Heating mechanism for tail gas treatment
By designing a heating mechanism for exhaust gas treatment including an outer cylinder, an inner cylinder, a heat exchange unit and a heating unit, the existing exhaust gas heating device has solved the problems of high energy consumption, low thermal energy utilization and high cost, and uniform heating and efficient thermal energy utilization of exhaust gas are achieved.
Patent Information
- Application Number
- CN202421812082.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-30
- Publication Date
- 2025-05-06
- Estimated Expiration
- 2034-07-30
AI Technical Summary
The existing exhaust gas heating devices have high energy consumption, low thermal energy utilization and high cost.
A heating mechanism for exhaust gas treatment is designed, including an outer cylinder, an inner cylinder, a heat exchange unit and a heating unit. By optimizing the structure and flow path design, the thermal energy utilization and heating uniformity are improved.
The uniform heating of exhaust gas and efficient heat utilization are achieved, reducing energy consumption and cost, and improving adsorption effect.
Smart Images
Figure CN222837112U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of tail gas treatment, in particular to a heating mechanism for tail gas treatment. Background Art
[0002] The semiconductor manufacturing industry produces tail gas containing a variety of harmful substances during the production process. These tail gases need to be effectively treated to reduce the harm to the environment and personnel. Adsorption is an important tail gas treatment method. Its main purpose is to remove harmful gases and particulate matter generated during the production process, ensure the safety of the working environment and reduce environmental pollution. When certain adsorbents are used to adsorb and treat specific types of tail gas, the tail gas needs to be heated to a set temperature to ensure a good adsorption treatment effect. In the prior art, the tail gas heating device is often simple in structure, high in energy consumption, and high in cost. Utility Model Content
[0003] The utility model discloses a heating mechanism for tail gas treatment, which solves the technical problems of high energy consumption, low thermal energy utilization and high cost of tail gas heating devices in the prior art, and has the technical effects of reasonable structure, high thermal energy utilization and uniform tail gas heating. The technical scheme adopted is as follows:
[0004] A heating mechanism for exhaust gas treatment comprises an outer cylinder, an inner cylinder, a heat exchange unit and a heating unit, wherein the inner cylinder and the heat exchange unit are arranged up and down in the outer cylinder, and a heating chamber is formed between the inner cylinder and the inner wall surface of the outer cylinder, and between the heat exchange unit and the inner wall surface of the outer cylinder. The heating unit is arranged in the heating chamber for heating the exhaust gas flowing through, and the heating chamber is connected to the inner cavity of the inner cylinder through a plurality of first through holes at an end away from the heat exchange unit. The heat exchange unit comprises a tube side and a shell side, and the tube side and the shell side are respectively connected to the heating chamber and the inner cavity of the inner cylinder.
[0005] On the basis of the above technical solution, the tube side is connected with the heating chamber, the shell side is connected with the inner cavity of the inner tube, and the exhaust gas entering the heating chamber through the tube side flows through the inner cavity of the inner tube and the shell side and is discharged outside.
[0006] On the basis of the above technical solution, the heating unit includes a plurality of electric heating rods arranged circumferentially, and the electric heating rods are fixed on the inner wall surface of the outer cylinder and correspond to the positions of the inner cylinder.
[0007] Based on the above technical solution, the heat exchange unit includes an outer shell and an inner shell. The hollow cavity of the inner shell forms a tube pass. The outer shell is sleeved outside the inner shell and forms a shell pass with the inner shell. The inner shell forms a plurality of expansion sections and reduction sections spaced apart along the axial direction.
[0008] On the basis of the above technical solution, the shell side extends along the outer wall surface of the inner shell.
[0009] Based on the above technical solution, a second partition is provided in the shell side, the second partition is sleeved outside the reduced diameter section and forms a second annular channel between the reduced diameter section, and the outer edge surface of the second partition is fixed on the inner wall surface of the shell.
[0010] On the basis of the above technical solution, the second partition is fixedly connected to the inner shell at the corresponding position through a plurality of columns to improve the structural stability of the second partition.
[0011] On the basis of the above technical solution, a first partition is arranged in the reduced diameter section of the inner shell, and the first partition separates adjacent reduced diameter sections and forms a first annular channel with the inner wall surface of the inner shell.
[0012] On the basis of the above technical solution, it also includes a shaft rod passing through the inner tube and the heat exchange unit, the shaft rod passes through the inner tube and is fixedly connected to the inner tube, and the shaft rod passes through the heat exchange unit and is respectively fixedly connected to multiple first partitions.
[0013] On the basis of the above technical solution, the tube side is connected with the heating chamber through a plurality of second through holes arranged circumferentially, and the shell side is connected with the inner cavity of the inner tube through a plurality of third through holes arranged circumferentially.
[0014] Beneficial Effects
[0015] The utility model has a reasonable structure. Firstly, it extends the length of the passage through which the exhaust gas flows in the outer cylinder and the inner cylinder within a limited space, which is conducive to fully and evenly heating the exhaust gas, thereby improving the adsorption effect. In addition, the arrangement of the heat exchange unit allows the exhaust gas to be preheated before entering the heating chamber, greatly improving the thermal energy utilization rate. At the same time, the exhaust gas entering the tube side through the inner cylinder can be effectively cooled in the process of preheating the exhaust gas in the shell side, which is conducive to simplifying the process and allowing the exhaust gas to be discharged into the next process within a set temperature range. Furthermore, the structural arrangement of the heat exchange unit in the present application greatly extends the length of the flow path of the exhaust gas in the tube side or the shell side, which is conducive to improving the exchange efficiency.
[0016] In the utility model, adsorbent can be stored in the inner cylinder. When the exhaust gas flows through the adsorbent, not only the adsorption treatment can be completed, but also the exhaust gas flow rate discharged through the inner cylinder is greatly slowed down. Therefore, the flow path design of the utility model, that is, the exhaust gas passes through the tube side-heating chamber-inner cylinder-shell side, so that the air flow directions in the tube side and the shell side are opposite and the flow rates are different, which is beneficial to further improve the heat exchange effect of the heat exchange unit. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only one embodiment of the utility model. For ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.
[0018] Figure 1 : A schematic diagram of the cross-sectional structure of the main view of the utility model;
[0019] Figure 2 : Schematic diagram of the three-dimensional structure of the heating unit;
[0020] Figure 3 : Schematic diagram of the cross-sectional structure of the main view of the heat exchange unit;
[0021] Figure 4 : Schematic diagram of the cross-sectional structure of the shell and the second partition in the heat exchange unit;
[0022] Figure 5 : Schematic diagram of the cross-sectional structure of the inner shell and the first baffle in the heat exchange unit; DETAILED DESCRIPTION
[0023] The following description and accompanying drawings fully illustrate the specific embodiments of this article so that those skilled in the art can practice them. Parts and features of some embodiments may be included in or replace parts and features of other embodiments. The scope of the embodiments of this article includes the entire scope of the claims, as well as all available equivalents of the claims. Herein, the terms "first", "second", etc. are only used to distinguish one element from another, without requiring or implying any actual relationship or order between these elements. In fact, the first element can also be called the second element, and vice versa. Moreover, the terms "include", "comprise" or any other variant thereof are intended to cover non-exclusive inclusion, so that the structure, device or equipment including a series of elements includes not only those elements, but also other elements that are not explicitly listed, or also include elements inherent to such structure, device or equipment. In the absence of more restrictions, the elements defined by the sentence "including one..." do not exclude the existence of other identical elements in the structure, device or equipment including the elements. Each embodiment is described in a progressive manner herein, and each embodiment focuses on the differences from other embodiments, and the same and similar parts between the embodiments can be referred to each other.
[0024] The terms "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. in this document indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing this document and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In the description of this document, unless otherwise specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a mechanical connection or an electrical connection, it can also be the internal communication of two elements, it can be a direct connection, or it can be an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.
[0025] As used herein, the term "plurality" means two or more than two, unless otherwise specified.
[0026] In this document, the character " / " indicates that the preceding and following objects are in an "or" relationship. For example, A / B means: A or B.
[0027] In this article, the term "and / or" is a description of the association relationship between objects, indicating that three relationships may exist. For example, A and / or B means: A or B, or, A and B.
[0028] like Figures 1 to 5 The heating mechanism for exhaust gas treatment shown in the figure includes an outer tube 1, an inner tube 2, a heat exchange unit 3 and a heating unit 4.
[0029] The inner tube 2 and the heat exchange unit 3 are arranged vertically in the outer tube 1. Specifically, the inner tube 2 is fixedly connected to the outer tube 1, the inner tube 2 is fixedly connected downward to the heat exchange unit 3, and the heat exchange unit 3 is fixedly connected to the outer tube 1. Figure 1 As shown, the inner wall surface of the inner tube 2 and the outer tube 1, the heat exchange unit 3 and the inner wall surface of the outer tube 1 together form a relatively independent heating chamber 5, and the heating unit 4 is arranged in the heating chamber 5 for heating the exhaust gas flowing through. Figure 2 As shown, the heating unit 4 includes a plurality of electric heating rods arranged circumferentially, which are fixed on the inner wall surface of the outer cylinder 1 and correspond to the position of the inner cylinder 2. The electric heating rods are prior art and are not described here in detail. A high-temperature resistant metal clamping ring is provided on the inner wall surface of the outer cylinder 1. The electric heating rod can be fixed on the inner wall surface of the outer cylinder 1 through the clamping ring, and the length of the electric heating rod covers the height of the inner cylinder. Not only can the exhaust gas flowing through the heating chamber be heated, but also the exhaust gas in the inner cylinder 2 during heat transfer can be heated, which is conducive to making full use of thermal energy and keeping the exhaust gas within the set temperature range at all times.
[0030] In addition, the heating chamber 5 is connected to the inner cavity of the inner tube 2 at one end away from the heat exchange unit 3 . Specifically, a plurality of first through holes 7 are provided on the side wall of the upper portion of the inner tube 2 to connect the inner cavity of the inner tube 2 and the heating chamber 5 .
[0031] like Figure 3 As shown, the heat exchange unit 3 includes a tube side and a shell side, wherein the tube side is connected to the heating chamber 5, and the shell side is connected to the inner cavity of the inner tube 2. The tail gas entering the heating chamber 5 through the tube side flows through the inner cavity of the inner tube 2 and the shell side and then is discharged outward. The inner tube 2 contains an adsorbent, and the adsorbent can be selected from activated carbon, molecular sieve, silica gel or other special chemical adsorbents. The tail gas is divided into several streams and the flow rate is greatly slowed down during the process of passing through the adsorbent.
[0032] The heat exchange unit 3 includes an outer shell 31 and an inner shell 32. The hollow cavity of the inner shell 32 forms a tube pass. The outer shell 31 is sleeved outside the inner shell 32 and forms a shell pass with the inner shell 32. The inner shell 32 forms a plurality of expansion sections 321 and reduction sections 322 spaced apart in the axial direction. Figure 5 shown.
[0033] like Figure 3 and 4 As shown, a second partition plate 33 is provided in the shell side, and the second partition plate 33 is sleeved outside the reduced diameter section 322 and forms a second annular channel with the reduced diameter section 322. The outer edge surface of the second partition plate 33 is fixed on the inner wall surface of the outer shell 31, so that the shell side extends along the outer wall surface of the inner shell 32. The second partition plate 33 is fixedly connected to the inner shell 32 at the corresponding position through a plurality of columns to improve the structural stability of the second partition plate 33.
[0034] A first partition 34 is provided in the reduced diameter section 322 of the inner shell 32. The first partition 34 separates adjacent reduced diameter sections 322 and forms a first annular channel with the inner wall surface of the inner shell 32, so that the exhaust gas in the tube side moves in a winding manner, which is conducive to sufficient heat exchange between the exhaust gas in the tube side and the exhaust gas in the shell side.
[0035] like Figure 1 As shown, it also includes a shaft rod 6 that passes through the inner tube 2 and the heat exchange unit 3. The shaft rod 6 passes through the inner tube 2 and is fixedly connected to the inner tube 2. The shaft rod 6 passes through the heat exchange unit and is respectively fixedly connected to multiple first partitions 34.
[0036] The tube side is connected to the heating chamber 5 through a plurality of second through holes 8 arranged circumferentially, and the shell side is connected to the inner cavity of the inner tube 2 through a plurality of third through holes 9 arranged circumferentially, so that the exhaust gas can enter the heating chamber 5 and the shell side evenly.
[0037] The present invention is described above by way of examples, but the present invention is not limited to the above specific embodiments, and any changes or modifications based on the present invention belong to the scope of protection required by the present invention.
Claims
1. A heating mechanism for exhaust gas treatment, characterized in that: The invention comprises an outer tube (1), an inner tube (2), a heat exchange unit (3) and a heating unit (4); the inner tube (2) and the heat exchange unit (3) are arranged in an upper and lower manner inside the outer tube (1); a heating chamber (5) is formed between the inner tube (2) and the inner wall surface of the outer tube (1), and between the heat exchange unit (3) and the inner wall surface of the outer tube (1); the heating unit (4) is arranged in the heating chamber (5) for heating the exhaust gas flowing through the heating chamber (5); and the heating chamber (5) is connected to the inner chamber of the inner tube (2) through a plurality of first through holes (7) at one end away from the heat exchange unit (3); the heat exchange unit (3) comprises a tube side and a shell side, and the tube side and the shell side are connected to the heating chamber (5) and the inner chamber of the inner tube (2) respectively.
2. The exhaust gas treatment heating mechanism according to claim 1, characterized in that: The tube side is in communication with the heating chamber (5), and the shell side is in communication with the inner chamber of the inner tube (2). The exhaust gas entering the heating chamber (5) through the tube side passes through the inner chamber of the inner tube (2) and the shell side and is then discharged to the outside.
3. The exhaust gas treatment heating mechanism according to claim 2, characterized in that: The heating unit (4) comprises a plurality of electric heating rods arranged circumferentially, wherein the electric heating rods are fixedly mounted on the inner wall surface of the outer cylinder (1) and correspond in position to the inner cylinder (2).
4. The heating mechanism for exhaust gas treatment according to any one of claims 1 to 3, characterized in that: The heat exchange unit (3) comprises an outer shell (31) and an inner shell (32); the hollow cavity of the inner shell (32) forms a tube pass; the outer shell (31) is sleeved outside the inner shell (32) and forms a shell pass with the inner shell (32); the inner shell (32) forms a plurality of diameter expansion sections (321) and diameter reduction sections (322) arranged at intervals along the axial direction.
5. The exhaust gas treatment heating mechanism according to claim 4, characterized in that: The shell side extends along the outer wall surface of the inner shell (32).
6. The exhaust gas treatment heating mechanism according to claim 5, characterized in that: A second partition plate (33) is provided in the shell side. The second partition plate (33) is sleeved outside the reduced diameter section (322) and forms a second annular channel with the reduced diameter section (322). The outer edge surface of the second partition plate (33) is fixedly mounted on the inner wall surface of the outer shell (31).
7. The exhaust gas treatment heating mechanism according to claim 6, characterized in that: The second partition plate (33) is fixedly connected to the inner shell (32) at a corresponding position via a plurality of columns, so as to improve the structural stability of the second partition plate (33).
8. The exhaust gas treatment heating mechanism according to any one of claims 5 to 7, characterized in that: A first partition plate (34) is arranged in the reduced diameter section of the inner shell (32); the first partition plate (34) separates adjacent reduced diameter sections (322) and forms a first annular channel with the inner wall surface of the inner shell (32).
9. The exhaust gas treatment heating mechanism according to claim 8, characterized in that: It also includes a shaft (6) that passes through the inner cylinder (2) and the heat exchange unit (3), wherein the shaft (6) passes through the inner cylinder (2) and is fixedly connected to the inner cylinder (2), and the shaft (6) passes through the heat exchange unit (3) and is respectively fixedly connected to a plurality of first partitions (34).
10. The exhaust gas treatment heating mechanism according to claim 9, characterized in that: The tube side is in communication with the heating chamber (5) via a plurality of second through holes (8) arranged circumferentially, and the shell side is in communication with the inner chamber of the inner cylinder (2) via a plurality of third through holes (9) arranged circumferentially.