole penetrating in a vertical direction, the first mounting hole and the second mounting hole are at least partially threaded holes, the first insertion shaft (221) is threadedly connected in the first mounting hole, and the second insertion shaft (222) is threadedly connected in the second mounting hole.

3. The push boat lifting device according to claim 1, characterized in that: The mounting seat mechanism (21) comprises a connected horizontal mounting plate (211) and a vertically mounted L-shaped bracket (212), wherein the horizontal mounting plate (211) has a first end and a second end arranged in a horizontal direction, the first insertion slot (2111) is arranged at the first end, the L-shaped bracket (212) is connected to the second end, and the second insertion slot (2121) is arranged at the L-shaped bracket (212).

4. The push boat lifting device according to claim 1, characterized in that: The moving assembly (1) comprises a lifting mechanism (11), and the lifting mechanism (11) comprises: Two lifting supports (111) are arranged at intervals in a horizontal direction, and the lifting supports (111) have an input end and an output end; A lifting motor (112), wherein the lifting motor (112) is arranged on one of the lifting brackets (111); A transmission mechanism (113), the transmission mechanism (113) comprising two reducers (1131) and a transmission shaft (1132), the lifting motor (112) driving the transmission shaft (1132) to rotate, the reducer (1131) being connected to the input end, and the two ends of the transmission shaft (1132) being respectively connected to the two reducers (1131) to drive the two input ends simultaneously; A lifting plate (114) is provided, the length of the lifting plate (114) extending in the horizontal direction and the two ends of the lifting plate are respectively connected to the two output ends by transmission, and the lifting plate (114) is used to drive the boat carrying assembly (2) to lift and lower reciprocate in the vertical direction.

5. The push boat lifting device according to claim 4, characterized in that: The lifting bracket (111) has a lifting screw (1111) extending in a vertical direction to form the input end, and the lifting bracket (111) also has a lifting seat (1112) connected to the lifting screw (1111) to form the output end, and the lifting plate (114) is connected to the lifting seat (1112), and the lifting screw (1111) can rotate to drive the lifting seat (1112) to lift and reciprocate in the vertical direction.

6. The push boat lifting device according to claim 5, characterized in that: The moving assembly (1) further comprises a first adjustment mechanism (12), the first adjustment mechanism (12) comprising a plurality of first adjustment screws (121) and an adjustment plate (122) arranged on the lifting seat (1112), the first adjustment screws (121) passing through first adjustment threaded holes on the adjustment plate (122) to abut against the lifting plate (114), at least three of the plurality of first adjustment screws (121) are arranged non-collinearly, and the first adjustment screws (121) are screwed to adjust the verticality of the lifting plate (114).

7. The push boat lifting device according to claim 4, characterized in that: The moving assembly (1) further comprises a boat pushing mechanism (13), wherein the boat pushing mechanism (13) comprises: A pushing motor (131), wherein the pushing motor (131) is arranged at one end of the lifting plate (114); A driving wheel (132) and a transmission wheel are arranged at intervals at both ends of the lifting plate (114) in the horizontal direction, and the driving wheel (132) is connected to the pushing motor (131); A conveyor belt (133) is mounted on the driving wheel (132) and the transmission wheel. The boat carrier assembly (2) is connected to the conveyor belt (133). The conveyor belt (133) rotates to drive the boat carrier assembly (2) to reciprocate in a horizontal direction.

8. The push boat lifting device according to any one of claims 1 to 7, characterized in that: The paddle seat mechanism (22) comprises a support seat (225) and a mounting cover plate (226); the support seat (225) and the mounting cover plate (226) are mutually surrounded to form a clamping space; one end of the paddle (23) is accommodated in the clamping space.

9. The push boat lifting device according to claim 8, characterized in that: The boat carrier assembly (2) further comprises a second adjustment mechanism (24), the second adjustment mechanism (24) comprising a plurality of second adjustment screws (241) and a plurality of buffer blocks (242) arranged in the clamping space, the plurality of buffer blocks (242) being closely connected to the circumference of the paddle (23), the second adjustment screws (241) passing through second adjustment threaded holes on the support seat (225) or the mounting cover plate (226) to abut against the buffer blocks (242), at least three of the plurality of second adjustment screws (241) are not arranged in a colinear manner, and the second adjustment screws (241) are screwed to adjust the verticality and / or horizontality of the buffer blocks (242).

10. A coating device, characterized in that: It comprises a reaction chamber and a push boat lifting device as claimed in any one of claims 1 to 9, wherein the boat carrying assembly (2) of the push boat lifting device can reciprocate in the vertical direction and the horizontal direction to push the push boat into or out of the reaction chamber.

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