High-voltage regulator for semiconductor

Abstract

The utility model relates to the technical field of high-pressure regulators, in particular to a high-pressure regulator for a semiconductor, which comprises a control assembly, a pressure assembly and a main body assembly, the control assembly is rotatably connected to the pressure assembly, the pressure assembly is fixedly connected to the main body assembly, the control assembly is positioned above the pressure assembly, and the pressure assembly is positioned above the main body assembly; the control assembly comprises screws, hand wheels and second nuts, the hand wheels are symmetrically arranged, and the two hand wheels are fixedly connected to the pressure assembly through the screws and the second nuts; the pressure assembly comprises an upper cover, a diaphragm, a second O-shaped ring, a pressure adjusting lead screw, a pressure adjusting lead screw pressing cap, a pressure adjusting lead screw nut, a first pressing cap, a check ring, a pressure adjusting spring, a second pressing cap and a third O-shaped ring. The valve can be tightly matched with a fluid blocking opening in a fluid pipeline, the sealing performance is good, and the safety is high.

Description

Technical Field

[0001] The utility model relates to the technical field of high-voltage regulators, in particular to a high-voltage regulator for semiconductors. Background Art

[0002] A high-voltage regulator is a device used to control the pressure in a gas or power system. It is widely used in the transmission and distribution of natural gas, liquefied petroleum gas, and other non-corrosive gases. In the process of manufacturing semiconductors, a high-voltage regulator is usually required for ion implantation. During the ion implantation process, the energy and concentration of the implanted ions need to be precisely controlled. A high-voltage regulator is required to provide the required electric field and acceleration voltage to ensure that the ions can penetrate the surface and be properly embedded in the semiconductor material.

[0003] The existing technology still has the following areas for improvement: when the pressure regulator needs to block the fluid, the fluid blocking ports at the valve and the fluid pipeline are not tightly matched, resulting in insufficient air tightness of the valve, which may cause fluid leakage and poor safety. Utility Model Content

[0004] In order to solve the above problems existing in the prior art, the utility model provides a high-pressure regulator for semiconductors, which can achieve close cooperation between the valve and the fluid blocking port at the fluid pipeline, has good sealing performance and high safety.

[0005] The purpose of the utility model can be achieved through the following technical solutions:

[0006] A high-voltage regulator for semiconductors, comprising a control component, a pressure component and a main body component, wherein the control component is rotatably connected to the pressure component, the pressure component is fixedly connected to the main body component, the control component is located above the pressure component, and the pressure component is located above the main body component;

[0007] The control assembly comprises a screw, a handwheel and a second nut, the handwheels are symmetrically arranged, and the two handwheels are fixedly connected to the pressure assembly through the screw and the second nut;

[0008] The pressure assembly includes an upper cover, a diaphragm, a second O-ring, a pressure-adjusting screw, a pressure-adjusting screw cap, a pressure-adjusting screw nut, a first pressure cap, a retaining ring, a pressure-adjusting spring, a second pressure cap, and a third O-ring. The pressure-adjusting screw is symmetrically provided with a pressure-adjusting screw cap and a pressure-adjusting screw nut. Two of the pressure-adjusting screw caps are fixedly connected to both sides of the pressure-adjusting screw. Two of the pressure-adjusting screw nuts are fixedly connected to both sides of the pressure-adjusting screw. The upper cover is fixedly connected to the main body assembly. The first pressure cap is fixedly connected to the upper cover and the pressure-adjusting screw. The pressure-adjusting spring is fixedly connected between the first pressure cap and the second pressure cap. The retaining ring is symmetrically arranged. Two retaining rings are fixedly connected between the adjacent interiors of the upper cover and the pressure-adjusting spring. The second pressure cap is fixedly connected above the diaphragm. The third O-ring is symmetrically arranged. Two of the third O-rings are fixedly connected to both sides of the horizontal plane below the second pressure cap.

[0009] The main body component includes a main body, a first nut, a first O-ring, a third pressure cap, a valve core seal, a valve stem, a valve core spring and a filter screen. The first nut is symmetrically arranged, and the upper cover is fixedly connected to the main body through two of the first nuts. The first O-ring is fixedly connected between the upper cover and the main body.

[0010] Preferably, the third pressure cap is fixedly connected to the valve core seal, the upper portion of the valve stem is arranged in a trapezoidal shape, the upper portion of the valve stem matches the valve core seal, and the valve core spring is fixedly connected between the valve stem and the filter screen.

[0011] Preferably, the pressure regulating screw cap is arranged in an inverted L shape, the pressure regulating screw nut is arranged in an L shape, the inverted L-shaped horizontal section of the pressure regulating screw cap matches the L-shaped horizontal section of the pressure regulating screw nut, and the pressure regulating screw cap is fixedly connected to the pressure regulating screw nut.

[0012] Preferably, an opening is provided at the horizontal position of the top end of the upper cover, and the upper cover opening is provided in an inverted convex shape. The two pressure-adjusting screw caps and the pressure-adjusting screw nut are fixedly connected between the adjacent edges on the inner side of the upper cover opening and the adjacent sides of the pressure-adjusting screw, and the lower end of the pressure-adjusting screw is fixedly connected to the inside of the raised section of the upper cover opening.

[0013] Preferably, the second O-rings are symmetrically arranged, and two of the second O-rings are fixedly connected between adjacent edges inside the raised section of the upper cover opening and adjacent sides of the lower end of the pressure regulating screw.

[0014] Preferably, the first pressure cap is arranged in an inverted cap shape, an opening is arranged on the upper part of the first pressure cap, the connecting part of the pressure regulating screw rod and the upper cover matches with the opening of the first pressure cap, and the connecting part of the pressure regulating screw rod and the upper cover is located inside the opening of the first pressure cap.

[0015] Preferably, concave sections are provided on both sides of the diaphragm, and the concave sections of the diaphragm correspond to the positions of the third O-ring.

[0016] The beneficial effects of the utility model are:

[0017] (1) By setting the control components, the technical effect that can be achieved is simple operation and easy control; the overall structure of the equipment is stable, the components are closely matched, the reliability is high, and it can work stably for a long time.

[0018] (2) By setting a pressure assembly, the technical effect that can be achieved is that two third O-rings are fixedly connected to both sides of the horizontal plane below the second pressure cap, and concave sections are set on both sides of the diaphragm. The positions of the concave sections of the diaphragm and the third O-rings correspond to each other, so that the second pressure cap has a high degree of fit with the diaphragm when pressed downward by a force, and can stably transmit the force received to the diaphragm to accurately control the downward pressure of the valve stem.

[0019] (3) By setting the main body component, the technical effect that can be achieved is that the shape of the upper part of the valve stem is matched with the valve core seal setting, and when there is no downward pressure, the fit is high, the fit is tight, the sealing is good, and the safety is high. Moreover, when subjected to fluid impact, if no pressure is actively applied to create a gap between the valve stem and the valve core seal, the impact of the fluid will make the two components fit more closely, and no fluid leakage will occur, which has a high safety. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to facilitate understanding by those skilled in the art, the present invention is further described below in conjunction with the accompanying drawings.

[0021] Figure 1 It is a three-dimensional diagram of the utility model;

[0022] Figure 2 For the utility model Figure 1 Enlarged view of point A in the middle;

[0023] Figure 3 For the utility model Figure 1 Enlarged view of point B in the middle;

[0024] Description of main component symbols:

[0025] In the figure: 1. main body; 2. first nut; 3. first O-ring; 4. upper cover; 5. diaphragm; 6. second O-ring; 7. pressure-adjusting screw; 8. screw; 9. handwheel; 10. second nut; 11. pressure-adjusting screw cap; 12. pressure-adjusting screw nut; 13. first pressure cap; 14. retaining ring; 15. pressure-adjusting spring; 16. second pressure cap; 17. third O-ring; 18. third pressure cap; 19. valve core seal; 20. valve stem; 21. valve core spring; 22. filter screen. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application; obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments, and all other embodiments obtained by ordinary technicians in this field based on the embodiments in the present application without making creative work are within the scope of protection of the present application.

[0027] In the description of the present application, it should be noted that the terms "upper", "lower", "inner", "outer", "top / bottom" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as limiting the present application. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0028] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "provided with", "set / connected", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0029] Reference Figures 1 to 3 The utility model discloses a high-voltage voltage regulator for semiconductors, comprising a control component, a pressure component and a main body component, wherein the control component is rotatably connected to the pressure component, the pressure component is fixedly connected to the main body component, the control component is located above the pressure component, and the pressure component is located above the main body component;

[0030] The control assembly includes a screw 8, a handwheel 9 and a second nut 10. The handwheels 9 are symmetrically arranged. The two handwheels 9 are fixedly connected to the pressure assembly through the screws 8 and the second nuts 10, which is easy to operate and control.

[0031] The pressure assembly includes an upper cover 4, a diaphragm 5, a second O-ring 6, a pressure regulating screw 7, a pressure regulating screw cap 11, a pressure regulating screw nut 12, a first pressure cap 13, a retaining ring 14, a pressure regulating spring 15, a second pressure cap 16, and a third O-ring 17. The pressure regulating screw 7 is symmetrically provided with a pressure regulating screw cap 11 and a pressure regulating screw nut 12. Two pressure regulating screw caps 11 are fixedly connected to both sides of the pressure regulating screw 7. Two pressure regulating screw nuts 12 are fixedly connected to both sides of the pressure regulating screw 7. The upper cover 4 is fixedly connected to the main assembly. The first pressure cap 13 is fixedly connected to the upper cover 4 and the pressure regulating screw 7. The first pressure cap 13 and the second pressure cap 16 are fixedly connected to the upper cover 4 and the pressure regulating screw 7. A pressure regulating spring 15 is fixedly connected between them, and the retaining ring 14 is symmetrically arranged. The two retaining rings 14 are fixedly connected between the adjacent upper covers 4 and the pressure regulating spring 15. The second pressure cap 16 is fixedly connected above the diaphragm 5. The third O-ring 17 is symmetrically arranged. The two third O-rings 17 are fixedly connected to both sides of the horizontal plane below the second pressure cap 16; concave sections are arranged on both sides of the diaphragm 5, and the positions of the concave sections of the diaphragm 5 and the third O-ring 17 correspond to each other, so that the second pressure cap 16 has a high fit with the diaphragm 5 when pressed downward by the force, and can stably transmit the force received to the diaphragm 5 to accurately control the downward pressure of the valve stem 20.

[0032] The main body assembly includes a main body 1, a first nut 2, a first O-ring 3, a third pressure cap 18, a valve core seal 19, a valve stem 20, a valve core spring 21 and a filter screen 22. The first nut 2 is symmetrically arranged, and the upper cover 4 is fixedly connected to the main body 1 through two first nuts 2. The first O-ring 3 is fixedly connected between the upper cover 4 and the main body 1.

[0033] Reference Figure 1 and Figure 2 The third pressure cap 18 is fixedly connected to the valve core seal 19, the upper part of the valve stem 20 is trapezoidal, the upper part of the valve stem 20 matches the valve core seal 19, and the shape of the upper part of the valve stem 20 matches the valve core seal 19. When there is no downward pressure, the fit is high, the fit is tight, the sealing is good, and the safety is high. When impacted by fluid, if no pressure is actively applied to create a gap between the valve stem 20 and the valve core seal 19, the impact of the fluid will make the two components fit more closely, and no fluid leakage will occur. The safety is very high. The valve core spring 21 is fixedly connected between the valve stem 20 and the filter screen 22.

[0034] Reference Figure 1 The pressure regulating screw cap 11 is set in an inverted L shape, and the pressure regulating screw nut 12 is set in an L shape. The inverted L-shaped horizontal section of the pressure regulating screw cap 11 matches the L-shaped horizontal section of the pressure regulating screw nut 12, and the pressure regulating screw cap 11 is fixedly connected to the pressure regulating screw nut 12.

[0035] Reference Figure 1An opening is provided at the horizontal top of the upper cover 4, and the opening of the upper cover 4 is inverted convex. Two pressure-adjusting screw caps 11 and pressure-adjusting screw nuts 12 are fixedly connected between the adjacent edges inside the opening of the upper cover 4 and the adjacent sides of the pressure-adjusting screw 7, and the lower end of the pressure-adjusting screw 7 is fixedly connected to the inside of the raised section of the opening of the upper cover 4; the second O-rings 6 are symmetrically arranged, and the two second O-rings 6 are fixedly connected between the adjacent edges inside the raised section of the opening of the upper cover 4 and the adjacent sides of the lower end of the pressure-adjusting screw 7.

[0036] Reference Figure 1 The first pressure cap 13 is arranged in an inverted cap shape, an opening is arranged on the upper part of the first pressure cap 13, the connecting part of the voltage regulating screw rod 7 and the upper cover 4 matches with the opening of the first pressure cap 13, and the connecting part of the voltage regulating screw rod 7 and the upper cover 4 is located inside the opening of the first pressure cap 13.

[0037] The overall structure of the equipment is stable, the components fit closely together, the reliability is high, and it can work stably for a long time.

[0038] The working principle and use process of the utility model are as follows: when output voltage is required, the hand wheel 9 is turned to control the voltage regulating screw rod 7 to drive the first pressure cap 13 to be pressed down, so that the pressure regulating spring 15 is extended and pressed down to drive the second pressure cap 16 to be pressed down to the diaphragm 5, and the diaphragm 5 drives the valve stem 20 to be pressed down to press the valve core spring 21 down and tighten, so that a gap is generated between the valve stem 20 and the valve core seal 19, and the voltage is output.

[0039] When the output voltage is not needed, the hand wheel 9 is turned to control the voltage regulating screw 7 to drive the first pressure cap 13 to move upward, and the pressure regulating spring 15 is retracted and reset, driving the second pressure cap 16 to move upward. The diaphragm 5 no longer exerts downward pressure on the valve stem 20, and the valve stem 20 drives the valve core spring 21 to move upward and reset. There is no gap between the valve stem 20 and the valve core seal 19, and the sealing is completed.

[0040] The above description is only a preferred embodiment of the present invention and does not constitute any form of limitation to the present invention. Although the present invention has been disclosed as a preferred embodiment as above, it is not intended to limit the present invention. Any technical personnel in this field can make some changes or modify the technical contents disclosed above into equivalent embodiments without departing from the scope of the technical solution of the present invention. However, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. A high voltage regulator for semiconductor, characterized in that: It comprises a control component, a pressure component and a main body component, wherein the control component is rotatably connected to the pressure component, the pressure component is fixedly connected to the main body component, the control component is located above the pressure component, and the pressure component is located above the main body component; The control assembly comprises a screw (8), a hand wheel (9) and a second nut (10), wherein the hand wheels (9) are symmetrically arranged, and the two hand wheels (9) are fixedly connected to the pressure assembly via the screw (8) and the second nut (10); The pressure assembly comprises an upper cover (4), a diaphragm (5), a second O-ring (6), a pressure regulating screw (7), a pressure regulating screw cap (11), a pressure regulating screw nut (12), a first cap (13), a retaining ring (14), a pressure regulating spring (15), a second cap (16), and a third O-ring (17). The pressure regulating screw (7) is symmetrically provided with a pressure regulating screw cap (11) and a pressure regulating screw nut (12). The two pressure regulating screw caps (11) are fixedly connected to both sides of the pressure regulating screw (7), the two pressure regulating screw nuts (12) are fixedly connected to both sides of the pressure regulating screw (7), and the upper cover (4) is fixedly connected to The main body component, the first pressure cap (13) is fixedly connected to the upper cover (4) and the pressure regulating screw rod (7), the pressure regulating spring (15) is fixedly connected between the first pressure cap (13) and the second pressure cap (16), the retaining ring (14) is symmetrically arranged, and the two retaining rings (14) are fixedly connected between the inside of the adjacent upper cover (4) and the pressure regulating spring (15), the second pressure cap (16) is fixedly connected above the diaphragm (5), and the third O-ring (17) is symmetrically arranged, and the two third O-rings (17) are fixedly connected to both sides of the horizontal plane below the second pressure cap (16); The main body component comprises a main body (1), a first nut (2), a first O-ring (3), a third pressure cap (18), a valve core seal (19), a valve stem (20), a valve core spring (21) and a filter screen (22); the first nut (2) is symmetrically arranged; the upper cover (4) is fixedly connected to the main body (1) via two of the first nuts (2); and the first O-ring (3) is fixedly connected between the upper cover (4) and the main body (1).

2. A semiconductor high voltage regulator according to claim 1, characterized in that: The third pressure cap (18) is fixedly connected to the valve core seal (19), the upper part of the valve stem (20) is arranged in a trapezoidal shape, the upper part of the valve stem (20) matches the valve core seal (19), and the valve core spring (21) is fixedly connected between the valve stem (20) and the filter screen (22).

3. A semiconductor high voltage regulator according to claim 1, characterized in that: The pressure regulating screw cap (11) is arranged in an inverted L shape, and the pressure regulating screw nut (12) is arranged in an L shape. The inverted L-shaped horizontal section of the pressure regulating screw cap (11) matches the L-shaped horizontal section of the pressure regulating screw nut (12), and the pressure regulating screw cap (11) is fixedly connected to the pressure regulating screw nut (12).

4. A semiconductor high voltage regulator according to claim 1, characterized in that: An opening is provided at the horizontal position of the top end of the upper cover (4), and the opening of the upper cover (4) is in an inverted convex shape. The two pressure-adjusting screw caps (11) and the pressure-adjusting screw nut (12) are fixedly connected between the adjacent edges of the inner side of the opening of the upper cover (4) and the adjacent sides of the pressure-adjusting screw (7), and the lower end of the pressure-adjusting screw (7) is fixedly connected to the inside of the raised section of the opening of the upper cover (4).

5. A semiconductor high voltage regulator according to claim 4, characterized in that: The second O-rings (6) are symmetrically arranged, and the two second O-rings (6) are fixedly connected between adjacent edges inside the raised section of the opening of the upper cover (4) and adjacent sides of the lower end of the pressure regulating screw rod (7).

6. A semiconductor high voltage regulator according to claim 4, characterized in that: The first pressure cap (13) is arranged in an inverted cap shape, an opening is arranged on the upper part of the first pressure cap (13), the connecting part between the pressure regulating screw rod (7) and the upper cover (4) matches with the opening of the first pressure cap (13), and the connecting part between the pressure regulating screw rod (7) and the upper cover (4) is located inside the opening of the first pressure cap (13).

7. The semiconductor high voltage regulator according to claim 1, characterized in that: Concave sections are arranged on both sides of the diaphragm (5), and the concave sections of the diaphragm (5) correspond to the positions of the third O-ring (17).

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