Drainage device

Abstract

The utility model provides a liquid discharging device which comprises a liquid discharging pipe, a liquid discharging pipe, a liquid discharging pipe and a liquid discharging pipe, one end of the liquid discharging pipe is connected to a cavity, and the liquid discharging pipe is used for discharging liquid flowing through the cavity; the auxiliary pipe is connected with the liquid discharging pipe in parallel through a branch, one end of the auxiliary pipe is connected with an air compressor, the other end of the auxiliary pipe is connected with a liquid collecting box, and the air compressor can convey flowing compressed air into the auxiliary pipe, so that liquid in the liquid discharging pipe is blown to the liquid collecting box. The auxiliary pipe connected with the liquid discharging pipe in parallel through the branch, the corresponding air compressor and the corresponding liquid collecting box are arranged on the lower portion of the cavity, automatic liquid discharging and gas discharging can be achieved under the condition that the pipeline is not disassembled and assembled through the venturi effect, gas and liquid in the machine table can be discharged to a factory affair end to be treated in a unified mode, and the working efficiency is improved. And the liquid and gas discharging process of the machine table is quicker, more convenient and safer.

Description

Technical Field

[0001] The utility model relates to the semiconductor field, in particular to a liquid discharge device. Background Art

[0002] When semiconductor equipment is being maintained, it is necessary to drain the heat exchanger of the machine's auxiliary equipment. If the water is not drained, it will leak after the water pipe is pulled out, and the water temperature of 75 degrees is not conducive to the maintenance of the machine. The existing drainage method is: first unplug the water inlet pipe and the return pipe from the heat exchanger, manually use a nitrogen (N2) spray gun to blow water at the water inlet pipe, and use a bucket at one end of the return pipe to collect the water blown out.

[0003] When using the existing drainage method to drain water, it may cause water leakage and dripping on the machine interface, and when blowing water manually, a lot of unpleasant odors will be discharged, causing physical discomfort to the maintenance personnel on site. In addition, the existing drainage method also leads to extended machine maintenance time and extended recovery time, which is not conducive to improving production efficiency. Summary of the invention

[0004] The technical problem to be solved by the utility model is to provide a liquid discharge device, so that the maintenance time and the restart time of the machine can be shortened during the maintenance of the machine, thereby improving the maintenance efficiency of the machine and improving the production efficiency of the machine, while also solving the safety problem of manual water blowing and the problem of slow efficiency.

[0005] In order to solve the above problems, the utility model provides a liquid discharge device, including: a liquid discharge pipe, one end of which is connected to a cavity for discharging liquid after passing through the cavity; an auxiliary pipe, which is connected to the liquid discharge pipe in parallel through a branch, one end of the auxiliary pipe is connected to an air compressor, and the other end is connected to a liquid collecting tank, and the air compressor can transport flowing compressed gas into the auxiliary pipe, thereby blowing the liquid in the liquid discharge pipe into the liquid collecting tank.

[0006] In some embodiments, the air compressor is disposed at one end of the auxiliary pipe close to the cavity, and the liquid collecting tank is disposed at one end of the auxiliary pipe away from the cavity.

[0007] In some embodiments, a return valve is provided on the drain pipe, and an auxiliary valve is provided on the auxiliary pipe; when operation is required, when the return valve and the auxiliary valve are opened, the liquid in the drain pipe is adsorbed into the liquid collecting tank.

[0008] In some embodiments, the return valve and the auxiliary valve are both three-way valves.

[0009] In some embodiments, the return valve and the auxiliary valve are both electric valves that can be controlled to open or close.

[0010] In some embodiments, the drainage pipe, the branch pipe, and the auxiliary pipe are all straight-through pipes.

[0011] In some embodiments, it also includes a liquid inlet pipe, one end of which is connected to the cavity for providing liquid to the cavity; the other end of the liquid discharge pipe and the other end of the liquid inlet pipe are both connected to a heat exchanger, and the heat exchanger can perform water circulation heat exchange on the cavity through the liquid inlet pipe and the liquid discharge pipe.

[0012] In some embodiments, a water inlet valve is provided on the liquid inlet pipe; when the cavity needs to be subjected to water circulation heat exchange operation, the water inlet valve and the water return valve are opened; when the liquid discharge operation is required, the water return valve and the auxiliary valve are opened and the water inlet valve is closed.

[0013] In some embodiments, the liquid collecting tank is further connected to a plant drainage pipe, and the liquid in the liquid collecting tank is discharged through the plant drainage pipe.

[0014] In some embodiments, the liquid collecting tank is further connected to a factory exhaust pipe, and the gas in the liquid collecting tank is discharged through the factory exhaust pipe.

[0015] The utility model arranges an auxiliary pipe connected in parallel with the drainage pipe through a branch at the lower part of the chamber, as well as a corresponding air compressor and a liquid collecting box, and utilizes the Venturi effect to achieve automatic drainage and exhaust without disassembling the pipeline, and can discharge the gas and liquid inside the machine to the factory service end for unified treatment, making the process of drainage and exhaust of the machine faster, more convenient and safer. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the specific implementation of the utility model, the following is a brief introduction to the drawings required for the description of the specific implementation. Obviously, the drawings described below are only some specific implementations of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0017] Figure 1 It is a schematic diagram of the structure of a liquid discharge device provided by an embodiment of the utility model;

[0018] Figure 2 It is a schematic diagram of a liquid discharge device provided in one embodiment of the utility model when performing a liquid discharge operation;

[0019] Figure 3It is a schematic diagram of a liquid discharge device provided in an embodiment of the utility model performing water circulation heat exchange operation on a cavity. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the specific implementation of the utility model to clearly and completely describe the technical solutions in the specific implementation of the utility model. Obviously, the specific implementation described is only a part of the specific implementation of the utility model, not all of the specific implementation. Based on the specific implementation of the utility model, all other specific implementations obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] Please also read Figure 1 to Figure 3 ,in, Figure 1 This is a schematic diagram of the structure of a liquid discharge device provided by an embodiment of the utility model. Figure 2 This is a schematic diagram of a liquid discharge device provided by an embodiment of the utility model during liquid discharge operation. Figure 3 It is a schematic diagram of a liquid discharge device provided in an embodiment of the utility model performing water circulation heat exchange operation on a cavity.

[0022] Figure 1 This is a schematic diagram of the structure of the liquid discharge device provided by an embodiment of the utility model. Figure 1 The liquid discharge device includes: a liquid discharge pipe 11, an auxiliary pipe 12, an air compressor 15, and a liquid collecting tank 16.

[0023] One end of the liquid discharge pipe 11 is connected to a cavity 13 for discharging the liquid after passing through the cavity 13. The auxiliary pipe 12 is connected in parallel with the liquid discharge pipe 11 through a branch 14. One end of the auxiliary pipe 12 is connected to the air compressor 15, and the other end is connected to the liquid collection tank 16. The air compressor 15 can deliver flowing compressed gas into the auxiliary pipe 12, so as to absorb the liquid in the liquid discharge pipe 11 into the liquid collection tank 16.

[0024] The compressed gas may be compressed air or nitrogen, and the liquid may be high-temperature water (eg, water with a temperature greater than or equal to 75 degrees).

[0025] In this embodiment, under the action of compressed gas, the Venturi effect is used to suck the liquid in the drain pipe 11 into the auxiliary pipe 12 through the branch 14, and the liquid is further brought into the liquid collecting tank 16 by the compressed gas. The Venturi effect is manifested as the flow rate increases when the fluid passes through a gradually shrinking channel, and the increase in the flow rate is proportional to the decrease in the channel cross-section. According to Bernoulli's principle, an increase in the flow rate will lead to a decrease in the fluid pressure. This effect produces a low-pressure area near the high-speed flowing fluid, thereby producing an adsorption effect. In this embodiment, by conveying flowing compressed gas into the auxiliary pipe 12, the Venturi effect is used, and the liquid in the drain pipe 11 enters the liquid collecting tank 16 along the direction of the gas through the action of the adsorption force. In this embodiment, the principle of the Venturi effect is used to achieve rapid gas flow and liquid discharge, thereby achieving automatic liquid discharge, which is more convenient and quick while ensuring the physical safety of the staff on site, and can greatly improve the maintenance speed.

[0026] In this embodiment, the air compressor 15 is disposed at one end of the auxiliary pipe 12 close to the cavity 13, and the liquid collecting tank 16 is disposed at one end of the auxiliary pipe 12 away from the cavity 13. The design of the pipeline can facilitate the discharge of water.

[0027] In this embodiment, a return valve 111 is provided on the drain pipe 11, and an auxiliary valve 121 is provided on the auxiliary pipe 12. When a drain operation is required, the return valve 111 and the auxiliary valve 121 are opened, and the air compressor 15 can deliver flowing compressed gas into the auxiliary pipe 12, thereby adsorbing the liquid in the drain pipe 11 into the liquid collecting tank 16. By utilizing the Venturi effect, the liquid in the drain pipe 11 is sucked out to the auxiliary pipe 12 through the branch 14, and the liquid is further brought into the liquid collecting tank 16 by the compressed gas.

[0028] In this embodiment, the return valve 111 and the auxiliary valve 121 are both three-way valves. When the machine needs to perform a discharge operation, the return valve 111 and the auxiliary valve 121 are both in an open state, and the remaining valves are kept in a closed state, and the air compressor 15 is turned on to deliver flowing compressed gas into the auxiliary pipe, and the liquid in the discharge pipe 11 is sucked out to the auxiliary pipe 12 through the branch 14 by the Venturi effect, and the liquid is further brought into the liquid collection tank 16 by the compressed gas.

[0029] In some embodiments, the return valve 111 and the auxiliary valve 121 can both be electric valves that can be controlled to open or close. The return valve 111 and the auxiliary valve 121 are configured as electric valves, which can simplify the operation of the staff and improve the maintenance efficiency of the machine. In other embodiments, the auxiliary valve 121 can also be a manual valve.

[0030] In this embodiment, the liquid discharge pipe 11, the branch pipe 14, and the auxiliary pipe 12 are all straight-through pipes. The design of the straight-through pipe can greatly facilitate the discharge of liquid, avoid the accumulation of liquid in the bend of the pipe, resulting in unclean liquid discharge, thereby reducing the maintenance efficiency of the machine.

[0031] In this embodiment, the liquid discharge device further includes a liquid inlet pipe 17, one end of which is connected to the cavity 13 for providing liquid to the cavity 13; the other end of the liquid discharge pipe 17 and the other end of the liquid inlet pipe 17 are both connected to a heat exchanger 18, and the heat exchanger 18 can perform water circulation heat exchange on the cavity 13 through the liquid inlet pipe 17 and the liquid discharge pipe 11. The heat exchanger 18 is used to provide cooling water to the cavity 13. When the machine is working normally and the cavity 13 needs to be subjected to water circulation heat exchange operation, the heat exchanger 18 continuously provides circulating cooling water to the cavity 13 through the liquid discharge pipe 12 and the liquid inlet pipe 17, thereby ensuring that the machine can work normally.

[0032] In this embodiment, a water inlet valve 171 is provided on the liquid inlet pipe 17. When the cavity 13 needs to be subjected to water circulation heat exchange operation, the water inlet valve 171 and the water return valve 111 are opened, and the heat exchanger 18 can perform water circulation heat exchange on the cavity 13 through the liquid inlet pipe 17 and the liquid discharge pipe 11. When the liquid discharge operation needs to be performed, the water return valve 111 and the auxiliary valve 121 are opened, and the water inlet valve 171 is closed, and the air compressor 15 can deliver flowing compressed gas into the auxiliary pipe 12, so as to adsorb the liquid in the liquid discharge pipe 11 to the liquid collecting tank 16. The heat exchanger 18 is used to provide cooling water to the cavity 13. When the machine is working normally and the cavity 13 needs to be subjected to water circulation heat exchange operation, the water inlet valve 171 and the water return valve 111 are opened, and the heat exchanger 18 continuously provides circulating cooling water to the cavity 13 through the drain pipe 11 and the inlet pipe 17, thereby ensuring the normal operation of the machine. When the machine needs to be drained for maintenance, the water inlet valve 171 is closed, the water return valve 111 and the auxiliary valve 121 are opened, and the air compressor 15 is turned on to deliver flowing compressed gas into the auxiliary pipe 12. The liquid in the drain pipe 11 is sucked out to the auxiliary pipe 12 through the branch 14 by the Venturi effect, and the liquid is further brought into the liquid collecting tank 16 by the compressed gas.

[0033] In this embodiment, the liquid collecting box 16 is further connected to a factory drainage pipe 161, and the liquid in the liquid collecting box 16 is discharged through the factory drainage pipe 161. The factory drainage pipe 161 is further connected to a factory drainage system, so that the liquid in the liquid collecting box 16 is uniformly collected through the factory drainage pipe 161 to prevent liquid leakage.

[0034] In the present embodiment, the liquid collecting tank 16 is further connected to the factory exhaust pipe 162, and the gas in the liquid collecting tank 16 is discharged through the factory exhaust pipe 162. The factory exhaust pipe 162 is further connected to the factory exhaust system. Since a gas with a strong pungent odor will be generated during the machine drainage process, it will cause physical discomfort to the staff on site and endanger the health of the staff. Therefore, in the present embodiment, the factory exhaust system is used to collect the gas in the liquid collecting tank 16 through the factory exhaust pipe 162 to prevent the gas from escaping and causing physical discomfort to the staff on site. At the same time, the compressed gas delivered by the air compressor 15 can be discharged to maintain the pressure balance of the machine.

[0035] The utility model arranges an auxiliary pipe connected in parallel with the drainage pipe through a branch at the lower part of the chamber, as well as a corresponding air compressor and a liquid collecting box, and utilizes the Venturi effect to achieve automatic drainage and exhaust without disassembling the pipeline, and can discharge the gas and liquid inside the machine to the factory service end for unified treatment, making the process of drainage and exhaust of the machine faster, more convenient and safer.

[0036] It should be noted that references in the specification to "an embodiment", "an embodiment", "an exemplary embodiment", "some embodiments", etc. indicate that the described embodiment may include a particular feature, structure, or characteristic, but every embodiment may not necessarily include the particular feature, structure, or characteristic. Moreover, such phrases do not necessarily refer to the same embodiment. In addition, when a particular feature, structure, or characteristic is described in conjunction with an embodiment, whether or not explicitly described, it is within the knowledge of a technician in the relevant art to implement such feature, structure, or characteristic in conjunction with other embodiments.

[0037] Typically, a term can be understood at least in part from usage in context. For example, the term "one or more" as used herein depends at least in part on the context and can be used to describe any feature, structure or characteristic in a singular sense, or can be used to describe a combination of features, structures or features in a plural sense. Similarly, terms such as "one", "a" or "the" can also be understood to express singular usage or to express plural usage, depending at least in part on the context. In addition, the term "based on" can be understood to not necessarily be intended to express a set of exclusive factors, but can alternatively, also at least in part depending on the context, allow for the presence of other factors that are not necessarily explicitly described. It should also be noted in this specification that "connected / coupled" refers not only to the direct coupling of one component to another component, but also to the indirect coupling of one component to another component through an intermediate component.

[0038] It should be noted that the terms "including" and "having" and their variations involved in the documents of the present utility model are intended to cover non-exclusive inclusions. The terms "first", "second", etc. are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. Unless the context clearly indicates otherwise, it should be understood that the data used in this way can be interchanged under appropriate circumstances. In addition, the embodiments of the present utility model and the features in the embodiments can be combined with each other unless there is a conflict. In addition, in the above description, the description of well-known components and technologies is omitted to avoid unnecessary confusion of the concepts of the present utility model. In the above-mentioned embodiments, each embodiment focuses on the differences from other embodiments, and the same / similar parts between the embodiments can be referred to each other.

[0039] The above is only a preferred embodiment of the present invention. It should be pointed out that ordinary technicians in this technical field can make several improvements and modifications without departing from the principle of the present invention. These improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. A liquid discharge device, characterized in that: include: A liquid discharge pipe, one end of which is connected to a cavity and is used to discharge the liquid after passing through the cavity; The auxiliary pipe is connected in parallel with the discharge pipe through a branch. One end of the auxiliary pipe is connected to the air compressor, and the other end is connected to the liquid collecting tank. The air compressor can transport flowing compressed gas into the auxiliary pipe, thereby absorbing the liquid in the discharge pipe into the liquid collecting tank.

2. The liquid discharge device according to claim 1, characterized in that: The air compressor is arranged at one end of the auxiliary pipe close to the cavity, and the liquid collecting tank is arranged at one end of the auxiliary pipe away from the cavity.

3. The liquid discharge device according to claim 1, characterized in that: The drain pipe is provided with a return valve, and the auxiliary pipe is provided with an auxiliary valve; When a drainage operation is required, the return valve and the auxiliary valve are opened, and the air compressor can deliver flowing compressed gas into the auxiliary pipe, thereby absorbing the liquid in the drainage pipe into the liquid collecting tank.

4. The liquid discharge device according to claim 3, characterized in that: The water return valve and the auxiliary valve are both three-way valves.

5. The liquid discharge device according to claim 3, characterized in that: The return valve and the auxiliary valve are both electric valves and can be controlled to open or close.

6. The liquid discharge device according to claim 1, characterized in that: The drainage pipe, the branch pipe and the auxiliary pipe are all straight-through pipes.

7. The liquid discharge device according to claim 3, characterized in that: Also included is a liquid inlet pipe, one end of which is connected to the cavity and is used to provide liquid to the cavity; The other end of the liquid discharge pipe and the other end of the liquid inlet pipe are both connected to a heat exchanger, and the heat exchanger can perform water circulation heat exchange on the cavity through the liquid inlet pipe and the liquid discharge pipe.

8. The liquid discharge device according to claim 7, characterized in that: The liquid inlet pipe is provided with a water inlet valve; When the cavity needs to be subjected to water circulation heat exchange operation, the water inlet valve and the water return valve are opened; When a drainage operation is required, the return valve and the auxiliary valve are opened, and the inlet valve is closed.

9. The liquid discharge device according to claim 1, characterized in that: The liquid collecting tank is further connected to a plant drainage pipe, and the liquid in the liquid collecting tank is discharged through the plant drainage pipe.

10. The liquid discharge device according to claim 1, characterized in that: The liquid collecting tank is further connected to a factory exhaust pipe, and the gas in the liquid collecting tank is discharged through the factory exhaust pipe.

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